Ontology type: schema:ScholarlyArticle
2020-04
AUTHORSV. V. Ratnikov, D. V. Nechaev, A. V. Myasoedov, O. A. Koshelev, V. N. Zhmerik
ABSTRACTAlN/c-sapphire templates grown by plasma-activated molecular beam epitaxy have been studied using multicrystal X-ray diffractometry and a multi-beam optical stress meter system. Studies of the seed and buffer layers grown at different ratios of Al and N* growth flows and substrate temperatures have shown that templates with small tensile elastic stresses (<0.5 GPa) and densities of screw and edge grown-in dislocations 4 × 108 and 8 × 109 cm−2, respectively, can be produced. More... »
PAGES389-392
http://scigraph.springernature.com/pub.10.1134/s1063785020040240
DOIhttp://dx.doi.org/10.1134/s1063785020040240
DIMENSIONShttps://app.dimensions.ai/details/publication/pub.1128249360
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[
{
"@context": "https://springernature.github.io/scigraph/jsonld/sgcontext.json",
"about": [
{
"id": "http://purl.org/au-research/vocabulary/anzsrc-for/2008/02",
"inDefinedTermSet": "http://purl.org/au-research/vocabulary/anzsrc-for/2008/",
"name": "Physical Sciences",
"type": "DefinedTerm"
},
{
"id": "http://purl.org/au-research/vocabulary/anzsrc-for/2008/0202",
"inDefinedTermSet": "http://purl.org/au-research/vocabulary/anzsrc-for/2008/",
"name": "Atomic, Molecular, Nuclear, Particle and Plasma Physics",
"type": "DefinedTerm"
}
],
"author": [
{
"affiliation": {
"alternateName": "Ioffe Physical Technical Institute, Russian Academy of Sciences, 194021, St. Petersburg, Russia",
"id": "http://www.grid.ac/institutes/grid.423485.c",
"name": [
"Ioffe Physical Technical Institute, Russian Academy of Sciences, 194021, St. Petersburg, Russia"
],
"type": "Organization"
},
"familyName": "Ratnikov",
"givenName": "V. V.",
"id": "sg:person.016253552311.27",
"sameAs": [
"https://app.dimensions.ai/discover/publication?and_facet_researcher=ur.016253552311.27"
],
"type": "Person"
},
{
"affiliation": {
"alternateName": "Ioffe Physical Technical Institute, Russian Academy of Sciences, 194021, St. Petersburg, Russia",
"id": "http://www.grid.ac/institutes/grid.423485.c",
"name": [
"Ioffe Physical Technical Institute, Russian Academy of Sciences, 194021, St. Petersburg, Russia"
],
"type": "Organization"
},
"familyName": "Nechaev",
"givenName": "D. V.",
"id": "sg:person.012053211625.45",
"sameAs": [
"https://app.dimensions.ai/discover/publication?and_facet_researcher=ur.012053211625.45"
],
"type": "Person"
},
{
"affiliation": {
"alternateName": "Ioffe Physical Technical Institute, Russian Academy of Sciences, 194021, St. Petersburg, Russia",
"id": "http://www.grid.ac/institutes/grid.423485.c",
"name": [
"Ioffe Physical Technical Institute, Russian Academy of Sciences, 194021, St. Petersburg, Russia"
],
"type": "Organization"
},
"familyName": "Myasoedov",
"givenName": "A. V.",
"type": "Person"
},
{
"affiliation": {
"alternateName": "Ioffe Physical Technical Institute, Russian Academy of Sciences, 194021, St. Petersburg, Russia",
"id": "http://www.grid.ac/institutes/grid.423485.c",
"name": [
"Ioffe Physical Technical Institute, Russian Academy of Sciences, 194021, St. Petersburg, Russia"
],
"type": "Organization"
},
"familyName": "Koshelev",
"givenName": "O. A.",
"id": "sg:person.013534467074.13",
"sameAs": [
"https://app.dimensions.ai/discover/publication?and_facet_researcher=ur.013534467074.13"
],
"type": "Person"
},
{
"affiliation": {
"alternateName": "Ioffe Physical Technical Institute, Russian Academy of Sciences, 194021, St. Petersburg, Russia",
"id": "http://www.grid.ac/institutes/grid.423485.c",
"name": [
"Ioffe Physical Technical Institute, Russian Academy of Sciences, 194021, St. Petersburg, Russia"
],
"type": "Organization"
},
"familyName": "Zhmerik",
"givenName": "V. N.",
"id": "sg:person.011240004551.84",
"sameAs": [
"https://app.dimensions.ai/discover/publication?and_facet_researcher=ur.011240004551.84"
],
"type": "Person"
}
],
"citation": [
{
"id": "sg:pub.10.1134/s1063785017030130",
"sameAs": [
"https://app.dimensions.ai/details/publication/pub.1084862268",
"https://doi.org/10.1134/s1063785017030130"
],
"type": "CreativeWork"
},
{
"id": "sg:pub.10.1134/1.1130722",
"sameAs": [
"https://app.dimensions.ai/details/publication/pub.1043783876",
"https://doi.org/10.1134/1.1130722"
],
"type": "CreativeWork"
},
{
"id": "sg:pub.10.1557/jmr.1999.0468",
"sameAs": [
"https://app.dimensions.ai/details/publication/pub.1000787635",
"https://doi.org/10.1557/jmr.1999.0468"
],
"type": "CreativeWork"
}
],
"datePublished": "2020-04",
"datePublishedReg": "2020-04-01",
"description": "AlN/c-sapphire templates grown by plasma-activated molecular beam epitaxy have been studied using multicrystal X-ray diffractometry and a multi-beam optical stress meter system. Studies of the seed and buffer layers grown at different ratios of Al and N* growth flows and substrate temperatures have shown that templates with small tensile elastic stresses (<0.5 GPa) and densities of screw and edge grown-in dislocations 4 \u00d7 108 and 8 \u00d7 109 cm\u22122, respectively, can be produced.",
"genre": "article",
"id": "sg:pub.10.1134/s1063785020040240",
"inLanguage": "en",
"isAccessibleForFree": false,
"isPartOf": [
{
"id": "sg:journal.1136630",
"issn": [
"0320-0116",
"0360-120X"
],
"name": "Technical Physics Letters",
"publisher": "Pleiades Publishing",
"type": "Periodical"
},
{
"issueNumber": "4",
"type": "PublicationIssue"
},
{
"type": "PublicationVolume",
"volumeNumber": "46"
}
],
"keywords": [
"molecular beam epitaxy",
"beam epitaxy",
"plasma-activated molecular beam epitaxy",
"substrate temperature",
"X-ray diffractometry",
"buffer layer",
"epitaxy",
"tensile elastic stress",
"density of screw",
"density",
"growth flow",
"diffractometry",
"layer",
"Grown",
"temperature",
"al",
"template",
"elastic stresses",
"meter system",
"different ratios",
"ratio",
"dislocations",
"system",
"flow",
"study",
"stress",
"seeds",
"screws"
],
"name": "Decreasing Density of Grown-in Dislocations in AlN/c-Sapphire Templates Grown by Plasma-Activated Molecular Beam Epitaxy",
"pagination": "389-392",
"productId": [
{
"name": "dimensions_id",
"type": "PropertyValue",
"value": [
"pub.1128249360"
]
},
{
"name": "doi",
"type": "PropertyValue",
"value": [
"10.1134/s1063785020040240"
]
}
],
"sameAs": [
"https://doi.org/10.1134/s1063785020040240",
"https://app.dimensions.ai/details/publication/pub.1128249360"
],
"sdDataset": "articles",
"sdDatePublished": "2022-05-10T10:24",
"sdLicense": "https://scigraph.springernature.com/explorer/license/",
"sdPublisher": {
"name": "Springer Nature - SN SciGraph project",
"type": "Organization"
},
"sdSource": "s3://com-springernature-scigraph/baseset/20220509/entities/gbq_results/article/article_850.jsonl",
"type": "ScholarlyArticle",
"url": "https://doi.org/10.1134/s1063785020040240"
}
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