Fabrication of flexible UV nanoimprint mold with fluorinated polymer-coated PET film View Full Text


Ontology type: schema:ScholarlyArticle      Open Access: True


Article Info

DATE

2011-12

AUTHORS

Ju-Hyeon Shin, Seong-Hwan Lee, Kyeong-Jae Byeon, Kang-Soo Han, Heon Lee, Kentaro Tsunozaki

ABSTRACT

UV curing nanoimprint lithography is one of the most promising techniques for the fabrication of micro- to nano-sized patterns on various substrates with high throughput and a low production cost. The UV nanoimprint process requires a transparent template with micro- to nano-sized surface protrusions, having a low surface energy and good flexibility. Therefore, the development of low-cost, transparent, and flexible templates is essential. In this study, a flexible polyethylene terephthalate (PET) film coated with a fluorinated polymer material was used as an imprinting mold. Micro- and nano-sized surface protrusion patterns were formed on the fluorinated polymer layer by the hot embossing process from a Si master template. Then, the replicated pattern of the fluorinated polymer, coated on the flexible PET film, was used as a template for the UV nanoimprint process without any anti-stiction coating process. In this way, the micro- to nano-sized patterns of the original master Si template were replicated on various substrates, including a flat Si substrate and curved acryl substrate, with high fidelity using UV nanoimprint lithography. More... »

PAGES

458

References to SciGraph publications

Identifiers

URI

http://scigraph.springernature.com/pub.10.1186/1556-276x-6-458

DOI

http://dx.doi.org/10.1186/1556-276x-6-458

DIMENSIONS

https://app.dimensions.ai/details/publication/pub.1041915404

PUBMED

https://www.ncbi.nlm.nih.gov/pubmed/21767390


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