Nanostructuring of diamond films using self-assembled nanoparticles View Full Text


Ontology type: schema:ScholarlyArticle      Open Access: True


Article Info

DATE

2009-06

AUTHORS

Oleg Babchenko, Alexander Kromka, Karel Hruska, Miroslav Michalka, Jiri Potmesil, Milan Vanecek

ABSTRACT

We report the use of gold, nickel and diamond nanoparticles as a masking material for realization of diamond nano-structures by applying the dry plasma etching process. Applying low power plasma (100 W) in a gas mixture of CF4/O2 for 5 minutes results in a formation of three different types of diamond nanostructures, depending on the mask type material and particle size. Using of the Ni mask results in realization of diamond nano-rods, applying of the Au mask brings cauliflower-like structures, and using the diamond powder allows the production of irregular nano-structures. The main advance of the presented etching procedure is use of a self-assembly strategy where no lithographic steps are implemented. More... »

PAGES

310-314

References to SciGraph publications

Identifiers

URI

http://scigraph.springernature.com/pub.10.2478/s11534-009-0026-8

DOI

http://dx.doi.org/10.2478/s11534-009-0026-8

DIMENSIONS

https://app.dimensions.ai/details/publication/pub.1009948620


Indexing Status Check whether this publication has been indexed by Scopus and Web Of Science using the SN Indexing Status Tool
Incoming Citations Browse incoming citations for this publication using opencitations.net

JSON-LD is the canonical representation for SciGraph data.

TIP: You can open this SciGraph record using an external JSON-LD service: JSON-LD Playground Google SDTT

[
  {
    "@context": "https://springernature.github.io/scigraph/jsonld/sgcontext.json", 
    "about": [
      {
        "id": "http://purl.org/au-research/vocabulary/anzsrc-for/2008/0306", 
        "inDefinedTermSet": "http://purl.org/au-research/vocabulary/anzsrc-for/2008/", 
        "name": "Physical Chemistry (incl. Structural)", 
        "type": "DefinedTerm"
      }, 
      {
        "id": "http://purl.org/au-research/vocabulary/anzsrc-for/2008/03", 
        "inDefinedTermSet": "http://purl.org/au-research/vocabulary/anzsrc-for/2008/", 
        "name": "Chemical Sciences", 
        "type": "DefinedTerm"
      }
    ], 
    "author": [
      {
        "affiliation": {
          "alternateName": "Institute of Physics", 
          "id": "https://www.grid.ac/institutes/grid.424881.3", 
          "name": [
            "Institute of Physics of the ASCR, v.v.i., CZ-16253, Prague 6, Czech Republic"
          ], 
          "type": "Organization"
        }, 
        "familyName": "Babchenko", 
        "givenName": "Oleg", 
        "id": "sg:person.012460602243.08", 
        "sameAs": [
          "https://app.dimensions.ai/discover/publication?and_facet_researcher=ur.012460602243.08"
        ], 
        "type": "Person"
      }, 
      {
        "affiliation": {
          "alternateName": "Institute of Physics", 
          "id": "https://www.grid.ac/institutes/grid.424881.3", 
          "name": [
            "Institute of Physics of the ASCR, v.v.i., CZ-16253, Prague 6, Czech Republic"
          ], 
          "type": "Organization"
        }, 
        "familyName": "Kromka", 
        "givenName": "Alexander", 
        "id": "sg:person.0631667714.03", 
        "sameAs": [
          "https://app.dimensions.ai/discover/publication?and_facet_researcher=ur.0631667714.03"
        ], 
        "type": "Person"
      }, 
      {
        "affiliation": {
          "alternateName": "Institute of Physics", 
          "id": "https://www.grid.ac/institutes/grid.424881.3", 
          "name": [
            "Institute of Physics of the ASCR, v.v.i., CZ-16253, Prague 6, Czech Republic"
          ], 
          "type": "Organization"
        }, 
        "familyName": "Hruska", 
        "givenName": "Karel", 
        "id": "sg:person.016266433271.15", 
        "sameAs": [
          "https://app.dimensions.ai/discover/publication?and_facet_researcher=ur.016266433271.15"
        ], 
        "type": "Person"
      }, 
      {
        "affiliation": {
          "alternateName": "International Laser Center", 
          "id": "https://www.grid.ac/institutes/grid.419374.c", 
          "name": [
            "International Laser Centre, SK-812 19, Bratislava, Slovak Republic"
          ], 
          "type": "Organization"
        }, 
        "familyName": "Michalka", 
        "givenName": "Miroslav", 
        "id": "sg:person.014757614705.14", 
        "sameAs": [
          "https://app.dimensions.ai/discover/publication?and_facet_researcher=ur.014757614705.14"
        ], 
        "type": "Person"
      }, 
      {
        "affiliation": {
          "alternateName": "Institute of Physics", 
          "id": "https://www.grid.ac/institutes/grid.424881.3", 
          "name": [
            "Institute of Physics of the ASCR, v.v.i., CZ-16253, Prague 6, Czech Republic"
          ], 
          "type": "Organization"
        }, 
        "familyName": "Potmesil", 
        "givenName": "Jiri", 
        "id": "sg:person.014160455664.24", 
        "sameAs": [
          "https://app.dimensions.ai/discover/publication?and_facet_researcher=ur.014160455664.24"
        ], 
        "type": "Person"
      }, 
      {
        "affiliation": {
          "alternateName": "Institute of Physics", 
          "id": "https://www.grid.ac/institutes/grid.424881.3", 
          "name": [
            "Institute of Physics of the ASCR, v.v.i., CZ-16253, Prague 6, Czech Republic"
          ], 
          "type": "Organization"
        }, 
        "familyName": "Vanecek", 
        "givenName": "Milan", 
        "id": "sg:person.014335777333.35", 
        "sameAs": [
          "https://app.dimensions.ai/discover/publication?and_facet_researcher=ur.014335777333.35"
        ], 
        "type": "Person"
      }
    ], 
    "citation": [
      {
        "id": "https://doi.org/10.1016/j.diamond.2004.07.020", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1009059091"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "https://doi.org/10.1016/j.diamond.2007.12.071", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1012931299"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "sg:pub.10.1038/454708a", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1014279264", 
          "https://doi.org/10.1038/454708a"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "https://doi.org/10.1016/0925-9635(95)00500-5", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1015270306"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "https://doi.org/10.1016/s0040-6090(00)00769-0", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1022415835"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "https://doi.org/10.1016/j.diamond.2007.12.067", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1024831678"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "https://doi.org/10.1002/pssb.200879579", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1025831773"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "sg:pub.10.1023/a:1017964129419", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1026424495", 
          "https://doi.org/10.1023/a:1017964129419"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "https://doi.org/10.1016/s0925-9635(98)00294-5", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1027533238"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "https://doi.org/10.1002/anie.200801706", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1038029086"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "https://doi.org/10.1016/s0925-9635(01)00617-3", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1038675980"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "https://doi.org/10.1016/s0925-9635(01)00617-3", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1038675980"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "https://doi.org/10.1016/j.cap.2008.08.012", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1040735625"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "https://doi.org/10.1088/0022-3727/34/16/201", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1047848521"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "https://doi.org/10.1016/s0925-9635(01)00703-8", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1049033304"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "https://doi.org/10.1016/s0925-9635(01)00703-8", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1049033304"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "https://doi.org/10.1116/1.2122907", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1062170991"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "https://doi.org/10.1116/1.2122907", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1062170991"
        ], 
        "type": "CreativeWork"
      }
    ], 
    "datePublished": "2009-06", 
    "datePublishedReg": "2009-06-01", 
    "description": "We report the use of gold, nickel and diamond nanoparticles as a masking material for realization of diamond nano-structures by applying the dry plasma etching process. Applying low power plasma (100 W) in a gas mixture of CF4/O2 for 5 minutes results in a formation of three different types of diamond nanostructures, depending on the mask type material and particle size. Using of the Ni mask results in realization of diamond nano-rods, applying of the Au mask brings cauliflower-like structures, and using the diamond powder allows the production of irregular nano-structures. The main advance of the presented etching procedure is use of a self-assembly strategy where no lithographic steps are implemented.", 
    "genre": "research_article", 
    "id": "sg:pub.10.2478/s11534-009-0026-8", 
    "inLanguage": [
      "en"
    ], 
    "isAccessibleForFree": true, 
    "isPartOf": [
      {
        "id": "sg:journal.1280627", 
        "issn": [
          "1895-1082", 
          "1644-3608"
        ], 
        "name": "Central European Journal of Physics", 
        "type": "Periodical"
      }, 
      {
        "issueNumber": "2", 
        "type": "PublicationIssue"
      }, 
      {
        "type": "PublicationVolume", 
        "volumeNumber": "7"
      }
    ], 
    "name": "Nanostructuring of diamond films using self-assembled nanoparticles", 
    "pagination": "310-314", 
    "productId": [
      {
        "name": "readcube_id", 
        "type": "PropertyValue", 
        "value": [
          "2f64f77ab59aa2a18a4e8bae175719f467bcd1cb6ee16a27118fce3ab3d3a876"
        ]
      }, 
      {
        "name": "doi", 
        "type": "PropertyValue", 
        "value": [
          "10.2478/s11534-009-0026-8"
        ]
      }, 
      {
        "name": "dimensions_id", 
        "type": "PropertyValue", 
        "value": [
          "pub.1009948620"
        ]
      }
    ], 
    "sameAs": [
      "https://doi.org/10.2478/s11534-009-0026-8", 
      "https://app.dimensions.ai/details/publication/pub.1009948620"
    ], 
    "sdDataset": "articles", 
    "sdDatePublished": "2019-04-10T17:28", 
    "sdLicense": "https://scigraph.springernature.com/explorer/license/", 
    "sdPublisher": {
      "name": "Springer Nature - SN SciGraph project", 
      "type": "Organization"
    }, 
    "sdSource": "s3://com-uberresearch-data-dimensions-target-20181106-alternative/cleanup/v134/2549eaecd7973599484d7c17b260dba0a4ecb94b/merge/v9/a6c9fde33151104705d4d7ff012ea9563521a3ce/jats-lookup/v90/0000000001_0000000264/records_8672_00000498.jsonl", 
    "type": "ScholarlyArticle", 
    "url": "http://link.springer.com/10.2478/s11534-009-0026-8"
  }
]
 

Download the RDF metadata as:  json-ld nt turtle xml License info

HOW TO GET THIS DATA PROGRAMMATICALLY:

JSON-LD is a popular format for linked data which is fully compatible with JSON.

curl -H 'Accept: application/ld+json' 'https://scigraph.springernature.com/pub.10.2478/s11534-009-0026-8'

N-Triples is a line-based linked data format ideal for batch operations.

curl -H 'Accept: application/n-triples' 'https://scigraph.springernature.com/pub.10.2478/s11534-009-0026-8'

Turtle is a human-readable linked data format.

curl -H 'Accept: text/turtle' 'https://scigraph.springernature.com/pub.10.2478/s11534-009-0026-8'

RDF/XML is a standard XML format for linked data.

curl -H 'Accept: application/rdf+xml' 'https://scigraph.springernature.com/pub.10.2478/s11534-009-0026-8'


 

This table displays all metadata directly associated to this object as RDF triples.

146 TRIPLES      21 PREDICATES      42 URIs      19 LITERALS      7 BLANK NODES

Subject Predicate Object
1 sg:pub.10.2478/s11534-009-0026-8 schema:about anzsrc-for:03
2 anzsrc-for:0306
3 schema:author Nb093830870074735aea816976313dc5c
4 schema:citation sg:pub.10.1023/a:1017964129419
5 sg:pub.10.1038/454708a
6 https://doi.org/10.1002/anie.200801706
7 https://doi.org/10.1002/pssb.200879579
8 https://doi.org/10.1016/0925-9635(95)00500-5
9 https://doi.org/10.1016/j.cap.2008.08.012
10 https://doi.org/10.1016/j.diamond.2004.07.020
11 https://doi.org/10.1016/j.diamond.2007.12.067
12 https://doi.org/10.1016/j.diamond.2007.12.071
13 https://doi.org/10.1016/s0040-6090(00)00769-0
14 https://doi.org/10.1016/s0925-9635(01)00617-3
15 https://doi.org/10.1016/s0925-9635(01)00703-8
16 https://doi.org/10.1016/s0925-9635(98)00294-5
17 https://doi.org/10.1088/0022-3727/34/16/201
18 https://doi.org/10.1116/1.2122907
19 schema:datePublished 2009-06
20 schema:datePublishedReg 2009-06-01
21 schema:description We report the use of gold, nickel and diamond nanoparticles as a masking material for realization of diamond nano-structures by applying the dry plasma etching process. Applying low power plasma (100 W) in a gas mixture of CF4/O2 for 5 minutes results in a formation of three different types of diamond nanostructures, depending on the mask type material and particle size. Using of the Ni mask results in realization of diamond nano-rods, applying of the Au mask brings cauliflower-like structures, and using the diamond powder allows the production of irregular nano-structures. The main advance of the presented etching procedure is use of a self-assembly strategy where no lithographic steps are implemented.
22 schema:genre research_article
23 schema:inLanguage en
24 schema:isAccessibleForFree true
25 schema:isPartOf N799e00f6ccbd4e35a5f0d6f6f7ef4c96
26 Nc528c2511ecd45e7bc32f4bd3b8d071b
27 sg:journal.1280627
28 schema:name Nanostructuring of diamond films using self-assembled nanoparticles
29 schema:pagination 310-314
30 schema:productId N6d2a3b7f0983404c9108a0fac31b23ee
31 Nbda74b6ac5dd49158896e7128a2945a8
32 Nc3e3e33a9919465cba676d980bedacb9
33 schema:sameAs https://app.dimensions.ai/details/publication/pub.1009948620
34 https://doi.org/10.2478/s11534-009-0026-8
35 schema:sdDatePublished 2019-04-10T17:28
36 schema:sdLicense https://scigraph.springernature.com/explorer/license/
37 schema:sdPublisher Nd6963d3282144591b1f3acd5ddcd8aea
38 schema:url http://link.springer.com/10.2478/s11534-009-0026-8
39 sgo:license sg:explorer/license/
40 sgo:sdDataset articles
41 rdf:type schema:ScholarlyArticle
42 N4901e8586d5c48c1a0235d0416e4b495 rdf:first sg:person.014757614705.14
43 rdf:rest N9ea40d4976c14deb89b9b6ddfc55f530
44 N51610d5992134e9f838054f47996ee6b rdf:first sg:person.014335777333.35
45 rdf:rest rdf:nil
46 N6d2a3b7f0983404c9108a0fac31b23ee schema:name readcube_id
47 schema:value 2f64f77ab59aa2a18a4e8bae175719f467bcd1cb6ee16a27118fce3ab3d3a876
48 rdf:type schema:PropertyValue
49 N799e00f6ccbd4e35a5f0d6f6f7ef4c96 schema:volumeNumber 7
50 rdf:type schema:PublicationVolume
51 N9ea40d4976c14deb89b9b6ddfc55f530 rdf:first sg:person.014160455664.24
52 rdf:rest N51610d5992134e9f838054f47996ee6b
53 Nb093830870074735aea816976313dc5c rdf:first sg:person.012460602243.08
54 rdf:rest Nd1d0f51e1f4747f0986ae69e3bbddd94
55 Nbda74b6ac5dd49158896e7128a2945a8 schema:name dimensions_id
56 schema:value pub.1009948620
57 rdf:type schema:PropertyValue
58 Nc3e3e33a9919465cba676d980bedacb9 schema:name doi
59 schema:value 10.2478/s11534-009-0026-8
60 rdf:type schema:PropertyValue
61 Nc528c2511ecd45e7bc32f4bd3b8d071b schema:issueNumber 2
62 rdf:type schema:PublicationIssue
63 Nd1d0f51e1f4747f0986ae69e3bbddd94 rdf:first sg:person.0631667714.03
64 rdf:rest Nf29b8c4d0c494b6da3ea3ded6cdf1c5f
65 Nd6963d3282144591b1f3acd5ddcd8aea schema:name Springer Nature - SN SciGraph project
66 rdf:type schema:Organization
67 Nf29b8c4d0c494b6da3ea3ded6cdf1c5f rdf:first sg:person.016266433271.15
68 rdf:rest N4901e8586d5c48c1a0235d0416e4b495
69 anzsrc-for:03 schema:inDefinedTermSet anzsrc-for:
70 schema:name Chemical Sciences
71 rdf:type schema:DefinedTerm
72 anzsrc-for:0306 schema:inDefinedTermSet anzsrc-for:
73 schema:name Physical Chemistry (incl. Structural)
74 rdf:type schema:DefinedTerm
75 sg:journal.1280627 schema:issn 1644-3608
76 1895-1082
77 schema:name Central European Journal of Physics
78 rdf:type schema:Periodical
79 sg:person.012460602243.08 schema:affiliation https://www.grid.ac/institutes/grid.424881.3
80 schema:familyName Babchenko
81 schema:givenName Oleg
82 schema:sameAs https://app.dimensions.ai/discover/publication?and_facet_researcher=ur.012460602243.08
83 rdf:type schema:Person
84 sg:person.014160455664.24 schema:affiliation https://www.grid.ac/institutes/grid.424881.3
85 schema:familyName Potmesil
86 schema:givenName Jiri
87 schema:sameAs https://app.dimensions.ai/discover/publication?and_facet_researcher=ur.014160455664.24
88 rdf:type schema:Person
89 sg:person.014335777333.35 schema:affiliation https://www.grid.ac/institutes/grid.424881.3
90 schema:familyName Vanecek
91 schema:givenName Milan
92 schema:sameAs https://app.dimensions.ai/discover/publication?and_facet_researcher=ur.014335777333.35
93 rdf:type schema:Person
94 sg:person.014757614705.14 schema:affiliation https://www.grid.ac/institutes/grid.419374.c
95 schema:familyName Michalka
96 schema:givenName Miroslav
97 schema:sameAs https://app.dimensions.ai/discover/publication?and_facet_researcher=ur.014757614705.14
98 rdf:type schema:Person
99 sg:person.016266433271.15 schema:affiliation https://www.grid.ac/institutes/grid.424881.3
100 schema:familyName Hruska
101 schema:givenName Karel
102 schema:sameAs https://app.dimensions.ai/discover/publication?and_facet_researcher=ur.016266433271.15
103 rdf:type schema:Person
104 sg:person.0631667714.03 schema:affiliation https://www.grid.ac/institutes/grid.424881.3
105 schema:familyName Kromka
106 schema:givenName Alexander
107 schema:sameAs https://app.dimensions.ai/discover/publication?and_facet_researcher=ur.0631667714.03
108 rdf:type schema:Person
109 sg:pub.10.1023/a:1017964129419 schema:sameAs https://app.dimensions.ai/details/publication/pub.1026424495
110 https://doi.org/10.1023/a:1017964129419
111 rdf:type schema:CreativeWork
112 sg:pub.10.1038/454708a schema:sameAs https://app.dimensions.ai/details/publication/pub.1014279264
113 https://doi.org/10.1038/454708a
114 rdf:type schema:CreativeWork
115 https://doi.org/10.1002/anie.200801706 schema:sameAs https://app.dimensions.ai/details/publication/pub.1038029086
116 rdf:type schema:CreativeWork
117 https://doi.org/10.1002/pssb.200879579 schema:sameAs https://app.dimensions.ai/details/publication/pub.1025831773
118 rdf:type schema:CreativeWork
119 https://doi.org/10.1016/0925-9635(95)00500-5 schema:sameAs https://app.dimensions.ai/details/publication/pub.1015270306
120 rdf:type schema:CreativeWork
121 https://doi.org/10.1016/j.cap.2008.08.012 schema:sameAs https://app.dimensions.ai/details/publication/pub.1040735625
122 rdf:type schema:CreativeWork
123 https://doi.org/10.1016/j.diamond.2004.07.020 schema:sameAs https://app.dimensions.ai/details/publication/pub.1009059091
124 rdf:type schema:CreativeWork
125 https://doi.org/10.1016/j.diamond.2007.12.067 schema:sameAs https://app.dimensions.ai/details/publication/pub.1024831678
126 rdf:type schema:CreativeWork
127 https://doi.org/10.1016/j.diamond.2007.12.071 schema:sameAs https://app.dimensions.ai/details/publication/pub.1012931299
128 rdf:type schema:CreativeWork
129 https://doi.org/10.1016/s0040-6090(00)00769-0 schema:sameAs https://app.dimensions.ai/details/publication/pub.1022415835
130 rdf:type schema:CreativeWork
131 https://doi.org/10.1016/s0925-9635(01)00617-3 schema:sameAs https://app.dimensions.ai/details/publication/pub.1038675980
132 rdf:type schema:CreativeWork
133 https://doi.org/10.1016/s0925-9635(01)00703-8 schema:sameAs https://app.dimensions.ai/details/publication/pub.1049033304
134 rdf:type schema:CreativeWork
135 https://doi.org/10.1016/s0925-9635(98)00294-5 schema:sameAs https://app.dimensions.ai/details/publication/pub.1027533238
136 rdf:type schema:CreativeWork
137 https://doi.org/10.1088/0022-3727/34/16/201 schema:sameAs https://app.dimensions.ai/details/publication/pub.1047848521
138 rdf:type schema:CreativeWork
139 https://doi.org/10.1116/1.2122907 schema:sameAs https://app.dimensions.ai/details/publication/pub.1062170991
140 rdf:type schema:CreativeWork
141 https://www.grid.ac/institutes/grid.419374.c schema:alternateName International Laser Center
142 schema:name International Laser Centre, SK-812 19, Bratislava, Slovak Republic
143 rdf:type schema:Organization
144 https://www.grid.ac/institutes/grid.424881.3 schema:alternateName Institute of Physics
145 schema:name Institute of Physics of the ASCR, v.v.i., CZ-16253, Prague 6, Czech Republic
146 rdf:type schema:Organization
 




Preview window. Press ESC to close (or click here)


...