High-resolution interference methods of inspecting the surface and layered structure profile of precision engineering and instrument-making products View Full Text


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Article Info

DATE

2010-02

AUTHORS

A. F. Rezchikov, V. P. Ryabukho

ABSTRACT

The methods of interference measurements using focused laser and nonlaser optical probing beams and microscopic systems for measuring surface microprofile parameters and parameters of a layered microstructure of transparent and scattering objects are considered. High-coherence (laser) and low-coherence interferometry techniques are analyzed and their comparative analysis as applied to practical applications for inspection purposes in high-tech production processes and for the development and adjustment of novel engineering methods of the development of new designs and materials is performed. More... »

PAGES

56-65

Identifiers

URI

http://scigraph.springernature.com/pub.10.3103/s1052618810010097

DOI

http://dx.doi.org/10.3103/s1052618810010097

DIMENSIONS

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