Light-Emitting and Structural Properties of Si-rich HfO2 Thin Films Fabricated by RF Magnetron Sputtering View Full Text


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Article Info

DATE

2013-11-19

AUTHORS

D. Khomenkov, Y.-T. An, X. Portier, C. Labbe, F. Gourbilleau, L. Khomenkova

ABSTRACT

ABSTRACT Structural, optical and luminescent properties of Si-rich HfO 2 films fabricated by RF magnetron sputtering were investigated versus annealing treatment. Pronounced phase separation process occurred at 950-1100°C and resulted in the formation of hafnia and silica phases, as well as pure silicon clusters. An intense light emission of annealed samples in visible spectral range was obtained under broad band excitation. It was ascribed to exciton recombination inside silicon clusters as well as host defects. To confirm the formation of Si clusters, the structures were co-doped with Er 3+ ions and effective light emission at 1.54µm was obtained under non-resonant excitation due to energy transfer from Si clusters towards Er 3+ ions. The interaction of Si clusters, host defects and Er 3+ ions under is discussed. More... »

PAGES

85-91

References to SciGraph publications

Identifiers

URI

http://scigraph.springernature.com/pub.10.1557/opl.2013.1169

DOI

http://dx.doi.org/10.1557/opl.2013.1169

DIMENSIONS

https://app.dimensions.ai/details/publication/pub.1115896900


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[
  {
    "@context": "https://springernature.github.io/scigraph/jsonld/sgcontext.json", 
    "about": [
      {
        "id": "http://purl.org/au-research/vocabulary/anzsrc-for/2008/09", 
        "inDefinedTermSet": "http://purl.org/au-research/vocabulary/anzsrc-for/2008/", 
        "name": "Engineering", 
        "type": "DefinedTerm"
      }, 
      {
        "id": "http://purl.org/au-research/vocabulary/anzsrc-for/2008/0912", 
        "inDefinedTermSet": "http://purl.org/au-research/vocabulary/anzsrc-for/2008/", 
        "name": "Materials Engineering", 
        "type": "DefinedTerm"
      }
    ], 
    "author": [
      {
        "affiliation": {
          "alternateName": "Taras Shevchenko National University of Kyiv, Faculty of Physics, 4 Pr. Hlushkov, Kyiv 03022, Ukraine", 
          "id": "http://www.grid.ac/institutes/grid.34555.32", 
          "name": [
            "Taras Shevchenko National University of Kyiv, Faculty of Physics, 4 Pr. Hlushkov, Kyiv 03022, Ukraine"
          ], 
          "type": "Organization"
        }, 
        "familyName": "Khomenkov", 
        "givenName": "D.", 
        "id": "sg:person.010670133707.08", 
        "sameAs": [
          "https://app.dimensions.ai/discover/publication?and_facet_researcher=ur.010670133707.08"
        ], 
        "type": "Person"
      }, 
      {
        "affiliation": {
          "alternateName": "CIMAP/ENSICAEN/UCBN, 6 Blvd. Mar\u00e9chal Juin, 14050 Caen Cedex 4, France", 
          "id": "http://www.grid.ac/institutes/None", 
          "name": [
            "CIMAP/ENSICAEN/UCBN, 6 Blvd. Mar\u00e9chal Juin, 14050 Caen Cedex 4, France"
          ], 
          "type": "Organization"
        }, 
        "familyName": "An", 
        "givenName": "Y.-T.", 
        "id": "sg:person.01332570160.01", 
        "sameAs": [
          "https://app.dimensions.ai/discover/publication?and_facet_researcher=ur.01332570160.01"
        ], 
        "type": "Person"
      }, 
      {
        "affiliation": {
          "alternateName": "CIMAP/ENSICAEN/UCBN, 6 Blvd. Mar\u00e9chal Juin, 14050 Caen Cedex 4, France", 
          "id": "http://www.grid.ac/institutes/None", 
          "name": [
            "CIMAP/ENSICAEN/UCBN, 6 Blvd. Mar\u00e9chal Juin, 14050 Caen Cedex 4, France"
          ], 
          "type": "Organization"
        }, 
        "familyName": "Portier", 
        "givenName": "X.", 
        "id": "sg:person.0771525660.41", 
        "sameAs": [
          "https://app.dimensions.ai/discover/publication?and_facet_researcher=ur.0771525660.41"
        ], 
        "type": "Person"
      }, 
      {
        "affiliation": {
          "alternateName": "CIMAP/ENSICAEN/UCBN, 6 Blvd. Mar\u00e9chal Juin, 14050 Caen Cedex 4, France", 
          "id": "http://www.grid.ac/institutes/None", 
          "name": [
            "CIMAP/ENSICAEN/UCBN, 6 Blvd. Mar\u00e9chal Juin, 14050 Caen Cedex 4, France"
          ], 
          "type": "Organization"
        }, 
        "familyName": "Labbe", 
        "givenName": "C.", 
        "id": "sg:person.01237036170.82", 
        "sameAs": [
          "https://app.dimensions.ai/discover/publication?and_facet_researcher=ur.01237036170.82"
        ], 
        "type": "Person"
      }, 
      {
        "affiliation": {
          "alternateName": "CIMAP/ENSICAEN/UCBN, 6 Blvd. Mar\u00e9chal Juin, 14050 Caen Cedex 4, France", 
          "id": "http://www.grid.ac/institutes/None", 
          "name": [
            "CIMAP/ENSICAEN/UCBN, 6 Blvd. Mar\u00e9chal Juin, 14050 Caen Cedex 4, France"
          ], 
          "type": "Organization"
        }, 
        "familyName": "Gourbilleau", 
        "givenName": "F.", 
        "id": "sg:person.01275733427.02", 
        "sameAs": [
          "https://app.dimensions.ai/discover/publication?and_facet_researcher=ur.01275733427.02"
        ], 
        "type": "Person"
      }, 
      {
        "affiliation": {
          "alternateName": "V. Lashkaryov Institute of Semiconductor Physics at NASU, 41 Pr. Nauky, Kyiv 03028, Ukraine", 
          "id": "http://www.grid.ac/institutes/grid.466789.2", 
          "name": [
            "V. Lashkaryov Institute of Semiconductor Physics at NASU, 41 Pr. Nauky, Kyiv 03028, Ukraine"
          ], 
          "type": "Organization"
        }, 
        "familyName": "Khomenkova", 
        "givenName": "L.", 
        "id": "sg:person.0777143227.34", 
        "sameAs": [
          "https://app.dimensions.ai/discover/publication?and_facet_researcher=ur.0777143227.34"
        ], 
        "type": "Person"
      }
    ], 
    "citation": [
      {
        "id": "sg:pub.10.1186/1556-276x-6-172", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1006095170", 
          "https://doi.org/10.1186/1556-276x-6-172"
        ], 
        "type": "CreativeWork"
      }
    ], 
    "datePublished": "2013-11-19", 
    "datePublishedReg": "2013-11-19", 
    "description": "ABSTRACT  Structural, optical and luminescent properties of Si-rich HfO 2 films fabricated by RF magnetron sputtering were investigated versus annealing treatment. Pronounced phase separation process occurred at 950-1100\u00b0C and resulted in the formation of hafnia and silica phases, as well as pure silicon clusters. An intense light emission of annealed samples in visible spectral range was obtained under broad band excitation. It was ascribed to exciton recombination inside silicon clusters as well as host defects. To confirm the formation of Si clusters, the structures were co-doped with Er 3+ ions and effective light emission at 1.54\u00b5m was obtained under non-resonant excitation due to energy transfer from Si clusters towards Er 3+ ions. The interaction of Si clusters, host defects and Er 3+ ions under is discussed. ", 
    "genre": "article", 
    "id": "sg:pub.10.1557/opl.2013.1169", 
    "isAccessibleForFree": false, 
    "isPartOf": [
      {
        "id": "sg:journal.1297379", 
        "issn": [
          "2731-5894", 
          "2059-8521"
        ], 
        "name": "MRS Advances", 
        "publisher": "Springer Nature", 
        "type": "Periodical"
      }, 
      {
        "type": "PublicationVolume", 
        "volumeNumber": "1617"
      }
    ], 
    "keywords": [
      "RF magnetron sputtering", 
      "Si clusters", 
      "Er 3", 
      "light emission", 
      "magnetron sputtering", 
      "silicon clusters", 
      "non-resonant excitation", 
      "pure silicon clusters", 
      "visible spectral range", 
      "HfO2 thin films", 
      "intense light emission", 
      "broad-band excitation", 
      "HfO 2 films", 
      "spectral range", 
      "band excitation", 
      "exciton recombination", 
      "light emitting", 
      "thin films", 
      "host defects", 
      "phase separation process", 
      "energy transfer", 
      "sputtering", 
      "luminescent properties", 
      "separation process", 
      "excitation", 
      "ions", 
      "structural properties", 
      "films", 
      "emission", 
      "clusters", 
      "properties", 
      "hafnia", 
      "recombination", 
      "silica", 
      "formation", 
      "structure", 
      "range", 
      "interaction", 
      "transfer", 
      "defects", 
      "process", 
      "samples", 
      "Abstract", 
      "host", 
      "treatment"
    ], 
    "name": "Light-Emitting and Structural Properties of Si-rich HfO2 Thin Films Fabricated by RF Magnetron Sputtering", 
    "pagination": "85-91", 
    "productId": [
      {
        "name": "dimensions_id", 
        "type": "PropertyValue", 
        "value": [
          "pub.1115896900"
        ]
      }, 
      {
        "name": "doi", 
        "type": "PropertyValue", 
        "value": [
          "10.1557/opl.2013.1169"
        ]
      }
    ], 
    "sameAs": [
      "https://doi.org/10.1557/opl.2013.1169", 
      "https://app.dimensions.ai/details/publication/pub.1115896900"
    ], 
    "sdDataset": "articles", 
    "sdDatePublished": "2022-09-02T15:56", 
    "sdLicense": "https://scigraph.springernature.com/explorer/license/", 
    "sdPublisher": {
      "name": "Springer Nature - SN SciGraph project", 
      "type": "Organization"
    }, 
    "sdSource": "s3://com-springernature-scigraph/baseset/20220902/entities/gbq_results/article/article_594.jsonl", 
    "type": "ScholarlyArticle", 
    "url": "https://doi.org/10.1557/opl.2013.1169"
  }
]
 

Download the RDF metadata as:  json-ld nt turtle xml License info

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This table displays all metadata directly associated to this object as RDF triples.

144 TRIPLES      21 PREDICATES      69 URIs      60 LITERALS      5 BLANK NODES

Subject Predicate Object
1 sg:pub.10.1557/opl.2013.1169 schema:about anzsrc-for:09
2 anzsrc-for:0912
3 schema:author Nf65fc781b7344952b14f48db79649f38
4 schema:citation sg:pub.10.1186/1556-276x-6-172
5 schema:datePublished 2013-11-19
6 schema:datePublishedReg 2013-11-19
7 schema:description ABSTRACT Structural, optical and luminescent properties of Si-rich HfO 2 films fabricated by RF magnetron sputtering were investigated versus annealing treatment. Pronounced phase separation process occurred at 950-1100°C and resulted in the formation of hafnia and silica phases, as well as pure silicon clusters. An intense light emission of annealed samples in visible spectral range was obtained under broad band excitation. It was ascribed to exciton recombination inside silicon clusters as well as host defects. To confirm the formation of Si clusters, the structures were co-doped with Er 3+ ions and effective light emission at 1.54µm was obtained under non-resonant excitation due to energy transfer from Si clusters towards Er 3+ ions. The interaction of Si clusters, host defects and Er 3+ ions under is discussed.
8 schema:genre article
9 schema:isAccessibleForFree false
10 schema:isPartOf N829a7ce7169f4148be8dfcf8ca52e74b
11 sg:journal.1297379
12 schema:keywords Abstract
13 Er 3
14 HfO 2 films
15 HfO2 thin films
16 RF magnetron sputtering
17 Si clusters
18 band excitation
19 broad-band excitation
20 clusters
21 defects
22 emission
23 energy transfer
24 excitation
25 exciton recombination
26 films
27 formation
28 hafnia
29 host
30 host defects
31 intense light emission
32 interaction
33 ions
34 light emission
35 light emitting
36 luminescent properties
37 magnetron sputtering
38 non-resonant excitation
39 phase separation process
40 process
41 properties
42 pure silicon clusters
43 range
44 recombination
45 samples
46 separation process
47 silica
48 silicon clusters
49 spectral range
50 sputtering
51 structural properties
52 structure
53 thin films
54 transfer
55 treatment
56 visible spectral range
57 schema:name Light-Emitting and Structural Properties of Si-rich HfO2 Thin Films Fabricated by RF Magnetron Sputtering
58 schema:pagination 85-91
59 schema:productId N0cdb26149c7a426fbb5f3eb8fe809335
60 N49f5615f439541fabcc8afd25f9b3a59
61 schema:sameAs https://app.dimensions.ai/details/publication/pub.1115896900
62 https://doi.org/10.1557/opl.2013.1169
63 schema:sdDatePublished 2022-09-02T15:56
64 schema:sdLicense https://scigraph.springernature.com/explorer/license/
65 schema:sdPublisher Nb0d9f1b847d24c8e81d9288548f548da
66 schema:url https://doi.org/10.1557/opl.2013.1169
67 sgo:license sg:explorer/license/
68 sgo:sdDataset articles
69 rdf:type schema:ScholarlyArticle
70 N0cdb26149c7a426fbb5f3eb8fe809335 schema:name dimensions_id
71 schema:value pub.1115896900
72 rdf:type schema:PropertyValue
73 N1fe8fa376fc84664ab3be5f36c32d677 rdf:first sg:person.01237036170.82
74 rdf:rest N5bc52304be2c4ec78ecf0ea76b31887f
75 N49f5615f439541fabcc8afd25f9b3a59 schema:name doi
76 schema:value 10.1557/opl.2013.1169
77 rdf:type schema:PropertyValue
78 N4d058e0a1275457bb0715b1c3d9224ed rdf:first sg:person.0777143227.34
79 rdf:rest rdf:nil
80 N5bc52304be2c4ec78ecf0ea76b31887f rdf:first sg:person.01275733427.02
81 rdf:rest N4d058e0a1275457bb0715b1c3d9224ed
82 N829a7ce7169f4148be8dfcf8ca52e74b schema:volumeNumber 1617
83 rdf:type schema:PublicationVolume
84 Nb0d9f1b847d24c8e81d9288548f548da schema:name Springer Nature - SN SciGraph project
85 rdf:type schema:Organization
86 Nb5e4b97510724b48b5cf8b005f7c999e rdf:first sg:person.0771525660.41
87 rdf:rest N1fe8fa376fc84664ab3be5f36c32d677
88 Nbecd223c8cfe42a98472f5f6e286196f rdf:first sg:person.01332570160.01
89 rdf:rest Nb5e4b97510724b48b5cf8b005f7c999e
90 Nf65fc781b7344952b14f48db79649f38 rdf:first sg:person.010670133707.08
91 rdf:rest Nbecd223c8cfe42a98472f5f6e286196f
92 anzsrc-for:09 schema:inDefinedTermSet anzsrc-for:
93 schema:name Engineering
94 rdf:type schema:DefinedTerm
95 anzsrc-for:0912 schema:inDefinedTermSet anzsrc-for:
96 schema:name Materials Engineering
97 rdf:type schema:DefinedTerm
98 sg:journal.1297379 schema:issn 2059-8521
99 2731-5894
100 schema:name MRS Advances
101 schema:publisher Springer Nature
102 rdf:type schema:Periodical
103 sg:person.010670133707.08 schema:affiliation grid-institutes:grid.34555.32
104 schema:familyName Khomenkov
105 schema:givenName D.
106 schema:sameAs https://app.dimensions.ai/discover/publication?and_facet_researcher=ur.010670133707.08
107 rdf:type schema:Person
108 sg:person.01237036170.82 schema:affiliation grid-institutes:None
109 schema:familyName Labbe
110 schema:givenName C.
111 schema:sameAs https://app.dimensions.ai/discover/publication?and_facet_researcher=ur.01237036170.82
112 rdf:type schema:Person
113 sg:person.01275733427.02 schema:affiliation grid-institutes:None
114 schema:familyName Gourbilleau
115 schema:givenName F.
116 schema:sameAs https://app.dimensions.ai/discover/publication?and_facet_researcher=ur.01275733427.02
117 rdf:type schema:Person
118 sg:person.01332570160.01 schema:affiliation grid-institutes:None
119 schema:familyName An
120 schema:givenName Y.-T.
121 schema:sameAs https://app.dimensions.ai/discover/publication?and_facet_researcher=ur.01332570160.01
122 rdf:type schema:Person
123 sg:person.0771525660.41 schema:affiliation grid-institutes:None
124 schema:familyName Portier
125 schema:givenName X.
126 schema:sameAs https://app.dimensions.ai/discover/publication?and_facet_researcher=ur.0771525660.41
127 rdf:type schema:Person
128 sg:person.0777143227.34 schema:affiliation grid-institutes:grid.466789.2
129 schema:familyName Khomenkova
130 schema:givenName L.
131 schema:sameAs https://app.dimensions.ai/discover/publication?and_facet_researcher=ur.0777143227.34
132 rdf:type schema:Person
133 sg:pub.10.1186/1556-276x-6-172 schema:sameAs https://app.dimensions.ai/details/publication/pub.1006095170
134 https://doi.org/10.1186/1556-276x-6-172
135 rdf:type schema:CreativeWork
136 grid-institutes:None schema:alternateName CIMAP/ENSICAEN/UCBN, 6 Blvd. Maréchal Juin, 14050 Caen Cedex 4, France
137 schema:name CIMAP/ENSICAEN/UCBN, 6 Blvd. Maréchal Juin, 14050 Caen Cedex 4, France
138 rdf:type schema:Organization
139 grid-institutes:grid.34555.32 schema:alternateName Taras Shevchenko National University of Kyiv, Faculty of Physics, 4 Pr. Hlushkov, Kyiv 03022, Ukraine
140 schema:name Taras Shevchenko National University of Kyiv, Faculty of Physics, 4 Pr. Hlushkov, Kyiv 03022, Ukraine
141 rdf:type schema:Organization
142 grid-institutes:grid.466789.2 schema:alternateName V. Lashkaryov Institute of Semiconductor Physics at NASU, 41 Pr. Nauky, Kyiv 03028, Ukraine
143 schema:name V. Lashkaryov Institute of Semiconductor Physics at NASU, 41 Pr. Nauky, Kyiv 03028, Ukraine
144 rdf:type schema:Organization
 




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