Effect of Pt, Pd, Au additives on the surface and in the bulk of tin dioxide thin films on the ... View Full Text


Ontology type: schema:ScholarlyArticle     


Article Info

DATE

2012-06

AUTHORS

E. Y. Sevastyanov, N. K. Maksimova, V. A. Novikov, F. V. Rudov, N. V. Sergeychenko, E. V. Chernikov

ABSTRACT

The microstructure and properties of thin (∼100 nm) SnO2 films with noble metals Pt, Pd, Au additives, grown by dc magnetron deposition are studied. It is shown that the introduction of additives into the bulk and the deposition of dispersed catalysts on the semiconductor surface make it possible to control the sensor parameters in pure air and upon exposure to reduction (CO, H2, CH4) and oxidation (NO2) gases. Possible mechanisms for the effect of Pt, Pd, Au on the bulk and surface properties of tin dioxide are discussed. The technological conditions for film growth, which provide the selective detection of low concentrations (10–100 ppm) of CO and H2, below-explosive concentrations (0.5–2.5 vol %) of methane, and trace concentrations (0.05–5 ppm) of NO2 are determined. More... »

PAGES

801-809

Journal

TITLE

Semiconductors

ISSUE

6

VOLUME

46

Author Affiliations

Identifiers

URI

http://scigraph.springernature.com/pub.10.1134/s1063782612060206

DOI

http://dx.doi.org/10.1134/s1063782612060206

DIMENSIONS

https://app.dimensions.ai/details/publication/pub.1032578327


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