Integrated characterization of multilayer periodic systems with nanosized layers as applied to Mo/Si structures View Full Text


Ontology type: schema:ScholarlyArticle     


Article Info

DATE

2013-03

AUTHORS

G. A. Valkovskiy, M. V. Baidakova, P. N. Brunkov, S. G. Konnikov, A. A. Sitnikova, M. A. Yagovkina, Yu. M. Zadiranov

ABSTRACT

The potential inherent in integrated characterization of multilayer periodic systems employed in development of extreme-ultraviolet mirrors was demonstrated using the example of Mo/Si structures grown by magnetron sputtering in different technological regimes. An integrated study provided mutually consistent data on the thicknesses and crystal structure of the layers, as well as on the quality of the interfaces. Measurements by atomic force microscopy permitted a comparison of surface roughness of the substrates and the multilayer systems grown on them. An analysis of the power spectral density functions revealed that low-frequency roughness is replicated from the substrate, whereas the high-frequency one can become smoothed out in the course of growth. X-ray diffractometry performed in the thin film mode showed that the Mo layers in the samples studied have different crystal structures, from the amorphous and polycrystalline to the [110]-textured one. An analysis of the transmission electron microscopy data confirmed that there is a difference in the degrees of crystallinity of Mo layers. The thicknesses of individual layers, the period, and the irreproducibility of the thicknesses and the period were determined using X-ray reflectometry. The root-mean-square roughness amplitude of the interfaces was estimated, and the existence of transition layers originating primarily from the Si layer was demonstrated. The study was used to formulate a proper strategy for the analysis of multilayer periodic systems with nanosized layers. More... »

PAGES

648-658

Journal

TITLE

Physics of the Solid State

ISSUE

3

VOLUME

55

Author Affiliations

Identifiers

URI

http://scigraph.springernature.com/pub.10.1134/s1063783413030293

DOI

http://dx.doi.org/10.1134/s1063783413030293

DIMENSIONS

https://app.dimensions.ai/details/publication/pub.1046346977


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[
  {
    "@context": "https://springernature.github.io/scigraph/jsonld/sgcontext.json", 
    "about": [
      {
        "id": "http://purl.org/au-research/vocabulary/anzsrc-for/2008/0299", 
        "inDefinedTermSet": "http://purl.org/au-research/vocabulary/anzsrc-for/2008/", 
        "name": "Other Physical Sciences", 
        "type": "DefinedTerm"
      }, 
      {
        "id": "http://purl.org/au-research/vocabulary/anzsrc-for/2008/02", 
        "inDefinedTermSet": "http://purl.org/au-research/vocabulary/anzsrc-for/2008/", 
        "name": "Physical Sciences", 
        "type": "DefinedTerm"
      }
    ], 
    "author": [
      {
        "affiliation": {
          "alternateName": "Ioffe Institute", 
          "id": "https://www.grid.ac/institutes/grid.423485.c", 
          "name": [
            "Ioffe Physical-Technical Institute, Russian Academy of Sciences, Politekhnicheskaya ul. 26, 194021, St. Petersburg, Russia"
          ], 
          "type": "Organization"
        }, 
        "familyName": "Valkovskiy", 
        "givenName": "G. A.", 
        "id": "sg:person.014275307405.43", 
        "sameAs": [
          "https://app.dimensions.ai/discover/publication?and_facet_researcher=ur.014275307405.43"
        ], 
        "type": "Person"
      }, 
      {
        "affiliation": {
          "alternateName": "Ioffe Institute", 
          "id": "https://www.grid.ac/institutes/grid.423485.c", 
          "name": [
            "Ioffe Physical-Technical Institute, Russian Academy of Sciences, Politekhnicheskaya ul. 26, 194021, St. Petersburg, Russia"
          ], 
          "type": "Organization"
        }, 
        "familyName": "Baidakova", 
        "givenName": "M. V.", 
        "id": "sg:person.015444514517.48", 
        "sameAs": [
          "https://app.dimensions.ai/discover/publication?and_facet_researcher=ur.015444514517.48"
        ], 
        "type": "Person"
      }, 
      {
        "affiliation": {
          "alternateName": "Ioffe Institute", 
          "id": "https://www.grid.ac/institutes/grid.423485.c", 
          "name": [
            "Ioffe Physical-Technical Institute, Russian Academy of Sciences, Politekhnicheskaya ul. 26, 194021, St. Petersburg, Russia"
          ], 
          "type": "Organization"
        }, 
        "familyName": "Brunkov", 
        "givenName": "P. N.", 
        "id": "sg:person.011771360023.05", 
        "sameAs": [
          "https://app.dimensions.ai/discover/publication?and_facet_researcher=ur.011771360023.05"
        ], 
        "type": "Person"
      }, 
      {
        "affiliation": {
          "alternateName": "Ioffe Institute", 
          "id": "https://www.grid.ac/institutes/grid.423485.c", 
          "name": [
            "Ioffe Physical-Technical Institute, Russian Academy of Sciences, Politekhnicheskaya ul. 26, 194021, St. Petersburg, Russia"
          ], 
          "type": "Organization"
        }, 
        "familyName": "Konnikov", 
        "givenName": "S. G.", 
        "id": "sg:person.015053767213.13", 
        "sameAs": [
          "https://app.dimensions.ai/discover/publication?and_facet_researcher=ur.015053767213.13"
        ], 
        "type": "Person"
      }, 
      {
        "affiliation": {
          "alternateName": "Ioffe Institute", 
          "id": "https://www.grid.ac/institutes/grid.423485.c", 
          "name": [
            "Ioffe Physical-Technical Institute, Russian Academy of Sciences, Politekhnicheskaya ul. 26, 194021, St. Petersburg, Russia"
          ], 
          "type": "Organization"
        }, 
        "familyName": "Sitnikova", 
        "givenName": "A. A.", 
        "id": "sg:person.015133024650.23", 
        "sameAs": [
          "https://app.dimensions.ai/discover/publication?and_facet_researcher=ur.015133024650.23"
        ], 
        "type": "Person"
      }, 
      {
        "affiliation": {
          "alternateName": "Ioffe Institute", 
          "id": "https://www.grid.ac/institutes/grid.423485.c", 
          "name": [
            "Ioffe Physical-Technical Institute, Russian Academy of Sciences, Politekhnicheskaya ul. 26, 194021, St. Petersburg, Russia"
          ], 
          "type": "Organization"
        }, 
        "familyName": "Yagovkina", 
        "givenName": "M. A.", 
        "id": "sg:person.016026355533.82", 
        "sameAs": [
          "https://app.dimensions.ai/discover/publication?and_facet_researcher=ur.016026355533.82"
        ], 
        "type": "Person"
      }, 
      {
        "affiliation": {
          "alternateName": "Ioffe Institute", 
          "id": "https://www.grid.ac/institutes/grid.423485.c", 
          "name": [
            "Ioffe Physical-Technical Institute, Russian Academy of Sciences, Politekhnicheskaya ul. 26, 194021, St. Petersburg, Russia"
          ], 
          "type": "Organization"
        }, 
        "familyName": "Zadiranov", 
        "givenName": "Yu. M.", 
        "id": "sg:person.014121041567.87", 
        "sameAs": [
          "https://app.dimensions.ai/discover/publication?and_facet_researcher=ur.014121041567.87"
        ], 
        "type": "Person"
      }
    ], 
    "citation": [
      {
        "id": "sg:pub.10.1007/978-3-540-74561-7", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1004174206", 
          "https://doi.org/10.1007/978-3-540-74561-7"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "sg:pub.10.1007/978-3-540-74561-7", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1004174206", 
          "https://doi.org/10.1007/978-3-540-74561-7"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "https://doi.org/10.1088/0953-8984/18/13/003", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1004963572"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "https://doi.org/10.1088/0953-8984/18/13/003", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1004963572"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "https://doi.org/10.1088/0953-8984/14/39/305", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1006581278"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "https://doi.org/10.1016/j.apsusc.2011.07.083", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1010903974"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "https://doi.org/10.1016/s0040-6090(02)00536-9", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1014051959"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "https://doi.org/10.1016/j.apsusc.2004.05.176", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1016665587"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "https://doi.org/10.1117/12.563302", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1024887785"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "https://doi.org/10.1117/12.458369", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1029948139"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "https://doi.org/10.1016/j.progsurf.2011.08.001", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1035165467"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "https://doi.org/10.1002/pssa.201184274", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1035311459"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "sg:pub.10.1134/1.1927207", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1035979688", 
          "https://doi.org/10.1134/1.1927207"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "sg:pub.10.1134/1.1927207", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1035979688", 
          "https://doi.org/10.1134/1.1927207"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "https://doi.org/10.1016/j.tsf.2006.02.073", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1043240457"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "https://doi.org/10.1116/1.2794048", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1043519962"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "https://doi.org/10.1016/j.susc.2008.12.002", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1046794548"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "https://doi.org/10.1016/j.vacuum.2009.04.026", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1048775943"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "https://doi.org/10.1063/1.1332095", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1057695752"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "https://doi.org/10.1063/1.1381559", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1057701158"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "https://doi.org/10.1063/1.368098", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1057999609"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "https://doi.org/10.1063/1.372977", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1058007367"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "https://doi.org/10.1103/physrevb.35.2137", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1060542020"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "https://doi.org/10.1103/physrevb.35.2137", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1060542020"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "https://doi.org/10.1103/physrevb.65.245416", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1060603583"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "https://doi.org/10.1103/physrevb.65.245416", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1060603583"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "https://doi.org/10.1103/physrevb.76.245404", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1060623360"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "https://doi.org/10.1103/physrevb.76.245404", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1060623360"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "https://doi.org/10.1143/jjap.41.4086", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1063068049"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "https://doi.org/10.1364/ao.37.001180", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1065112966"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "https://doi.org/10.1364/ao.42.004049", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1065118298"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "https://doi.org/10.1364/oe.15.013997", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1065186286"
        ], 
        "type": "CreativeWork"
      }
    ], 
    "datePublished": "2013-03", 
    "datePublishedReg": "2013-03-01", 
    "description": "The potential inherent in integrated characterization of multilayer periodic systems employed in development of extreme-ultraviolet mirrors was demonstrated using the example of Mo/Si structures grown by magnetron sputtering in different technological regimes. An integrated study provided mutually consistent data on the thicknesses and crystal structure of the layers, as well as on the quality of the interfaces. Measurements by atomic force microscopy permitted a comparison of surface roughness of the substrates and the multilayer systems grown on them. An analysis of the power spectral density functions revealed that low-frequency roughness is replicated from the substrate, whereas the high-frequency one can become smoothed out in the course of growth. X-ray diffractometry performed in the thin film mode showed that the Mo layers in the samples studied have different crystal structures, from the amorphous and polycrystalline to the [110]-textured one. An analysis of the transmission electron microscopy data confirmed that there is a difference in the degrees of crystallinity of Mo layers. The thicknesses of individual layers, the period, and the irreproducibility of the thicknesses and the period were determined using X-ray reflectometry. The root-mean-square roughness amplitude of the interfaces was estimated, and the existence of transition layers originating primarily from the Si layer was demonstrated. The study was used to formulate a proper strategy for the analysis of multilayer periodic systems with nanosized layers.", 
    "genre": "research_article", 
    "id": "sg:pub.10.1134/s1063783413030293", 
    "inLanguage": [
      "en"
    ], 
    "isAccessibleForFree": false, 
    "isPartOf": [
      {
        "id": "sg:journal.1136591", 
        "issn": [
          "0367-3294", 
          "1063-7834"
        ], 
        "name": "Physics of the Solid State", 
        "type": "Periodical"
      }, 
      {
        "issueNumber": "3", 
        "type": "PublicationIssue"
      }, 
      {
        "type": "PublicationVolume", 
        "volumeNumber": "55"
      }
    ], 
    "name": "Integrated characterization of multilayer periodic systems with nanosized layers as applied to Mo/Si structures", 
    "pagination": "648-658", 
    "productId": [
      {
        "name": "readcube_id", 
        "type": "PropertyValue", 
        "value": [
          "dcc6bfe591d633a9fc3a0bb757aea5d9b7c131ba5f0346e07145e13ef294ecb1"
        ]
      }, 
      {
        "name": "doi", 
        "type": "PropertyValue", 
        "value": [
          "10.1134/s1063783413030293"
        ]
      }, 
      {
        "name": "dimensions_id", 
        "type": "PropertyValue", 
        "value": [
          "pub.1046346977"
        ]
      }
    ], 
    "sameAs": [
      "https://doi.org/10.1134/s1063783413030293", 
      "https://app.dimensions.ai/details/publication/pub.1046346977"
    ], 
    "sdDataset": "articles", 
    "sdDatePublished": "2019-04-10T15:50", 
    "sdLicense": "https://scigraph.springernature.com/explorer/license/", 
    "sdPublisher": {
      "name": "Springer Nature - SN SciGraph project", 
      "type": "Organization"
    }, 
    "sdSource": "s3://com-uberresearch-data-dimensions-target-20181106-alternative/cleanup/v134/2549eaecd7973599484d7c17b260dba0a4ecb94b/merge/v9/a6c9fde33151104705d4d7ff012ea9563521a3ce/jats-lookup/v90/0000000001_0000000264/records_8664_00000507.jsonl", 
    "type": "ScholarlyArticle", 
    "url": "http://link.springer.com/10.1134%2FS1063783413030293"
  }
]
 

Download the RDF metadata as:  json-ld nt turtle xml License info

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curl -H 'Accept: application/rdf+xml' 'https://scigraph.springernature.com/pub.10.1134/s1063783413030293'


 

This table displays all metadata directly associated to this object as RDF triples.

183 TRIPLES      21 PREDICATES      53 URIs      19 LITERALS      7 BLANK NODES

Subject Predicate Object
1 sg:pub.10.1134/s1063783413030293 schema:about anzsrc-for:02
2 anzsrc-for:0299
3 schema:author N43ba198ed92445dfaa2057cae2ca352d
4 schema:citation sg:pub.10.1007/978-3-540-74561-7
5 sg:pub.10.1134/1.1927207
6 https://doi.org/10.1002/pssa.201184274
7 https://doi.org/10.1016/j.apsusc.2004.05.176
8 https://doi.org/10.1016/j.apsusc.2011.07.083
9 https://doi.org/10.1016/j.progsurf.2011.08.001
10 https://doi.org/10.1016/j.susc.2008.12.002
11 https://doi.org/10.1016/j.tsf.2006.02.073
12 https://doi.org/10.1016/j.vacuum.2009.04.026
13 https://doi.org/10.1016/s0040-6090(02)00536-9
14 https://doi.org/10.1063/1.1332095
15 https://doi.org/10.1063/1.1381559
16 https://doi.org/10.1063/1.368098
17 https://doi.org/10.1063/1.372977
18 https://doi.org/10.1088/0953-8984/14/39/305
19 https://doi.org/10.1088/0953-8984/18/13/003
20 https://doi.org/10.1103/physrevb.35.2137
21 https://doi.org/10.1103/physrevb.65.245416
22 https://doi.org/10.1103/physrevb.76.245404
23 https://doi.org/10.1116/1.2794048
24 https://doi.org/10.1117/12.458369
25 https://doi.org/10.1117/12.563302
26 https://doi.org/10.1143/jjap.41.4086
27 https://doi.org/10.1364/ao.37.001180
28 https://doi.org/10.1364/ao.42.004049
29 https://doi.org/10.1364/oe.15.013997
30 schema:datePublished 2013-03
31 schema:datePublishedReg 2013-03-01
32 schema:description The potential inherent in integrated characterization of multilayer periodic systems employed in development of extreme-ultraviolet mirrors was demonstrated using the example of Mo/Si structures grown by magnetron sputtering in different technological regimes. An integrated study provided mutually consistent data on the thicknesses and crystal structure of the layers, as well as on the quality of the interfaces. Measurements by atomic force microscopy permitted a comparison of surface roughness of the substrates and the multilayer systems grown on them. An analysis of the power spectral density functions revealed that low-frequency roughness is replicated from the substrate, whereas the high-frequency one can become smoothed out in the course of growth. X-ray diffractometry performed in the thin film mode showed that the Mo layers in the samples studied have different crystal structures, from the amorphous and polycrystalline to the [110]-textured one. An analysis of the transmission electron microscopy data confirmed that there is a difference in the degrees of crystallinity of Mo layers. The thicknesses of individual layers, the period, and the irreproducibility of the thicknesses and the period were determined using X-ray reflectometry. The root-mean-square roughness amplitude of the interfaces was estimated, and the existence of transition layers originating primarily from the Si layer was demonstrated. The study was used to formulate a proper strategy for the analysis of multilayer periodic systems with nanosized layers.
33 schema:genre research_article
34 schema:inLanguage en
35 schema:isAccessibleForFree false
36 schema:isPartOf N8aa759259a05421292ece0f535657dda
37 Nb1cdd59dc42c49d9a801901307e1083b
38 sg:journal.1136591
39 schema:name Integrated characterization of multilayer periodic systems with nanosized layers as applied to Mo/Si structures
40 schema:pagination 648-658
41 schema:productId N5c50d9b0a3724124aefc58868c049a07
42 N808eb3feeebe4e858b2361847396d758
43 Nf61ec26ac61a4f5882f2a55fd15c2f2f
44 schema:sameAs https://app.dimensions.ai/details/publication/pub.1046346977
45 https://doi.org/10.1134/s1063783413030293
46 schema:sdDatePublished 2019-04-10T15:50
47 schema:sdLicense https://scigraph.springernature.com/explorer/license/
48 schema:sdPublisher Nf9855a9bf4244f6188d28e26c3295082
49 schema:url http://link.springer.com/10.1134%2FS1063783413030293
50 sgo:license sg:explorer/license/
51 sgo:sdDataset articles
52 rdf:type schema:ScholarlyArticle
53 N06e30fd6706b44599ae3325cddb9fdaa rdf:first sg:person.016026355533.82
54 rdf:rest N8339aca0c71942879f43a949deba33b7
55 N0d6d18562f9e48289564f7461d2391aa rdf:first sg:person.015133024650.23
56 rdf:rest N06e30fd6706b44599ae3325cddb9fdaa
57 N43ba198ed92445dfaa2057cae2ca352d rdf:first sg:person.014275307405.43
58 rdf:rest Nd37617b105434c4a870c4219b9c16a91
59 N5c50d9b0a3724124aefc58868c049a07 schema:name readcube_id
60 schema:value dcc6bfe591d633a9fc3a0bb757aea5d9b7c131ba5f0346e07145e13ef294ecb1
61 rdf:type schema:PropertyValue
62 N67ac2f2329ee484899a177bc289e8635 rdf:first sg:person.011771360023.05
63 rdf:rest Nceaca4f06e3a47f983ac354d539b7f9a
64 N808eb3feeebe4e858b2361847396d758 schema:name doi
65 schema:value 10.1134/s1063783413030293
66 rdf:type schema:PropertyValue
67 N8339aca0c71942879f43a949deba33b7 rdf:first sg:person.014121041567.87
68 rdf:rest rdf:nil
69 N8aa759259a05421292ece0f535657dda schema:volumeNumber 55
70 rdf:type schema:PublicationVolume
71 Nb1cdd59dc42c49d9a801901307e1083b schema:issueNumber 3
72 rdf:type schema:PublicationIssue
73 Nceaca4f06e3a47f983ac354d539b7f9a rdf:first sg:person.015053767213.13
74 rdf:rest N0d6d18562f9e48289564f7461d2391aa
75 Nd37617b105434c4a870c4219b9c16a91 rdf:first sg:person.015444514517.48
76 rdf:rest N67ac2f2329ee484899a177bc289e8635
77 Nf61ec26ac61a4f5882f2a55fd15c2f2f schema:name dimensions_id
78 schema:value pub.1046346977
79 rdf:type schema:PropertyValue
80 Nf9855a9bf4244f6188d28e26c3295082 schema:name Springer Nature - SN SciGraph project
81 rdf:type schema:Organization
82 anzsrc-for:02 schema:inDefinedTermSet anzsrc-for:
83 schema:name Physical Sciences
84 rdf:type schema:DefinedTerm
85 anzsrc-for:0299 schema:inDefinedTermSet anzsrc-for:
86 schema:name Other Physical Sciences
87 rdf:type schema:DefinedTerm
88 sg:journal.1136591 schema:issn 0367-3294
89 1063-7834
90 schema:name Physics of the Solid State
91 rdf:type schema:Periodical
92 sg:person.011771360023.05 schema:affiliation https://www.grid.ac/institutes/grid.423485.c
93 schema:familyName Brunkov
94 schema:givenName P. N.
95 schema:sameAs https://app.dimensions.ai/discover/publication?and_facet_researcher=ur.011771360023.05
96 rdf:type schema:Person
97 sg:person.014121041567.87 schema:affiliation https://www.grid.ac/institutes/grid.423485.c
98 schema:familyName Zadiranov
99 schema:givenName Yu. M.
100 schema:sameAs https://app.dimensions.ai/discover/publication?and_facet_researcher=ur.014121041567.87
101 rdf:type schema:Person
102 sg:person.014275307405.43 schema:affiliation https://www.grid.ac/institutes/grid.423485.c
103 schema:familyName Valkovskiy
104 schema:givenName G. A.
105 schema:sameAs https://app.dimensions.ai/discover/publication?and_facet_researcher=ur.014275307405.43
106 rdf:type schema:Person
107 sg:person.015053767213.13 schema:affiliation https://www.grid.ac/institutes/grid.423485.c
108 schema:familyName Konnikov
109 schema:givenName S. G.
110 schema:sameAs https://app.dimensions.ai/discover/publication?and_facet_researcher=ur.015053767213.13
111 rdf:type schema:Person
112 sg:person.015133024650.23 schema:affiliation https://www.grid.ac/institutes/grid.423485.c
113 schema:familyName Sitnikova
114 schema:givenName A. A.
115 schema:sameAs https://app.dimensions.ai/discover/publication?and_facet_researcher=ur.015133024650.23
116 rdf:type schema:Person
117 sg:person.015444514517.48 schema:affiliation https://www.grid.ac/institutes/grid.423485.c
118 schema:familyName Baidakova
119 schema:givenName M. V.
120 schema:sameAs https://app.dimensions.ai/discover/publication?and_facet_researcher=ur.015444514517.48
121 rdf:type schema:Person
122 sg:person.016026355533.82 schema:affiliation https://www.grid.ac/institutes/grid.423485.c
123 schema:familyName Yagovkina
124 schema:givenName M. A.
125 schema:sameAs https://app.dimensions.ai/discover/publication?and_facet_researcher=ur.016026355533.82
126 rdf:type schema:Person
127 sg:pub.10.1007/978-3-540-74561-7 schema:sameAs https://app.dimensions.ai/details/publication/pub.1004174206
128 https://doi.org/10.1007/978-3-540-74561-7
129 rdf:type schema:CreativeWork
130 sg:pub.10.1134/1.1927207 schema:sameAs https://app.dimensions.ai/details/publication/pub.1035979688
131 https://doi.org/10.1134/1.1927207
132 rdf:type schema:CreativeWork
133 https://doi.org/10.1002/pssa.201184274 schema:sameAs https://app.dimensions.ai/details/publication/pub.1035311459
134 rdf:type schema:CreativeWork
135 https://doi.org/10.1016/j.apsusc.2004.05.176 schema:sameAs https://app.dimensions.ai/details/publication/pub.1016665587
136 rdf:type schema:CreativeWork
137 https://doi.org/10.1016/j.apsusc.2011.07.083 schema:sameAs https://app.dimensions.ai/details/publication/pub.1010903974
138 rdf:type schema:CreativeWork
139 https://doi.org/10.1016/j.progsurf.2011.08.001 schema:sameAs https://app.dimensions.ai/details/publication/pub.1035165467
140 rdf:type schema:CreativeWork
141 https://doi.org/10.1016/j.susc.2008.12.002 schema:sameAs https://app.dimensions.ai/details/publication/pub.1046794548
142 rdf:type schema:CreativeWork
143 https://doi.org/10.1016/j.tsf.2006.02.073 schema:sameAs https://app.dimensions.ai/details/publication/pub.1043240457
144 rdf:type schema:CreativeWork
145 https://doi.org/10.1016/j.vacuum.2009.04.026 schema:sameAs https://app.dimensions.ai/details/publication/pub.1048775943
146 rdf:type schema:CreativeWork
147 https://doi.org/10.1016/s0040-6090(02)00536-9 schema:sameAs https://app.dimensions.ai/details/publication/pub.1014051959
148 rdf:type schema:CreativeWork
149 https://doi.org/10.1063/1.1332095 schema:sameAs https://app.dimensions.ai/details/publication/pub.1057695752
150 rdf:type schema:CreativeWork
151 https://doi.org/10.1063/1.1381559 schema:sameAs https://app.dimensions.ai/details/publication/pub.1057701158
152 rdf:type schema:CreativeWork
153 https://doi.org/10.1063/1.368098 schema:sameAs https://app.dimensions.ai/details/publication/pub.1057999609
154 rdf:type schema:CreativeWork
155 https://doi.org/10.1063/1.372977 schema:sameAs https://app.dimensions.ai/details/publication/pub.1058007367
156 rdf:type schema:CreativeWork
157 https://doi.org/10.1088/0953-8984/14/39/305 schema:sameAs https://app.dimensions.ai/details/publication/pub.1006581278
158 rdf:type schema:CreativeWork
159 https://doi.org/10.1088/0953-8984/18/13/003 schema:sameAs https://app.dimensions.ai/details/publication/pub.1004963572
160 rdf:type schema:CreativeWork
161 https://doi.org/10.1103/physrevb.35.2137 schema:sameAs https://app.dimensions.ai/details/publication/pub.1060542020
162 rdf:type schema:CreativeWork
163 https://doi.org/10.1103/physrevb.65.245416 schema:sameAs https://app.dimensions.ai/details/publication/pub.1060603583
164 rdf:type schema:CreativeWork
165 https://doi.org/10.1103/physrevb.76.245404 schema:sameAs https://app.dimensions.ai/details/publication/pub.1060623360
166 rdf:type schema:CreativeWork
167 https://doi.org/10.1116/1.2794048 schema:sameAs https://app.dimensions.ai/details/publication/pub.1043519962
168 rdf:type schema:CreativeWork
169 https://doi.org/10.1117/12.458369 schema:sameAs https://app.dimensions.ai/details/publication/pub.1029948139
170 rdf:type schema:CreativeWork
171 https://doi.org/10.1117/12.563302 schema:sameAs https://app.dimensions.ai/details/publication/pub.1024887785
172 rdf:type schema:CreativeWork
173 https://doi.org/10.1143/jjap.41.4086 schema:sameAs https://app.dimensions.ai/details/publication/pub.1063068049
174 rdf:type schema:CreativeWork
175 https://doi.org/10.1364/ao.37.001180 schema:sameAs https://app.dimensions.ai/details/publication/pub.1065112966
176 rdf:type schema:CreativeWork
177 https://doi.org/10.1364/ao.42.004049 schema:sameAs https://app.dimensions.ai/details/publication/pub.1065118298
178 rdf:type schema:CreativeWork
179 https://doi.org/10.1364/oe.15.013997 schema:sameAs https://app.dimensions.ai/details/publication/pub.1065186286
180 rdf:type schema:CreativeWork
181 https://www.grid.ac/institutes/grid.423485.c schema:alternateName Ioffe Institute
182 schema:name Ioffe Physical-Technical Institute, Russian Academy of Sciences, Politekhnicheskaya ul. 26, 194021, St. Petersburg, Russia
183 rdf:type schema:Organization
 




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