Features of formation of metal oxide thin film layers in a gas-sensor structure Pt/WOx/SiC by means of pulsed laser deposition View Full Text


Ontology type: schema:ScholarlyArticle     


Article Info

DATE

2011-10

AUTHORS

V. Yu. Fominskii, R. I. Romanov, V. N. Nevolin, A. G. Gnedovets

ABSTRACT

The effect of regimes of reactive pulsed laser deposition (PLD) of WOx thin films on gas sensing performance of a metal-oxide-silicon carbide device potentially applicable for monitoring explosive gases, in particular, hydrogen, and environmentally harmful gases at elevated temperatures was investigated. The films were deposited from a tungsten target in oxygen at room temperature and subjected to high-temperature annealing. The features of the film deposition under free laser plume expansion and the deposition of the plume scattered in a buffer gas were considered. Weak differences in the structural and chemical state of the WOx films arising from the variation of the deposition conditions had a significant influence on the properties of the sensor. Deposition of WOx by the scattered plume at an oxygen pressure of ∼10 Pa made it possible to increase the value of the sensor response to hydrogen at temperatures of 150 to 500°C by more than one order of magnitude. Mathematical modeling of the dynamics of the laser plume expansion from the W target at a given oxygen pressure allowed identifying the factors that have significant influence on the properties of metal oxide films fabricated using various schemes of PLD. More... »

PAGES

395-404

Identifiers

URI

http://scigraph.springernature.com/pub.10.1134/s2075113311050121

DOI

http://dx.doi.org/10.1134/s2075113311050121

DIMENSIONS

https://app.dimensions.ai/details/publication/pub.1016026783


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[
  {
    "@context": "https://springernature.github.io/scigraph/jsonld/sgcontext.json", 
    "about": [
      {
        "id": "http://purl.org/au-research/vocabulary/anzsrc-for/2008/0912", 
        "inDefinedTermSet": "http://purl.org/au-research/vocabulary/anzsrc-for/2008/", 
        "name": "Materials Engineering", 
        "type": "DefinedTerm"
      }, 
      {
        "id": "http://purl.org/au-research/vocabulary/anzsrc-for/2008/09", 
        "inDefinedTermSet": "http://purl.org/au-research/vocabulary/anzsrc-for/2008/", 
        "name": "Engineering", 
        "type": "DefinedTerm"
      }
    ], 
    "author": [
      {
        "affiliation": {
          "alternateName": "Moscow Engineering Physics Institute", 
          "id": "https://www.grid.ac/institutes/grid.183446.c", 
          "name": [
            "National Research Nuclear University (MEPhI), Moscow, Russia"
          ], 
          "type": "Organization"
        }, 
        "familyName": "Fominskii", 
        "givenName": "V. Yu.", 
        "id": "sg:person.014126264277.63", 
        "sameAs": [
          "https://app.dimensions.ai/discover/publication?and_facet_researcher=ur.014126264277.63"
        ], 
        "type": "Person"
      }, 
      {
        "affiliation": {
          "alternateName": "Moscow Engineering Physics Institute", 
          "id": "https://www.grid.ac/institutes/grid.183446.c", 
          "name": [
            "National Research Nuclear University (MEPhI), Moscow, Russia"
          ], 
          "type": "Organization"
        }, 
        "familyName": "Romanov", 
        "givenName": "R. I.", 
        "id": "sg:person.014716620177.77", 
        "sameAs": [
          "https://app.dimensions.ai/discover/publication?and_facet_researcher=ur.014716620177.77"
        ], 
        "type": "Person"
      }, 
      {
        "affiliation": {
          "alternateName": "Institute of Physics. PN Lebedev, the Russian Academy of Sciences", 
          "id": "https://www.grid.ac/institutes/grid.425806.d", 
          "name": [
            "Lebedev Physical Institute, Russian Academy of Sciences, Moscow, Russia"
          ], 
          "type": "Organization"
        }, 
        "familyName": "Nevolin", 
        "givenName": "V. N.", 
        "id": "sg:person.012476536477.36", 
        "sameAs": [
          "https://app.dimensions.ai/discover/publication?and_facet_researcher=ur.012476536477.36"
        ], 
        "type": "Person"
      }, 
      {
        "affiliation": {
          "alternateName": "Baikov Institute of Metallurgy and Materials Science", 
          "id": "https://www.grid.ac/institutes/grid.423921.f", 
          "name": [
            "Baikov Institute of Metallurgy and Materials Science, Russian Academy of Sciences, Moscow, Russia"
          ], 
          "type": "Organization"
        }, 
        "familyName": "Gnedovets", 
        "givenName": "A. G.", 
        "id": "sg:person.015550453605.21", 
        "sameAs": [
          "https://app.dimensions.ai/discover/publication?and_facet_researcher=ur.015550453605.21"
        ], 
        "type": "Person"
      }
    ], 
    "citation": [
      {
        "id": "sg:pub.10.1134/s1063782610030164", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1011904534", 
          "https://doi.org/10.1134/s1063782610030164"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "sg:pub.10.1134/s1063782610030164", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1011904534", 
          "https://doi.org/10.1134/s1063782610030164"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "sg:pub.10.1007/978-3-540-76664-3_6", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1014349945", 
          "https://doi.org/10.1007/978-3-540-76664-3_6"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "https://doi.org/10.1016/j.apsusc.2007.02.171", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1022234662"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "https://doi.org/10.1016/0168-583x(88)90235-2", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1022640025"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "https://doi.org/10.1016/0168-583x(88)90235-2", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1022640025"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "https://doi.org/10.1016/j.snb.2005.06.066", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1023511716"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "https://doi.org/10.1016/j.tsf.2007.05.041", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1028407299"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "https://doi.org/10.1016/j.nimb.2007.12.092", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1028832504"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "https://doi.org/10.1016/j.snb.2008.03.011", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1039097176"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "https://doi.org/10.1016/s0925-4005(03)00570-7", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1040261924"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "https://doi.org/10.1016/s0925-4005(03)00570-7", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1040261924"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "sg:pub.10.1134/s1063782610040226", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1045176569", 
          "https://doi.org/10.1134/s1063782610040226"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "sg:pub.10.1134/s1063782610040226", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1045176569", 
          "https://doi.org/10.1134/s1063782610040226"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "https://doi.org/10.1016/s0169-4332(03)00677-9", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1046670881"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "https://doi.org/10.1016/s0169-4332(03)00677-9", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1046670881"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "https://doi.org/10.1016/s0925-4005(00)00290-2", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1049665843"
        ], 
        "type": "CreativeWork"
      }
    ], 
    "datePublished": "2011-10", 
    "datePublishedReg": "2011-10-01", 
    "description": "The effect of regimes of reactive pulsed laser deposition (PLD) of WOx thin films on gas sensing performance of a metal-oxide-silicon carbide device potentially applicable for monitoring explosive gases, in particular, hydrogen, and environmentally harmful gases at elevated temperatures was investigated. The films were deposited from a tungsten target in oxygen at room temperature and subjected to high-temperature annealing. The features of the film deposition under free laser plume expansion and the deposition of the plume scattered in a buffer gas were considered. Weak differences in the structural and chemical state of the WOx films arising from the variation of the deposition conditions had a significant influence on the properties of the sensor. Deposition of WOx by the scattered plume at an oxygen pressure of \u223c10 Pa made it possible to increase the value of the sensor response to hydrogen at temperatures of 150 to 500\u00b0C by more than one order of magnitude. Mathematical modeling of the dynamics of the laser plume expansion from the W target at a given oxygen pressure allowed identifying the factors that have significant influence on the properties of metal oxide films fabricated using various schemes of PLD.", 
    "genre": "research_article", 
    "id": "sg:pub.10.1134/s2075113311050121", 
    "inLanguage": [
      "en"
    ], 
    "isAccessibleForFree": false, 
    "isPartOf": [
      {
        "id": "sg:journal.1135943", 
        "issn": [
          "2075-1133", 
          "2075-115X"
        ], 
        "name": "Inorganic Materials: Applied Research", 
        "type": "Periodical"
      }, 
      {
        "issueNumber": "5", 
        "type": "PublicationIssue"
      }, 
      {
        "type": "PublicationVolume", 
        "volumeNumber": "2"
      }
    ], 
    "name": "Features of formation of metal oxide thin film layers in a gas-sensor structure Pt/WOx/SiC by means of pulsed laser deposition", 
    "pagination": "395-404", 
    "productId": [
      {
        "name": "readcube_id", 
        "type": "PropertyValue", 
        "value": [
          "4c5d533a8362893684547dd7a30d244f593113057cdaf5139dc57220762326a7"
        ]
      }, 
      {
        "name": "doi", 
        "type": "PropertyValue", 
        "value": [
          "10.1134/s2075113311050121"
        ]
      }, 
      {
        "name": "dimensions_id", 
        "type": "PropertyValue", 
        "value": [
          "pub.1016026783"
        ]
      }
    ], 
    "sameAs": [
      "https://doi.org/10.1134/s2075113311050121", 
      "https://app.dimensions.ai/details/publication/pub.1016026783"
    ], 
    "sdDataset": "articles", 
    "sdDatePublished": "2019-04-10T17:36", 
    "sdLicense": "https://scigraph.springernature.com/explorer/license/", 
    "sdPublisher": {
      "name": "Springer Nature - SN SciGraph project", 
      "type": "Organization"
    }, 
    "sdSource": "s3://com-uberresearch-data-dimensions-target-20181106-alternative/cleanup/v134/2549eaecd7973599484d7c17b260dba0a4ecb94b/merge/v9/a6c9fde33151104705d4d7ff012ea9563521a3ce/jats-lookup/v90/0000000001_0000000264/records_8672_00000536.jsonl", 
    "type": "ScholarlyArticle", 
    "url": "http://link.springer.com/10.1134%2FS2075113311050121"
  }
]
 

Download the RDF metadata as:  json-ld nt turtle xml License info

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This table displays all metadata directly associated to this object as RDF triples.

127 TRIPLES      21 PREDICATES      39 URIs      19 LITERALS      7 BLANK NODES

Subject Predicate Object
1 sg:pub.10.1134/s2075113311050121 schema:about anzsrc-for:09
2 anzsrc-for:0912
3 schema:author N1735460fccc0467ba4dec728a1877e7f
4 schema:citation sg:pub.10.1007/978-3-540-76664-3_6
5 sg:pub.10.1134/s1063782610030164
6 sg:pub.10.1134/s1063782610040226
7 https://doi.org/10.1016/0168-583x(88)90235-2
8 https://doi.org/10.1016/j.apsusc.2007.02.171
9 https://doi.org/10.1016/j.nimb.2007.12.092
10 https://doi.org/10.1016/j.snb.2005.06.066
11 https://doi.org/10.1016/j.snb.2008.03.011
12 https://doi.org/10.1016/j.tsf.2007.05.041
13 https://doi.org/10.1016/s0169-4332(03)00677-9
14 https://doi.org/10.1016/s0925-4005(00)00290-2
15 https://doi.org/10.1016/s0925-4005(03)00570-7
16 schema:datePublished 2011-10
17 schema:datePublishedReg 2011-10-01
18 schema:description The effect of regimes of reactive pulsed laser deposition (PLD) of WOx thin films on gas sensing performance of a metal-oxide-silicon carbide device potentially applicable for monitoring explosive gases, in particular, hydrogen, and environmentally harmful gases at elevated temperatures was investigated. The films were deposited from a tungsten target in oxygen at room temperature and subjected to high-temperature annealing. The features of the film deposition under free laser plume expansion and the deposition of the plume scattered in a buffer gas were considered. Weak differences in the structural and chemical state of the WOx films arising from the variation of the deposition conditions had a significant influence on the properties of the sensor. Deposition of WOx by the scattered plume at an oxygen pressure of ∼10 Pa made it possible to increase the value of the sensor response to hydrogen at temperatures of 150 to 500°C by more than one order of magnitude. Mathematical modeling of the dynamics of the laser plume expansion from the W target at a given oxygen pressure allowed identifying the factors that have significant influence on the properties of metal oxide films fabricated using various schemes of PLD.
19 schema:genre research_article
20 schema:inLanguage en
21 schema:isAccessibleForFree false
22 schema:isPartOf N12f9e051a97d4e0bb9a445d29f02eb19
23 Nc7350cad3fad4114830e548c23862eea
24 sg:journal.1135943
25 schema:name Features of formation of metal oxide thin film layers in a gas-sensor structure Pt/WOx/SiC by means of pulsed laser deposition
26 schema:pagination 395-404
27 schema:productId N4c19abe430164c4882fefb21c2e728c5
28 N68666ed0b1bf4a25bdeec4b5f371ddb5
29 N6bf7ee25804543b982fdbbe934b9ab52
30 schema:sameAs https://app.dimensions.ai/details/publication/pub.1016026783
31 https://doi.org/10.1134/s2075113311050121
32 schema:sdDatePublished 2019-04-10T17:36
33 schema:sdLicense https://scigraph.springernature.com/explorer/license/
34 schema:sdPublisher N4d25eeaa92b14de3abc9298d125edc7b
35 schema:url http://link.springer.com/10.1134%2FS2075113311050121
36 sgo:license sg:explorer/license/
37 sgo:sdDataset articles
38 rdf:type schema:ScholarlyArticle
39 N12f9e051a97d4e0bb9a445d29f02eb19 schema:volumeNumber 2
40 rdf:type schema:PublicationVolume
41 N1735460fccc0467ba4dec728a1877e7f rdf:first sg:person.014126264277.63
42 rdf:rest N6e08a65296de4be4a4a368aab719b947
43 N4a8738582b234218a1f1316481cdd00f rdf:first sg:person.015550453605.21
44 rdf:rest rdf:nil
45 N4c19abe430164c4882fefb21c2e728c5 schema:name doi
46 schema:value 10.1134/s2075113311050121
47 rdf:type schema:PropertyValue
48 N4d25eeaa92b14de3abc9298d125edc7b schema:name Springer Nature - SN SciGraph project
49 rdf:type schema:Organization
50 N68666ed0b1bf4a25bdeec4b5f371ddb5 schema:name readcube_id
51 schema:value 4c5d533a8362893684547dd7a30d244f593113057cdaf5139dc57220762326a7
52 rdf:type schema:PropertyValue
53 N6bf7ee25804543b982fdbbe934b9ab52 schema:name dimensions_id
54 schema:value pub.1016026783
55 rdf:type schema:PropertyValue
56 N6e08a65296de4be4a4a368aab719b947 rdf:first sg:person.014716620177.77
57 rdf:rest N80e1da53e585432d8c5c1e3c7a24eb6a
58 N80e1da53e585432d8c5c1e3c7a24eb6a rdf:first sg:person.012476536477.36
59 rdf:rest N4a8738582b234218a1f1316481cdd00f
60 Nc7350cad3fad4114830e548c23862eea schema:issueNumber 5
61 rdf:type schema:PublicationIssue
62 anzsrc-for:09 schema:inDefinedTermSet anzsrc-for:
63 schema:name Engineering
64 rdf:type schema:DefinedTerm
65 anzsrc-for:0912 schema:inDefinedTermSet anzsrc-for:
66 schema:name Materials Engineering
67 rdf:type schema:DefinedTerm
68 sg:journal.1135943 schema:issn 2075-1133
69 2075-115X
70 schema:name Inorganic Materials: Applied Research
71 rdf:type schema:Periodical
72 sg:person.012476536477.36 schema:affiliation https://www.grid.ac/institutes/grid.425806.d
73 schema:familyName Nevolin
74 schema:givenName V. N.
75 schema:sameAs https://app.dimensions.ai/discover/publication?and_facet_researcher=ur.012476536477.36
76 rdf:type schema:Person
77 sg:person.014126264277.63 schema:affiliation https://www.grid.ac/institutes/grid.183446.c
78 schema:familyName Fominskii
79 schema:givenName V. Yu.
80 schema:sameAs https://app.dimensions.ai/discover/publication?and_facet_researcher=ur.014126264277.63
81 rdf:type schema:Person
82 sg:person.014716620177.77 schema:affiliation https://www.grid.ac/institutes/grid.183446.c
83 schema:familyName Romanov
84 schema:givenName R. I.
85 schema:sameAs https://app.dimensions.ai/discover/publication?and_facet_researcher=ur.014716620177.77
86 rdf:type schema:Person
87 sg:person.015550453605.21 schema:affiliation https://www.grid.ac/institutes/grid.423921.f
88 schema:familyName Gnedovets
89 schema:givenName A. G.
90 schema:sameAs https://app.dimensions.ai/discover/publication?and_facet_researcher=ur.015550453605.21
91 rdf:type schema:Person
92 sg:pub.10.1007/978-3-540-76664-3_6 schema:sameAs https://app.dimensions.ai/details/publication/pub.1014349945
93 https://doi.org/10.1007/978-3-540-76664-3_6
94 rdf:type schema:CreativeWork
95 sg:pub.10.1134/s1063782610030164 schema:sameAs https://app.dimensions.ai/details/publication/pub.1011904534
96 https://doi.org/10.1134/s1063782610030164
97 rdf:type schema:CreativeWork
98 sg:pub.10.1134/s1063782610040226 schema:sameAs https://app.dimensions.ai/details/publication/pub.1045176569
99 https://doi.org/10.1134/s1063782610040226
100 rdf:type schema:CreativeWork
101 https://doi.org/10.1016/0168-583x(88)90235-2 schema:sameAs https://app.dimensions.ai/details/publication/pub.1022640025
102 rdf:type schema:CreativeWork
103 https://doi.org/10.1016/j.apsusc.2007.02.171 schema:sameAs https://app.dimensions.ai/details/publication/pub.1022234662
104 rdf:type schema:CreativeWork
105 https://doi.org/10.1016/j.nimb.2007.12.092 schema:sameAs https://app.dimensions.ai/details/publication/pub.1028832504
106 rdf:type schema:CreativeWork
107 https://doi.org/10.1016/j.snb.2005.06.066 schema:sameAs https://app.dimensions.ai/details/publication/pub.1023511716
108 rdf:type schema:CreativeWork
109 https://doi.org/10.1016/j.snb.2008.03.011 schema:sameAs https://app.dimensions.ai/details/publication/pub.1039097176
110 rdf:type schema:CreativeWork
111 https://doi.org/10.1016/j.tsf.2007.05.041 schema:sameAs https://app.dimensions.ai/details/publication/pub.1028407299
112 rdf:type schema:CreativeWork
113 https://doi.org/10.1016/s0169-4332(03)00677-9 schema:sameAs https://app.dimensions.ai/details/publication/pub.1046670881
114 rdf:type schema:CreativeWork
115 https://doi.org/10.1016/s0925-4005(00)00290-2 schema:sameAs https://app.dimensions.ai/details/publication/pub.1049665843
116 rdf:type schema:CreativeWork
117 https://doi.org/10.1016/s0925-4005(03)00570-7 schema:sameAs https://app.dimensions.ai/details/publication/pub.1040261924
118 rdf:type schema:CreativeWork
119 https://www.grid.ac/institutes/grid.183446.c schema:alternateName Moscow Engineering Physics Institute
120 schema:name National Research Nuclear University (MEPhI), Moscow, Russia
121 rdf:type schema:Organization
122 https://www.grid.ac/institutes/grid.423921.f schema:alternateName Baikov Institute of Metallurgy and Materials Science
123 schema:name Baikov Institute of Metallurgy and Materials Science, Russian Academy of Sciences, Moscow, Russia
124 rdf:type schema:Organization
125 https://www.grid.ac/institutes/grid.425806.d schema:alternateName Institute of Physics. PN Lebedev, the Russian Academy of Sciences
126 schema:name Lebedev Physical Institute, Russian Academy of Sciences, Moscow, Russia
127 rdf:type schema:Organization
 




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