Complex use of the diffraction techniques in depth profiling of the crystal lattice parameter and composition of InGaAs/GaAs gradient layers View Full Text


Ontology type: schema:ScholarlyArticle     


Article Info

DATE

2016-05

AUTHORS

M. V. Baidakova, D. A. Kirilenko, A. A. Sitnikova, M. A. Yagovkina, G. V. Klimko, S. V. Sorokin, I. V. Sedova, S. V. Ivanov, A. E. Romanov

ABSTRACT

A technique is proposed for testing thick (1 μm and larger) gradient layers with the composition and relaxation degree alternating over the layer depth on the basis of comparative analysis of X-ray scattered intensity maps in the reciprocal space and depth profiles of the crystal lattice parameters obtained by electron microdiffraction. The informativity of the proposed technique is demonstrated using the example of an InxGa1–xAs/GaAs layer with linear depth variation in x. Complex representation of the diffraction data in the form of the depth-profiled reciprocal space map allows taking into account the additional relaxation caused by thinning electron microscopy specimens. More... »

PAGES

464-467

References to SciGraph publications

Journal

TITLE

Technical Physics Letters

ISSUE

5

VOLUME

42

Author Affiliations

Identifiers

URI

http://scigraph.springernature.com/pub.10.1134/s1063785016050023

DOI

http://dx.doi.org/10.1134/s1063785016050023

DIMENSIONS

https://app.dimensions.ai/details/publication/pub.1015543613


Indexing Status Check whether this publication has been indexed by Scopus and Web Of Science using the SN Indexing Status Tool
Incoming Citations Browse incoming citations for this publication using opencitations.net

JSON-LD is the canonical representation for SciGraph data.

TIP: You can open this SciGraph record using an external JSON-LD service: JSON-LD Playground Google SDTT

[
  {
    "@context": "https://springernature.github.io/scigraph/jsonld/sgcontext.json", 
    "about": [
      {
        "id": "http://purl.org/au-research/vocabulary/anzsrc-for/2008/0403", 
        "inDefinedTermSet": "http://purl.org/au-research/vocabulary/anzsrc-for/2008/", 
        "name": "Geology", 
        "type": "DefinedTerm"
      }, 
      {
        "id": "http://purl.org/au-research/vocabulary/anzsrc-for/2008/04", 
        "inDefinedTermSet": "http://purl.org/au-research/vocabulary/anzsrc-for/2008/", 
        "name": "Earth Sciences", 
        "type": "DefinedTerm"
      }
    ], 
    "author": [
      {
        "affiliation": {
          "alternateName": "ITMO University", 
          "id": "https://www.grid.ac/institutes/grid.35915.3b", 
          "name": [
            "Ioffe Physical Technical Institute, Russian Academy of Sciences, 194021, St. Petersburg, Russia", 
            "St. Petersburg National Research University of Information Technologies, Mechanics, and Optics (ITMO University), 197101, St. Petersburg, Russia"
          ], 
          "type": "Organization"
        }, 
        "familyName": "Baidakova", 
        "givenName": "M. V.", 
        "id": "sg:person.015444514517.48", 
        "sameAs": [
          "https://app.dimensions.ai/discover/publication?and_facet_researcher=ur.015444514517.48"
        ], 
        "type": "Person"
      }, 
      {
        "affiliation": {
          "alternateName": "ITMO University", 
          "id": "https://www.grid.ac/institutes/grid.35915.3b", 
          "name": [
            "Ioffe Physical Technical Institute, Russian Academy of Sciences, 194021, St. Petersburg, Russia", 
            "St. Petersburg National Research University of Information Technologies, Mechanics, and Optics (ITMO University), 197101, St. Petersburg, Russia"
          ], 
          "type": "Organization"
        }, 
        "familyName": "Kirilenko", 
        "givenName": "D. A.", 
        "id": "sg:person.01217546552.16", 
        "sameAs": [
          "https://app.dimensions.ai/discover/publication?and_facet_researcher=ur.01217546552.16"
        ], 
        "type": "Person"
      }, 
      {
        "affiliation": {
          "alternateName": "Ioffe Institute", 
          "id": "https://www.grid.ac/institutes/grid.423485.c", 
          "name": [
            "Ioffe Physical Technical Institute, Russian Academy of Sciences, 194021, St. Petersburg, Russia"
          ], 
          "type": "Organization"
        }, 
        "familyName": "Sitnikova", 
        "givenName": "A. A.", 
        "id": "sg:person.015133024650.23", 
        "sameAs": [
          "https://app.dimensions.ai/discover/publication?and_facet_researcher=ur.015133024650.23"
        ], 
        "type": "Person"
      }, 
      {
        "affiliation": {
          "alternateName": "Ioffe Institute", 
          "id": "https://www.grid.ac/institutes/grid.423485.c", 
          "name": [
            "Ioffe Physical Technical Institute, Russian Academy of Sciences, 194021, St. Petersburg, Russia"
          ], 
          "type": "Organization"
        }, 
        "familyName": "Yagovkina", 
        "givenName": "M. A.", 
        "id": "sg:person.016026355533.82", 
        "sameAs": [
          "https://app.dimensions.ai/discover/publication?and_facet_researcher=ur.016026355533.82"
        ], 
        "type": "Person"
      }, 
      {
        "affiliation": {
          "alternateName": "Ioffe Institute", 
          "id": "https://www.grid.ac/institutes/grid.423485.c", 
          "name": [
            "Ioffe Physical Technical Institute, Russian Academy of Sciences, 194021, St. Petersburg, Russia"
          ], 
          "type": "Organization"
        }, 
        "familyName": "Klimko", 
        "givenName": "G. V.", 
        "id": "sg:person.013335174157.15", 
        "sameAs": [
          "https://app.dimensions.ai/discover/publication?and_facet_researcher=ur.013335174157.15"
        ], 
        "type": "Person"
      }, 
      {
        "affiliation": {
          "alternateName": "Ioffe Institute", 
          "id": "https://www.grid.ac/institutes/grid.423485.c", 
          "name": [
            "Ioffe Physical Technical Institute, Russian Academy of Sciences, 194021, St. Petersburg, Russia"
          ], 
          "type": "Organization"
        }, 
        "familyName": "Sorokin", 
        "givenName": "S. V.", 
        "id": "sg:person.012454020751.10", 
        "sameAs": [
          "https://app.dimensions.ai/discover/publication?and_facet_researcher=ur.012454020751.10"
        ], 
        "type": "Person"
      }, 
      {
        "affiliation": {
          "alternateName": "Ioffe Institute", 
          "id": "https://www.grid.ac/institutes/grid.423485.c", 
          "name": [
            "Ioffe Physical Technical Institute, Russian Academy of Sciences, 194021, St. Petersburg, Russia"
          ], 
          "type": "Organization"
        }, 
        "familyName": "Sedova", 
        "givenName": "I. V.", 
        "id": "sg:person.014533010336.56", 
        "sameAs": [
          "https://app.dimensions.ai/discover/publication?and_facet_researcher=ur.014533010336.56"
        ], 
        "type": "Person"
      }, 
      {
        "affiliation": {
          "alternateName": "Ioffe Institute", 
          "id": "https://www.grid.ac/institutes/grid.423485.c", 
          "name": [
            "Ioffe Physical Technical Institute, Russian Academy of Sciences, 194021, St. Petersburg, Russia"
          ], 
          "type": "Organization"
        }, 
        "familyName": "Ivanov", 
        "givenName": "S. V.", 
        "id": "sg:person.01064304443.31", 
        "sameAs": [
          "https://app.dimensions.ai/discover/publication?and_facet_researcher=ur.01064304443.31"
        ], 
        "type": "Person"
      }, 
      {
        "affiliation": {
          "alternateName": "ITMO University", 
          "id": "https://www.grid.ac/institutes/grid.35915.3b", 
          "name": [
            "Ioffe Physical Technical Institute, Russian Academy of Sciences, 194021, St. Petersburg, Russia", 
            "St. Petersburg National Research University of Information Technologies, Mechanics, and Optics (ITMO University), 197101, St. Petersburg, Russia"
          ], 
          "type": "Organization"
        }, 
        "familyName": "Romanov", 
        "givenName": "A. E.", 
        "id": "sg:person.01316324045.94", 
        "sameAs": [
          "https://app.dimensions.ai/discover/publication?and_facet_researcher=ur.01316324045.94"
        ], 
        "type": "Person"
      }
    ], 
    "citation": [
      {
        "id": "https://doi.org/10.1016/0022-0248(94)90724-2", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1012528186"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "https://doi.org/10.1016/0022-0248(94)90724-2", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1012528186"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "https://app.dimensions.ai/details/publication/pub.1032240546", 
        "type": "CreativeWork"
      }, 
      {
        "id": "sg:pub.10.1007/978-1-4757-4050-9", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1032240546", 
          "https://doi.org/10.1007/978-1-4757-4050-9"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "sg:pub.10.1007/978-1-4757-4050-9", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1032240546", 
          "https://doi.org/10.1007/978-1-4757-4050-9"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "https://doi.org/10.1142/p289", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1098912679"
        ], 
        "type": "CreativeWork"
      }
    ], 
    "datePublished": "2016-05", 
    "datePublishedReg": "2016-05-01", 
    "description": "A technique is proposed for testing thick (1 \u03bcm and larger) gradient layers with the composition and relaxation degree alternating over the layer depth on the basis of comparative analysis of X-ray scattered intensity maps in the reciprocal space and depth profiles of the crystal lattice parameters obtained by electron microdiffraction. The informativity of the proposed technique is demonstrated using the example of an InxGa1\u2013xAs/GaAs layer with linear depth variation in x. Complex representation of the diffraction data in the form of the depth-profiled reciprocal space map allows taking into account the additional relaxation caused by thinning electron microscopy specimens.", 
    "genre": "research_article", 
    "id": "sg:pub.10.1134/s1063785016050023", 
    "inLanguage": [
      "en"
    ], 
    "isAccessibleForFree": false, 
    "isPartOf": [
      {
        "id": "sg:journal.1136630", 
        "issn": [
          "1063-7850", 
          "1090-6533"
        ], 
        "name": "Technical Physics Letters", 
        "type": "Periodical"
      }, 
      {
        "issueNumber": "5", 
        "type": "PublicationIssue"
      }, 
      {
        "type": "PublicationVolume", 
        "volumeNumber": "42"
      }
    ], 
    "name": "Complex use of the diffraction techniques in depth profiling of the crystal lattice parameter and composition of InGaAs/GaAs gradient layers", 
    "pagination": "464-467", 
    "productId": [
      {
        "name": "readcube_id", 
        "type": "PropertyValue", 
        "value": [
          "4a0ea4aa51fceefa3c5e1494225020bec999fc88910227b811723e2ef3158cea"
        ]
      }, 
      {
        "name": "doi", 
        "type": "PropertyValue", 
        "value": [
          "10.1134/s1063785016050023"
        ]
      }, 
      {
        "name": "dimensions_id", 
        "type": "PropertyValue", 
        "value": [
          "pub.1015543613"
        ]
      }
    ], 
    "sameAs": [
      "https://doi.org/10.1134/s1063785016050023", 
      "https://app.dimensions.ai/details/publication/pub.1015543613"
    ], 
    "sdDataset": "articles", 
    "sdDatePublished": "2019-04-11T13:12", 
    "sdLicense": "https://scigraph.springernature.com/explorer/license/", 
    "sdPublisher": {
      "name": "Springer Nature - SN SciGraph project", 
      "type": "Organization"
    }, 
    "sdSource": "s3://com-uberresearch-data-dimensions-target-20181106-alternative/cleanup/v134/2549eaecd7973599484d7c17b260dba0a4ecb94b/merge/v9/a6c9fde33151104705d4d7ff012ea9563521a3ce/jats-lookup/v90/0000000367_0000000367/records_88257_00000000.jsonl", 
    "type": "ScholarlyArticle", 
    "url": "https://link.springer.com/10.1134%2FS1063785016050023"
  }
]
 

Download the RDF metadata as:  json-ld nt turtle xml License info

HOW TO GET THIS DATA PROGRAMMATICALLY:

JSON-LD is a popular format for linked data which is fully compatible with JSON.

curl -H 'Accept: application/ld+json' 'https://scigraph.springernature.com/pub.10.1134/s1063785016050023'

N-Triples is a line-based linked data format ideal for batch operations.

curl -H 'Accept: application/n-triples' 'https://scigraph.springernature.com/pub.10.1134/s1063785016050023'

Turtle is a human-readable linked data format.

curl -H 'Accept: text/turtle' 'https://scigraph.springernature.com/pub.10.1134/s1063785016050023'

RDF/XML is a standard XML format for linked data.

curl -H 'Accept: application/rdf+xml' 'https://scigraph.springernature.com/pub.10.1134/s1063785016050023'


 

This table displays all metadata directly associated to this object as RDF triples.

133 TRIPLES      21 PREDICATES      31 URIs      19 LITERALS      7 BLANK NODES

Subject Predicate Object
1 sg:pub.10.1134/s1063785016050023 schema:about anzsrc-for:04
2 anzsrc-for:0403
3 schema:author N0bc66d4331b74f598d8e245650f34fcc
4 schema:citation sg:pub.10.1007/978-1-4757-4050-9
5 https://app.dimensions.ai/details/publication/pub.1032240546
6 https://doi.org/10.1016/0022-0248(94)90724-2
7 https://doi.org/10.1142/p289
8 schema:datePublished 2016-05
9 schema:datePublishedReg 2016-05-01
10 schema:description A technique is proposed for testing thick (1 μm and larger) gradient layers with the composition and relaxation degree alternating over the layer depth on the basis of comparative analysis of X-ray scattered intensity maps in the reciprocal space and depth profiles of the crystal lattice parameters obtained by electron microdiffraction. The informativity of the proposed technique is demonstrated using the example of an InxGa1–xAs/GaAs layer with linear depth variation in x. Complex representation of the diffraction data in the form of the depth-profiled reciprocal space map allows taking into account the additional relaxation caused by thinning electron microscopy specimens.
11 schema:genre research_article
12 schema:inLanguage en
13 schema:isAccessibleForFree false
14 schema:isPartOf N1ba0a591b8224284add9c3c41773480a
15 Naa65857e081742138881036a0426f8ae
16 sg:journal.1136630
17 schema:name Complex use of the diffraction techniques in depth profiling of the crystal lattice parameter and composition of InGaAs/GaAs gradient layers
18 schema:pagination 464-467
19 schema:productId N42f2b406f81741789a9f5ea71fdd8218
20 N48f9cc8d4bc3417aa805efd688755908
21 N569c639caa114145bfab76100e9e0da7
22 schema:sameAs https://app.dimensions.ai/details/publication/pub.1015543613
23 https://doi.org/10.1134/s1063785016050023
24 schema:sdDatePublished 2019-04-11T13:12
25 schema:sdLicense https://scigraph.springernature.com/explorer/license/
26 schema:sdPublisher N7afc0a34a7fd41eb90bff0fad5b2723c
27 schema:url https://link.springer.com/10.1134%2FS1063785016050023
28 sgo:license sg:explorer/license/
29 sgo:sdDataset articles
30 rdf:type schema:ScholarlyArticle
31 N0bc66d4331b74f598d8e245650f34fcc rdf:first sg:person.015444514517.48
32 rdf:rest Nf23bb1f0ef7847158bfe33d17d8088f5
33 N0e19a748cadf4aad93a833d80c4b8693 rdf:first sg:person.01064304443.31
34 rdf:rest N7d44caf3394e4fcfa9211a12b6057cd0
35 N14d74cda38944631abe3a77241de9f1c rdf:first sg:person.015133024650.23
36 rdf:rest N1b60d0e713924903ad7d8d9509c1bedf
37 N1b60d0e713924903ad7d8d9509c1bedf rdf:first sg:person.016026355533.82
38 rdf:rest N1f65da14adc848969eba88d86079e22b
39 N1ba0a591b8224284add9c3c41773480a schema:volumeNumber 42
40 rdf:type schema:PublicationVolume
41 N1f65da14adc848969eba88d86079e22b rdf:first sg:person.013335174157.15
42 rdf:rest N2ddb8dde64c548458494da8a4184825f
43 N2ddb8dde64c548458494da8a4184825f rdf:first sg:person.012454020751.10
44 rdf:rest N5b518959b0ef4db9bd40ab5a73153312
45 N42f2b406f81741789a9f5ea71fdd8218 schema:name readcube_id
46 schema:value 4a0ea4aa51fceefa3c5e1494225020bec999fc88910227b811723e2ef3158cea
47 rdf:type schema:PropertyValue
48 N48f9cc8d4bc3417aa805efd688755908 schema:name doi
49 schema:value 10.1134/s1063785016050023
50 rdf:type schema:PropertyValue
51 N569c639caa114145bfab76100e9e0da7 schema:name dimensions_id
52 schema:value pub.1015543613
53 rdf:type schema:PropertyValue
54 N5b518959b0ef4db9bd40ab5a73153312 rdf:first sg:person.014533010336.56
55 rdf:rest N0e19a748cadf4aad93a833d80c4b8693
56 N7afc0a34a7fd41eb90bff0fad5b2723c schema:name Springer Nature - SN SciGraph project
57 rdf:type schema:Organization
58 N7d44caf3394e4fcfa9211a12b6057cd0 rdf:first sg:person.01316324045.94
59 rdf:rest rdf:nil
60 Naa65857e081742138881036a0426f8ae schema:issueNumber 5
61 rdf:type schema:PublicationIssue
62 Nf23bb1f0ef7847158bfe33d17d8088f5 rdf:first sg:person.01217546552.16
63 rdf:rest N14d74cda38944631abe3a77241de9f1c
64 anzsrc-for:04 schema:inDefinedTermSet anzsrc-for:
65 schema:name Earth Sciences
66 rdf:type schema:DefinedTerm
67 anzsrc-for:0403 schema:inDefinedTermSet anzsrc-for:
68 schema:name Geology
69 rdf:type schema:DefinedTerm
70 sg:journal.1136630 schema:issn 1063-7850
71 1090-6533
72 schema:name Technical Physics Letters
73 rdf:type schema:Periodical
74 sg:person.01064304443.31 schema:affiliation https://www.grid.ac/institutes/grid.423485.c
75 schema:familyName Ivanov
76 schema:givenName S. V.
77 schema:sameAs https://app.dimensions.ai/discover/publication?and_facet_researcher=ur.01064304443.31
78 rdf:type schema:Person
79 sg:person.01217546552.16 schema:affiliation https://www.grid.ac/institutes/grid.35915.3b
80 schema:familyName Kirilenko
81 schema:givenName D. A.
82 schema:sameAs https://app.dimensions.ai/discover/publication?and_facet_researcher=ur.01217546552.16
83 rdf:type schema:Person
84 sg:person.012454020751.10 schema:affiliation https://www.grid.ac/institutes/grid.423485.c
85 schema:familyName Sorokin
86 schema:givenName S. V.
87 schema:sameAs https://app.dimensions.ai/discover/publication?and_facet_researcher=ur.012454020751.10
88 rdf:type schema:Person
89 sg:person.01316324045.94 schema:affiliation https://www.grid.ac/institutes/grid.35915.3b
90 schema:familyName Romanov
91 schema:givenName A. E.
92 schema:sameAs https://app.dimensions.ai/discover/publication?and_facet_researcher=ur.01316324045.94
93 rdf:type schema:Person
94 sg:person.013335174157.15 schema:affiliation https://www.grid.ac/institutes/grid.423485.c
95 schema:familyName Klimko
96 schema:givenName G. V.
97 schema:sameAs https://app.dimensions.ai/discover/publication?and_facet_researcher=ur.013335174157.15
98 rdf:type schema:Person
99 sg:person.014533010336.56 schema:affiliation https://www.grid.ac/institutes/grid.423485.c
100 schema:familyName Sedova
101 schema:givenName I. V.
102 schema:sameAs https://app.dimensions.ai/discover/publication?and_facet_researcher=ur.014533010336.56
103 rdf:type schema:Person
104 sg:person.015133024650.23 schema:affiliation https://www.grid.ac/institutes/grid.423485.c
105 schema:familyName Sitnikova
106 schema:givenName A. A.
107 schema:sameAs https://app.dimensions.ai/discover/publication?and_facet_researcher=ur.015133024650.23
108 rdf:type schema:Person
109 sg:person.015444514517.48 schema:affiliation https://www.grid.ac/institutes/grid.35915.3b
110 schema:familyName Baidakova
111 schema:givenName M. V.
112 schema:sameAs https://app.dimensions.ai/discover/publication?and_facet_researcher=ur.015444514517.48
113 rdf:type schema:Person
114 sg:person.016026355533.82 schema:affiliation https://www.grid.ac/institutes/grid.423485.c
115 schema:familyName Yagovkina
116 schema:givenName M. A.
117 schema:sameAs https://app.dimensions.ai/discover/publication?and_facet_researcher=ur.016026355533.82
118 rdf:type schema:Person
119 sg:pub.10.1007/978-1-4757-4050-9 schema:sameAs https://app.dimensions.ai/details/publication/pub.1032240546
120 https://doi.org/10.1007/978-1-4757-4050-9
121 rdf:type schema:CreativeWork
122 https://app.dimensions.ai/details/publication/pub.1032240546 schema:CreativeWork
123 https://doi.org/10.1016/0022-0248(94)90724-2 schema:sameAs https://app.dimensions.ai/details/publication/pub.1012528186
124 rdf:type schema:CreativeWork
125 https://doi.org/10.1142/p289 schema:sameAs https://app.dimensions.ai/details/publication/pub.1098912679
126 rdf:type schema:CreativeWork
127 https://www.grid.ac/institutes/grid.35915.3b schema:alternateName ITMO University
128 schema:name Ioffe Physical Technical Institute, Russian Academy of Sciences, 194021, St. Petersburg, Russia
129 St. Petersburg National Research University of Information Technologies, Mechanics, and Optics (ITMO University), 197101, St. Petersburg, Russia
130 rdf:type schema:Organization
131 https://www.grid.ac/institutes/grid.423485.c schema:alternateName Ioffe Institute
132 schema:name Ioffe Physical Technical Institute, Russian Academy of Sciences, 194021, St. Petersburg, Russia
133 rdf:type schema:Organization
 




Preview window. Press ESC to close (or click here)


...