High-Precision Characterization of Super-Multiperiod AlGaAs/GaAs Superlattices Using X-Ray Reflectometry on a Synchrotron Source View Full Text


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Article Info

DATE

2021-10

AUTHORS

L. I. Goray, E. V. Pirogov, M. V. Svechnikov, M. S. Sobolev, N. K. Polyakov, L. G. Gerchikov, E. V. Nikitina, A. S. Dashkov, M. M. Borisov, S. N. Yakunin, A. D. Bouravleuv

ABSTRACT

The morphology of supermultiperiod Al0.3Ga0.7As/GaAs superlattices grown by molecular-beam epitaxy has been determined using X-ray reflectometry (including the one on a synchrotron source) and photoluminescence. The layer thicknesses of a superlattice with 100 periods determined in laboratory and synchrotron studies correlate with an error of ~1%. Reflection peaks, which are not observed in measurements on a diffractometer and are likely related to the technological growth features of these structures, are revealed on a synchrotron beginning with high (>4–5) Bragg orders. It is analytically shown that these peaks correspond to modulation in the superlattice with a period that is three to five times larger and characterize the thickness dispersion over the structure depth of a few percent. More... »

PAGES

757-760

Identifiers

URI

http://scigraph.springernature.com/pub.10.1134/s1063785021080071

DOI

http://dx.doi.org/10.1134/s1063785021080071

DIMENSIONS

https://app.dimensions.ai/details/publication/pub.1144041712


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