SiOx/SiNy multilayers for photovoltaic and photonic applications View Full Text


Ontology type: schema:ScholarlyArticle      Open Access: True


Article Info

DATE

2012-02-14

AUTHORS

Ramesh Pratibha Nalini, Larysa Khomenkova, Olivier Debieu, Julien Cardin, Christian Dufour, Marzia Carrada, Fabrice Gourbilleau

ABSTRACT

Microstructural, electrical, and optical properties of undoped and Nd3+-doped SiOx/SiNy multilayers fabricated by reactive radio frequency magnetron co-sputtering have been investigated with regard to thermal treatment. This letter demonstrates the advantages of using SiNy as the alternating sublayer instead of SiO2. A high density of silicon nanoclusters of the order 1019 nc/cm3 is achieved in the SiOx sublayers. Enhanced conductivity, emission, and absorption are attained at low thermal budget, which are promising for photovoltaic applications. Furthermore, the enhancement of Nd3+ emission in these multilayers in comparison with the SiOx/SiO2 counterparts offers promising future photonic applications.PACS: 88.40.fh (Advanced materials development), 81.15.cd (Deposition by sputtering), 78.67.bf (Nanocrystals, nanoparticles, and nanoclusters). More... »

PAGES

124

References to SciGraph publications

  • 2000-11. Optical gain in silicon nanocrystals in NATURE
  • 2011-02-18. New Si-based multilayers for solar cell applications in NANOSCALE RESEARCH LETTERS
  • Identifiers

    URI

    http://scigraph.springernature.com/pub.10.1186/1556-276x-7-124

    DOI

    http://dx.doi.org/10.1186/1556-276x-7-124

    DIMENSIONS

    https://app.dimensions.ai/details/publication/pub.1012585318

    PUBMED

    https://www.ncbi.nlm.nih.gov/pubmed/22333343


    Indexing Status Check whether this publication has been indexed by Scopus and Web Of Science using the SN Indexing Status Tool
    Incoming Citations Browse incoming citations for this publication using opencitations.net

    JSON-LD is the canonical representation for SciGraph data.

    TIP: You can open this SciGraph record using an external JSON-LD service: JSON-LD Playground Google SDTT

    [
      {
        "@context": "https://springernature.github.io/scigraph/jsonld/sgcontext.json", 
        "about": [
          {
            "id": "http://purl.org/au-research/vocabulary/anzsrc-for/2008/09", 
            "inDefinedTermSet": "http://purl.org/au-research/vocabulary/anzsrc-for/2008/", 
            "name": "Engineering", 
            "type": "DefinedTerm"
          }, 
          {
            "id": "http://purl.org/au-research/vocabulary/anzsrc-for/2008/0912", 
            "inDefinedTermSet": "http://purl.org/au-research/vocabulary/anzsrc-for/2008/", 
            "name": "Materials Engineering", 
            "type": "DefinedTerm"
          }
        ], 
        "author": [
          {
            "affiliation": {
              "alternateName": "CIMAP UMR CNRS/CEA/ENSICAEN/UCBN, 6 Bd. Mar\u00e9chal Juin, 14050Caen Cedex 4, France", 
              "id": "http://www.grid.ac/institutes/None", 
              "name": [
                "CIMAP UMR CNRS/CEA/ENSICAEN/UCBN, 6 Bd. Mar\u00e9chal Juin, 14050Caen Cedex 4, France"
              ], 
              "type": "Organization"
            }, 
            "familyName": "Nalini", 
            "givenName": "Ramesh Pratibha", 
            "id": "sg:person.0731030027.13", 
            "sameAs": [
              "https://app.dimensions.ai/discover/publication?and_facet_researcher=ur.0731030027.13"
            ], 
            "type": "Person"
          }, 
          {
            "affiliation": {
              "alternateName": "CIMAP UMR CNRS/CEA/ENSICAEN/UCBN, 6 Bd. Mar\u00e9chal Juin, 14050Caen Cedex 4, France", 
              "id": "http://www.grid.ac/institutes/None", 
              "name": [
                "CIMAP UMR CNRS/CEA/ENSICAEN/UCBN, 6 Bd. Mar\u00e9chal Juin, 14050Caen Cedex 4, France"
              ], 
              "type": "Organization"
            }, 
            "familyName": "Khomenkova", 
            "givenName": "Larysa", 
            "id": "sg:person.0777143227.34", 
            "sameAs": [
              "https://app.dimensions.ai/discover/publication?and_facet_researcher=ur.0777143227.34"
            ], 
            "type": "Person"
          }, 
          {
            "affiliation": {
              "alternateName": "CIMAP UMR CNRS/CEA/ENSICAEN/UCBN, 6 Bd. Mar\u00e9chal Juin, 14050Caen Cedex 4, France", 
              "id": "http://www.grid.ac/institutes/None", 
              "name": [
                "CIMAP UMR CNRS/CEA/ENSICAEN/UCBN, 6 Bd. Mar\u00e9chal Juin, 14050Caen Cedex 4, France"
              ], 
              "type": "Organization"
            }, 
            "familyName": "Debieu", 
            "givenName": "Olivier", 
            "id": "sg:person.01055335234.41", 
            "sameAs": [
              "https://app.dimensions.ai/discover/publication?and_facet_researcher=ur.01055335234.41"
            ], 
            "type": "Person"
          }, 
          {
            "affiliation": {
              "alternateName": "CIMAP UMR CNRS/CEA/ENSICAEN/UCBN, 6 Bd. Mar\u00e9chal Juin, 14050Caen Cedex 4, France", 
              "id": "http://www.grid.ac/institutes/None", 
              "name": [
                "CIMAP UMR CNRS/CEA/ENSICAEN/UCBN, 6 Bd. Mar\u00e9chal Juin, 14050Caen Cedex 4, France"
              ], 
              "type": "Organization"
            }, 
            "familyName": "Cardin", 
            "givenName": "Julien", 
            "id": "sg:person.01113371627.34", 
            "sameAs": [
              "https://app.dimensions.ai/discover/publication?and_facet_researcher=ur.01113371627.34"
            ], 
            "type": "Person"
          }, 
          {
            "affiliation": {
              "alternateName": "CIMAP UMR CNRS/CEA/ENSICAEN/UCBN, 6 Bd. Mar\u00e9chal Juin, 14050Caen Cedex 4, France", 
              "id": "http://www.grid.ac/institutes/None", 
              "name": [
                "CIMAP UMR CNRS/CEA/ENSICAEN/UCBN, 6 Bd. Mar\u00e9chal Juin, 14050Caen Cedex 4, France"
              ], 
              "type": "Organization"
            }, 
            "familyName": "Dufour", 
            "givenName": "Christian", 
            "id": "sg:person.01161505027.20", 
            "sameAs": [
              "https://app.dimensions.ai/discover/publication?and_facet_researcher=ur.01161505027.20"
            ], 
            "type": "Person"
          }, 
          {
            "affiliation": {
              "alternateName": "CEMES/CNRS, 29 rue J. Marvig, 31055, Toulouse, France", 
              "id": "http://www.grid.ac/institutes/grid.462730.4", 
              "name": [
                "CEMES/CNRS, 29 rue J. Marvig, 31055, Toulouse, France"
              ], 
              "type": "Organization"
            }, 
            "familyName": "Carrada", 
            "givenName": "Marzia", 
            "id": "sg:person.0606262334.49", 
            "sameAs": [
              "https://app.dimensions.ai/discover/publication?and_facet_researcher=ur.0606262334.49"
            ], 
            "type": "Person"
          }, 
          {
            "affiliation": {
              "alternateName": "CIMAP UMR CNRS/CEA/ENSICAEN/UCBN, 6 Bd. Mar\u00e9chal Juin, 14050Caen Cedex 4, France", 
              "id": "http://www.grid.ac/institutes/None", 
              "name": [
                "CIMAP UMR CNRS/CEA/ENSICAEN/UCBN, 6 Bd. Mar\u00e9chal Juin, 14050Caen Cedex 4, France"
              ], 
              "type": "Organization"
            }, 
            "familyName": "Gourbilleau", 
            "givenName": "Fabrice", 
            "id": "sg:person.01275733427.02", 
            "sameAs": [
              "https://app.dimensions.ai/discover/publication?and_facet_researcher=ur.01275733427.02"
            ], 
            "type": "Person"
          }
        ], 
        "citation": [
          {
            "id": "sg:pub.10.1186/1556-276x-6-156", 
            "sameAs": [
              "https://app.dimensions.ai/details/publication/pub.1022381394", 
              "https://doi.org/10.1186/1556-276x-6-156"
            ], 
            "type": "CreativeWork"
          }, 
          {
            "id": "sg:pub.10.1038/35044012", 
            "sameAs": [
              "https://app.dimensions.ai/details/publication/pub.1047554794", 
              "https://doi.org/10.1038/35044012"
            ], 
            "type": "CreativeWork"
          }
        ], 
        "datePublished": "2012-02-14", 
        "datePublishedReg": "2012-02-14", 
        "description": "Microstructural, electrical, and optical properties of undoped and Nd3+-doped SiOx/SiNy multilayers fabricated by reactive radio frequency magnetron co-sputtering have been investigated with regard to thermal treatment. This letter demonstrates the advantages of using SiNy as the alternating sublayer instead of SiO2. A high density of silicon nanoclusters of the order 1019 nc/cm3 is achieved in the SiOx sublayers. Enhanced conductivity, emission, and absorption are attained at low thermal budget, which are promising for photovoltaic applications. Furthermore, the enhancement of Nd3+ emission in these multilayers in comparison with the SiOx/SiO2 counterparts offers promising future photonic applications.PACS: 88.40.fh (Advanced materials development), 81.15.cd (Deposition by sputtering), 78.67.bf (Nanocrystals, nanoparticles, and nanoclusters).", 
        "genre": "article", 
        "id": "sg:pub.10.1186/1556-276x-7-124", 
        "isAccessibleForFree": true, 
        "isPartOf": [
          {
            "id": "sg:journal.1037280", 
            "issn": [
              "1931-7573", 
              "1556-276X"
            ], 
            "name": "Nanoscale Research Letters", 
            "publisher": "Springer Nature", 
            "type": "Periodical"
          }, 
          {
            "issueNumber": "1", 
            "type": "PublicationIssue"
          }, 
          {
            "type": "PublicationVolume", 
            "volumeNumber": "7"
          }
        ], 
        "keywords": [
          "photonic applications", 
          "radio frequency magnetron co", 
          "low thermal budget", 
          "future photonic applications", 
          "SiO2 counterparts", 
          "thermal budget", 
          "magnetron co", 
          "photovoltaic applications", 
          "optical properties", 
          "silicon nanoclusters", 
          "thermal treatment", 
          "enhanced conductivity", 
          "multilayers", 
          "sublayer", 
          "Nd3", 
          "emission", 
          "SiNy", 
          "high density", 
          "photovoltaics", 
          "applications", 
          "conductivity", 
          "SiO2", 
          "absorption", 
          "nanoclusters", 
          "cm3", 
          "properties", 
          "density", 
          "CO", 
          "enhancement", 
          "advantages", 
          "letter", 
          "comparison", 
          "Cd", 
          "budget", 
          "counterparts", 
          "BF", 
          "regard", 
          "treatment"
        ], 
        "name": "SiOx/SiNy multilayers for photovoltaic and photonic applications", 
        "pagination": "124", 
        "productId": [
          {
            "name": "dimensions_id", 
            "type": "PropertyValue", 
            "value": [
              "pub.1012585318"
            ]
          }, 
          {
            "name": "doi", 
            "type": "PropertyValue", 
            "value": [
              "10.1186/1556-276x-7-124"
            ]
          }, 
          {
            "name": "pubmed_id", 
            "type": "PropertyValue", 
            "value": [
              "22333343"
            ]
          }
        ], 
        "sameAs": [
          "https://doi.org/10.1186/1556-276x-7-124", 
          "https://app.dimensions.ai/details/publication/pub.1012585318"
        ], 
        "sdDataset": "articles", 
        "sdDatePublished": "2022-10-01T06:38", 
        "sdLicense": "https://scigraph.springernature.com/explorer/license/", 
        "sdPublisher": {
          "name": "Springer Nature - SN SciGraph project", 
          "type": "Organization"
        }, 
        "sdSource": "s3://com-springernature-scigraph/baseset/20221001/entities/gbq_results/article/article_576.jsonl", 
        "type": "ScholarlyArticle", 
        "url": "https://doi.org/10.1186/1556-276x-7-124"
      }
    ]
     

    Download the RDF metadata as:  json-ld nt turtle xml License info

    HOW TO GET THIS DATA PROGRAMMATICALLY:

    JSON-LD is a popular format for linked data which is fully compatible with JSON.

    curl -H 'Accept: application/ld+json' 'https://scigraph.springernature.com/pub.10.1186/1556-276x-7-124'

    N-Triples is a line-based linked data format ideal for batch operations.

    curl -H 'Accept: application/n-triples' 'https://scigraph.springernature.com/pub.10.1186/1556-276x-7-124'

    Turtle is a human-readable linked data format.

    curl -H 'Accept: text/turtle' 'https://scigraph.springernature.com/pub.10.1186/1556-276x-7-124'

    RDF/XML is a standard XML format for linked data.

    curl -H 'Accept: application/rdf+xml' 'https://scigraph.springernature.com/pub.10.1186/1556-276x-7-124'


     

    This table displays all metadata directly associated to this object as RDF triples.

    152 TRIPLES      21 PREDICATES      65 URIs      55 LITERALS      7 BLANK NODES

    Subject Predicate Object
    1 sg:pub.10.1186/1556-276x-7-124 schema:about anzsrc-for:09
    2 anzsrc-for:0912
    3 schema:author N9459972119ab4d7f9a52bd634913771a
    4 schema:citation sg:pub.10.1038/35044012
    5 sg:pub.10.1186/1556-276x-6-156
    6 schema:datePublished 2012-02-14
    7 schema:datePublishedReg 2012-02-14
    8 schema:description Microstructural, electrical, and optical properties of undoped and Nd3+-doped SiOx/SiNy multilayers fabricated by reactive radio frequency magnetron co-sputtering have been investigated with regard to thermal treatment. This letter demonstrates the advantages of using SiNy as the alternating sublayer instead of SiO2. A high density of silicon nanoclusters of the order 1019 nc/cm3 is achieved in the SiOx sublayers. Enhanced conductivity, emission, and absorption are attained at low thermal budget, which are promising for photovoltaic applications. Furthermore, the enhancement of Nd3+ emission in these multilayers in comparison with the SiOx/SiO2 counterparts offers promising future photonic applications.PACS: 88.40.fh (Advanced materials development), 81.15.cd (Deposition by sputtering), 78.67.bf (Nanocrystals, nanoparticles, and nanoclusters).
    9 schema:genre article
    10 schema:isAccessibleForFree true
    11 schema:isPartOf N2d07c48b7cf641f78ae78119e412d48e
    12 N91d2dd921b074ffca2c2d0a3b058596e
    13 sg:journal.1037280
    14 schema:keywords BF
    15 CO
    16 Cd
    17 Nd3
    18 SiNy
    19 SiO2
    20 SiO2 counterparts
    21 absorption
    22 advantages
    23 applications
    24 budget
    25 cm3
    26 comparison
    27 conductivity
    28 counterparts
    29 density
    30 emission
    31 enhanced conductivity
    32 enhancement
    33 future photonic applications
    34 high density
    35 letter
    36 low thermal budget
    37 magnetron co
    38 multilayers
    39 nanoclusters
    40 optical properties
    41 photonic applications
    42 photovoltaic applications
    43 photovoltaics
    44 properties
    45 radio frequency magnetron co
    46 regard
    47 silicon nanoclusters
    48 sublayer
    49 thermal budget
    50 thermal treatment
    51 treatment
    52 schema:name SiOx/SiNy multilayers for photovoltaic and photonic applications
    53 schema:pagination 124
    54 schema:productId N65d8849726c54b5bbf29ef2999f0c507
    55 N6f9d649086624c97a493c64d56992f7e
    56 Nee647d0e03054c2cb593a1497b65a424
    57 schema:sameAs https://app.dimensions.ai/details/publication/pub.1012585318
    58 https://doi.org/10.1186/1556-276x-7-124
    59 schema:sdDatePublished 2022-10-01T06:38
    60 schema:sdLicense https://scigraph.springernature.com/explorer/license/
    61 schema:sdPublisher N716c6a2659be470a822f06985d4b5d5b
    62 schema:url https://doi.org/10.1186/1556-276x-7-124
    63 sgo:license sg:explorer/license/
    64 sgo:sdDataset articles
    65 rdf:type schema:ScholarlyArticle
    66 N06543cd5526b4d35aaace78dd200254a rdf:first sg:person.01055335234.41
    67 rdf:rest N12ce3740ab414d80ba4be7095cd22c47
    68 N12ce3740ab414d80ba4be7095cd22c47 rdf:first sg:person.01113371627.34
    69 rdf:rest N244b1d75c4ea471e8d7b846b9cf05e67
    70 N244b1d75c4ea471e8d7b846b9cf05e67 rdf:first sg:person.01161505027.20
    71 rdf:rest N9a387eabb4fb449695e1ff1b2c91fb49
    72 N2d07c48b7cf641f78ae78119e412d48e schema:issueNumber 1
    73 rdf:type schema:PublicationIssue
    74 N5858d32e7d32454a9a464da43fd58bd2 rdf:first sg:person.0777143227.34
    75 rdf:rest N06543cd5526b4d35aaace78dd200254a
    76 N65d8849726c54b5bbf29ef2999f0c507 schema:name doi
    77 schema:value 10.1186/1556-276x-7-124
    78 rdf:type schema:PropertyValue
    79 N6f9d649086624c97a493c64d56992f7e schema:name pubmed_id
    80 schema:value 22333343
    81 rdf:type schema:PropertyValue
    82 N716c6a2659be470a822f06985d4b5d5b schema:name Springer Nature - SN SciGraph project
    83 rdf:type schema:Organization
    84 N91d2dd921b074ffca2c2d0a3b058596e schema:volumeNumber 7
    85 rdf:type schema:PublicationVolume
    86 N9459972119ab4d7f9a52bd634913771a rdf:first sg:person.0731030027.13
    87 rdf:rest N5858d32e7d32454a9a464da43fd58bd2
    88 N9a387eabb4fb449695e1ff1b2c91fb49 rdf:first sg:person.0606262334.49
    89 rdf:rest Nd1bc86277e3a49108ffe6ce4865bc01a
    90 Nd1bc86277e3a49108ffe6ce4865bc01a rdf:first sg:person.01275733427.02
    91 rdf:rest rdf:nil
    92 Nee647d0e03054c2cb593a1497b65a424 schema:name dimensions_id
    93 schema:value pub.1012585318
    94 rdf:type schema:PropertyValue
    95 anzsrc-for:09 schema:inDefinedTermSet anzsrc-for:
    96 schema:name Engineering
    97 rdf:type schema:DefinedTerm
    98 anzsrc-for:0912 schema:inDefinedTermSet anzsrc-for:
    99 schema:name Materials Engineering
    100 rdf:type schema:DefinedTerm
    101 sg:journal.1037280 schema:issn 1556-276X
    102 1931-7573
    103 schema:name Nanoscale Research Letters
    104 schema:publisher Springer Nature
    105 rdf:type schema:Periodical
    106 sg:person.01055335234.41 schema:affiliation grid-institutes:None
    107 schema:familyName Debieu
    108 schema:givenName Olivier
    109 schema:sameAs https://app.dimensions.ai/discover/publication?and_facet_researcher=ur.01055335234.41
    110 rdf:type schema:Person
    111 sg:person.01113371627.34 schema:affiliation grid-institutes:None
    112 schema:familyName Cardin
    113 schema:givenName Julien
    114 schema:sameAs https://app.dimensions.ai/discover/publication?and_facet_researcher=ur.01113371627.34
    115 rdf:type schema:Person
    116 sg:person.01161505027.20 schema:affiliation grid-institutes:None
    117 schema:familyName Dufour
    118 schema:givenName Christian
    119 schema:sameAs https://app.dimensions.ai/discover/publication?and_facet_researcher=ur.01161505027.20
    120 rdf:type schema:Person
    121 sg:person.01275733427.02 schema:affiliation grid-institutes:None
    122 schema:familyName Gourbilleau
    123 schema:givenName Fabrice
    124 schema:sameAs https://app.dimensions.ai/discover/publication?and_facet_researcher=ur.01275733427.02
    125 rdf:type schema:Person
    126 sg:person.0606262334.49 schema:affiliation grid-institutes:grid.462730.4
    127 schema:familyName Carrada
    128 schema:givenName Marzia
    129 schema:sameAs https://app.dimensions.ai/discover/publication?and_facet_researcher=ur.0606262334.49
    130 rdf:type schema:Person
    131 sg:person.0731030027.13 schema:affiliation grid-institutes:None
    132 schema:familyName Nalini
    133 schema:givenName Ramesh Pratibha
    134 schema:sameAs https://app.dimensions.ai/discover/publication?and_facet_researcher=ur.0731030027.13
    135 rdf:type schema:Person
    136 sg:person.0777143227.34 schema:affiliation grid-institutes:None
    137 schema:familyName Khomenkova
    138 schema:givenName Larysa
    139 schema:sameAs https://app.dimensions.ai/discover/publication?and_facet_researcher=ur.0777143227.34
    140 rdf:type schema:Person
    141 sg:pub.10.1038/35044012 schema:sameAs https://app.dimensions.ai/details/publication/pub.1047554794
    142 https://doi.org/10.1038/35044012
    143 rdf:type schema:CreativeWork
    144 sg:pub.10.1186/1556-276x-6-156 schema:sameAs https://app.dimensions.ai/details/publication/pub.1022381394
    145 https://doi.org/10.1186/1556-276x-6-156
    146 rdf:type schema:CreativeWork
    147 grid-institutes:None schema:alternateName CIMAP UMR CNRS/CEA/ENSICAEN/UCBN, 6 Bd. Maréchal Juin, 14050Caen Cedex 4, France
    148 schema:name CIMAP UMR CNRS/CEA/ENSICAEN/UCBN, 6 Bd. Maréchal Juin, 14050Caen Cedex 4, France
    149 rdf:type schema:Organization
    150 grid-institutes:grid.462730.4 schema:alternateName CEMES/CNRS, 29 rue J. Marvig, 31055, Toulouse, France
    151 schema:name CEMES/CNRS, 29 rue J. Marvig, 31055, Toulouse, France
    152 rdf:type schema:Organization
     




    Preview window. Press ESC to close (or click here)


    ...