The effect of axial stiffness of cutoff diamond wheels on nonflatness of cut wafers View Full Text


Ontology type: schema:ScholarlyArticle     


Article Info

DATE

2007-10

AUTHORS

S. S. Eroshin, G. A. Petasyuk, M. T. Tarashchanskii

ABSTRACT

An analytical expression has been derived to relate the axial component of the cutting force and the axial stiffness of a diamond cutoff wheel with an inner cutting edge to the nonflatness of cut wafers. The adequacy of the proposed mathematical model is analyzed qualitatively and quantitatively. The verification results are in agreement with the available experimental data on geometrical errors of cut wafers. More... »

PAGES

319-322

Identifiers

URI

http://scigraph.springernature.com/pub.10.3103/s1063457607050085

DOI

http://dx.doi.org/10.3103/s1063457607050085

DIMENSIONS

https://app.dimensions.ai/details/publication/pub.1034218964


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