An Increase of Threading Dislocations Filtering Efficiency in Al2O3 Templates with Faceted Surface Morphology During a Growth by Molecular Beam ... View Full Text


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Article Info

DATE

2020-06

AUTHORS

A. V. Myasoedov, D. V. Nechaev, V. V. Ratnikov, A. E. Kalmykov, L. M. Sorokin, V. N. Jmerik

ABSTRACT

We present the results of a transmission electron microscopy and X-ray diffractometry investigation of AlN/c-Al2O3 templates with GaN ultrathin insertions grown by plasma-assisted molecular beam epitaxy. It has been shown that AlN buffer layers with faceted surface morphology provide a greater threading dislocation density reduction than smooth layers. The filtering effect of GaN ultrathin insertions has been confirmed. More... »

PAGES

543-547

References to SciGraph publications

  • 2014-07-04. Role of SiC substrate polarity on the growth and properties of bulk AlN single crystals in JOURNAL OF MATERIALS SCIENCE: MATERIALS IN ELECTRONICS
  • Identifiers

    URI

    http://scigraph.springernature.com/pub.10.1134/s1063785020060097

    DOI

    http://dx.doi.org/10.1134/s1063785020060097

    DIMENSIONS

    https://app.dimensions.ai/details/publication/pub.1129478768


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    JSON-LD is the canonical representation for SciGraph data.

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    [
      {
        "@context": "https://springernature.github.io/scigraph/jsonld/sgcontext.json", 
        "about": [
          {
            "id": "http://purl.org/au-research/vocabulary/anzsrc-for/2008/02", 
            "inDefinedTermSet": "http://purl.org/au-research/vocabulary/anzsrc-for/2008/", 
            "name": "Physical Sciences", 
            "type": "DefinedTerm"
          }, 
          {
            "id": "http://purl.org/au-research/vocabulary/anzsrc-for/2008/0299", 
            "inDefinedTermSet": "http://purl.org/au-research/vocabulary/anzsrc-for/2008/", 
            "name": "Other Physical Sciences", 
            "type": "DefinedTerm"
          }
        ], 
        "author": [
          {
            "affiliation": {
              "alternateName": "Ioffe Physical Technical Institute, Russian Academy of Sciences, St. Petersburg, Russia", 
              "id": "http://www.grid.ac/institutes/grid.423485.c", 
              "name": [
                "Ioffe Physical Technical Institute, Russian Academy of Sciences, St. Petersburg, Russia"
              ], 
              "type": "Organization"
            }, 
            "familyName": "Myasoedov", 
            "givenName": "A. V.", 
            "type": "Person"
          }, 
          {
            "affiliation": {
              "alternateName": "Ioffe Physical Technical Institute, Russian Academy of Sciences, St. Petersburg, Russia", 
              "id": "http://www.grid.ac/institutes/grid.423485.c", 
              "name": [
                "Ioffe Physical Technical Institute, Russian Academy of Sciences, St. Petersburg, Russia"
              ], 
              "type": "Organization"
            }, 
            "familyName": "Nechaev", 
            "givenName": "D. V.", 
            "id": "sg:person.012053211625.45", 
            "sameAs": [
              "https://app.dimensions.ai/discover/publication?and_facet_researcher=ur.012053211625.45"
            ], 
            "type": "Person"
          }, 
          {
            "affiliation": {
              "alternateName": "Ioffe Physical Technical Institute, Russian Academy of Sciences, St. Petersburg, Russia", 
              "id": "http://www.grid.ac/institutes/grid.423485.c", 
              "name": [
                "Ioffe Physical Technical Institute, Russian Academy of Sciences, St. Petersburg, Russia"
              ], 
              "type": "Organization"
            }, 
            "familyName": "Ratnikov", 
            "givenName": "V. V.", 
            "id": "sg:person.016253552311.27", 
            "sameAs": [
              "https://app.dimensions.ai/discover/publication?and_facet_researcher=ur.016253552311.27"
            ], 
            "type": "Person"
          }, 
          {
            "affiliation": {
              "alternateName": "Ioffe Physical Technical Institute, Russian Academy of Sciences, St. Petersburg, Russia", 
              "id": "http://www.grid.ac/institutes/grid.423485.c", 
              "name": [
                "Ioffe Physical Technical Institute, Russian Academy of Sciences, St. Petersburg, Russia"
              ], 
              "type": "Organization"
            }, 
            "familyName": "Kalmykov", 
            "givenName": "A. E.", 
            "id": "sg:person.014156466341.63", 
            "sameAs": [
              "https://app.dimensions.ai/discover/publication?and_facet_researcher=ur.014156466341.63"
            ], 
            "type": "Person"
          }, 
          {
            "affiliation": {
              "alternateName": "Ioffe Physical Technical Institute, Russian Academy of Sciences, St. Petersburg, Russia", 
              "id": "http://www.grid.ac/institutes/grid.423485.c", 
              "name": [
                "Ioffe Physical Technical Institute, Russian Academy of Sciences, St. Petersburg, Russia"
              ], 
              "type": "Organization"
            }, 
            "familyName": "Sorokin", 
            "givenName": "L. M.", 
            "id": "sg:person.010730376716.55", 
            "sameAs": [
              "https://app.dimensions.ai/discover/publication?and_facet_researcher=ur.010730376716.55"
            ], 
            "type": "Person"
          }, 
          {
            "affiliation": {
              "alternateName": "Ioffe Physical Technical Institute, Russian Academy of Sciences, St. Petersburg, Russia", 
              "id": "http://www.grid.ac/institutes/grid.423485.c", 
              "name": [
                "Ioffe Physical Technical Institute, Russian Academy of Sciences, St. Petersburg, Russia"
              ], 
              "type": "Organization"
            }, 
            "familyName": "Jmerik", 
            "givenName": "V. N.", 
            "id": "sg:person.010773242043.36", 
            "sameAs": [
              "https://app.dimensions.ai/discover/publication?and_facet_researcher=ur.010773242043.36"
            ], 
            "type": "Person"
          }
        ], 
        "citation": [
          {
            "id": "sg:pub.10.1007/s10854-014-2083-z", 
            "sameAs": [
              "https://app.dimensions.ai/details/publication/pub.1000569340", 
              "https://doi.org/10.1007/s10854-014-2083-z"
            ], 
            "type": "CreativeWork"
          }
        ], 
        "datePublished": "2020-06", 
        "datePublishedReg": "2020-06-01", 
        "description": "We present the results of a transmission electron microscopy and X-ray diffractometry investigation of AlN/c-Al2O3 templates with GaN ultrathin insertions grown by plasma-assisted molecular beam epitaxy. It has been shown that AlN buffer layers with faceted surface morphology provide a greater threading dislocation density reduction than smooth layers. The filtering effect of GaN ultrathin insertions has been confirmed.", 
        "genre": "article", 
        "id": "sg:pub.10.1134/s1063785020060097", 
        "inLanguage": "en", 
        "isAccessibleForFree": false, 
        "isPartOf": [
          {
            "id": "sg:journal.1136630", 
            "issn": [
              "0320-0116", 
              "0360-120X"
            ], 
            "name": "Technical Physics Letters", 
            "publisher": "Pleiades Publishing", 
            "type": "Periodical"
          }, 
          {
            "issueNumber": "6", 
            "type": "PublicationIssue"
          }, 
          {
            "type": "PublicationVolume", 
            "volumeNumber": "46"
          }
        ], 
        "keywords": [
          "molecular beam epitaxy", 
          "beam epitaxy", 
          "surface morphology", 
          "plasma-assisted molecular beam epitaxy", 
          "transmission electron microscopy", 
          "AlN buffer layer", 
          "Al2O3 templates", 
          "dislocation density reduction", 
          "electron microscopy", 
          "buffer layer", 
          "X-ray diffractometry investigation", 
          "smooth layer", 
          "epitaxy", 
          "filtering efficiency", 
          "template", 
          "filtering effect", 
          "morphology", 
          "layer", 
          "microscopy", 
          "density reduction", 
          "efficiency", 
          "investigation", 
          "insertion", 
          "growth", 
          "reduction", 
          "results", 
          "increase", 
          "effect"
        ], 
        "name": "An Increase of Threading Dislocations Filtering Efficiency in Al2O3 Templates with Faceted Surface Morphology During a Growth by Molecular Beam Epitaxy", 
        "pagination": "543-547", 
        "productId": [
          {
            "name": "dimensions_id", 
            "type": "PropertyValue", 
            "value": [
              "pub.1129478768"
            ]
          }, 
          {
            "name": "doi", 
            "type": "PropertyValue", 
            "value": [
              "10.1134/s1063785020060097"
            ]
          }
        ], 
        "sameAs": [
          "https://doi.org/10.1134/s1063785020060097", 
          "https://app.dimensions.ai/details/publication/pub.1129478768"
        ], 
        "sdDataset": "articles", 
        "sdDatePublished": "2022-05-20T07:37", 
        "sdLicense": "https://scigraph.springernature.com/explorer/license/", 
        "sdPublisher": {
          "name": "Springer Nature - SN SciGraph project", 
          "type": "Organization"
        }, 
        "sdSource": "s3://com-springernature-scigraph/baseset/20220519/entities/gbq_results/article/article_854.jsonl", 
        "type": "ScholarlyArticle", 
        "url": "https://doi.org/10.1134/s1063785020060097"
      }
    ]
     

    Download the RDF metadata as:  json-ld nt turtle xml License info

    HOW TO GET THIS DATA PROGRAMMATICALLY:

    JSON-LD is a popular format for linked data which is fully compatible with JSON.

    curl -H 'Accept: application/ld+json' 'https://scigraph.springernature.com/pub.10.1134/s1063785020060097'

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    curl -H 'Accept: application/rdf+xml' 'https://scigraph.springernature.com/pub.10.1134/s1063785020060097'


     

    This table displays all metadata directly associated to this object as RDF triples.

    124 TRIPLES      22 PREDICATES      55 URIs      46 LITERALS      6 BLANK NODES

    Subject Predicate Object
    1 sg:pub.10.1134/s1063785020060097 schema:about anzsrc-for:02
    2 anzsrc-for:0299
    3 schema:author Ndf15d22d4d3e4ff6b5e4c930c11288cb
    4 schema:citation sg:pub.10.1007/s10854-014-2083-z
    5 schema:datePublished 2020-06
    6 schema:datePublishedReg 2020-06-01
    7 schema:description We present the results of a transmission electron microscopy and X-ray diffractometry investigation of AlN/c-Al2O3 templates with GaN ultrathin insertions grown by plasma-assisted molecular beam epitaxy. It has been shown that AlN buffer layers with faceted surface morphology provide a greater threading dislocation density reduction than smooth layers. The filtering effect of GaN ultrathin insertions has been confirmed.
    8 schema:genre article
    9 schema:inLanguage en
    10 schema:isAccessibleForFree false
    11 schema:isPartOf N8b829539e46841c182c47dd931b9794f
    12 Na74ca861581c4b9fb9fd0ae342ef426b
    13 sg:journal.1136630
    14 schema:keywords Al2O3 templates
    15 AlN buffer layer
    16 X-ray diffractometry investigation
    17 beam epitaxy
    18 buffer layer
    19 density reduction
    20 dislocation density reduction
    21 effect
    22 efficiency
    23 electron microscopy
    24 epitaxy
    25 filtering effect
    26 filtering efficiency
    27 growth
    28 increase
    29 insertion
    30 investigation
    31 layer
    32 microscopy
    33 molecular beam epitaxy
    34 morphology
    35 plasma-assisted molecular beam epitaxy
    36 reduction
    37 results
    38 smooth layer
    39 surface morphology
    40 template
    41 transmission electron microscopy
    42 schema:name An Increase of Threading Dislocations Filtering Efficiency in Al2O3 Templates with Faceted Surface Morphology During a Growth by Molecular Beam Epitaxy
    43 schema:pagination 543-547
    44 schema:productId N8c934fe942f54466829f5e159fc46817
    45 Ne437b0caebb94f15ade58b89f5e03092
    46 schema:sameAs https://app.dimensions.ai/details/publication/pub.1129478768
    47 https://doi.org/10.1134/s1063785020060097
    48 schema:sdDatePublished 2022-05-20T07:37
    49 schema:sdLicense https://scigraph.springernature.com/explorer/license/
    50 schema:sdPublisher N62dedfa1d9ec40d281935e83f249c1da
    51 schema:url https://doi.org/10.1134/s1063785020060097
    52 sgo:license sg:explorer/license/
    53 sgo:sdDataset articles
    54 rdf:type schema:ScholarlyArticle
    55 N0d9f7363bf5644d2ac4998d7db12b8cb rdf:first sg:person.010773242043.36
    56 rdf:rest rdf:nil
    57 N4a10c1295d2849d99257cc185b2de273 rdf:first sg:person.012053211625.45
    58 rdf:rest Nbe4c08fc01d443318a555f7d1f1ed462
    59 N62dedfa1d9ec40d281935e83f249c1da schema:name Springer Nature - SN SciGraph project
    60 rdf:type schema:Organization
    61 N81876056fd484737b6b2107c3872c751 schema:affiliation grid-institutes:grid.423485.c
    62 schema:familyName Myasoedov
    63 schema:givenName A. V.
    64 rdf:type schema:Person
    65 N8b829539e46841c182c47dd931b9794f schema:volumeNumber 46
    66 rdf:type schema:PublicationVolume
    67 N8c934fe942f54466829f5e159fc46817 schema:name dimensions_id
    68 schema:value pub.1129478768
    69 rdf:type schema:PropertyValue
    70 Na74ca861581c4b9fb9fd0ae342ef426b schema:issueNumber 6
    71 rdf:type schema:PublicationIssue
    72 Nb9148c61ac574a91ba644cfce2b7672b rdf:first sg:person.014156466341.63
    73 rdf:rest Nf2666e2b9691475da0ea2884dab7095d
    74 Nbe4c08fc01d443318a555f7d1f1ed462 rdf:first sg:person.016253552311.27
    75 rdf:rest Nb9148c61ac574a91ba644cfce2b7672b
    76 Ndf15d22d4d3e4ff6b5e4c930c11288cb rdf:first N81876056fd484737b6b2107c3872c751
    77 rdf:rest N4a10c1295d2849d99257cc185b2de273
    78 Ne437b0caebb94f15ade58b89f5e03092 schema:name doi
    79 schema:value 10.1134/s1063785020060097
    80 rdf:type schema:PropertyValue
    81 Nf2666e2b9691475da0ea2884dab7095d rdf:first sg:person.010730376716.55
    82 rdf:rest N0d9f7363bf5644d2ac4998d7db12b8cb
    83 anzsrc-for:02 schema:inDefinedTermSet anzsrc-for:
    84 schema:name Physical Sciences
    85 rdf:type schema:DefinedTerm
    86 anzsrc-for:0299 schema:inDefinedTermSet anzsrc-for:
    87 schema:name Other Physical Sciences
    88 rdf:type schema:DefinedTerm
    89 sg:journal.1136630 schema:issn 0320-0116
    90 0360-120X
    91 schema:name Technical Physics Letters
    92 schema:publisher Pleiades Publishing
    93 rdf:type schema:Periodical
    94 sg:person.010730376716.55 schema:affiliation grid-institutes:grid.423485.c
    95 schema:familyName Sorokin
    96 schema:givenName L. M.
    97 schema:sameAs https://app.dimensions.ai/discover/publication?and_facet_researcher=ur.010730376716.55
    98 rdf:type schema:Person
    99 sg:person.010773242043.36 schema:affiliation grid-institutes:grid.423485.c
    100 schema:familyName Jmerik
    101 schema:givenName V. N.
    102 schema:sameAs https://app.dimensions.ai/discover/publication?and_facet_researcher=ur.010773242043.36
    103 rdf:type schema:Person
    104 sg:person.012053211625.45 schema:affiliation grid-institutes:grid.423485.c
    105 schema:familyName Nechaev
    106 schema:givenName D. V.
    107 schema:sameAs https://app.dimensions.ai/discover/publication?and_facet_researcher=ur.012053211625.45
    108 rdf:type schema:Person
    109 sg:person.014156466341.63 schema:affiliation grid-institutes:grid.423485.c
    110 schema:familyName Kalmykov
    111 schema:givenName A. E.
    112 schema:sameAs https://app.dimensions.ai/discover/publication?and_facet_researcher=ur.014156466341.63
    113 rdf:type schema:Person
    114 sg:person.016253552311.27 schema:affiliation grid-institutes:grid.423485.c
    115 schema:familyName Ratnikov
    116 schema:givenName V. V.
    117 schema:sameAs https://app.dimensions.ai/discover/publication?and_facet_researcher=ur.016253552311.27
    118 rdf:type schema:Person
    119 sg:pub.10.1007/s10854-014-2083-z schema:sameAs https://app.dimensions.ai/details/publication/pub.1000569340
    120 https://doi.org/10.1007/s10854-014-2083-z
    121 rdf:type schema:CreativeWork
    122 grid-institutes:grid.423485.c schema:alternateName Ioffe Physical Technical Institute, Russian Academy of Sciences, St. Petersburg, Russia
    123 schema:name Ioffe Physical Technical Institute, Russian Academy of Sciences, St. Petersburg, Russia
    124 rdf:type schema:Organization
     




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