Submicron surface relief fabrication technology for epitaxial GaAs structures with thin AlGaAs stop layers View Full Text


Ontology type: schema:ScholarlyArticle     


Article Info

DATE

2011-12-29

AUTHORS

A. G. Gladyshev, M. M. Kulagina, S. A. Blokhin, A. A. Krasivichev, L. Ya. Karachinskii, A. P. Vasil’ev, N. A. Maleev, V. M. Ustinov

ABSTRACT

Basic technology for the fabrication of submicron surface reliefs in epitaxial GaAs structures with thin AlGaAs stop layers has been developed using electron-beam lithography. High sensitivity of the characteristics of vertical-cavity surface-emitting lasers (VCSELs) with respect to the level of optical losses allows this technology to be used for controlling the mode composition and stabilizing the polarization of VCSEL radiation. More... »

PAGES

1145-1148

Identifiers

URI

http://scigraph.springernature.com/pub.10.1134/s1063785011120200

DOI

http://dx.doi.org/10.1134/s1063785011120200

DIMENSIONS

https://app.dimensions.ai/details/publication/pub.1051096746


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