Iridium wire grid polarizer fabricated using atomic layer deposition View Full Text


Ontology type: schema:ScholarlyArticle      Open Access: True


Article Info

DATE

2011-12

AUTHORS

Thomas Weber, Thomas Käsebier, Adriana Szeghalmi, Mato Knez, Ernst-Bernhard Kley, Andreas Tünnermann

ABSTRACT

In this work, an effective multistep process toward fabrication of an iridium wire grid polarizer for UV applications involving a frequency doubling process based on ultrafast electron beam lithography and atomic layer deposition is presented. The choice of iridium as grating material is based on its good optical properties and a superior oxidation resistance. Furthermore, atomic layer deposition of iridium allows a precise adjustment of the structural parameters of the grating much better than other deposition techniques like sputtering for example. At the target wavelength of 250 nm, a transmission of about 45% and an extinction ratio of 87 are achieved. More... »

PAGES

558

Identifiers

URI

http://scigraph.springernature.com/pub.10.1186/1556-276x-6-558

DOI

http://dx.doi.org/10.1186/1556-276x-6-558

DIMENSIONS

https://app.dimensions.ai/details/publication/pub.1037723983

PUBMED

https://www.ncbi.nlm.nih.gov/pubmed/22023700


Indexing Status Check whether this publication has been indexed by Scopus and Web Of Science using the SN Indexing Status Tool
Incoming Citations Browse incoming citations for this publication using opencitations.net

JSON-LD is the canonical representation for SciGraph data.

TIP: You can open this SciGraph record using an external JSON-LD service: JSON-LD Playground Google SDTT

[
  {
    "@context": "https://springernature.github.io/scigraph/jsonld/sgcontext.json", 
    "about": [
      {
        "id": "http://purl.org/au-research/vocabulary/anzsrc-for/2008/0202", 
        "inDefinedTermSet": "http://purl.org/au-research/vocabulary/anzsrc-for/2008/", 
        "name": "Atomic, Molecular, Nuclear, Particle and Plasma Physics", 
        "type": "DefinedTerm"
      }, 
      {
        "id": "http://purl.org/au-research/vocabulary/anzsrc-for/2008/02", 
        "inDefinedTermSet": "http://purl.org/au-research/vocabulary/anzsrc-for/2008/", 
        "name": "Physical Sciences", 
        "type": "DefinedTerm"
      }
    ], 
    "author": [
      {
        "affiliation": {
          "alternateName": "Friedrich Schiller University Jena", 
          "id": "https://www.grid.ac/institutes/grid.9613.d", 
          "name": [
            "Friedrich-Schiller-University Jena, Institute of Applied Physics, Max-Wien-Platz 1, 07749, Jena, Germany"
          ], 
          "type": "Organization"
        }, 
        "familyName": "Weber", 
        "givenName": "Thomas", 
        "id": "sg:person.0706520571.37", 
        "sameAs": [
          "https://app.dimensions.ai/discover/publication?and_facet_researcher=ur.0706520571.37"
        ], 
        "type": "Person"
      }, 
      {
        "affiliation": {
          "alternateName": "Friedrich Schiller University Jena", 
          "id": "https://www.grid.ac/institutes/grid.9613.d", 
          "name": [
            "Friedrich-Schiller-University Jena, Institute of Applied Physics, Max-Wien-Platz 1, 07749, Jena, Germany"
          ], 
          "type": "Organization"
        }, 
        "familyName": "K\u00e4sebier", 
        "givenName": "Thomas", 
        "id": "sg:person.01102255221.26", 
        "sameAs": [
          "https://app.dimensions.ai/discover/publication?and_facet_researcher=ur.01102255221.26"
        ], 
        "type": "Person"
      }, 
      {
        "affiliation": {
          "alternateName": "Max Planck Institute of Microstructure Physics", 
          "id": "https://www.grid.ac/institutes/grid.450270.4", 
          "name": [
            "Friedrich-Schiller-University Jena, Institute of Applied Physics, Max-Wien-Platz 1, 07749, Jena, Germany", 
            "Max-Planck-Institute of Microstructure Physics, Weinberg 2, 06120, Halle, Germany"
          ], 
          "type": "Organization"
        }, 
        "familyName": "Szeghalmi", 
        "givenName": "Adriana", 
        "id": "sg:person.0613260051.58", 
        "sameAs": [
          "https://app.dimensions.ai/discover/publication?and_facet_researcher=ur.0613260051.58"
        ], 
        "type": "Person"
      }, 
      {
        "affiliation": {
          "alternateName": "Max Planck Institute of Microstructure Physics", 
          "id": "https://www.grid.ac/institutes/grid.450270.4", 
          "name": [
            "Max-Planck-Institute of Microstructure Physics, Weinberg 2, 06120, Halle, Germany"
          ], 
          "type": "Organization"
        }, 
        "familyName": "Knez", 
        "givenName": "Mato", 
        "id": "sg:person.0735706320.80", 
        "sameAs": [
          "https://app.dimensions.ai/discover/publication?and_facet_researcher=ur.0735706320.80"
        ], 
        "type": "Person"
      }, 
      {
        "affiliation": {
          "alternateName": "Friedrich Schiller University Jena", 
          "id": "https://www.grid.ac/institutes/grid.9613.d", 
          "name": [
            "Friedrich-Schiller-University Jena, Institute of Applied Physics, Max-Wien-Platz 1, 07749, Jena, Germany"
          ], 
          "type": "Organization"
        }, 
        "familyName": "Kley", 
        "givenName": "Ernst-Bernhard", 
        "id": "sg:person.01261754731.24", 
        "sameAs": [
          "https://app.dimensions.ai/discover/publication?and_facet_researcher=ur.01261754731.24"
        ], 
        "type": "Person"
      }, 
      {
        "affiliation": {
          "alternateName": "Fraunhofer Institute for Applied Optics and Precision Engineering", 
          "id": "https://www.grid.ac/institutes/grid.418007.a", 
          "name": [
            "Friedrich-Schiller-University Jena, Institute of Applied Physics, Max-Wien-Platz 1, 07749, Jena, Germany", 
            "Fraunhofer Institute for Applied Optics and Precision Engineering, Albert-Einstein-Stra\u00dfe 7, 07745, Jena, Germany"
          ], 
          "type": "Organization"
        }, 
        "familyName": "T\u00fcnnermann", 
        "givenName": "Andreas", 
        "id": "sg:person.0577721111.73", 
        "sameAs": [
          "https://app.dimensions.ai/discover/publication?and_facet_researcher=ur.0577721111.73"
        ], 
        "type": "Person"
      }
    ], 
    "citation": [
      {
        "id": "https://doi.org/10.1088/0957-4484/16/9/076", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1013567698"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "https://doi.org/10.1117/1.602257", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1015715759"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "https://doi.org/10.1021/nn102879s", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1024079719"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "https://doi.org/10.1117/12.807993", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1029832311"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "https://doi.org/10.1016/j.mee.2006.11.013", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1045621378"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "https://doi.org/10.1002/smll.201000169", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1047416312"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "https://doi.org/10.1002/smll.201000169", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1047416312"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "https://doi.org/10.1063/1.1404425", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1057703267"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "https://doi.org/10.1063/1.2358813", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1057852194"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "https://doi.org/10.1063/1.2437731", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1057857510"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "https://doi.org/10.1063/1.2472532", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1057857740"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "https://doi.org/10.1103/physrevlett.99.264801", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1060835094"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "https://doi.org/10.1103/physrevlett.99.264801", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1060835094"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "https://doi.org/10.1149/1.1761011", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1063188553"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "https://doi.org/10.1364/josa.50.000886", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1065147376"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "https://doi.org/10.1364/oe.15.010744", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1065185890"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "https://doi.org/10.1364/ol.22.000419", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1065217271"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "https://doi.org/10.1364/ol.34.000274", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1065226792"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "https://doi.org/10.1364/ol.36.000445", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1065229709"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "https://doi.org/10.1364/opex.13.002303", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1065243856"
        ], 
        "type": "CreativeWork"
      }
    ], 
    "datePublished": "2011-12", 
    "datePublishedReg": "2011-12-01", 
    "description": " In this work, an effective multistep process toward fabrication of an iridium wire grid polarizer for UV applications involving a frequency doubling process based on ultrafast electron beam lithography and atomic layer deposition is presented. The choice of iridium as grating material is based on its good optical properties and a superior oxidation resistance. Furthermore, atomic layer deposition of iridium allows a precise adjustment of the structural parameters of the grating much better than other deposition techniques like sputtering for example. At the target wavelength of 250 nm, a transmission of about 45% and an extinction ratio of 87 are achieved.", 
    "genre": "research_article", 
    "id": "sg:pub.10.1186/1556-276x-6-558", 
    "inLanguage": [
      "en"
    ], 
    "isAccessibleForFree": true, 
    "isPartOf": [
      {
        "id": "sg:journal.1037280", 
        "issn": [
          "1931-7573", 
          "1556-276X"
        ], 
        "name": "Nanoscale Research Letters", 
        "type": "Periodical"
      }, 
      {
        "issueNumber": "1", 
        "type": "PublicationIssue"
      }, 
      {
        "type": "PublicationVolume", 
        "volumeNumber": "6"
      }
    ], 
    "name": "Iridium wire grid polarizer fabricated using atomic layer deposition", 
    "pagination": "558", 
    "productId": [
      {
        "name": "readcube_id", 
        "type": "PropertyValue", 
        "value": [
          "b3b45634b33200c48a7ed285a121e75be05cd5719867adc565b7f7ca63aeaaeb"
        ]
      }, 
      {
        "name": "pubmed_id", 
        "type": "PropertyValue", 
        "value": [
          "22023700"
        ]
      }, 
      {
        "name": "nlm_unique_id", 
        "type": "PropertyValue", 
        "value": [
          "101279750"
        ]
      }, 
      {
        "name": "doi", 
        "type": "PropertyValue", 
        "value": [
          "10.1186/1556-276x-6-558"
        ]
      }, 
      {
        "name": "dimensions_id", 
        "type": "PropertyValue", 
        "value": [
          "pub.1037723983"
        ]
      }
    ], 
    "sameAs": [
      "https://doi.org/10.1186/1556-276x-6-558", 
      "https://app.dimensions.ai/details/publication/pub.1037723983"
    ], 
    "sdDataset": "articles", 
    "sdDatePublished": "2019-04-10T16:49", 
    "sdLicense": "https://scigraph.springernature.com/explorer/license/", 
    "sdPublisher": {
      "name": "Springer Nature - SN SciGraph project", 
      "type": "Organization"
    }, 
    "sdSource": "s3://com-uberresearch-data-dimensions-target-20181106-alternative/cleanup/v134/2549eaecd7973599484d7c17b260dba0a4ecb94b/merge/v9/a6c9fde33151104705d4d7ff012ea9563521a3ce/jats-lookup/v90/0000000001_0000000264/records_8669_00000550.jsonl", 
    "type": "ScholarlyArticle", 
    "url": "http://link.springer.com/10.1186%2F1556-276X-6-558"
  }
]
 

Download the RDF metadata as:  json-ld nt turtle xml License info

HOW TO GET THIS DATA PROGRAMMATICALLY:

JSON-LD is a popular format for linked data which is fully compatible with JSON.

curl -H 'Accept: application/ld+json' 'https://scigraph.springernature.com/pub.10.1186/1556-276x-6-558'

N-Triples is a line-based linked data format ideal for batch operations.

curl -H 'Accept: application/n-triples' 'https://scigraph.springernature.com/pub.10.1186/1556-276x-6-558'

Turtle is a human-readable linked data format.

curl -H 'Accept: text/turtle' 'https://scigraph.springernature.com/pub.10.1186/1556-276x-6-558'

RDF/XML is a standard XML format for linked data.

curl -H 'Accept: application/rdf+xml' 'https://scigraph.springernature.com/pub.10.1186/1556-276x-6-558'


 

This table displays all metadata directly associated to this object as RDF triples.

166 TRIPLES      21 PREDICATES      47 URIs      21 LITERALS      9 BLANK NODES

Subject Predicate Object
1 sg:pub.10.1186/1556-276x-6-558 schema:about anzsrc-for:02
2 anzsrc-for:0202
3 schema:author Naa7bbd935b4c48d6a38b175af05cec8f
4 schema:citation https://doi.org/10.1002/smll.201000169
5 https://doi.org/10.1016/j.mee.2006.11.013
6 https://doi.org/10.1021/nn102879s
7 https://doi.org/10.1063/1.1404425
8 https://doi.org/10.1063/1.2358813
9 https://doi.org/10.1063/1.2437731
10 https://doi.org/10.1063/1.2472532
11 https://doi.org/10.1088/0957-4484/16/9/076
12 https://doi.org/10.1103/physrevlett.99.264801
13 https://doi.org/10.1117/1.602257
14 https://doi.org/10.1117/12.807993
15 https://doi.org/10.1149/1.1761011
16 https://doi.org/10.1364/josa.50.000886
17 https://doi.org/10.1364/oe.15.010744
18 https://doi.org/10.1364/ol.22.000419
19 https://doi.org/10.1364/ol.34.000274
20 https://doi.org/10.1364/ol.36.000445
21 https://doi.org/10.1364/opex.13.002303
22 schema:datePublished 2011-12
23 schema:datePublishedReg 2011-12-01
24 schema:description In this work, an effective multistep process toward fabrication of an iridium wire grid polarizer for UV applications involving a frequency doubling process based on ultrafast electron beam lithography and atomic layer deposition is presented. The choice of iridium as grating material is based on its good optical properties and a superior oxidation resistance. Furthermore, atomic layer deposition of iridium allows a precise adjustment of the structural parameters of the grating much better than other deposition techniques like sputtering for example. At the target wavelength of 250 nm, a transmission of about 45% and an extinction ratio of 87 are achieved.
25 schema:genre research_article
26 schema:inLanguage en
27 schema:isAccessibleForFree true
28 schema:isPartOf N43e19db8c8b84b3489f846654b017bd8
29 N64c2aff61a6a4dcf81a797420915d7a2
30 sg:journal.1037280
31 schema:name Iridium wire grid polarizer fabricated using atomic layer deposition
32 schema:pagination 558
33 schema:productId N0eab67030b7f4ce597bc085532f3143a
34 N4714d4ae130c49bcb56bb0234a26f8f7
35 N5d52db9f832541528a80e0ce1e2d40d3
36 N7ea43b33fdf84a34ac23e240752465c9
37 N981032bae4714713b41a8ea7418908ba
38 schema:sameAs https://app.dimensions.ai/details/publication/pub.1037723983
39 https://doi.org/10.1186/1556-276x-6-558
40 schema:sdDatePublished 2019-04-10T16:49
41 schema:sdLicense https://scigraph.springernature.com/explorer/license/
42 schema:sdPublisher Ncb76c988b85e4d37a0fae81d4a11e455
43 schema:url http://link.springer.com/10.1186%2F1556-276X-6-558
44 sgo:license sg:explorer/license/
45 sgo:sdDataset articles
46 rdf:type schema:ScholarlyArticle
47 N0a7360b4225e460ab813a44fc7af5624 rdf:first sg:person.0613260051.58
48 rdf:rest Nb6e3212bb6b34ea5b4cd50ffb98a246e
49 N0eab67030b7f4ce597bc085532f3143a schema:name nlm_unique_id
50 schema:value 101279750
51 rdf:type schema:PropertyValue
52 N35152ed89c504d1b83f64e04f0cac33a rdf:first sg:person.01261754731.24
53 rdf:rest N80da54b785054ad4977aee1c14a425ff
54 N42e5bf5af57e4ba885504a55441c85fe rdf:first sg:person.01102255221.26
55 rdf:rest N0a7360b4225e460ab813a44fc7af5624
56 N43e19db8c8b84b3489f846654b017bd8 schema:volumeNumber 6
57 rdf:type schema:PublicationVolume
58 N4714d4ae130c49bcb56bb0234a26f8f7 schema:name dimensions_id
59 schema:value pub.1037723983
60 rdf:type schema:PropertyValue
61 N5d52db9f832541528a80e0ce1e2d40d3 schema:name doi
62 schema:value 10.1186/1556-276x-6-558
63 rdf:type schema:PropertyValue
64 N64c2aff61a6a4dcf81a797420915d7a2 schema:issueNumber 1
65 rdf:type schema:PublicationIssue
66 N7ea43b33fdf84a34ac23e240752465c9 schema:name readcube_id
67 schema:value b3b45634b33200c48a7ed285a121e75be05cd5719867adc565b7f7ca63aeaaeb
68 rdf:type schema:PropertyValue
69 N80da54b785054ad4977aee1c14a425ff rdf:first sg:person.0577721111.73
70 rdf:rest rdf:nil
71 N981032bae4714713b41a8ea7418908ba schema:name pubmed_id
72 schema:value 22023700
73 rdf:type schema:PropertyValue
74 Naa7bbd935b4c48d6a38b175af05cec8f rdf:first sg:person.0706520571.37
75 rdf:rest N42e5bf5af57e4ba885504a55441c85fe
76 Nb6e3212bb6b34ea5b4cd50ffb98a246e rdf:first sg:person.0735706320.80
77 rdf:rest N35152ed89c504d1b83f64e04f0cac33a
78 Ncb76c988b85e4d37a0fae81d4a11e455 schema:name Springer Nature - SN SciGraph project
79 rdf:type schema:Organization
80 anzsrc-for:02 schema:inDefinedTermSet anzsrc-for:
81 schema:name Physical Sciences
82 rdf:type schema:DefinedTerm
83 anzsrc-for:0202 schema:inDefinedTermSet anzsrc-for:
84 schema:name Atomic, Molecular, Nuclear, Particle and Plasma Physics
85 rdf:type schema:DefinedTerm
86 sg:journal.1037280 schema:issn 1556-276X
87 1931-7573
88 schema:name Nanoscale Research Letters
89 rdf:type schema:Periodical
90 sg:person.01102255221.26 schema:affiliation https://www.grid.ac/institutes/grid.9613.d
91 schema:familyName Käsebier
92 schema:givenName Thomas
93 schema:sameAs https://app.dimensions.ai/discover/publication?and_facet_researcher=ur.01102255221.26
94 rdf:type schema:Person
95 sg:person.01261754731.24 schema:affiliation https://www.grid.ac/institutes/grid.9613.d
96 schema:familyName Kley
97 schema:givenName Ernst-Bernhard
98 schema:sameAs https://app.dimensions.ai/discover/publication?and_facet_researcher=ur.01261754731.24
99 rdf:type schema:Person
100 sg:person.0577721111.73 schema:affiliation https://www.grid.ac/institutes/grid.418007.a
101 schema:familyName Tünnermann
102 schema:givenName Andreas
103 schema:sameAs https://app.dimensions.ai/discover/publication?and_facet_researcher=ur.0577721111.73
104 rdf:type schema:Person
105 sg:person.0613260051.58 schema:affiliation https://www.grid.ac/institutes/grid.450270.4
106 schema:familyName Szeghalmi
107 schema:givenName Adriana
108 schema:sameAs https://app.dimensions.ai/discover/publication?and_facet_researcher=ur.0613260051.58
109 rdf:type schema:Person
110 sg:person.0706520571.37 schema:affiliation https://www.grid.ac/institutes/grid.9613.d
111 schema:familyName Weber
112 schema:givenName Thomas
113 schema:sameAs https://app.dimensions.ai/discover/publication?and_facet_researcher=ur.0706520571.37
114 rdf:type schema:Person
115 sg:person.0735706320.80 schema:affiliation https://www.grid.ac/institutes/grid.450270.4
116 schema:familyName Knez
117 schema:givenName Mato
118 schema:sameAs https://app.dimensions.ai/discover/publication?and_facet_researcher=ur.0735706320.80
119 rdf:type schema:Person
120 https://doi.org/10.1002/smll.201000169 schema:sameAs https://app.dimensions.ai/details/publication/pub.1047416312
121 rdf:type schema:CreativeWork
122 https://doi.org/10.1016/j.mee.2006.11.013 schema:sameAs https://app.dimensions.ai/details/publication/pub.1045621378
123 rdf:type schema:CreativeWork
124 https://doi.org/10.1021/nn102879s schema:sameAs https://app.dimensions.ai/details/publication/pub.1024079719
125 rdf:type schema:CreativeWork
126 https://doi.org/10.1063/1.1404425 schema:sameAs https://app.dimensions.ai/details/publication/pub.1057703267
127 rdf:type schema:CreativeWork
128 https://doi.org/10.1063/1.2358813 schema:sameAs https://app.dimensions.ai/details/publication/pub.1057852194
129 rdf:type schema:CreativeWork
130 https://doi.org/10.1063/1.2437731 schema:sameAs https://app.dimensions.ai/details/publication/pub.1057857510
131 rdf:type schema:CreativeWork
132 https://doi.org/10.1063/1.2472532 schema:sameAs https://app.dimensions.ai/details/publication/pub.1057857740
133 rdf:type schema:CreativeWork
134 https://doi.org/10.1088/0957-4484/16/9/076 schema:sameAs https://app.dimensions.ai/details/publication/pub.1013567698
135 rdf:type schema:CreativeWork
136 https://doi.org/10.1103/physrevlett.99.264801 schema:sameAs https://app.dimensions.ai/details/publication/pub.1060835094
137 rdf:type schema:CreativeWork
138 https://doi.org/10.1117/1.602257 schema:sameAs https://app.dimensions.ai/details/publication/pub.1015715759
139 rdf:type schema:CreativeWork
140 https://doi.org/10.1117/12.807993 schema:sameAs https://app.dimensions.ai/details/publication/pub.1029832311
141 rdf:type schema:CreativeWork
142 https://doi.org/10.1149/1.1761011 schema:sameAs https://app.dimensions.ai/details/publication/pub.1063188553
143 rdf:type schema:CreativeWork
144 https://doi.org/10.1364/josa.50.000886 schema:sameAs https://app.dimensions.ai/details/publication/pub.1065147376
145 rdf:type schema:CreativeWork
146 https://doi.org/10.1364/oe.15.010744 schema:sameAs https://app.dimensions.ai/details/publication/pub.1065185890
147 rdf:type schema:CreativeWork
148 https://doi.org/10.1364/ol.22.000419 schema:sameAs https://app.dimensions.ai/details/publication/pub.1065217271
149 rdf:type schema:CreativeWork
150 https://doi.org/10.1364/ol.34.000274 schema:sameAs https://app.dimensions.ai/details/publication/pub.1065226792
151 rdf:type schema:CreativeWork
152 https://doi.org/10.1364/ol.36.000445 schema:sameAs https://app.dimensions.ai/details/publication/pub.1065229709
153 rdf:type schema:CreativeWork
154 https://doi.org/10.1364/opex.13.002303 schema:sameAs https://app.dimensions.ai/details/publication/pub.1065243856
155 rdf:type schema:CreativeWork
156 https://www.grid.ac/institutes/grid.418007.a schema:alternateName Fraunhofer Institute for Applied Optics and Precision Engineering
157 schema:name Fraunhofer Institute for Applied Optics and Precision Engineering, Albert-Einstein-Straße 7, 07745, Jena, Germany
158 Friedrich-Schiller-University Jena, Institute of Applied Physics, Max-Wien-Platz 1, 07749, Jena, Germany
159 rdf:type schema:Organization
160 https://www.grid.ac/institutes/grid.450270.4 schema:alternateName Max Planck Institute of Microstructure Physics
161 schema:name Friedrich-Schiller-University Jena, Institute of Applied Physics, Max-Wien-Platz 1, 07749, Jena, Germany
162 Max-Planck-Institute of Microstructure Physics, Weinberg 2, 06120, Halle, Germany
163 rdf:type schema:Organization
164 https://www.grid.ac/institutes/grid.9613.d schema:alternateName Friedrich Schiller University Jena
165 schema:name Friedrich-Schiller-University Jena, Institute of Applied Physics, Max-Wien-Platz 1, 07749, Jena, Germany
166 rdf:type schema:Organization
 




Preview window. Press ESC to close (or click here)


...