Precise calibration of thickness and composition of epitaxial AlGaAs heterostructures with vertical-cavity optical microresonators View Full Text


Ontology type: schema:ScholarlyArticle     


Article Info

DATE

2014-12

AUTHORS

S. A. Blokhin, A. G. Kuz’menkov, A. G. Gladyshev, A. P. Vasil’ev, A. A. Blokhin, M. A. Bobrov, N. A. Maleev, V. M. Ustinov

ABSTRACT

We have studied the possibility of determining the actual thicknesses and compositions of separate layers in AlGaAs heterostructures with vertical-cavity optical microresonators by the combined use of optical reflectance spectroscopy and X-ray diffraction. It is established that a self-consistent solution of two inverse problems with the aid of a special test heterostructure partly removes the problem of solution ambiguity and increases the absolute accuracy of determination of the parameters of individual epitaxial layers. More... »

PAGES

1098-1102

References to SciGraph publications

  • 2003-09. Investigation of the precision in X-ray diffraction analysis of VCSEL structures in JOURNAL OF MATERIALS SCIENCE: MATERIALS IN ELECTRONICS
  • Identifiers

    URI

    http://scigraph.springernature.com/pub.10.1134/s1063785014120190

    DOI

    http://dx.doi.org/10.1134/s1063785014120190

    DIMENSIONS

    https://app.dimensions.ai/details/publication/pub.1031541198


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