Tunneling Atomic Layer-Deposited Aluminum Oxide: a Correlated Structural/Electrical Performance Study for the Surface Passivation of Silicon Junctions View Full Text


Ontology type: schema:ScholarlyArticle      Open Access: True


Article Info

DATE

2019-10-22

AUTHORS

Kangping Liu, Odile Cristini-Robbe, Omar Ibrahim Elmi, Shuang Long Wang, Bin Wei, Ingsong Yu, Xavier Portier, Fabrice Gourbilleau, Didier Stiévenard, Tao Xu

ABSTRACT

Passivation is a key process for the optimization of silicon p-n junctions. Among the different technologies used to passivate the surface and contact interfaces, alumina is widely used. One key parameter is the thickness of the passivation layer that is commonly deposited using atomic layer deposition (ALD) technique. This paper aims at presenting correlated structural/electrical studies for the passivation effect of alumina on Si junctions to obtain optimal thickness of alumina passivation layer. High-resolution transmission electron microscope (HRTEM) observations coupled with energy dispersive X-ray (EDX) measurements are used to determine the thickness of alumina at atomic scale. The correlated electrical parameters are measured with both solar simulator and Sinton’s Suns-Voc measurements. Finally, an optimum alumina thickness of 1.2 nm is thus evidenced. More... »

PAGES

330

Identifiers

URI

http://scigraph.springernature.com/pub.10.1186/s11671-019-3160-2

DOI

http://dx.doi.org/10.1186/s11671-019-3160-2

DIMENSIONS

https://app.dimensions.ai/details/publication/pub.1121996731

PUBMED

https://www.ncbi.nlm.nih.gov/pubmed/31641871


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184 schema:name IEMN, UMR8520, Université de Lille 1, 59652, Villeneuve d’Ascq Cédex, France
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186 grid-institutes:grid.462765.4 schema:alternateName PHLAM, UMR8523, Université de Lille 1, 59652, Villeneuve d’Asq Cédex, France
187 schema:name PHLAM, UMR8523, Université de Lille 1, 59652, Villeneuve d’Asq Cédex, France
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189 grid-institutes:grid.462794.a schema:alternateName CIMAP, Normandie Univ, ENSICAEN, UNICAEN, CEA, CNRS, 6 Boulevard Maréchal Juin, 14050, Caen Cedex 4, France
190 schema:name CIMAP, Normandie Univ, ENSICAEN, UNICAEN, CEA, CNRS, 6 Boulevard Maréchal Juin, 14050, Caen Cedex 4, France
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