Ontology type: schema:ScholarlyArticle
2008-07-29
AUTHORS ABSTRACTWe have studied the reactions that take place at interfaces in an a-SiC/a-Si/6H-SiC sandwich structure, which was obtained by the sequential deposition of amorphous silicon (a-Si) and amorphous silicon carbide (a-SiC) onto a 6H-SiC substrate by ion sputtering in vacuum and then annealed at 1500°C (i.e., above the melting point of silicon). It is shown that the annealing leads to complete îdissipationî of the silicon film in SiC, probably as a result of the dissolution of carbon in the silicon melt and the diffusion of silicon into SiC. More... »
PAGES591
http://scigraph.springernature.com/pub.10.1134/s1063785008070171
DOIhttp://dx.doi.org/10.1134/s1063785008070171
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