Structural and optical characterization of pure Si-rich nitride thin films View Full Text


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Article Info

DATE

2013-01-16

AUTHORS

Olivier Debieu, Ramesh Pratibha Nalini, Julien Cardin, Xavier Portier, Jacques Perrière, Fabrice Gourbilleau

ABSTRACT

The specific dependence of the Si content on the structural and optical properties of O- and H-free Si-rich nitride (SiNx>1.33) thin films deposited by magnetron sputtering is investigated. A semiempirical relation between the composition and the refractive index was found. In the absence of Si-H, N-H, and Si-O vibration modes in the FTIR spectra, the transverse and longitudinal optical (TO-LO) Si-N stretching pair modes could be unambiguously identified using the Berreman effect. With increasing Si content, the LO and the TO bands shifted to lower wavenumbers, and the LO band intensity dropped suggesting that the films became more disordered. Besides, the LO and the TO bands shifted to higher wavenumbers with increasing annealing temperature which may result from the phase separation between Si nanoparticles (Si-np) and the host medium. Indeed, XRD and Raman measurements showed that crystalline Si-np formed upon 1100°C annealing but only for SiNx<0.8. Besides, quantum confinement effects on the Raman peaks of crystalline Si-np, which were observed by HRTEM, were evidenced for Si-np average sizes between 3 and 6 nm. A contrario, visible photoluminescence (PL) was only observed for SiNx>0.9, demonstrating that this PL is not originating from confined states in crystalline Si-np. As an additional proof, the PL was quenched while crystalline Si-np could be formed by laser annealing. Besides, the PL cannot be explained neither by defect states in the bandgap nor by tail to tail recombination. The PL properties of SiNx>0.9 could be then due to a size effect of Si-np but having an amorphous phase. More... »

PAGES

31

References to SciGraph publications

Identifiers

URI

http://scigraph.springernature.com/pub.10.1186/1556-276x-8-31

DOI

http://dx.doi.org/10.1186/1556-276x-8-31

DIMENSIONS

https://app.dimensions.ai/details/publication/pub.1007109831

PUBMED

https://www.ncbi.nlm.nih.gov/pubmed/23324447


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[
  {
    "@context": "https://springernature.github.io/scigraph/jsonld/sgcontext.json", 
    "about": [
      {
        "id": "http://purl.org/au-research/vocabulary/anzsrc-for/2008/09", 
        "inDefinedTermSet": "http://purl.org/au-research/vocabulary/anzsrc-for/2008/", 
        "name": "Engineering", 
        "type": "DefinedTerm"
      }, 
      {
        "id": "http://purl.org/au-research/vocabulary/anzsrc-for/2008/0912", 
        "inDefinedTermSet": "http://purl.org/au-research/vocabulary/anzsrc-for/2008/", 
        "name": "Materials Engineering", 
        "type": "DefinedTerm"
      }
    ], 
    "author": [
      {
        "affiliation": {
          "alternateName": "CIMAP, UMR 6252 CNRS-ENSICAEN-CEA-UCBN, Ensicaen, 6 Bd Mar\u00e9chal Juin, 14050 Caen, cedex 4, France", 
          "id": "http://www.grid.ac/institutes/grid.462794.a", 
          "name": [
            "CIMAP, UMR 6252 CNRS-ENSICAEN-CEA-UCBN, Ensicaen, 6 Bd Mar\u00e9chal Juin, 14050 Caen, cedex 4, France"
          ], 
          "type": "Organization"
        }, 
        "familyName": "Debieu", 
        "givenName": "Olivier", 
        "id": "sg:person.01055335234.41", 
        "sameAs": [
          "https://app.dimensions.ai/discover/publication?and_facet_researcher=ur.01055335234.41"
        ], 
        "type": "Person"
      }, 
      {
        "affiliation": {
          "alternateName": "CIMAP, UMR 6252 CNRS-ENSICAEN-CEA-UCBN, Ensicaen, 6 Bd Mar\u00e9chal Juin, 14050 Caen, cedex 4, France", 
          "id": "http://www.grid.ac/institutes/grid.462794.a", 
          "name": [
            "CIMAP, UMR 6252 CNRS-ENSICAEN-CEA-UCBN, Ensicaen, 6 Bd Mar\u00e9chal Juin, 14050 Caen, cedex 4, France"
          ], 
          "type": "Organization"
        }, 
        "familyName": "Nalini", 
        "givenName": "Ramesh Pratibha", 
        "id": "sg:person.0731030027.13", 
        "sameAs": [
          "https://app.dimensions.ai/discover/publication?and_facet_researcher=ur.0731030027.13"
        ], 
        "type": "Person"
      }, 
      {
        "affiliation": {
          "alternateName": "CIMAP, UMR 6252 CNRS-ENSICAEN-CEA-UCBN, Ensicaen, 6 Bd Mar\u00e9chal Juin, 14050 Caen, cedex 4, France", 
          "id": "http://www.grid.ac/institutes/grid.462794.a", 
          "name": [
            "CIMAP, UMR 6252 CNRS-ENSICAEN-CEA-UCBN, Ensicaen, 6 Bd Mar\u00e9chal Juin, 14050 Caen, cedex 4, France"
          ], 
          "type": "Organization"
        }, 
        "familyName": "Cardin", 
        "givenName": "Julien", 
        "id": "sg:person.01113371627.34", 
        "sameAs": [
          "https://app.dimensions.ai/discover/publication?and_facet_researcher=ur.01113371627.34"
        ], 
        "type": "Person"
      }, 
      {
        "affiliation": {
          "alternateName": "CIMAP, UMR 6252 CNRS-ENSICAEN-CEA-UCBN, Ensicaen, 6 Bd Mar\u00e9chal Juin, 14050 Caen, cedex 4, France", 
          "id": "http://www.grid.ac/institutes/grid.462794.a", 
          "name": [
            "CIMAP, UMR 6252 CNRS-ENSICAEN-CEA-UCBN, Ensicaen, 6 Bd Mar\u00e9chal Juin, 14050 Caen, cedex 4, France"
          ], 
          "type": "Organization"
        }, 
        "familyName": "Portier", 
        "givenName": "Xavier", 
        "id": "sg:person.0771525660.41", 
        "sameAs": [
          "https://app.dimensions.ai/discover/publication?and_facet_researcher=ur.0771525660.41"
        ], 
        "type": "Person"
      }, 
      {
        "affiliation": {
          "alternateName": "UNIV PARIS 06, INSP NANOSCIENCE PARIS CNRS, UMR 7588, 75015, Paris, France", 
          "id": "http://www.grid.ac/institutes/grid.410511.0", 
          "name": [
            "UNIV PARIS 06, INSP NANOSCIENCE PARIS CNRS, UMR 7588, 75015, Paris, France"
          ], 
          "type": "Organization"
        }, 
        "familyName": "Perri\u00e8re", 
        "givenName": "Jacques", 
        "id": "sg:person.010725431763.59", 
        "sameAs": [
          "https://app.dimensions.ai/discover/publication?and_facet_researcher=ur.010725431763.59"
        ], 
        "type": "Person"
      }, 
      {
        "affiliation": {
          "alternateName": "CIMAP, UMR 6252 CNRS-ENSICAEN-CEA-UCBN, Ensicaen, 6 Bd Mar\u00e9chal Juin, 14050 Caen, cedex 4, France", 
          "id": "http://www.grid.ac/institutes/grid.462794.a", 
          "name": [
            "CIMAP, UMR 6252 CNRS-ENSICAEN-CEA-UCBN, Ensicaen, 6 Bd Mar\u00e9chal Juin, 14050 Caen, cedex 4, France"
          ], 
          "type": "Organization"
        }, 
        "familyName": "Gourbilleau", 
        "givenName": "Fabrice", 
        "id": "sg:person.01275733427.02", 
        "sameAs": [
          "https://app.dimensions.ai/discover/publication?and_facet_researcher=ur.01275733427.02"
        ], 
        "type": "Person"
      }
    ], 
    "citation": [
      {
        "id": "sg:pub.10.1186/1556-276x-6-178", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1052921472", 
          "https://doi.org/10.1186/1556-276x-6-178"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "sg:pub.10.1186/1556-276x-7-124", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1012585318", 
          "https://doi.org/10.1186/1556-276x-7-124"
        ], 
        "type": "CreativeWork"
      }
    ], 
    "datePublished": "2013-01-16", 
    "datePublishedReg": "2013-01-16", 
    "description": "The specific dependence of the Si content on the structural and optical properties of O- and H-free Si-rich nitride (SiNx>1.33) thin films deposited by magnetron sputtering is investigated. A semiempirical relation between the composition and the refractive index was found. In the absence of Si-H, N-H, and Si-O vibration modes in the FTIR spectra, the transverse and longitudinal optical (TO-LO) Si-N stretching pair modes could be unambiguously identified using the Berreman effect. With increasing Si content, the LO and the TO bands shifted to lower wavenumbers, and the LO band intensity dropped suggesting that the films became more disordered. Besides, the LO and the TO bands shifted to higher wavenumbers with increasing annealing temperature which may result from the phase separation between Si nanoparticles (Si-np) and the host medium. Indeed, XRD and Raman measurements showed that crystalline Si-np formed upon 1100\u00b0C annealing but only for SiNx<0.8. Besides, quantum confinement effects on the Raman peaks of crystalline Si-np, which were observed by HRTEM, were evidenced for Si-np average sizes between 3 and 6 nm. A contrario, visible photoluminescence (PL) was only observed for SiNx>0.9, demonstrating that this PL is not originating from confined states in crystalline Si-np. As an additional proof, the PL was quenched while crystalline Si-np could be formed by laser annealing. Besides, the PL cannot be explained neither by defect states in the bandgap nor by tail to tail recombination. The PL properties of SiNx>0.9 could be then due to a size effect of Si-np but having an amorphous phase.", 
    "genre": "article", 
    "id": "sg:pub.10.1186/1556-276x-8-31", 
    "isAccessibleForFree": true, 
    "isPartOf": [
      {
        "id": "sg:journal.1037280", 
        "issn": [
          "1931-7573", 
          "1556-276X"
        ], 
        "name": "Nanoscale Research Letters", 
        "publisher": "Springer Nature", 
        "type": "Periodical"
      }, 
      {
        "issueNumber": "1", 
        "type": "PublicationIssue"
      }, 
      {
        "type": "PublicationVolume", 
        "volumeNumber": "8"
      }
    ], 
    "keywords": [
      "Si NPs", 
      "Si\u2013O vibration modes", 
      "thin films", 
      "nitride thin films", 
      "optical characterization", 
      "refractive index", 
      "Berreman effect", 
      "laser annealing", 
      "optical properties", 
      "confined states", 
      "visible photoluminescence", 
      "magnetron sputtering", 
      "confinement effect", 
      "defect states", 
      "pair modes", 
      "Raman measurements", 
      "photoluminescence", 
      "PL properties", 
      "Raman peaks", 
      "Si nanoparticles", 
      "host medium", 
      "TO band", 
      "C annealing", 
      "specific dependence", 
      "annealing temperature", 
      "films", 
      "higher wavenumbers", 
      "vibration modes", 
      "Si", 
      "lower wavenumbers", 
      "size effect", 
      "band intensities", 
      "Si content", 
      "annealing", 
      "wavenumbers", 
      "semiempirical relation", 
      "band", 
      "sputtering", 
      "FTIR spectra", 
      "bandgap", 
      "average size", 
      "amorphous phase", 
      "phase separation", 
      "mode", 
      "spectra", 
      "state", 
      "additional proof", 
      "properties", 
      "transverse", 
      "dependence", 
      "recombination", 
      "measurements", 
      "intensity", 
      "peak", 
      "nanoparticles", 
      "temperature", 
      "tail", 
      "LO", 
      "phase", 
      "HRTEM", 
      "effect", 
      "characterization", 
      "separation", 
      "absence of Si", 
      "XRD", 
      "medium", 
      "composition", 
      "proof", 
      "size", 
      "index", 
      "relation", 
      "content", 
      "contrario", 
      "absence"
    ], 
    "name": "Structural and optical characterization of pure Si-rich nitride thin films", 
    "pagination": "31", 
    "productId": [
      {
        "name": "dimensions_id", 
        "type": "PropertyValue", 
        "value": [
          "pub.1007109831"
        ]
      }, 
      {
        "name": "doi", 
        "type": "PropertyValue", 
        "value": [
          "10.1186/1556-276x-8-31"
        ]
      }, 
      {
        "name": "pubmed_id", 
        "type": "PropertyValue", 
        "value": [
          "23324447"
        ]
      }
    ], 
    "sameAs": [
      "https://doi.org/10.1186/1556-276x-8-31", 
      "https://app.dimensions.ai/details/publication/pub.1007109831"
    ], 
    "sdDataset": "articles", 
    "sdDatePublished": "2022-10-01T06:39", 
    "sdLicense": "https://scigraph.springernature.com/explorer/license/", 
    "sdPublisher": {
      "name": "Springer Nature - SN SciGraph project", 
      "type": "Organization"
    }, 
    "sdSource": "s3://com-springernature-scigraph/baseset/20221001/entities/gbq_results/article/article_616.jsonl", 
    "type": "ScholarlyArticle", 
    "url": "https://doi.org/10.1186/1556-276x-8-31"
  }
]
 

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This table displays all metadata directly associated to this object as RDF triples.

181 TRIPLES      21 PREDICATES      101 URIs      91 LITERALS      7 BLANK NODES

Subject Predicate Object
1 sg:pub.10.1186/1556-276x-8-31 schema:about anzsrc-for:09
2 anzsrc-for:0912
3 schema:author N4be534e8387b489fa9820ac70da65587
4 schema:citation sg:pub.10.1186/1556-276x-6-178
5 sg:pub.10.1186/1556-276x-7-124
6 schema:datePublished 2013-01-16
7 schema:datePublishedReg 2013-01-16
8 schema:description The specific dependence of the Si content on the structural and optical properties of O- and H-free Si-rich nitride (SiNx>1.33) thin films deposited by magnetron sputtering is investigated. A semiempirical relation between the composition and the refractive index was found. In the absence of Si-H, N-H, and Si-O vibration modes in the FTIR spectra, the transverse and longitudinal optical (TO-LO) Si-N stretching pair modes could be unambiguously identified using the Berreman effect. With increasing Si content, the LO and the TO bands shifted to lower wavenumbers, and the LO band intensity dropped suggesting that the films became more disordered. Besides, the LO and the TO bands shifted to higher wavenumbers with increasing annealing temperature which may result from the phase separation between Si nanoparticles (Si-np) and the host medium. Indeed, XRD and Raman measurements showed that crystalline Si-np formed upon 1100°C annealing but only for SiNx<0.8. Besides, quantum confinement effects on the Raman peaks of crystalline Si-np, which were observed by HRTEM, were evidenced for Si-np average sizes between 3 and 6 nm. A contrario, visible photoluminescence (PL) was only observed for SiNx>0.9, demonstrating that this PL is not originating from confined states in crystalline Si-np. As an additional proof, the PL was quenched while crystalline Si-np could be formed by laser annealing. Besides, the PL cannot be explained neither by defect states in the bandgap nor by tail to tail recombination. The PL properties of SiNx>0.9 could be then due to a size effect of Si-np but having an amorphous phase.
9 schema:genre article
10 schema:isAccessibleForFree true
11 schema:isPartOf N4a8baa705717477d8e9469e0e8038121
12 Ndb4d0c2bdf7f4be09e342fa1f7128d85
13 sg:journal.1037280
14 schema:keywords Berreman effect
15 C annealing
16 FTIR spectra
17 HRTEM
18 LO
19 PL properties
20 Raman measurements
21 Raman peaks
22 Si
23 Si NPs
24 Si content
25 Si nanoparticles
26 Si–O vibration modes
27 TO band
28 XRD
29 absence
30 absence of Si
31 additional proof
32 amorphous phase
33 annealing
34 annealing temperature
35 average size
36 band
37 band intensities
38 bandgap
39 characterization
40 composition
41 confined states
42 confinement effect
43 content
44 contrario
45 defect states
46 dependence
47 effect
48 films
49 higher wavenumbers
50 host medium
51 index
52 intensity
53 laser annealing
54 lower wavenumbers
55 magnetron sputtering
56 measurements
57 medium
58 mode
59 nanoparticles
60 nitride thin films
61 optical characterization
62 optical properties
63 pair modes
64 peak
65 phase
66 phase separation
67 photoluminescence
68 proof
69 properties
70 recombination
71 refractive index
72 relation
73 semiempirical relation
74 separation
75 size
76 size effect
77 specific dependence
78 spectra
79 sputtering
80 state
81 tail
82 temperature
83 thin films
84 transverse
85 vibration modes
86 visible photoluminescence
87 wavenumbers
88 schema:name Structural and optical characterization of pure Si-rich nitride thin films
89 schema:pagination 31
90 schema:productId N2cda87b8c47a4aefbc09c7d1f55d4cb0
91 N7d5ea6d039b94a01a5794389681cc5ce
92 Ncbb171a226d4406da480eb0e7112c8f4
93 schema:sameAs https://app.dimensions.ai/details/publication/pub.1007109831
94 https://doi.org/10.1186/1556-276x-8-31
95 schema:sdDatePublished 2022-10-01T06:39
96 schema:sdLicense https://scigraph.springernature.com/explorer/license/
97 schema:sdPublisher N1ac842909e164e5c94827541313c2be8
98 schema:url https://doi.org/10.1186/1556-276x-8-31
99 sgo:license sg:explorer/license/
100 sgo:sdDataset articles
101 rdf:type schema:ScholarlyArticle
102 N06c0de68e4c446c7988c73efb8127c55 rdf:first sg:person.010725431763.59
103 rdf:rest N0f925582a1994fe3b644d290232f2791
104 N0f925582a1994fe3b644d290232f2791 rdf:first sg:person.01275733427.02
105 rdf:rest rdf:nil
106 N1ac842909e164e5c94827541313c2be8 schema:name Springer Nature - SN SciGraph project
107 rdf:type schema:Organization
108 N2cda87b8c47a4aefbc09c7d1f55d4cb0 schema:name pubmed_id
109 schema:value 23324447
110 rdf:type schema:PropertyValue
111 N4a8baa705717477d8e9469e0e8038121 schema:issueNumber 1
112 rdf:type schema:PublicationIssue
113 N4be534e8387b489fa9820ac70da65587 rdf:first sg:person.01055335234.41
114 rdf:rest Na0d9c964992744caaed4f956cf7173bf
115 N56f5564bda59484c972881e84c17253e rdf:first sg:person.01113371627.34
116 rdf:rest N760f5be1fbfa44d3beb69439a40e94d0
117 N760f5be1fbfa44d3beb69439a40e94d0 rdf:first sg:person.0771525660.41
118 rdf:rest N06c0de68e4c446c7988c73efb8127c55
119 N7d5ea6d039b94a01a5794389681cc5ce schema:name dimensions_id
120 schema:value pub.1007109831
121 rdf:type schema:PropertyValue
122 Na0d9c964992744caaed4f956cf7173bf rdf:first sg:person.0731030027.13
123 rdf:rest N56f5564bda59484c972881e84c17253e
124 Ncbb171a226d4406da480eb0e7112c8f4 schema:name doi
125 schema:value 10.1186/1556-276x-8-31
126 rdf:type schema:PropertyValue
127 Ndb4d0c2bdf7f4be09e342fa1f7128d85 schema:volumeNumber 8
128 rdf:type schema:PublicationVolume
129 anzsrc-for:09 schema:inDefinedTermSet anzsrc-for:
130 schema:name Engineering
131 rdf:type schema:DefinedTerm
132 anzsrc-for:0912 schema:inDefinedTermSet anzsrc-for:
133 schema:name Materials Engineering
134 rdf:type schema:DefinedTerm
135 sg:journal.1037280 schema:issn 1556-276X
136 1931-7573
137 schema:name Nanoscale Research Letters
138 schema:publisher Springer Nature
139 rdf:type schema:Periodical
140 sg:person.01055335234.41 schema:affiliation grid-institutes:grid.462794.a
141 schema:familyName Debieu
142 schema:givenName Olivier
143 schema:sameAs https://app.dimensions.ai/discover/publication?and_facet_researcher=ur.01055335234.41
144 rdf:type schema:Person
145 sg:person.010725431763.59 schema:affiliation grid-institutes:grid.410511.0
146 schema:familyName Perrière
147 schema:givenName Jacques
148 schema:sameAs https://app.dimensions.ai/discover/publication?and_facet_researcher=ur.010725431763.59
149 rdf:type schema:Person
150 sg:person.01113371627.34 schema:affiliation grid-institutes:grid.462794.a
151 schema:familyName Cardin
152 schema:givenName Julien
153 schema:sameAs https://app.dimensions.ai/discover/publication?and_facet_researcher=ur.01113371627.34
154 rdf:type schema:Person
155 sg:person.01275733427.02 schema:affiliation grid-institutes:grid.462794.a
156 schema:familyName Gourbilleau
157 schema:givenName Fabrice
158 schema:sameAs https://app.dimensions.ai/discover/publication?and_facet_researcher=ur.01275733427.02
159 rdf:type schema:Person
160 sg:person.0731030027.13 schema:affiliation grid-institutes:grid.462794.a
161 schema:familyName Nalini
162 schema:givenName Ramesh Pratibha
163 schema:sameAs https://app.dimensions.ai/discover/publication?and_facet_researcher=ur.0731030027.13
164 rdf:type schema:Person
165 sg:person.0771525660.41 schema:affiliation grid-institutes:grid.462794.a
166 schema:familyName Portier
167 schema:givenName Xavier
168 schema:sameAs https://app.dimensions.ai/discover/publication?and_facet_researcher=ur.0771525660.41
169 rdf:type schema:Person
170 sg:pub.10.1186/1556-276x-6-178 schema:sameAs https://app.dimensions.ai/details/publication/pub.1052921472
171 https://doi.org/10.1186/1556-276x-6-178
172 rdf:type schema:CreativeWork
173 sg:pub.10.1186/1556-276x-7-124 schema:sameAs https://app.dimensions.ai/details/publication/pub.1012585318
174 https://doi.org/10.1186/1556-276x-7-124
175 rdf:type schema:CreativeWork
176 grid-institutes:grid.410511.0 schema:alternateName UNIV PARIS 06, INSP NANOSCIENCE PARIS CNRS, UMR 7588, 75015, Paris, France
177 schema:name UNIV PARIS 06, INSP NANOSCIENCE PARIS CNRS, UMR 7588, 75015, Paris, France
178 rdf:type schema:Organization
179 grid-institutes:grid.462794.a schema:alternateName CIMAP, UMR 6252 CNRS-ENSICAEN-CEA-UCBN, Ensicaen, 6 Bd Maréchal Juin, 14050 Caen, cedex 4, France
180 schema:name CIMAP, UMR 6252 CNRS-ENSICAEN-CEA-UCBN, Ensicaen, 6 Bd Maréchal Juin, 14050 Caen, cedex 4, France
181 rdf:type schema:Organization
 




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