Functional micro- and nanostructured layers based on tungsten oxide for high-temperature hydrogen detectors on the “Pt-metal oxide-SiC” platform View Full Text


Ontology type: schema:ScholarlyArticle     


Article Info

DATE

2012-05

AUTHORS

V. Yu. Fominskii, R. I. Romanov, V. V. Zuev, A. G. Gnedovetz, M. I. Alymov

ABSTRACT

The features of the structural formation and chemical composition of thin films of tungsten oxide grown under various conditions of pulsed laser deposition on a substrate of single crystal silicon carbide followed by annealing have been investigated. To obtain doped films of tungsten oxide deposited by the laser plume expanding from a tungsten target, an additional deposition of Pt, Ti, and Ta atoms was carried out. In some cases a thin film of a catalytically active metal (platinum) was deposited on the oxide layer formation. The structural state of the films was investigated by X-ray diffraction, electron and atomic force scanning microscopy, and Raman spectroscopy. The gas-sensing properties of the Pt-oxide-SiC structures were investigated by measuring the current-voltage characteristics at 300°C in air and air mixtures with hydrogen (2 vol %). It has been established that the deposited metal oxide films are significantly different in morphology and structure on micro- and nanoscales. This had a significant impact on the magnitude of the response to hydrogen and the mechanisms determining the gas-sensing properties: current passage in oxide and the magnitude of the potential barriers at the interfaces of the structure. More... »

PAGES

246-254

References to SciGraph publications

Identifiers

URI

http://scigraph.springernature.com/pub.10.1134/s1995078012030056

DOI

http://dx.doi.org/10.1134/s1995078012030056

DIMENSIONS

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