Investigation of the Modified Structure of a Quantum Cascade Laser View Full Text


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Article Info

DATE

2018-01

AUTHORS

V. V. Mamutin, N. A. Maleev, A. P. Vasilyev, N. D. Ilyinskaya, Yu. M. Zadiranov, A. A. Usikova, M. A. Yagovkina, Yu. M. Shernyakov, V. M. Ustinov

ABSTRACT

The process of obtaining a modified structure for quantum cascade lasers is studied; this process includes growth using molecular-beam epitaxy, plasma etching, photolithography with the use of liquid etching, and the formation of special contacts for decreasing losses in the waveguide. The use of a special type of structure makes it possible, even without postgrowth overgrowth with a high-resistivity material, to attain parameters satisfying requirements to heterostructures in high-quality quantum cascade lasers at maximal simplification of the entire preparation process. More... »

PAGES

126-130

Identifiers

URI

http://scigraph.springernature.com/pub.10.1134/s106378261801013x

DOI

http://dx.doi.org/10.1134/s106378261801013x

DIMENSIONS

https://app.dimensions.ai/details/publication/pub.1101041412


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