Ontology type: schema:ScholarlyArticle
2021-10
AUTHORSL. I. Goray, E. V. Pirogov, M. V. Svechnikov, M. S. Sobolev, N. K. Polyakov, L. G. Gerchikov, E. V. Nikitina, A. S. Dashkov, M. M. Borisov, S. N. Yakunin, A. D. Bouravleuv
ABSTRACTThe morphology of supermultiperiod Al0.3Ga0.7As/GaAs superlattices grown by molecular-beam epitaxy has been determined using X-ray reflectometry (including the one on a synchrotron source) and photoluminescence. The layer thicknesses of a superlattice with 100 periods determined in laboratory and synchrotron studies correlate with an error of ~1%. Reflection peaks, which are not observed in measurements on a diffractometer and are likely related to the technological growth features of these structures, are revealed on a synchrotron beginning with high (>4–5) Bragg orders. It is analytically shown that these peaks correspond to modulation in the superlattice with a period that is three to five times larger and characterize the thickness dispersion over the structure depth of a few percent. More... »
PAGES757-760
http://scigraph.springernature.com/pub.10.1134/s1063785021080071
DOIhttp://dx.doi.org/10.1134/s1063785021080071
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