Application of diamond-like carbon films to increase transmission of semi-insulating GaAs crystals in the IR spectral range View Full Text


Ontology type: schema:ScholarlyArticle     


Article Info

DATE

2012-07

AUTHORS

N. I. Klyui, A. I. Liptuga, V. B. Lozinskii, A. N. Lukyanov, A. P. Oksanich, V. A. Terban

ABSTRACT

The effect of treatments in plasmas of different gases and subsequent deposition of diamond-like carbon films (DCFs) on the transmission of semi-insulating GaAs crystals in the IR spectral range has been analyzed. It is shown that deposition of 1- to 1.5-μm DCFs makes it possible to increase the GaAs transmission in the range of 4–15 μm and that preliminary treatment in H+ or Ar+ plasma increases the optical transmission of the DCF-GaAs structure. A mechanism is proposed to explain the effect of plasma treatment on the optical transmission of semi-insulating GaAs in the IR spectral range. More... »

PAGES

609-612

Journal

TITLE

Technical Physics Letters

ISSUE

7

VOLUME

38

Identifiers

URI

http://scigraph.springernature.com/pub.10.1134/s106378501207005x

DOI

http://dx.doi.org/10.1134/s106378501207005x

DIMENSIONS

https://app.dimensions.ai/details/publication/pub.1048282566


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