Studies of topological features of the surface relief formation of titanium nitride films on silicon substrates during the diffusion mass ... View Full Text


Ontology type: schema:ScholarlyArticle     


Article Info

DATE

2013-02

AUTHORS

M. A. Tsysar’

ABSTRACT

The special features of the structure and properties of nanostructural titanium nitride films on silicon substrates have been considered and a physicomathematical model of the formation of their surface relief has been constructed on the basis of the deformation theory. A dependence of the wavelength of the surface corrugation on the film thickness has been established. The topography of the surface relief formed as a result of a diffusion mass transfer and changed on annealing has been examined. The amplitude of corrugations formed has been defined. More... »

PAGES

42-49

Identifiers

URI

http://scigraph.springernature.com/pub.10.3103/s106345761301005x

DOI

http://dx.doi.org/10.3103/s106345761301005x

DIMENSIONS

https://app.dimensions.ai/details/publication/pub.1002744876


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[
  {
    "@context": "https://springernature.github.io/scigraph/jsonld/sgcontext.json", 
    "about": [
      {
        "id": "http://purl.org/au-research/vocabulary/anzsrc-for/2008/0912", 
        "inDefinedTermSet": "http://purl.org/au-research/vocabulary/anzsrc-for/2008/", 
        "name": "Materials Engineering", 
        "type": "DefinedTerm"
      }, 
      {
        "id": "http://purl.org/au-research/vocabulary/anzsrc-for/2008/09", 
        "inDefinedTermSet": "http://purl.org/au-research/vocabulary/anzsrc-for/2008/", 
        "name": "Engineering", 
        "type": "DefinedTerm"
      }
    ], 
    "author": [
      {
        "affiliation": {
          "alternateName": "National Academy of Sciences of Ukraine", 
          "id": "https://www.grid.ac/institutes/grid.418751.e", 
          "name": [
            "Bakul Institute for Superhard Materials, National Academy of Sciences of Ukraine, vul. Avtozavods\u2019ka 2, 04074, Kiev, Ukraine"
          ], 
          "type": "Organization"
        }, 
        "familyName": "Tsysar\u2019", 
        "givenName": "M. A.", 
        "id": "sg:person.013135231031.93", 
        "sameAs": [
          "https://app.dimensions.ai/discover/publication?and_facet_researcher=ur.013135231031.93"
        ], 
        "type": "Person"
      }
    ], 
    "citation": [
      {
        "id": "https://doi.org/10.1016/0022-5096(93)90092-t", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1000185361"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "https://doi.org/10.1016/0022-5096(93)90092-t", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1000185361"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "https://doi.org/10.1016/s0022-0248(74)80055-2", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1007555665"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "https://doi.org/10.1016/0001-6160(89)90246-0", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1015761386"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "https://doi.org/10.1016/0001-6160(89)90246-0", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1015761386"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "https://doi.org/10.1016/0020-7683(93)90208-o", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1017052213"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "https://doi.org/10.1016/0020-7683(93)90208-o", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1017052213"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "sg:pub.10.3103/s1063457611030075", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1027057538", 
          "https://doi.org/10.3103/s1063457611030075"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "sg:pub.10.1007/bf02666659", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1028696296", 
          "https://doi.org/10.1007/bf02666659"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "sg:pub.10.1007/bf02666659", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1028696296", 
          "https://doi.org/10.1007/bf02666659"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "https://doi.org/10.1016/0956-7151(94)90429-4", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1030813131"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "https://doi.org/10.1016/0956-7151(94)90429-4", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1030813131"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "https://doi.org/10.1002/pssc.200405082", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1033731884"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "https://doi.org/10.1016/s1359-6454(99)00285-2", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1050593457"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "https://doi.org/10.1063/1.112608", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1057660161"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "https://doi.org/10.1063/1.118819", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1057683013"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "https://doi.org/10.1063/1.1466522", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1057709433"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "https://doi.org/10.1063/1.1687047", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1057762786"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "https://doi.org/10.1063/1.94131", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1058134270"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "https://doi.org/10.1103/physrevlett.67.3696", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1060803780"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "https://doi.org/10.1103/physrevlett.67.3696", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1060803780"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "https://doi.org/10.1103/physrevlett.71.1593", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1060807507"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "https://doi.org/10.1103/physrevlett.71.1593", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1060807507"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "https://doi.org/10.1115/1.3173068", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1062105979"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "https://doi.org/10.1364/ao.43.002670", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1065119003"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "https://doi.org/10.1557/proc-188-315", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1067915771"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "https://doi.org/10.1557/proc-239-395", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1067919590"
        ], 
        "type": "CreativeWork"
      }
    ], 
    "datePublished": "2013-02", 
    "datePublishedReg": "2013-02-01", 
    "description": "The special features of the structure and properties of nanostructural titanium nitride films on silicon substrates have been considered and a physicomathematical model of the formation of their surface relief has been constructed on the basis of the deformation theory. A dependence of the wavelength of the surface corrugation on the film thickness has been established. The topography of the surface relief formed as a result of a diffusion mass transfer and changed on annealing has been examined. The amplitude of corrugations formed has been defined.", 
    "genre": "research_article", 
    "id": "sg:pub.10.3103/s106345761301005x", 
    "inLanguage": [
      "en"
    ], 
    "isAccessibleForFree": false, 
    "isPartOf": [
      {
        "id": "sg:journal.1136513", 
        "issn": [
          "1063-4576", 
          "1934-9408"
        ], 
        "name": "Journal of Superhard Materials", 
        "type": "Periodical"
      }, 
      {
        "issueNumber": "1", 
        "type": "PublicationIssue"
      }, 
      {
        "type": "PublicationVolume", 
        "volumeNumber": "35"
      }
    ], 
    "name": "Studies of topological features of the surface relief formation of titanium nitride films on silicon substrates during the diffusion mass transfer and on annealing using scanning tunneling microscopy", 
    "pagination": "42-49", 
    "productId": [
      {
        "name": "readcube_id", 
        "type": "PropertyValue", 
        "value": [
          "0d11e6b3b2dd8fb847a898086e68abf5df12975f828f6e8c13d9ab6684be9088"
        ]
      }, 
      {
        "name": "doi", 
        "type": "PropertyValue", 
        "value": [
          "10.3103/s106345761301005x"
        ]
      }, 
      {
        "name": "dimensions_id", 
        "type": "PropertyValue", 
        "value": [
          "pub.1002744876"
        ]
      }
    ], 
    "sameAs": [
      "https://doi.org/10.3103/s106345761301005x", 
      "https://app.dimensions.ai/details/publication/pub.1002744876"
    ], 
    "sdDataset": "articles", 
    "sdDatePublished": "2019-04-11T00:14", 
    "sdLicense": "https://scigraph.springernature.com/explorer/license/", 
    "sdPublisher": {
      "name": "Springer Nature - SN SciGraph project", 
      "type": "Organization"
    }, 
    "sdSource": "s3://com-uberresearch-data-dimensions-target-20181106-alternative/cleanup/v134/2549eaecd7973599484d7c17b260dba0a4ecb94b/merge/v9/a6c9fde33151104705d4d7ff012ea9563521a3ce/jats-lookup/v90/0000000001_0000000264/records_8695_00000503.jsonl", 
    "type": "ScholarlyArticle", 
    "url": "http://link.springer.com/10.3103/S106345761301005X"
  }
]
 

Download the RDF metadata as:  json-ld nt turtle xml License info

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This table displays all metadata directly associated to this object as RDF triples.

123 TRIPLES      21 PREDICATES      47 URIs      19 LITERALS      7 BLANK NODES

Subject Predicate Object
1 sg:pub.10.3103/s106345761301005x schema:about anzsrc-for:09
2 anzsrc-for:0912
3 schema:author Nc93388b5b3204d9b9da8664c0f07cf3a
4 schema:citation sg:pub.10.1007/bf02666659
5 sg:pub.10.3103/s1063457611030075
6 https://doi.org/10.1002/pssc.200405082
7 https://doi.org/10.1016/0001-6160(89)90246-0
8 https://doi.org/10.1016/0020-7683(93)90208-o
9 https://doi.org/10.1016/0022-5096(93)90092-t
10 https://doi.org/10.1016/0956-7151(94)90429-4
11 https://doi.org/10.1016/s0022-0248(74)80055-2
12 https://doi.org/10.1016/s1359-6454(99)00285-2
13 https://doi.org/10.1063/1.112608
14 https://doi.org/10.1063/1.118819
15 https://doi.org/10.1063/1.1466522
16 https://doi.org/10.1063/1.1687047
17 https://doi.org/10.1063/1.94131
18 https://doi.org/10.1103/physrevlett.67.3696
19 https://doi.org/10.1103/physrevlett.71.1593
20 https://doi.org/10.1115/1.3173068
21 https://doi.org/10.1364/ao.43.002670
22 https://doi.org/10.1557/proc-188-315
23 https://doi.org/10.1557/proc-239-395
24 schema:datePublished 2013-02
25 schema:datePublishedReg 2013-02-01
26 schema:description The special features of the structure and properties of nanostructural titanium nitride films on silicon substrates have been considered and a physicomathematical model of the formation of their surface relief has been constructed on the basis of the deformation theory. A dependence of the wavelength of the surface corrugation on the film thickness has been established. The topography of the surface relief formed as a result of a diffusion mass transfer and changed on annealing has been examined. The amplitude of corrugations formed has been defined.
27 schema:genre research_article
28 schema:inLanguage en
29 schema:isAccessibleForFree false
30 schema:isPartOf N7ff856def2b240fa970f500f3dbfc2bd
31 Na0091c36a3294c8cb640ac637d0043d6
32 sg:journal.1136513
33 schema:name Studies of topological features of the surface relief formation of titanium nitride films on silicon substrates during the diffusion mass transfer and on annealing using scanning tunneling microscopy
34 schema:pagination 42-49
35 schema:productId N0b04e46a4b62440299c7903f7d4d035a
36 N6073a404bab443c2b32501380ba358f1
37 Nb69f18cde1f84754bd7dd7a0881706a0
38 schema:sameAs https://app.dimensions.ai/details/publication/pub.1002744876
39 https://doi.org/10.3103/s106345761301005x
40 schema:sdDatePublished 2019-04-11T00:14
41 schema:sdLicense https://scigraph.springernature.com/explorer/license/
42 schema:sdPublisher N795d98438ef7479f9c3fcc1204a189c9
43 schema:url http://link.springer.com/10.3103/S106345761301005X
44 sgo:license sg:explorer/license/
45 sgo:sdDataset articles
46 rdf:type schema:ScholarlyArticle
47 N0b04e46a4b62440299c7903f7d4d035a schema:name doi
48 schema:value 10.3103/s106345761301005x
49 rdf:type schema:PropertyValue
50 N6073a404bab443c2b32501380ba358f1 schema:name readcube_id
51 schema:value 0d11e6b3b2dd8fb847a898086e68abf5df12975f828f6e8c13d9ab6684be9088
52 rdf:type schema:PropertyValue
53 N795d98438ef7479f9c3fcc1204a189c9 schema:name Springer Nature - SN SciGraph project
54 rdf:type schema:Organization
55 N7ff856def2b240fa970f500f3dbfc2bd schema:volumeNumber 35
56 rdf:type schema:PublicationVolume
57 Na0091c36a3294c8cb640ac637d0043d6 schema:issueNumber 1
58 rdf:type schema:PublicationIssue
59 Nb69f18cde1f84754bd7dd7a0881706a0 schema:name dimensions_id
60 schema:value pub.1002744876
61 rdf:type schema:PropertyValue
62 Nc93388b5b3204d9b9da8664c0f07cf3a rdf:first sg:person.013135231031.93
63 rdf:rest rdf:nil
64 anzsrc-for:09 schema:inDefinedTermSet anzsrc-for:
65 schema:name Engineering
66 rdf:type schema:DefinedTerm
67 anzsrc-for:0912 schema:inDefinedTermSet anzsrc-for:
68 schema:name Materials Engineering
69 rdf:type schema:DefinedTerm
70 sg:journal.1136513 schema:issn 1063-4576
71 1934-9408
72 schema:name Journal of Superhard Materials
73 rdf:type schema:Periodical
74 sg:person.013135231031.93 schema:affiliation https://www.grid.ac/institutes/grid.418751.e
75 schema:familyName Tsysar’
76 schema:givenName M. A.
77 schema:sameAs https://app.dimensions.ai/discover/publication?and_facet_researcher=ur.013135231031.93
78 rdf:type schema:Person
79 sg:pub.10.1007/bf02666659 schema:sameAs https://app.dimensions.ai/details/publication/pub.1028696296
80 https://doi.org/10.1007/bf02666659
81 rdf:type schema:CreativeWork
82 sg:pub.10.3103/s1063457611030075 schema:sameAs https://app.dimensions.ai/details/publication/pub.1027057538
83 https://doi.org/10.3103/s1063457611030075
84 rdf:type schema:CreativeWork
85 https://doi.org/10.1002/pssc.200405082 schema:sameAs https://app.dimensions.ai/details/publication/pub.1033731884
86 rdf:type schema:CreativeWork
87 https://doi.org/10.1016/0001-6160(89)90246-0 schema:sameAs https://app.dimensions.ai/details/publication/pub.1015761386
88 rdf:type schema:CreativeWork
89 https://doi.org/10.1016/0020-7683(93)90208-o schema:sameAs https://app.dimensions.ai/details/publication/pub.1017052213
90 rdf:type schema:CreativeWork
91 https://doi.org/10.1016/0022-5096(93)90092-t schema:sameAs https://app.dimensions.ai/details/publication/pub.1000185361
92 rdf:type schema:CreativeWork
93 https://doi.org/10.1016/0956-7151(94)90429-4 schema:sameAs https://app.dimensions.ai/details/publication/pub.1030813131
94 rdf:type schema:CreativeWork
95 https://doi.org/10.1016/s0022-0248(74)80055-2 schema:sameAs https://app.dimensions.ai/details/publication/pub.1007555665
96 rdf:type schema:CreativeWork
97 https://doi.org/10.1016/s1359-6454(99)00285-2 schema:sameAs https://app.dimensions.ai/details/publication/pub.1050593457
98 rdf:type schema:CreativeWork
99 https://doi.org/10.1063/1.112608 schema:sameAs https://app.dimensions.ai/details/publication/pub.1057660161
100 rdf:type schema:CreativeWork
101 https://doi.org/10.1063/1.118819 schema:sameAs https://app.dimensions.ai/details/publication/pub.1057683013
102 rdf:type schema:CreativeWork
103 https://doi.org/10.1063/1.1466522 schema:sameAs https://app.dimensions.ai/details/publication/pub.1057709433
104 rdf:type schema:CreativeWork
105 https://doi.org/10.1063/1.1687047 schema:sameAs https://app.dimensions.ai/details/publication/pub.1057762786
106 rdf:type schema:CreativeWork
107 https://doi.org/10.1063/1.94131 schema:sameAs https://app.dimensions.ai/details/publication/pub.1058134270
108 rdf:type schema:CreativeWork
109 https://doi.org/10.1103/physrevlett.67.3696 schema:sameAs https://app.dimensions.ai/details/publication/pub.1060803780
110 rdf:type schema:CreativeWork
111 https://doi.org/10.1103/physrevlett.71.1593 schema:sameAs https://app.dimensions.ai/details/publication/pub.1060807507
112 rdf:type schema:CreativeWork
113 https://doi.org/10.1115/1.3173068 schema:sameAs https://app.dimensions.ai/details/publication/pub.1062105979
114 rdf:type schema:CreativeWork
115 https://doi.org/10.1364/ao.43.002670 schema:sameAs https://app.dimensions.ai/details/publication/pub.1065119003
116 rdf:type schema:CreativeWork
117 https://doi.org/10.1557/proc-188-315 schema:sameAs https://app.dimensions.ai/details/publication/pub.1067915771
118 rdf:type schema:CreativeWork
119 https://doi.org/10.1557/proc-239-395 schema:sameAs https://app.dimensions.ai/details/publication/pub.1067919590
120 rdf:type schema:CreativeWork
121 https://www.grid.ac/institutes/grid.418751.e schema:alternateName National Academy of Sciences of Ukraine
122 schema:name Bakul Institute for Superhard Materials, National Academy of Sciences of Ukraine, vul. Avtozavods’ka 2, 04074, Kiev, Ukraine
123 rdf:type schema:Organization
 




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