Ontology type: schema:ScholarlyArticle
2018-12
AUTHORSK. Yu. Shubina, T. N. Berezovskaya, D. V. Mokhov, I. A. Morozov, K. P. Kotlyar, A. M. Mizerov, E. V. Nikitina, A. D. Bouravleuv
ABSTRACTTwo different approaches for the etching of the gallium nitride epitaxial layers grown on Si(111) substrates by plasma-assisted molecular beam epitaxy have been elaborated. It is demonstrated that anisotropic etch profiles can be achieved by both photoenhanced wet chemical etching and reactive plasma-chemical etching methods. Moreover, it is shown, that the photoenhanced wet chemical etching allows to remove GaN layer without damaging silicon substrate. More... »
PAGES2117-2119
http://scigraph.springernature.com/pub.10.1134/s1063782618160297
DOIhttp://dx.doi.org/10.1134/s1063782618160297
DIMENSIONShttps://app.dimensions.ai/details/publication/pub.1112389043
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[
{
"@context": "https://springernature.github.io/scigraph/jsonld/sgcontext.json",
"about": [
{
"id": "http://purl.org/au-research/vocabulary/anzsrc-for/2008/02",
"inDefinedTermSet": "http://purl.org/au-research/vocabulary/anzsrc-for/2008/",
"name": "Physical Sciences",
"type": "DefinedTerm"
},
{
"id": "http://purl.org/au-research/vocabulary/anzsrc-for/2008/0204",
"inDefinedTermSet": "http://purl.org/au-research/vocabulary/anzsrc-for/2008/",
"name": "Condensed Matter Physics",
"type": "DefinedTerm"
},
{
"id": "http://purl.org/au-research/vocabulary/anzsrc-for/2008/0206",
"inDefinedTermSet": "http://purl.org/au-research/vocabulary/anzsrc-for/2008/",
"name": "Quantum Physics",
"type": "DefinedTerm"
}
],
"author": [
{
"affiliation": {
"alternateName": "Saint Petersburg National Research Academic University RAS, 194021, St. Petersburg, Russia",
"id": "http://www.grid.ac/institutes/None",
"name": [
"Saint Petersburg National Research Academic University RAS, 194021, St. Petersburg, Russia"
],
"type": "Organization"
},
"familyName": "Shubina",
"givenName": "K. Yu.",
"id": "sg:person.015366243747.29",
"sameAs": [
"https://app.dimensions.ai/discover/publication?and_facet_researcher=ur.015366243747.29"
],
"type": "Person"
},
{
"affiliation": {
"alternateName": "Saint Petersburg National Research Academic University RAS, 194021, St. Petersburg, Russia",
"id": "http://www.grid.ac/institutes/None",
"name": [
"Saint Petersburg National Research Academic University RAS, 194021, St. Petersburg, Russia"
],
"type": "Organization"
},
"familyName": "Berezovskaya",
"givenName": "T. N.",
"id": "sg:person.07460553147.33",
"sameAs": [
"https://app.dimensions.ai/discover/publication?and_facet_researcher=ur.07460553147.33"
],
"type": "Person"
},
{
"affiliation": {
"alternateName": "Saint Petersburg National Research Academic University RAS, 194021, St. Petersburg, Russia",
"id": "http://www.grid.ac/institutes/None",
"name": [
"Saint Petersburg National Research Academic University RAS, 194021, St. Petersburg, Russia"
],
"type": "Organization"
},
"familyName": "Mokhov",
"givenName": "D. V.",
"id": "sg:person.013317604251.22",
"sameAs": [
"https://app.dimensions.ai/discover/publication?and_facet_researcher=ur.013317604251.22"
],
"type": "Person"
},
{
"affiliation": {
"alternateName": "Saint Petersburg National Research Academic University RAS, 194021, St. Petersburg, Russia",
"id": "http://www.grid.ac/institutes/None",
"name": [
"Saint Petersburg National Research Academic University RAS, 194021, St. Petersburg, Russia"
],
"type": "Organization"
},
"familyName": "Morozov",
"givenName": "I. A.",
"id": "sg:person.013166747367.12",
"sameAs": [
"https://app.dimensions.ai/discover/publication?and_facet_researcher=ur.013166747367.12"
],
"type": "Person"
},
{
"affiliation": {
"alternateName": "Saint Petersburg National Research Academic University RAS, 194021, St. Petersburg, Russia",
"id": "http://www.grid.ac/institutes/None",
"name": [
"Saint Petersburg National Research Academic University RAS, 194021, St. Petersburg, Russia"
],
"type": "Organization"
},
"familyName": "Kotlyar",
"givenName": "K. P.",
"id": "sg:person.010527440047.58",
"sameAs": [
"https://app.dimensions.ai/discover/publication?and_facet_researcher=ur.010527440047.58"
],
"type": "Person"
},
{
"affiliation": {
"alternateName": "Saint Petersburg National Research Academic University RAS, 194021, St. Petersburg, Russia",
"id": "http://www.grid.ac/institutes/None",
"name": [
"Saint Petersburg National Research Academic University RAS, 194021, St. Petersburg, Russia"
],
"type": "Organization"
},
"familyName": "Mizerov",
"givenName": "A. M.",
"id": "sg:person.011570622443.35",
"sameAs": [
"https://app.dimensions.ai/discover/publication?and_facet_researcher=ur.011570622443.35"
],
"type": "Person"
},
{
"affiliation": {
"alternateName": "Saint Petersburg National Research Academic University RAS, 194021, St. Petersburg, Russia",
"id": "http://www.grid.ac/institutes/None",
"name": [
"Saint Petersburg National Research Academic University RAS, 194021, St. Petersburg, Russia"
],
"type": "Organization"
},
"familyName": "Nikitina",
"givenName": "E. V.",
"id": "sg:person.012555247104.74",
"sameAs": [
"https://app.dimensions.ai/discover/publication?and_facet_researcher=ur.012555247104.74"
],
"type": "Person"
},
{
"affiliation": {
"alternateName": "Saint Petersburg National Research Academic University RAS, 194021, St. Petersburg, Russia",
"id": "http://www.grid.ac/institutes/None",
"name": [
"Saint Petersburg National Research Academic University RAS, 194021, St. Petersburg, Russia"
],
"type": "Organization"
},
"familyName": "Bouravleuv",
"givenName": "A. D.",
"id": "sg:person.012577710235.67",
"sameAs": [
"https://app.dimensions.ai/discover/publication?and_facet_researcher=ur.012577710235.67"
],
"type": "Person"
}
],
"citation": [
{
"id": "sg:pub.10.1134/s1063785017110116",
"sameAs": [
"https://app.dimensions.ai/details/publication/pub.1093127495",
"https://doi.org/10.1134/s1063785017110116"
],
"type": "CreativeWork"
},
{
"id": "sg:pub.10.1038/micronano.2016.48",
"sameAs": [
"https://app.dimensions.ai/details/publication/pub.1027584003",
"https://doi.org/10.1038/micronano.2016.48"
],
"type": "CreativeWork"
}
],
"datePublished": "2018-12",
"datePublishedReg": "2018-12-01",
"description": "Two different approaches for the etching of the gallium nitride epitaxial layers grown on Si(111) substrates by plasma-assisted molecular beam epitaxy have been elaborated. It is demonstrated that anisotropic etch profiles can be achieved by both photoenhanced wet chemical etching and reactive plasma-chemical etching methods. Moreover, it is shown, that the photoenhanced wet chemical etching allows to remove GaN layer without damaging silicon substrate.",
"genre": "article",
"id": "sg:pub.10.1134/s1063782618160297",
"inLanguage": "en",
"isAccessibleForFree": false,
"isPartOf": [
{
"id": "sg:journal.1136692",
"issn": [
"1063-7826",
"1090-6479"
],
"name": "Semiconductors",
"publisher": "Pleiades Publishing",
"type": "Periodical"
},
{
"issueNumber": "16",
"type": "PublicationIssue"
},
{
"type": "PublicationVolume",
"volumeNumber": "52"
}
],
"keywords": [
"wet chemical etching",
"gallium nitride epitaxial layers",
"chemical etching",
"nitride epitaxial layers",
"plasma-assisted molecular beam epitaxy",
"anisotropic etch profiles",
"MEMS applications",
"molecular beam epitaxy",
"silicon substrate",
"epitaxial structures",
"GaN layers",
"epitaxial layers",
"etching method",
"GaN/",
"beam epitaxy",
"etch profile",
"etching",
"layer",
"substrate",
"epitaxy",
"applications",
"processing",
"different approaches",
"structure",
"method",
"approach",
"profile"
],
"name": "Processing of GaN/Si(111) Epitaxial Structures for MEMS Applications",
"pagination": "2117-2119",
"productId": [
{
"name": "dimensions_id",
"type": "PropertyValue",
"value": [
"pub.1112389043"
]
},
{
"name": "doi",
"type": "PropertyValue",
"value": [
"10.1134/s1063782618160297"
]
}
],
"sameAs": [
"https://doi.org/10.1134/s1063782618160297",
"https://app.dimensions.ai/details/publication/pub.1112389043"
],
"sdDataset": "articles",
"sdDatePublished": "2022-05-20T07:33",
"sdLicense": "https://scigraph.springernature.com/explorer/license/",
"sdPublisher": {
"name": "Springer Nature - SN SciGraph project",
"type": "Organization"
},
"sdSource": "s3://com-springernature-scigraph/baseset/20220519/entities/gbq_results/article/article_773.jsonl",
"type": "ScholarlyArticle",
"url": "https://doi.org/10.1134/s1063782618160297"
}
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