The effect of Al target current on the structure and properties of (Nb2Al)N films with an amorphous AlN phase View Full Text


Ontology type: schema:ScholarlyArticle     


Article Info

DATE

2015-07

AUTHORS

V. I. Ivashchenko, A. D. Pogrebnjak, O. V. Sobol’, V. N. Rogoz, A. A. Meilekhov, S. N. Dub, A. I. Kupchishin

ABSTRACT

Nanocomposite films based on (Nb2Al)N intermetallic nitride have been obtained by the method of magnetron sputtering. X-ray diffraction analysis revealed two stable states of the crystalline structure: (i) NbN with low amount (within 5 at %) of dissolved Al in a composition close to (Nb2Al)N and (ii) an amorphous component related to aluminum nitride formed by reactive magnetron sputtering. The substructural characteristics (grain size and microdeformation level) are sensitive to the current via Al target and exhibit correlation with nanohardness and Knoop hardness of the film, which vary within 29–33.5 and 46–48 GPa, respectively. More... »

PAGES

697-700

Identifiers

URI

http://scigraph.springernature.com/pub.10.1134/s1063785015070214

DOI

http://dx.doi.org/10.1134/s1063785015070214

DIMENSIONS

https://app.dimensions.ai/details/publication/pub.1005366189


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[
  {
    "@context": "https://springernature.github.io/scigraph/jsonld/sgcontext.json", 
    "about": [
      {
        "id": "http://purl.org/au-research/vocabulary/anzsrc-for/2008/0912", 
        "inDefinedTermSet": "http://purl.org/au-research/vocabulary/anzsrc-for/2008/", 
        "name": "Materials Engineering", 
        "type": "DefinedTerm"
      }, 
      {
        "id": "http://purl.org/au-research/vocabulary/anzsrc-for/2008/09", 
        "inDefinedTermSet": "http://purl.org/au-research/vocabulary/anzsrc-for/2008/", 
        "name": "Engineering", 
        "type": "DefinedTerm"
      }
    ], 
    "author": [
      {
        "affiliation": {
          "alternateName": "Frantsevich Institute for Problems in Materials Science", 
          "id": "https://www.grid.ac/institutes/grid.425103.1", 
          "name": [
            "Institute for Problems in Materials Science, National Academy of Sciences of Ukraine, 03680, Kyiv-142, Ukraine"
          ], 
          "type": "Organization"
        }, 
        "familyName": "Ivashchenko", 
        "givenName": "V. I.", 
        "id": "sg:person.0743613312.75", 
        "sameAs": [
          "https://app.dimensions.ai/discover/publication?and_facet_researcher=ur.0743613312.75"
        ], 
        "type": "Person"
      }, 
      {
        "affiliation": {
          "alternateName": "Sumy National Agrarian University", 
          "id": "https://www.grid.ac/institutes/grid.446020.4", 
          "name": [
            "Sumy National University, 40007, Sumy, Ukraine"
          ], 
          "type": "Organization"
        }, 
        "familyName": "Pogrebnjak", 
        "givenName": "A. D.", 
        "id": "sg:person.0735532446.26", 
        "sameAs": [
          "https://app.dimensions.ai/discover/publication?and_facet_researcher=ur.0735532446.26"
        ], 
        "type": "Person"
      }, 
      {
        "affiliation": {
          "alternateName": "Kharkiv Polytechnic Institute", 
          "id": "https://www.grid.ac/institutes/grid.18192.33", 
          "name": [
            "National Technical University Kharkiv Polytechnic Institute, 61002, Kharkiv, Ukraine"
          ], 
          "type": "Organization"
        }, 
        "familyName": "Sobol\u2019", 
        "givenName": "O. V.", 
        "id": "sg:person.016455550461.26", 
        "sameAs": [
          "https://app.dimensions.ai/discover/publication?and_facet_researcher=ur.016455550461.26"
        ], 
        "type": "Person"
      }, 
      {
        "affiliation": {
          "alternateName": "Sumy National Agrarian University", 
          "id": "https://www.grid.ac/institutes/grid.446020.4", 
          "name": [
            "Sumy National University, 40007, Sumy, Ukraine"
          ], 
          "type": "Organization"
        }, 
        "familyName": "Rogoz", 
        "givenName": "V. N.", 
        "id": "sg:person.015253351571.01", 
        "sameAs": [
          "https://app.dimensions.ai/discover/publication?and_facet_researcher=ur.015253351571.01"
        ], 
        "type": "Person"
      }, 
      {
        "affiliation": {
          "alternateName": "Kharkiv Polytechnic Institute", 
          "id": "https://www.grid.ac/institutes/grid.18192.33", 
          "name": [
            "National Technical University Kharkiv Polytechnic Institute, 61002, Kharkiv, Ukraine"
          ], 
          "type": "Organization"
        }, 
        "familyName": "Meilekhov", 
        "givenName": "A. A.", 
        "id": "sg:person.012202122261.44", 
        "sameAs": [
          "https://app.dimensions.ai/discover/publication?and_facet_researcher=ur.012202122261.44"
        ], 
        "type": "Person"
      }, 
      {
        "affiliation": {
          "alternateName": "V.Bakul Institute for Superhard materials", 
          "id": "https://www.grid.ac/institutes/grid.438873.3", 
          "name": [
            "V. Bakul Institute for Superhard Materials, 04074, Kyiv, Ukraine"
          ], 
          "type": "Organization"
        }, 
        "familyName": "Dub", 
        "givenName": "S. N.", 
        "id": "sg:person.011401767341.66", 
        "sameAs": [
          "https://app.dimensions.ai/discover/publication?and_facet_researcher=ur.011401767341.66"
        ], 
        "type": "Person"
      }, 
      {
        "affiliation": {
          "name": [
            "Abai Kazakh National Pedagogical University, 050010, Almaty, Kazakhstan"
          ], 
          "type": "Organization"
        }, 
        "familyName": "Kupchishin", 
        "givenName": "A. I.", 
        "id": "sg:person.011166140031.40", 
        "sameAs": [
          "https://app.dimensions.ai/discover/publication?and_facet_researcher=ur.011166140031.40"
        ], 
        "type": "Person"
      }
    ], 
    "citation": [
      {
        "id": "https://doi.org/10.1557/jmr.2008.0168", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1006301933"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "https://doi.org/10.1088/0022-3727/43/14/145403", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1017041746"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "https://doi.org/10.1016/s0168-583x(98)00679-x", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1022775234"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "https://doi.org/10.1016/j.surfcoat.2010.01.023", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1034359642"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "https://doi.org/10.1016/0042-207x(95)00161-1", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1044761706"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "https://doi.org/10.1116/1.581425", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1062191472"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "https://doi.org/10.12693/aphyspola.125.1284", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1064623743"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "https://doi.org/10.1557/mrs2003.57", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1067968432"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "https://doi.org/10.4028/www.scientific.net/ssp.127.195", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1072153217"
        ], 
        "type": "CreativeWork"
      }
    ], 
    "datePublished": "2015-07", 
    "datePublishedReg": "2015-07-01", 
    "description": "Nanocomposite films based on (Nb2Al)N intermetallic nitride have been obtained by the method of magnetron sputtering. X-ray diffraction analysis revealed two stable states of the crystalline structure: (i) NbN with low amount (within 5 at %) of dissolved Al in a composition close to (Nb2Al)N and (ii) an amorphous component related to aluminum nitride formed by reactive magnetron sputtering. The substructural characteristics (grain size and microdeformation level) are sensitive to the current via Al target and exhibit correlation with nanohardness and Knoop hardness of the film, which vary within 29\u201333.5 and 46\u201348 GPa, respectively.", 
    "genre": "research_article", 
    "id": "sg:pub.10.1134/s1063785015070214", 
    "inLanguage": [
      "en"
    ], 
    "isAccessibleForFree": false, 
    "isPartOf": [
      {
        "id": "sg:journal.1136630", 
        "issn": [
          "1063-7850", 
          "1090-6533"
        ], 
        "name": "Technical Physics Letters", 
        "type": "Periodical"
      }, 
      {
        "issueNumber": "7", 
        "type": "PublicationIssue"
      }, 
      {
        "type": "PublicationVolume", 
        "volumeNumber": "41"
      }
    ], 
    "name": "The effect of Al target current on the structure and properties of (Nb2Al)N films with an amorphous AlN phase", 
    "pagination": "697-700", 
    "productId": [
      {
        "name": "readcube_id", 
        "type": "PropertyValue", 
        "value": [
          "1990da36be64ee20c108161600684cf1664df07e18b5f8d53e0e5d1f11262663"
        ]
      }, 
      {
        "name": "doi", 
        "type": "PropertyValue", 
        "value": [
          "10.1134/s1063785015070214"
        ]
      }, 
      {
        "name": "dimensions_id", 
        "type": "PropertyValue", 
        "value": [
          "pub.1005366189"
        ]
      }
    ], 
    "sameAs": [
      "https://doi.org/10.1134/s1063785015070214", 
      "https://app.dimensions.ai/details/publication/pub.1005366189"
    ], 
    "sdDataset": "articles", 
    "sdDatePublished": "2019-04-10T23:22", 
    "sdLicense": "https://scigraph.springernature.com/explorer/license/", 
    "sdPublisher": {
      "name": "Springer Nature - SN SciGraph project", 
      "type": "Organization"
    }, 
    "sdSource": "s3://com-uberresearch-data-dimensions-target-20181106-alternative/cleanup/v134/2549eaecd7973599484d7c17b260dba0a4ecb94b/merge/v9/a6c9fde33151104705d4d7ff012ea9563521a3ce/jats-lookup/v90/0000000001_0000000264/records_8693_00000503.jsonl", 
    "type": "ScholarlyArticle", 
    "url": "http://link.springer.com/10.1134%2FS1063785015070214"
  }
]
 

Download the RDF metadata as:  json-ld nt turtle xml License info

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This table displays all metadata directly associated to this object as RDF triples.

141 TRIPLES      21 PREDICATES      36 URIs      19 LITERALS      7 BLANK NODES

Subject Predicate Object
1 sg:pub.10.1134/s1063785015070214 schema:about anzsrc-for:09
2 anzsrc-for:0912
3 schema:author N7e65d0a6c3204fb488c08e83a7b510a8
4 schema:citation https://doi.org/10.1016/0042-207x(95)00161-1
5 https://doi.org/10.1016/j.surfcoat.2010.01.023
6 https://doi.org/10.1016/s0168-583x(98)00679-x
7 https://doi.org/10.1088/0022-3727/43/14/145403
8 https://doi.org/10.1116/1.581425
9 https://doi.org/10.12693/aphyspola.125.1284
10 https://doi.org/10.1557/jmr.2008.0168
11 https://doi.org/10.1557/mrs2003.57
12 https://doi.org/10.4028/www.scientific.net/ssp.127.195
13 schema:datePublished 2015-07
14 schema:datePublishedReg 2015-07-01
15 schema:description Nanocomposite films based on (Nb2Al)N intermetallic nitride have been obtained by the method of magnetron sputtering. X-ray diffraction analysis revealed two stable states of the crystalline structure: (i) NbN with low amount (within 5 at %) of dissolved Al in a composition close to (Nb2Al)N and (ii) an amorphous component related to aluminum nitride formed by reactive magnetron sputtering. The substructural characteristics (grain size and microdeformation level) are sensitive to the current via Al target and exhibit correlation with nanohardness and Knoop hardness of the film, which vary within 29–33.5 and 46–48 GPa, respectively.
16 schema:genre research_article
17 schema:inLanguage en
18 schema:isAccessibleForFree false
19 schema:isPartOf N1b67b48d56544aeebe24b6008f628292
20 Na20b7b1a954e4fbdadf356201f62d1a8
21 sg:journal.1136630
22 schema:name The effect of Al target current on the structure and properties of (Nb2Al)N films with an amorphous AlN phase
23 schema:pagination 697-700
24 schema:productId N13bdae6179b24d4fa8fd910cab546730
25 Nac355e0d3b9b4dfa836fbbcffe7eba56
26 Nb275e84976c148888938e2af79f3e754
27 schema:sameAs https://app.dimensions.ai/details/publication/pub.1005366189
28 https://doi.org/10.1134/s1063785015070214
29 schema:sdDatePublished 2019-04-10T23:22
30 schema:sdLicense https://scigraph.springernature.com/explorer/license/
31 schema:sdPublisher N9305cca0407347f4b29ecf02064b3ce2
32 schema:url http://link.springer.com/10.1134%2FS1063785015070214
33 sgo:license sg:explorer/license/
34 sgo:sdDataset articles
35 rdf:type schema:ScholarlyArticle
36 N13bdae6179b24d4fa8fd910cab546730 schema:name dimensions_id
37 schema:value pub.1005366189
38 rdf:type schema:PropertyValue
39 N159fcd04999b4cd8b3f3a169dbc2727e rdf:first sg:person.0735532446.26
40 rdf:rest Nf0f8cee8b1f94f559465c393dd970bc4
41 N1b67b48d56544aeebe24b6008f628292 schema:volumeNumber 41
42 rdf:type schema:PublicationVolume
43 N6fde73f6213348bbbe37b9ffee57da82 rdf:first sg:person.015253351571.01
44 rdf:rest N8f39867f191b4ccb8a177124afa47498
45 N7899b705179d4e31b861a225b7db4656 rdf:first sg:person.011166140031.40
46 rdf:rest rdf:nil
47 N7e65d0a6c3204fb488c08e83a7b510a8 rdf:first sg:person.0743613312.75
48 rdf:rest N159fcd04999b4cd8b3f3a169dbc2727e
49 N8f39867f191b4ccb8a177124afa47498 rdf:first sg:person.012202122261.44
50 rdf:rest Ne98b14fa494e4e1fb025a4c96bca84b6
51 N9305cca0407347f4b29ecf02064b3ce2 schema:name Springer Nature - SN SciGraph project
52 rdf:type schema:Organization
53 Na20b7b1a954e4fbdadf356201f62d1a8 schema:issueNumber 7
54 rdf:type schema:PublicationIssue
55 Nac355e0d3b9b4dfa836fbbcffe7eba56 schema:name doi
56 schema:value 10.1134/s1063785015070214
57 rdf:type schema:PropertyValue
58 Nb275e84976c148888938e2af79f3e754 schema:name readcube_id
59 schema:value 1990da36be64ee20c108161600684cf1664df07e18b5f8d53e0e5d1f11262663
60 rdf:type schema:PropertyValue
61 Nce7129394e894ff7bc8000e0ac710fa0 schema:name Abai Kazakh National Pedagogical University, 050010, Almaty, Kazakhstan
62 rdf:type schema:Organization
63 Ne98b14fa494e4e1fb025a4c96bca84b6 rdf:first sg:person.011401767341.66
64 rdf:rest N7899b705179d4e31b861a225b7db4656
65 Nf0f8cee8b1f94f559465c393dd970bc4 rdf:first sg:person.016455550461.26
66 rdf:rest N6fde73f6213348bbbe37b9ffee57da82
67 anzsrc-for:09 schema:inDefinedTermSet anzsrc-for:
68 schema:name Engineering
69 rdf:type schema:DefinedTerm
70 anzsrc-for:0912 schema:inDefinedTermSet anzsrc-for:
71 schema:name Materials Engineering
72 rdf:type schema:DefinedTerm
73 sg:journal.1136630 schema:issn 1063-7850
74 1090-6533
75 schema:name Technical Physics Letters
76 rdf:type schema:Periodical
77 sg:person.011166140031.40 schema:affiliation Nce7129394e894ff7bc8000e0ac710fa0
78 schema:familyName Kupchishin
79 schema:givenName A. I.
80 schema:sameAs https://app.dimensions.ai/discover/publication?and_facet_researcher=ur.011166140031.40
81 rdf:type schema:Person
82 sg:person.011401767341.66 schema:affiliation https://www.grid.ac/institutes/grid.438873.3
83 schema:familyName Dub
84 schema:givenName S. N.
85 schema:sameAs https://app.dimensions.ai/discover/publication?and_facet_researcher=ur.011401767341.66
86 rdf:type schema:Person
87 sg:person.012202122261.44 schema:affiliation https://www.grid.ac/institutes/grid.18192.33
88 schema:familyName Meilekhov
89 schema:givenName A. A.
90 schema:sameAs https://app.dimensions.ai/discover/publication?and_facet_researcher=ur.012202122261.44
91 rdf:type schema:Person
92 sg:person.015253351571.01 schema:affiliation https://www.grid.ac/institutes/grid.446020.4
93 schema:familyName Rogoz
94 schema:givenName V. N.
95 schema:sameAs https://app.dimensions.ai/discover/publication?and_facet_researcher=ur.015253351571.01
96 rdf:type schema:Person
97 sg:person.016455550461.26 schema:affiliation https://www.grid.ac/institutes/grid.18192.33
98 schema:familyName Sobol’
99 schema:givenName O. V.
100 schema:sameAs https://app.dimensions.ai/discover/publication?and_facet_researcher=ur.016455550461.26
101 rdf:type schema:Person
102 sg:person.0735532446.26 schema:affiliation https://www.grid.ac/institutes/grid.446020.4
103 schema:familyName Pogrebnjak
104 schema:givenName A. D.
105 schema:sameAs https://app.dimensions.ai/discover/publication?and_facet_researcher=ur.0735532446.26
106 rdf:type schema:Person
107 sg:person.0743613312.75 schema:affiliation https://www.grid.ac/institutes/grid.425103.1
108 schema:familyName Ivashchenko
109 schema:givenName V. I.
110 schema:sameAs https://app.dimensions.ai/discover/publication?and_facet_researcher=ur.0743613312.75
111 rdf:type schema:Person
112 https://doi.org/10.1016/0042-207x(95)00161-1 schema:sameAs https://app.dimensions.ai/details/publication/pub.1044761706
113 rdf:type schema:CreativeWork
114 https://doi.org/10.1016/j.surfcoat.2010.01.023 schema:sameAs https://app.dimensions.ai/details/publication/pub.1034359642
115 rdf:type schema:CreativeWork
116 https://doi.org/10.1016/s0168-583x(98)00679-x schema:sameAs https://app.dimensions.ai/details/publication/pub.1022775234
117 rdf:type schema:CreativeWork
118 https://doi.org/10.1088/0022-3727/43/14/145403 schema:sameAs https://app.dimensions.ai/details/publication/pub.1017041746
119 rdf:type schema:CreativeWork
120 https://doi.org/10.1116/1.581425 schema:sameAs https://app.dimensions.ai/details/publication/pub.1062191472
121 rdf:type schema:CreativeWork
122 https://doi.org/10.12693/aphyspola.125.1284 schema:sameAs https://app.dimensions.ai/details/publication/pub.1064623743
123 rdf:type schema:CreativeWork
124 https://doi.org/10.1557/jmr.2008.0168 schema:sameAs https://app.dimensions.ai/details/publication/pub.1006301933
125 rdf:type schema:CreativeWork
126 https://doi.org/10.1557/mrs2003.57 schema:sameAs https://app.dimensions.ai/details/publication/pub.1067968432
127 rdf:type schema:CreativeWork
128 https://doi.org/10.4028/www.scientific.net/ssp.127.195 schema:sameAs https://app.dimensions.ai/details/publication/pub.1072153217
129 rdf:type schema:CreativeWork
130 https://www.grid.ac/institutes/grid.18192.33 schema:alternateName Kharkiv Polytechnic Institute
131 schema:name National Technical University Kharkiv Polytechnic Institute, 61002, Kharkiv, Ukraine
132 rdf:type schema:Organization
133 https://www.grid.ac/institutes/grid.425103.1 schema:alternateName Frantsevich Institute for Problems in Materials Science
134 schema:name Institute for Problems in Materials Science, National Academy of Sciences of Ukraine, 03680, Kyiv-142, Ukraine
135 rdf:type schema:Organization
136 https://www.grid.ac/institutes/grid.438873.3 schema:alternateName V.Bakul Institute for Superhard materials
137 schema:name V. Bakul Institute for Superhard Materials, 04074, Kyiv, Ukraine
138 rdf:type schema:Organization
139 https://www.grid.ac/institutes/grid.446020.4 schema:alternateName Sumy National Agrarian University
140 schema:name Sumy National University, 40007, Sumy, Ukraine
141 rdf:type schema:Organization
 




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