Influence of the energy parameters of the deposited laser-induced flow of platinum atoms on characteristics of a Pt/n-6H-SiC thin-film structure View Full Text


Ontology type: schema:ScholarlyArticle     


Article Info

DATE

2010-04

AUTHORS

V. Yu. Fominskii, R. I. Romanov, A. G. Gnedovets, V. V. Zuev, M. V. Demin

ABSTRACT

The features of platinum film formation on n-6H-SiC substrates were experimentally studied for different methods of pulsed laser deposition, i.e., by both the conventional method in vacuum and in an inert gas atmosphere. In the latter case, a disk screen was placed on the plume expansion axis between the laser target and substrate to protect the latter from micrometer and submicrometer particles. A numerical model of such a process was developed, which makes it possible to predict the deposited film distribution over the substrate surface, energy and angular parameters of the atomic flow as laser plume properties, inert gas pressure, and screen position are varied. Simulation results were used to explain electrical properties of Pt/n-6H-SiC thin-film structures fabricated by different methods. More... »

PAGES

537-543

Journal

TITLE

Semiconductors

ISSUE

4

VOLUME

44

Identifiers

URI

http://scigraph.springernature.com/pub.10.1134/s1063782610040226

DOI

http://dx.doi.org/10.1134/s1063782610040226

DIMENSIONS

https://app.dimensions.ai/details/publication/pub.1045176569


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