Free-standing optical filters for a nanolithography source operating in the 12–15 nm wavelength range View Full Text


Ontology type: schema:ScholarlyArticle     


Article Info

DATE

2007-06

AUTHORS

V. P. Belik, Yu. M. Zadiranov, N. D. Il’inskaya, A. V. Korlyakov, V. V. Luchinin, M. A. Markosov, R. P. Seisyan, É. M. Sher

ABSTRACT

Optical filters in the form of free-standing multilayer films have been obtained for a nanolithography source operating in the 12–15 nm range of wavelengths. A method for the synthesis of such filters is described.

PAGES

508-511

Identifiers

URI

http://scigraph.springernature.com/pub.10.1134/s1063785007060193

DOI

http://dx.doi.org/10.1134/s1063785007060193

DIMENSIONS

https://app.dimensions.ai/details/publication/pub.1044855668


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