The Growth of Submicron Eutectic Thin Film Structures View Full Text


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Article Info

DATE

1981

AUTHORS

Harvey E. Cline

ABSTRACT

As the minimum dimension of electronic circuits is reduced below one micron, there has been increased interest in developing techniques for fabricating submicron structures. Pb-Sn, Cd-Pb and Al-Al 2Cu eutectic thin films were directionally solidified at rates between .0015 cm/sec and .15 cm/sec with both a lamp and a laser heat source to fabricate fault free submicron periodic structures. A transition from lamellar to cellular structures with increasing solidification rate was observed with a thermal gradient of 200°C/cm applied with the lamp heat source. Cells did not form with the increased thermal gradient produced by the laser heat source, 8000° C/cm. Spacings as fine as .1 micron were observed in the Cd-Pb eutectic. A maximum theoretical growth rate was estimated which corresponds to a spacing of 80A. More... »

PAGES

217

References to SciGraph publications

  • 1974-05. Capillary effects in the growth of thin Pb-Sn eutectic specimens in METALLURGICAL AND MATERIALS TRANSACTIONS B
  • Identifiers

    URI

    http://scigraph.springernature.com/pub.10.1557/proc-12-217

    DOI

    http://dx.doi.org/10.1557/proc-12-217

    DIMENSIONS

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