Vapor phase epitaxy of aluminum nitride from trimethylaluminum and molecular nitrogen View Full Text


Ontology type: schema:ScholarlyArticle     


Article Info

DATE

2008-11

AUTHORS

W. V. Lundin, E. E. Zavarin, M. A. Sinitsyn, M. A. Yagovkina, A. F. Tsatsul’nikov

ABSTRACT

We have studied the pyrolysis of trimethylaluminum (TMA) in a nitrogen-containing atmosphere of a vapor phase epitaxy reactor. It is established that, in the presence of gallium nitride coatings in the reactor, the main product of TMA pyrolysis in a nitrogen-hydrogen atmosphere is aluminum nitride. Using this process (without introducing ammonia), we obtained perfect epitaxial aluminum nitride layers. More... »

PAGES

908-911

Journal

TITLE

Technical Physics Letters

ISSUE

11

VOLUME

34

Author Affiliations

Identifiers

URI

http://scigraph.springernature.com/pub.10.1134/s1063785008110023

DOI

http://dx.doi.org/10.1134/s1063785008110023

DIMENSIONS

https://app.dimensions.ai/details/publication/pub.1017258849


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