Studies of topological features of the surface relief formation of titanium nitride films on silicon substrates during the diffusion mass ... View Full Text


Ontology type: schema:ScholarlyArticle     


Article Info

DATE

2013-02

AUTHORS

M. A. Tsysar’

ABSTRACT

The special features of the structure and properties of nanostructural titanium nitride films on silicon substrates have been considered and a physicomathematical model of the formation of their surface relief has been constructed on the basis of the deformation theory. A dependence of the wavelength of the surface corrugation on the film thickness has been established. The topography of the surface relief formed as a result of a diffusion mass transfer and changed on annealing has been examined. The amplitude of corrugations formed has been defined. More... »

PAGES

42-49

References to SciGraph publications

Identifiers

URI

http://scigraph.springernature.com/pub.10.3103/s106345761301005x

DOI

http://dx.doi.org/10.3103/s106345761301005x

DIMENSIONS

https://app.dimensions.ai/details/publication/pub.1002744876


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