On the self-structuring of single-crystal silicon wafers under inductive heating in vacuum View Full Text


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Article Info

DATE

2014-03-07

AUTHORS

M. G. Mynbaeva, S. P. Lebedev, A. A. Lavrent’ev, K. D. Mynbaev, A. A. Golovatenko, A. A. Lebedev, V. I. Nikolaev

ABSTRACT

The self-organized structuring of the surface of single-crystal silicon wafers under high-frequency annealing in a carbon-containing atmosphere is reported. The effect can be used to develop new maskless methods for the fabrication of structured materials for different functional purposes.

PAGES

350-353

References to SciGraph publications

Identifiers

URI

http://scigraph.springernature.com/pub.10.1134/s106378261403018x

DOI

http://dx.doi.org/10.1134/s106378261403018x

DIMENSIONS

https://app.dimensions.ai/details/publication/pub.1053537288


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[
  {
    "@context": "https://springernature.github.io/scigraph/jsonld/sgcontext.json", 
    "about": [
      {
        "id": "http://purl.org/au-research/vocabulary/anzsrc-for/2008/02", 
        "inDefinedTermSet": "http://purl.org/au-research/vocabulary/anzsrc-for/2008/", 
        "name": "Physical Sciences", 
        "type": "DefinedTerm"
      }, 
      {
        "id": "http://purl.org/au-research/vocabulary/anzsrc-for/2008/0299", 
        "inDefinedTermSet": "http://purl.org/au-research/vocabulary/anzsrc-for/2008/", 
        "name": "Other Physical Sciences", 
        "type": "DefinedTerm"
      }
    ], 
    "author": [
      {
        "affiliation": {
          "alternateName": "Ioffe Physical-Technical Institute, Russian Academy of Sciences, 194021, St. Petersburg, Russia", 
          "id": "http://www.grid.ac/institutes/grid.423485.c", 
          "name": [
            "Ioffe Physical-Technical Institute, Russian Academy of Sciences, 194021, St. Petersburg, Russia"
          ], 
          "type": "Organization"
        }, 
        "familyName": "Mynbaeva", 
        "givenName": "M. G.", 
        "id": "sg:person.07660667737.36", 
        "sameAs": [
          "https://app.dimensions.ai/discover/publication?and_facet_researcher=ur.07660667737.36"
        ], 
        "type": "Person"
      }, 
      {
        "affiliation": {
          "alternateName": "Ioffe Physical-Technical Institute, Russian Academy of Sciences, 194021, St. Petersburg, Russia", 
          "id": "http://www.grid.ac/institutes/grid.423485.c", 
          "name": [
            "Ioffe Physical-Technical Institute, Russian Academy of Sciences, 194021, St. Petersburg, Russia"
          ], 
          "type": "Organization"
        }, 
        "familyName": "Lebedev", 
        "givenName": "S. P.", 
        "id": "sg:person.012160272645.18", 
        "sameAs": [
          "https://app.dimensions.ai/discover/publication?and_facet_researcher=ur.012160272645.18"
        ], 
        "type": "Person"
      }, 
      {
        "affiliation": {
          "alternateName": "Ioffe Physical-Technical Institute, Russian Academy of Sciences, 194021, St. Petersburg, Russia", 
          "id": "http://www.grid.ac/institutes/grid.423485.c", 
          "name": [
            "Ioffe Physical-Technical Institute, Russian Academy of Sciences, 194021, St. Petersburg, Russia"
          ], 
          "type": "Organization"
        }, 
        "familyName": "Lavrent\u2019ev", 
        "givenName": "A. A.", 
        "id": "sg:person.07655161301.87", 
        "sameAs": [
          "https://app.dimensions.ai/discover/publication?and_facet_researcher=ur.07655161301.87"
        ], 
        "type": "Person"
      }, 
      {
        "affiliation": {
          "alternateName": "St. Petersburg National Research University of Information Technologies, Mechanics, and Optics, 197101, St. Petersburg, Russia", 
          "id": "http://www.grid.ac/institutes/grid.35915.3b", 
          "name": [
            "Ioffe Physical-Technical Institute, Russian Academy of Sciences, 194021, St. Petersburg, Russia", 
            "St. Petersburg National Research University of Information Technologies, Mechanics, and Optics, 197101, St. Petersburg, Russia"
          ], 
          "type": "Organization"
        }, 
        "familyName": "Mynbaev", 
        "givenName": "K. D.", 
        "id": "sg:person.010274772027.40", 
        "sameAs": [
          "https://app.dimensions.ai/discover/publication?and_facet_researcher=ur.010274772027.40"
        ], 
        "type": "Person"
      }, 
      {
        "affiliation": {
          "alternateName": "St. Petersburg National Research University of Information Technologies, Mechanics, and Optics, 197101, St. Petersburg, Russia", 
          "id": "http://www.grid.ac/institutes/grid.35915.3b", 
          "name": [
            "Ioffe Physical-Technical Institute, Russian Academy of Sciences, 194021, St. Petersburg, Russia", 
            "Perfect Crystals LLC, 194021, St. Petersburg, Russia", 
            "St. Petersburg National Research University of Information Technologies, Mechanics, and Optics, 197101, St. Petersburg, Russia"
          ], 
          "type": "Organization"
        }, 
        "familyName": "Golovatenko", 
        "givenName": "A. A.", 
        "id": "sg:person.010373376006.13", 
        "sameAs": [
          "https://app.dimensions.ai/discover/publication?and_facet_researcher=ur.010373376006.13"
        ], 
        "type": "Person"
      }, 
      {
        "affiliation": {
          "alternateName": "Ioffe Physical-Technical Institute, Russian Academy of Sciences, 194021, St. Petersburg, Russia", 
          "id": "http://www.grid.ac/institutes/grid.423485.c", 
          "name": [
            "Ioffe Physical-Technical Institute, Russian Academy of Sciences, 194021, St. Petersburg, Russia"
          ], 
          "type": "Organization"
        }, 
        "familyName": "Lebedev", 
        "givenName": "A. A.", 
        "id": "sg:person.011264364575.18", 
        "sameAs": [
          "https://app.dimensions.ai/discover/publication?and_facet_researcher=ur.011264364575.18"
        ], 
        "type": "Person"
      }, 
      {
        "affiliation": {
          "alternateName": "St. Petersburg National Research University of Information Technologies, Mechanics, and Optics, 197101, St. Petersburg, Russia", 
          "id": "http://www.grid.ac/institutes/grid.35915.3b", 
          "name": [
            "Ioffe Physical-Technical Institute, Russian Academy of Sciences, 194021, St. Petersburg, Russia", 
            "Perfect Crystals LLC, 194021, St. Petersburg, Russia", 
            "St. Petersburg National Research University of Information Technologies, Mechanics, and Optics, 197101, St. Petersburg, Russia"
          ], 
          "type": "Organization"
        }, 
        "familyName": "Nikolaev", 
        "givenName": "V. I.", 
        "id": "sg:person.013050610202.08", 
        "sameAs": [
          "https://app.dimensions.ai/discover/publication?and_facet_researcher=ur.013050610202.08"
        ], 
        "type": "Person"
      }
    ], 
    "citation": [
      {
        "id": "sg:pub.10.1557/jmr.2012.24", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1053527090", 
          "https://doi.org/10.1557/jmr.2012.24"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "sg:pub.10.1134/s1063782611060157", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1051199127", 
          "https://doi.org/10.1134/s1063782611060157"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "sg:pub.10.1134/s1063783407010283", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1003268935", 
          "https://doi.org/10.1134/s1063783407010283"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "sg:pub.10.1134/s102745100905022x", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1053542106", 
          "https://doi.org/10.1134/s102745100905022x"
        ], 
        "type": "CreativeWork"
      }
    ], 
    "datePublished": "2014-03-07", 
    "datePublishedReg": "2014-03-07", 
    "description": "The self-organized structuring of the surface of single-crystal silicon wafers under high-frequency annealing in a carbon-containing atmosphere is reported. The effect can be used to develop new maskless methods for the fabrication of structured materials for different functional purposes.", 
    "genre": "article", 
    "id": "sg:pub.10.1134/s106378261403018x", 
    "inLanguage": "en", 
    "isAccessibleForFree": false, 
    "isPartOf": [
      {
        "id": "sg:journal.1136692", 
        "issn": [
          "1063-7826", 
          "1090-6479"
        ], 
        "name": "Semiconductors", 
        "publisher": "Pleiades Publishing", 
        "type": "Periodical"
      }, 
      {
        "issueNumber": "3", 
        "type": "PublicationIssue"
      }, 
      {
        "type": "PublicationVolume", 
        "volumeNumber": "48"
      }
    ], 
    "keywords": [
      "single-crystal silicon wafers", 
      "self-organized structuring", 
      "silicon wafers", 
      "carbon-containing atmospheres", 
      "maskless method", 
      "wafers", 
      "inductive heating", 
      "vacuum", 
      "annealing", 
      "atmosphere", 
      "fabrication", 
      "heating", 
      "surface", 
      "materials", 
      "structuring", 
      "effect", 
      "method", 
      "functional purpose", 
      "purpose", 
      "different functional purposes", 
      "high-frequency annealing", 
      "new maskless methods"
    ], 
    "name": "On the self-structuring of single-crystal silicon wafers under inductive heating in vacuum", 
    "pagination": "350-353", 
    "productId": [
      {
        "name": "dimensions_id", 
        "type": "PropertyValue", 
        "value": [
          "pub.1053537288"
        ]
      }, 
      {
        "name": "doi", 
        "type": "PropertyValue", 
        "value": [
          "10.1134/s106378261403018x"
        ]
      }
    ], 
    "sameAs": [
      "https://doi.org/10.1134/s106378261403018x", 
      "https://app.dimensions.ai/details/publication/pub.1053537288"
    ], 
    "sdDataset": "articles", 
    "sdDatePublished": "2021-11-01T18:23", 
    "sdLicense": "https://scigraph.springernature.com/explorer/license/", 
    "sdPublisher": {
      "name": "Springer Nature - SN SciGraph project", 
      "type": "Organization"
    }, 
    "sdSource": "s3://com-springernature-scigraph/baseset/20211101/entities/gbq_results/article/article_638.jsonl", 
    "type": "ScholarlyArticle", 
    "url": "https://doi.org/10.1134/s106378261403018x"
  }
]
 

Download the RDF metadata as:  json-ld nt turtle xml License info

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This table displays all metadata directly associated to this object as RDF triples.

143 TRIPLES      22 PREDICATES      51 URIs      39 LITERALS      6 BLANK NODES

Subject Predicate Object
1 sg:pub.10.1134/s106378261403018x schema:about anzsrc-for:02
2 anzsrc-for:0299
3 schema:author N6309eddea79a4c3facf89e61797027f7
4 schema:citation sg:pub.10.1134/s102745100905022x
5 sg:pub.10.1134/s1063782611060157
6 sg:pub.10.1134/s1063783407010283
7 sg:pub.10.1557/jmr.2012.24
8 schema:datePublished 2014-03-07
9 schema:datePublishedReg 2014-03-07
10 schema:description The self-organized structuring of the surface of single-crystal silicon wafers under high-frequency annealing in a carbon-containing atmosphere is reported. The effect can be used to develop new maskless methods for the fabrication of structured materials for different functional purposes.
11 schema:genre article
12 schema:inLanguage en
13 schema:isAccessibleForFree false
14 schema:isPartOf N5da76f6462e24f8d908d2fe0c4d9ab69
15 Na0ef25a0c3764a2eb544397aef093afd
16 sg:journal.1136692
17 schema:keywords annealing
18 atmosphere
19 carbon-containing atmospheres
20 different functional purposes
21 effect
22 fabrication
23 functional purpose
24 heating
25 high-frequency annealing
26 inductive heating
27 maskless method
28 materials
29 method
30 new maskless methods
31 purpose
32 self-organized structuring
33 silicon wafers
34 single-crystal silicon wafers
35 structuring
36 surface
37 vacuum
38 wafers
39 schema:name On the self-structuring of single-crystal silicon wafers under inductive heating in vacuum
40 schema:pagination 350-353
41 schema:productId N491294e6ae0849a6853c24e9ac0dccef
42 N57f701f7245249a7ac874c7b6d74de35
43 schema:sameAs https://app.dimensions.ai/details/publication/pub.1053537288
44 https://doi.org/10.1134/s106378261403018x
45 schema:sdDatePublished 2021-11-01T18:23
46 schema:sdLicense https://scigraph.springernature.com/explorer/license/
47 schema:sdPublisher Ne434b4dac2ed47a79d75520c683d6436
48 schema:url https://doi.org/10.1134/s106378261403018x
49 sgo:license sg:explorer/license/
50 sgo:sdDataset articles
51 rdf:type schema:ScholarlyArticle
52 N491294e6ae0849a6853c24e9ac0dccef schema:name doi
53 schema:value 10.1134/s106378261403018x
54 rdf:type schema:PropertyValue
55 N57f701f7245249a7ac874c7b6d74de35 schema:name dimensions_id
56 schema:value pub.1053537288
57 rdf:type schema:PropertyValue
58 N5da76f6462e24f8d908d2fe0c4d9ab69 schema:volumeNumber 48
59 rdf:type schema:PublicationVolume
60 N5f5fdf46b1b44020b9c8cc5920b877c1 rdf:first sg:person.07655161301.87
61 rdf:rest Na2cac5bd36ab4687bcd48d76355db0a1
62 N6309eddea79a4c3facf89e61797027f7 rdf:first sg:person.07660667737.36
63 rdf:rest N7a222877b18a4f768316ebea22aa406b
64 N73be1cd0cc924ae8ac4daa8ef587b8a3 rdf:first sg:person.013050610202.08
65 rdf:rest rdf:nil
66 N7a034254afdd4eccad69e2799f40d6be rdf:first sg:person.010373376006.13
67 rdf:rest Nb4c92c2d25c645a7847d999a8961bb14
68 N7a222877b18a4f768316ebea22aa406b rdf:first sg:person.012160272645.18
69 rdf:rest N5f5fdf46b1b44020b9c8cc5920b877c1
70 Na0ef25a0c3764a2eb544397aef093afd schema:issueNumber 3
71 rdf:type schema:PublicationIssue
72 Na2cac5bd36ab4687bcd48d76355db0a1 rdf:first sg:person.010274772027.40
73 rdf:rest N7a034254afdd4eccad69e2799f40d6be
74 Nb4c92c2d25c645a7847d999a8961bb14 rdf:first sg:person.011264364575.18
75 rdf:rest N73be1cd0cc924ae8ac4daa8ef587b8a3
76 Ne434b4dac2ed47a79d75520c683d6436 schema:name Springer Nature - SN SciGraph project
77 rdf:type schema:Organization
78 anzsrc-for:02 schema:inDefinedTermSet anzsrc-for:
79 schema:name Physical Sciences
80 rdf:type schema:DefinedTerm
81 anzsrc-for:0299 schema:inDefinedTermSet anzsrc-for:
82 schema:name Other Physical Sciences
83 rdf:type schema:DefinedTerm
84 sg:journal.1136692 schema:issn 1063-7826
85 1090-6479
86 schema:name Semiconductors
87 schema:publisher Pleiades Publishing
88 rdf:type schema:Periodical
89 sg:person.010274772027.40 schema:affiliation grid-institutes:grid.35915.3b
90 schema:familyName Mynbaev
91 schema:givenName K. D.
92 schema:sameAs https://app.dimensions.ai/discover/publication?and_facet_researcher=ur.010274772027.40
93 rdf:type schema:Person
94 sg:person.010373376006.13 schema:affiliation grid-institutes:grid.35915.3b
95 schema:familyName Golovatenko
96 schema:givenName A. A.
97 schema:sameAs https://app.dimensions.ai/discover/publication?and_facet_researcher=ur.010373376006.13
98 rdf:type schema:Person
99 sg:person.011264364575.18 schema:affiliation grid-institutes:grid.423485.c
100 schema:familyName Lebedev
101 schema:givenName A. A.
102 schema:sameAs https://app.dimensions.ai/discover/publication?and_facet_researcher=ur.011264364575.18
103 rdf:type schema:Person
104 sg:person.012160272645.18 schema:affiliation grid-institutes:grid.423485.c
105 schema:familyName Lebedev
106 schema:givenName S. P.
107 schema:sameAs https://app.dimensions.ai/discover/publication?and_facet_researcher=ur.012160272645.18
108 rdf:type schema:Person
109 sg:person.013050610202.08 schema:affiliation grid-institutes:grid.35915.3b
110 schema:familyName Nikolaev
111 schema:givenName V. I.
112 schema:sameAs https://app.dimensions.ai/discover/publication?and_facet_researcher=ur.013050610202.08
113 rdf:type schema:Person
114 sg:person.07655161301.87 schema:affiliation grid-institutes:grid.423485.c
115 schema:familyName Lavrent’ev
116 schema:givenName A. A.
117 schema:sameAs https://app.dimensions.ai/discover/publication?and_facet_researcher=ur.07655161301.87
118 rdf:type schema:Person
119 sg:person.07660667737.36 schema:affiliation grid-institutes:grid.423485.c
120 schema:familyName Mynbaeva
121 schema:givenName M. G.
122 schema:sameAs https://app.dimensions.ai/discover/publication?and_facet_researcher=ur.07660667737.36
123 rdf:type schema:Person
124 sg:pub.10.1134/s102745100905022x schema:sameAs https://app.dimensions.ai/details/publication/pub.1053542106
125 https://doi.org/10.1134/s102745100905022x
126 rdf:type schema:CreativeWork
127 sg:pub.10.1134/s1063782611060157 schema:sameAs https://app.dimensions.ai/details/publication/pub.1051199127
128 https://doi.org/10.1134/s1063782611060157
129 rdf:type schema:CreativeWork
130 sg:pub.10.1134/s1063783407010283 schema:sameAs https://app.dimensions.ai/details/publication/pub.1003268935
131 https://doi.org/10.1134/s1063783407010283
132 rdf:type schema:CreativeWork
133 sg:pub.10.1557/jmr.2012.24 schema:sameAs https://app.dimensions.ai/details/publication/pub.1053527090
134 https://doi.org/10.1557/jmr.2012.24
135 rdf:type schema:CreativeWork
136 grid-institutes:grid.35915.3b schema:alternateName St. Petersburg National Research University of Information Technologies, Mechanics, and Optics, 197101, St. Petersburg, Russia
137 schema:name Ioffe Physical-Technical Institute, Russian Academy of Sciences, 194021, St. Petersburg, Russia
138 Perfect Crystals LLC, 194021, St. Petersburg, Russia
139 St. Petersburg National Research University of Information Technologies, Mechanics, and Optics, 197101, St. Petersburg, Russia
140 rdf:type schema:Organization
141 grid-institutes:grid.423485.c schema:alternateName Ioffe Physical-Technical Institute, Russian Academy of Sciences, 194021, St. Petersburg, Russia
142 schema:name Ioffe Physical-Technical Institute, Russian Academy of Sciences, 194021, St. Petersburg, Russia
143 rdf:type schema:Organization
 




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