Sputtering of LiF and other halide crystals in the electronic energy loss regime View Full Text


Ontology type: schema:ScholarlyArticle     


Article Info

DATE

2020-07-07

AUTHORS

Marcel Toulemonde, Walter Assmann, Brigitte Ban-d’Etat, Markus Bender, Andreas Bergmaier, Philippe Boduch, Serge Della Negra, Jinglai Duan, Aymann S. El-Said, Florian Grüner, Jie Liu, Daniel Lelièvre, Hermann Rothard, Tim Seidl, Daniel Severin, Jean Paul Stoquert, Kay-Obe Voss, Christina Trautmann

ABSTRACT

Sputtering experiments were performed by irradiating LiF, NaCl, and RbCl crystals with various swift heavy ions like S, Ni, I, Au with energies between 60 and 210 MeV, C60 clusters between 12 and 30 MeV or Pb ions between 730 and 6040 MeV. Sputtered species are collected on arc-shaped catchers and subsequently analyzed by elastic recoil detection analysis or Rutherford backscattering analysis. The study focuses on angular distributions and total yields for LiF and covers a broad range of experimental parameters including cleaved or rough sample surfaces, ion fluence, beam incident angles, and different ion velocities leading to electronic energy loss (Se) values from 5 to 45 keV/nm. In most cases, the angular distribution has two components, a jet-like peak perpendicular to the surface sample superimposed on a broad isotropic cosine distribution whatever is the beam incident angle. The observation of the jet depends mainly on the surface flatness and angle of ion incidence. However, the jet does not appear clearly when irradiated with C60 cluster. The sputtering yield is stoichiometric and characterized by huge total yields of up to a few 105 atoms per incident ion. The yield follows a power law as function of electronic energy loss, Y follows an exponential law with Sen with n ~ 4. While the azimuthal symmetry for sputtering is observed at low ion velocity (~1 MeV/u), it seems to be lost at high velocity (>4 MeV/u). The data provide a comprehensive overview how the angular distribution and the total sputtering yield scale with the energy loss, beam incidence angle and ion velocity. Complementary experiments have been done with NaCl and RbCl targets confirming the observation made for LiF. Graphical abstract More... »

PAGES

144

Identifiers

URI

http://scigraph.springernature.com/pub.10.1140/epjd/e2020-10040-9

DOI

http://dx.doi.org/10.1140/epjd/e2020-10040-9

DIMENSIONS

https://app.dimensions.ai/details/publication/pub.1129065172


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11 schema:description Abstract Sputtering experiments were performed by irradiating LiF, NaCl, and RbCl crystals with various swift heavy ions like S, Ni, I, Au with energies between 60 and 210 MeV, C60 clusters between 12 and 30 MeV or Pb ions between 730 and 6040 MeV. Sputtered species are collected on arc-shaped catchers and subsequently analyzed by elastic recoil detection analysis or Rutherford backscattering analysis. The study focuses on angular distributions and total yields for LiF and covers a broad range of experimental parameters including cleaved or rough sample surfaces, ion fluence, beam incident angles, and different ion velocities leading to electronic energy loss (Se) values from 5 to 45 keV/nm. In most cases, the angular distribution has two components, a jet-like peak perpendicular to the surface sample superimposed on a broad isotropic cosine distribution whatever is the beam incident angle. The observation of the jet depends mainly on the surface flatness and angle of ion incidence. However, the jet does not appear clearly when irradiated with C60 cluster. The sputtering yield is stoichiometric and characterized by huge total yields of up to a few 105 atoms per incident ion. The yield follows a power law as function of electronic energy loss, Y follows an exponential law with Sen with n ~ 4. While the azimuthal symmetry for sputtering is observed at low ion velocity (~1 MeV/u), it seems to be lost at high velocity (>4 MeV/u). The data provide a comprehensive overview how the angular distribution and the total sputtering yield scale with the energy loss, beam incidence angle and ion velocity. Complementary experiments have been done with NaCl and RbCl targets confirming the observation made for LiF. Graphical abstract
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17 schema:keywords C60 clusters
18 LiF
19 LiF.
20 MeV
21 MeV.
22 NaCl
23 Ni
24 Pb ions
25 Rutherford
26 Sen
27 analysis
28 angle
29 angular distributions
30 atoms
31 azimuthal symmetry
32 beam incidence angle
33 beam incident angle
34 broad range
35 cases
36 catcher
37 clusters
38 complementary experiments
39 components
40 comprehensive overview
41 cosine distribution
42 crystals
43 data
44 detection analysis
45 different ion velocities
46 distribution
47 elastic recoil detection analysis
48 electronic energy loss
49 electronic energy loss regime
50 electronic energy loss values
51 energy
52 energy loss
53 energy loss values
54 experimental parameters
55 experiments
56 exponential law
57 flatness
58 fluence
59 function
60 halide crystals
61 heavy ions
62 high velocity
63 incidence
64 incidence angle
65 incident angle
66 incident ions
67 ion fluence
68 ion incidence
69 ion velocity
70 ions
71 jet
72 keV/
73 law
74 loss
75 loss regime
76 loss values
77 low ion velocities
78 most cases
79 observations
80 overview
81 parameters
82 perpendicular
83 power law
84 range
85 rbcL
86 regime
87 rough sample surface
88 sample surface
89 samples
90 scale
91 species
92 sputtering
93 sputtering experiments
94 sputtering yield
95 study
96 surface
97 surface flatness
98 surface samples
99 swift heavy ions
100 symmetry
101 target
102 total yield
103 values
104 velocity
105 yield
106 yield scales
107 schema:name Sputtering of LiF and other halide crystals in the electronic energy loss regime
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