Features of formation of metal oxide thin film layers in a gas-sensor structure Pt/WOx/SiC by means of pulsed laser deposition View Full Text


Ontology type: schema:ScholarlyArticle     


Article Info

DATE

2011-10

AUTHORS

V. Yu. Fominskii, R. I. Romanov, V. N. Nevolin, A. G. Gnedovets

ABSTRACT

The effect of regimes of reactive pulsed laser deposition (PLD) of WOx thin films on gas sensing performance of a metal-oxide-silicon carbide device potentially applicable for monitoring explosive gases, in particular, hydrogen, and environmentally harmful gases at elevated temperatures was investigated. The films were deposited from a tungsten target in oxygen at room temperature and subjected to high-temperature annealing. The features of the film deposition under free laser plume expansion and the deposition of the plume scattered in a buffer gas were considered. Weak differences in the structural and chemical state of the WOx films arising from the variation of the deposition conditions had a significant influence on the properties of the sensor. Deposition of WOx by the scattered plume at an oxygen pressure of ∼10 Pa made it possible to increase the value of the sensor response to hydrogen at temperatures of 150 to 500°C by more than one order of magnitude. Mathematical modeling of the dynamics of the laser plume expansion from the W target at a given oxygen pressure allowed identifying the factors that have significant influence on the properties of metal oxide films fabricated using various schemes of PLD. More... »

PAGES

395-404

Identifiers

URI

http://scigraph.springernature.com/pub.10.1134/s2075113311050121

DOI

http://dx.doi.org/10.1134/s2075113311050121

DIMENSIONS

https://app.dimensions.ai/details/publication/pub.1016026783


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