Features of CoSi2 phase formation by two-stage rapid thermal annealing of Ti/Co/Ti/Si(100) structures View Full Text


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Article Info

DATE

2011-02

AUTHORS

V. I. Rudakov, Yu. I. Denisenko, V. V. Naumov, S. G. Simakin

ABSTRACT

A method of cobalt disilicide (CoSi2) layer formation proceeding from a Ti(8 nm)/Co(10 nm)/Ti(5 nm)/Si(100) (substrate) structure prepared by magnetron sputtering is described. The initial structure was subjected to two-stage rapid thermal annealing (RTA) in nitrogen, and the samples after each stage were studied by the time-of-flight secondary-ion mass spectrometry, Auger electron spectroscopy, scanning electron microscopy, and energy-dispersive X-ray spectroscopy. The RTA-1 stage (550°C, 45 s) resulted in the formation of a sacrificial surface layer of TiNxOy, which gettered residual impurities (O, C, N) from inner interfaces of the initial structure. After the chemical removal of this TiNxOy layer, the enrichment with cobalt at the RTA-2 stage (830°C, 25 s) led to the formation of a low-resistance CoSi2 phase. More... »

PAGES

112-115

Identifiers

URI

http://scigraph.springernature.com/pub.10.1134/s106378501102012x

DOI

http://dx.doi.org/10.1134/s106378501102012x

DIMENSIONS

https://app.dimensions.ai/details/publication/pub.1051250317


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[
  {
    "@context": "https://springernature.github.io/scigraph/jsonld/sgcontext.json", 
    "about": [
      {
        "id": "http://purl.org/au-research/vocabulary/anzsrc-for/2008/02", 
        "inDefinedTermSet": "http://purl.org/au-research/vocabulary/anzsrc-for/2008/", 
        "name": "Physical Sciences", 
        "type": "DefinedTerm"
      }, 
      {
        "id": "http://purl.org/au-research/vocabulary/anzsrc-for/2008/0299", 
        "inDefinedTermSet": "http://purl.org/au-research/vocabulary/anzsrc-for/2008/", 
        "name": "Other Physical Sciences", 
        "type": "DefinedTerm"
      }
    ], 
    "author": [
      {
        "affiliation": {
          "alternateName": "Institute of Physics and Technology (Yaroslavl Branch), Russian Academy of Sciences, 150007, Yaroslavl, Russia", 
          "id": "http://www.grid.ac/institutes/grid.465409.a", 
          "name": [
            "Institute of Physics and Technology (Yaroslavl Branch), Russian Academy of Sciences, 150007, Yaroslavl, Russia"
          ], 
          "type": "Organization"
        }, 
        "familyName": "Rudakov", 
        "givenName": "V. I.", 
        "id": "sg:person.07746020061.23", 
        "sameAs": [
          "https://app.dimensions.ai/discover/publication?and_facet_researcher=ur.07746020061.23"
        ], 
        "type": "Person"
      }, 
      {
        "affiliation": {
          "alternateName": "Institute of Physics and Technology (Yaroslavl Branch), Russian Academy of Sciences, 150007, Yaroslavl, Russia", 
          "id": "http://www.grid.ac/institutes/grid.465409.a", 
          "name": [
            "Institute of Physics and Technology (Yaroslavl Branch), Russian Academy of Sciences, 150007, Yaroslavl, Russia"
          ], 
          "type": "Organization"
        }, 
        "familyName": "Denisenko", 
        "givenName": "Yu. I.", 
        "id": "sg:person.011277147751.97", 
        "sameAs": [
          "https://app.dimensions.ai/discover/publication?and_facet_researcher=ur.011277147751.97"
        ], 
        "type": "Person"
      }, 
      {
        "affiliation": {
          "alternateName": "Institute of Physics and Technology (Yaroslavl Branch), Russian Academy of Sciences, 150007, Yaroslavl, Russia", 
          "id": "http://www.grid.ac/institutes/grid.465409.a", 
          "name": [
            "Institute of Physics and Technology (Yaroslavl Branch), Russian Academy of Sciences, 150007, Yaroslavl, Russia"
          ], 
          "type": "Organization"
        }, 
        "familyName": "Naumov", 
        "givenName": "V. V.", 
        "id": "sg:person.010207276273.43", 
        "sameAs": [
          "https://app.dimensions.ai/discover/publication?and_facet_researcher=ur.010207276273.43"
        ], 
        "type": "Person"
      }, 
      {
        "affiliation": {
          "alternateName": "Institute of Physics and Technology (Yaroslavl Branch), Russian Academy of Sciences, 150007, Yaroslavl, Russia", 
          "id": "http://www.grid.ac/institutes/grid.465409.a", 
          "name": [
            "Institute of Physics and Technology (Yaroslavl Branch), Russian Academy of Sciences, 150007, Yaroslavl, Russia"
          ], 
          "type": "Organization"
        }, 
        "familyName": "Simakin", 
        "givenName": "S. G.", 
        "id": "sg:person.014255337761.03", 
        "sameAs": [
          "https://app.dimensions.ai/discover/publication?and_facet_researcher=ur.014255337761.03"
        ], 
        "type": "Person"
      }
    ], 
    "datePublished": "2011-02", 
    "datePublishedReg": "2011-02-01", 
    "description": "A method of cobalt disilicide (CoSi2) layer formation proceeding from a Ti(8 nm)/Co(10 nm)/Ti(5 nm)/Si(100) (substrate) structure prepared by magnetron sputtering is described. The initial structure was subjected to two-stage rapid thermal annealing (RTA) in nitrogen, and the samples after each stage were studied by the time-of-flight secondary-ion mass spectrometry, Auger electron spectroscopy, scanning electron microscopy, and energy-dispersive X-ray spectroscopy. The RTA-1 stage (550\u00b0C, 45 s) resulted in the formation of a sacrificial surface layer of TiNxOy, which gettered residual impurities (O, C, N) from inner interfaces of the initial structure. After the chemical removal of this TiNxOy layer, the enrichment with cobalt at the RTA-2 stage (830\u00b0C, 25 s) led to the formation of a low-resistance CoSi2 phase.", 
    "genre": "article", 
    "id": "sg:pub.10.1134/s106378501102012x", 
    "inLanguage": "en", 
    "isAccessibleForFree": false, 
    "isPartOf": [
      {
        "id": "sg:journal.1136630", 
        "issn": [
          "0320-0116", 
          "0360-120X"
        ], 
        "name": "Technical Physics Letters", 
        "publisher": "Pleiades Publishing", 
        "type": "Periodical"
      }, 
      {
        "issueNumber": "2", 
        "type": "PublicationIssue"
      }, 
      {
        "type": "PublicationVolume", 
        "volumeNumber": "37"
      }
    ], 
    "keywords": [
      "rapid thermal annealing", 
      "Auger electron spectroscopy", 
      "thermal annealing", 
      "secondary ion mass spectrometry", 
      "flight secondary ion mass spectrometry", 
      "sacrificial surface layer", 
      "electron spectroscopy", 
      "TiNxOy layer", 
      "magnetron sputtering", 
      "ray spectroscopy", 
      "CoSi2 phase", 
      "phase formation", 
      "layer formation", 
      "initial structure", 
      "inner interface", 
      "surface layer", 
      "Ti/", 
      "residual impurities", 
      "electron microscopy", 
      "spectroscopy", 
      "annealing", 
      "chemical removal", 
      "sputtering", 
      "layer", 
      "TiNxOy", 
      "structure", 
      "impurities", 
      "microscopy", 
      "formation", 
      "interface", 
      "cobalt", 
      "mass spectrometry", 
      "phase", 
      "removal", 
      "method", 
      "spectrometry", 
      "nitrogen", 
      "stage", 
      "samples", 
      "time", 
      "features", 
      "enrichment"
    ], 
    "name": "Features of CoSi2 phase formation by two-stage rapid thermal annealing of Ti/Co/Ti/Si(100) structures", 
    "pagination": "112-115", 
    "productId": [
      {
        "name": "dimensions_id", 
        "type": "PropertyValue", 
        "value": [
          "pub.1051250317"
        ]
      }, 
      {
        "name": "doi", 
        "type": "PropertyValue", 
        "value": [
          "10.1134/s106378501102012x"
        ]
      }
    ], 
    "sameAs": [
      "https://doi.org/10.1134/s106378501102012x", 
      "https://app.dimensions.ai/details/publication/pub.1051250317"
    ], 
    "sdDataset": "articles", 
    "sdDatePublished": "2022-05-10T10:05", 
    "sdLicense": "https://scigraph.springernature.com/explorer/license/", 
    "sdPublisher": {
      "name": "Springer Nature - SN SciGraph project", 
      "type": "Organization"
    }, 
    "sdSource": "s3://com-springernature-scigraph/baseset/20220509/entities/gbq_results/article/article_547.jsonl", 
    "type": "ScholarlyArticle", 
    "url": "https://doi.org/10.1134/s106378501102012x"
  }
]
 

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This table displays all metadata directly associated to this object as RDF triples.

121 TRIPLES      21 PREDICATES      68 URIs      60 LITERALS      6 BLANK NODES

Subject Predicate Object
1 sg:pub.10.1134/s106378501102012x schema:about anzsrc-for:02
2 anzsrc-for:0299
3 schema:author Nef6229a9b63f4855a507dbbbbd2e78ab
4 schema:datePublished 2011-02
5 schema:datePublishedReg 2011-02-01
6 schema:description A method of cobalt disilicide (CoSi2) layer formation proceeding from a Ti(8 nm)/Co(10 nm)/Ti(5 nm)/Si(100) (substrate) structure prepared by magnetron sputtering is described. The initial structure was subjected to two-stage rapid thermal annealing (RTA) in nitrogen, and the samples after each stage were studied by the time-of-flight secondary-ion mass spectrometry, Auger electron spectroscopy, scanning electron microscopy, and energy-dispersive X-ray spectroscopy. The RTA-1 stage (550°C, 45 s) resulted in the formation of a sacrificial surface layer of TiNxOy, which gettered residual impurities (O, C, N) from inner interfaces of the initial structure. After the chemical removal of this TiNxOy layer, the enrichment with cobalt at the RTA-2 stage (830°C, 25 s) led to the formation of a low-resistance CoSi2 phase.
7 schema:genre article
8 schema:inLanguage en
9 schema:isAccessibleForFree false
10 schema:isPartOf N8a8d5f46369b423ebb06c5d359255df2
11 Nb2c29c1b2a8747bc82a3cc36e33e6bd2
12 sg:journal.1136630
13 schema:keywords Auger electron spectroscopy
14 CoSi2 phase
15 Ti/
16 TiNxOy
17 TiNxOy layer
18 annealing
19 chemical removal
20 cobalt
21 electron microscopy
22 electron spectroscopy
23 enrichment
24 features
25 flight secondary ion mass spectrometry
26 formation
27 impurities
28 initial structure
29 inner interface
30 interface
31 layer
32 layer formation
33 magnetron sputtering
34 mass spectrometry
35 method
36 microscopy
37 nitrogen
38 phase
39 phase formation
40 rapid thermal annealing
41 ray spectroscopy
42 removal
43 residual impurities
44 sacrificial surface layer
45 samples
46 secondary ion mass spectrometry
47 spectrometry
48 spectroscopy
49 sputtering
50 stage
51 structure
52 surface layer
53 thermal annealing
54 time
55 schema:name Features of CoSi2 phase formation by two-stage rapid thermal annealing of Ti/Co/Ti/Si(100) structures
56 schema:pagination 112-115
57 schema:productId N80b7478bdf644cceb5d50ee6531dc43b
58 Nbdbe8b3e6ca14958ac653c427e4bd1af
59 schema:sameAs https://app.dimensions.ai/details/publication/pub.1051250317
60 https://doi.org/10.1134/s106378501102012x
61 schema:sdDatePublished 2022-05-10T10:05
62 schema:sdLicense https://scigraph.springernature.com/explorer/license/
63 schema:sdPublisher N5df91b95a91349e3859812d8b3b4fdd0
64 schema:url https://doi.org/10.1134/s106378501102012x
65 sgo:license sg:explorer/license/
66 sgo:sdDataset articles
67 rdf:type schema:ScholarlyArticle
68 N5df91b95a91349e3859812d8b3b4fdd0 schema:name Springer Nature - SN SciGraph project
69 rdf:type schema:Organization
70 N642bb6f4e4b74db4a1fb8cf99a300621 rdf:first sg:person.014255337761.03
71 rdf:rest rdf:nil
72 N80b7478bdf644cceb5d50ee6531dc43b schema:name dimensions_id
73 schema:value pub.1051250317
74 rdf:type schema:PropertyValue
75 N8a8d5f46369b423ebb06c5d359255df2 schema:issueNumber 2
76 rdf:type schema:PublicationIssue
77 Naca3276ba0c1427f8023f640b3b7d708 rdf:first sg:person.011277147751.97
78 rdf:rest Nd6673dbc6feb411cb1eccb59f784fed6
79 Nb2c29c1b2a8747bc82a3cc36e33e6bd2 schema:volumeNumber 37
80 rdf:type schema:PublicationVolume
81 Nbdbe8b3e6ca14958ac653c427e4bd1af schema:name doi
82 schema:value 10.1134/s106378501102012x
83 rdf:type schema:PropertyValue
84 Nd6673dbc6feb411cb1eccb59f784fed6 rdf:first sg:person.010207276273.43
85 rdf:rest N642bb6f4e4b74db4a1fb8cf99a300621
86 Nef6229a9b63f4855a507dbbbbd2e78ab rdf:first sg:person.07746020061.23
87 rdf:rest Naca3276ba0c1427f8023f640b3b7d708
88 anzsrc-for:02 schema:inDefinedTermSet anzsrc-for:
89 schema:name Physical Sciences
90 rdf:type schema:DefinedTerm
91 anzsrc-for:0299 schema:inDefinedTermSet anzsrc-for:
92 schema:name Other Physical Sciences
93 rdf:type schema:DefinedTerm
94 sg:journal.1136630 schema:issn 0320-0116
95 0360-120X
96 schema:name Technical Physics Letters
97 schema:publisher Pleiades Publishing
98 rdf:type schema:Periodical
99 sg:person.010207276273.43 schema:affiliation grid-institutes:grid.465409.a
100 schema:familyName Naumov
101 schema:givenName V. V.
102 schema:sameAs https://app.dimensions.ai/discover/publication?and_facet_researcher=ur.010207276273.43
103 rdf:type schema:Person
104 sg:person.011277147751.97 schema:affiliation grid-institutes:grid.465409.a
105 schema:familyName Denisenko
106 schema:givenName Yu. I.
107 schema:sameAs https://app.dimensions.ai/discover/publication?and_facet_researcher=ur.011277147751.97
108 rdf:type schema:Person
109 sg:person.014255337761.03 schema:affiliation grid-institutes:grid.465409.a
110 schema:familyName Simakin
111 schema:givenName S. G.
112 schema:sameAs https://app.dimensions.ai/discover/publication?and_facet_researcher=ur.014255337761.03
113 rdf:type schema:Person
114 sg:person.07746020061.23 schema:affiliation grid-institutes:grid.465409.a
115 schema:familyName Rudakov
116 schema:givenName V. I.
117 schema:sameAs https://app.dimensions.ai/discover/publication?and_facet_researcher=ur.07746020061.23
118 rdf:type schema:Person
119 grid-institutes:grid.465409.a schema:alternateName Institute of Physics and Technology (Yaroslavl Branch), Russian Academy of Sciences, 150007, Yaroslavl, Russia
120 schema:name Institute of Physics and Technology (Yaroslavl Branch), Russian Academy of Sciences, 150007, Yaroslavl, Russia
121 rdf:type schema:Organization
 




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