Effect of an External Magnetic Field on the Absorption Efficiency of the RF Power in a Spatially Bounded Inductive Plasma ... View Full Text


Ontology type: schema:ScholarlyArticle     


Article Info

DATE

2018-09

AUTHORS

P. A. Nekliudova, E. A. Kralkina, K. V. Vavilin, I. I. Zadiriyev, A. M. Nikonov

ABSTRACT

The measured dependences of the equivalent plasma resistance on the external magnetic field (0–50 G) in a 46-cm-diameter RF inductive plasma source operating at frequencies of 2, 4, and 13.56 MHz and a power of 100–500 W are presented. The experiments were carried out in argon at pressures of 0.1–30 mTorr. The presence of the external magnetic field leads to the appearance of resonance domains of efficient RF power absorption corresponding to the conditions of resonance excitation of helicons coupled with Trivelpiece–Gould modes. It is shown that RF power absorption at frequencies of 2 MHz can be optimized by applying an external magnetic field corresponding to the domains of resonance absorption. The effect is enhanced with increasing operating frequency. More... »

PAGES

878-881

Identifiers

URI

http://scigraph.springernature.com/pub.10.1134/s1063780x18090088

DOI

http://dx.doi.org/10.1134/s1063780x18090088

DIMENSIONS

https://app.dimensions.ai/details/publication/pub.1107110951


Indexing Status Check whether this publication has been indexed by Scopus and Web Of Science using the SN Indexing Status Tool
Incoming Citations Browse incoming citations for this publication using opencitations.net

JSON-LD is the canonical representation for SciGraph data.

TIP: You can open this SciGraph record using an external JSON-LD service: JSON-LD Playground Google SDTT

[
  {
    "@context": "https://springernature.github.io/scigraph/jsonld/sgcontext.json", 
    "about": [
      {
        "id": "http://purl.org/au-research/vocabulary/anzsrc-for/2008/0202", 
        "inDefinedTermSet": "http://purl.org/au-research/vocabulary/anzsrc-for/2008/", 
        "name": "Atomic, Molecular, Nuclear, Particle and Plasma Physics", 
        "type": "DefinedTerm"
      }, 
      {
        "id": "http://purl.org/au-research/vocabulary/anzsrc-for/2008/02", 
        "inDefinedTermSet": "http://purl.org/au-research/vocabulary/anzsrc-for/2008/", 
        "name": "Physical Sciences", 
        "type": "DefinedTerm"
      }
    ], 
    "author": [
      {
        "affiliation": {
          "alternateName": "Moscow State University", 
          "id": "https://www.grid.ac/institutes/grid.14476.30", 
          "name": [
            "Department of Physics, Moscow State University, 111991, Moscow, Russia"
          ], 
          "type": "Organization"
        }, 
        "familyName": "Nekliudova", 
        "givenName": "P. A.", 
        "id": "sg:person.011273102047.95", 
        "sameAs": [
          "https://app.dimensions.ai/discover/publication?and_facet_researcher=ur.011273102047.95"
        ], 
        "type": "Person"
      }, 
      {
        "affiliation": {
          "alternateName": "Moscow State University", 
          "id": "https://www.grid.ac/institutes/grid.14476.30", 
          "name": [
            "Department of Physics, Moscow State University, 111991, Moscow, Russia"
          ], 
          "type": "Organization"
        }, 
        "familyName": "Kralkina", 
        "givenName": "E. A.", 
        "id": "sg:person.014140704615.67", 
        "sameAs": [
          "https://app.dimensions.ai/discover/publication?and_facet_researcher=ur.014140704615.67"
        ], 
        "type": "Person"
      }, 
      {
        "affiliation": {
          "alternateName": "Moscow State University", 
          "id": "https://www.grid.ac/institutes/grid.14476.30", 
          "name": [
            "Department of Physics, Moscow State University, 111991, Moscow, Russia"
          ], 
          "type": "Organization"
        }, 
        "familyName": "Vavilin", 
        "givenName": "K. V.", 
        "id": "sg:person.010033754055.29", 
        "sameAs": [
          "https://app.dimensions.ai/discover/publication?and_facet_researcher=ur.010033754055.29"
        ], 
        "type": "Person"
      }, 
      {
        "affiliation": {
          "alternateName": "Moscow State University", 
          "id": "https://www.grid.ac/institutes/grid.14476.30", 
          "name": [
            "Department of Physics, Moscow State University, 111991, Moscow, Russia"
          ], 
          "type": "Organization"
        }, 
        "familyName": "Zadiriyev", 
        "givenName": "I. I.", 
        "type": "Person"
      }, 
      {
        "affiliation": {
          "alternateName": "Moscow State University", 
          "id": "https://www.grid.ac/institutes/grid.14476.30", 
          "name": [
            "Department of Physics, Moscow State University, 111991, Moscow, Russia"
          ], 
          "type": "Organization"
        }, 
        "familyName": "Nikonov", 
        "givenName": "A. M.", 
        "id": "sg:person.07453514152.10", 
        "sameAs": [
          "https://app.dimensions.ai/discover/publication?and_facet_researcher=ur.07453514152.10"
        ], 
        "type": "Person"
      }
    ], 
    "citation": [
      {
        "id": "sg:pub.10.1134/1.1744949", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1000097377", 
          "https://doi.org/10.1134/1.1744949"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "https://doi.org/10.1088/0963-0252/9/4/301", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1003047783"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "sg:pub.10.1134/1.1788762", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1016016533", 
          "https://doi.org/10.1134/1.1788762"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "https://doi.org/10.1088/0963-0252/1/2/006", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1017028051"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "https://doi.org/10.1088/0963-0252/3/2/007", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1045420824"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "https://doi.org/10.1088/0963-0252/1/3/006", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1052712722"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "https://doi.org/10.1063/1.369150", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1058001848"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "https://doi.org/10.1070/pu2008v051n05abeh006422", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1058174119"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "https://doi.org/10.1088/0963-0252/25/1/015016", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1059120013"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "https://doi.org/10.1116/1.4819316", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1062176895"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "sg:pub.10.3103/s002713491401010x", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1070973492", 
          "https://doi.org/10.3103/s002713491401010x"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "https://doi.org/10.1017/cbo9780511974342", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1098676635"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "https://doi.org/10.1002/0471724254", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1109700912"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "https://doi.org/10.1002/0471724254", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1109700912"
        ], 
        "type": "CreativeWork"
      }
    ], 
    "datePublished": "2018-09", 
    "datePublishedReg": "2018-09-01", 
    "description": "The measured dependences of the equivalent plasma resistance on the external magnetic field (0\u201350 G) in a 46-cm-diameter RF inductive plasma source operating at frequencies of 2, 4, and 13.56 MHz and a power of 100\u2013500 W are presented. The experiments were carried out in argon at pressures of 0.1\u201330 mTorr. The presence of the external magnetic field leads to the appearance of resonance domains of efficient RF power absorption corresponding to the conditions of resonance excitation of helicons coupled with Trivelpiece\u2013Gould modes. It is shown that RF power absorption at frequencies of 2 MHz can be optimized by applying an external magnetic field corresponding to the domains of resonance absorption. The effect is enhanced with increasing operating frequency.", 
    "genre": "research_article", 
    "id": "sg:pub.10.1134/s1063780x18090088", 
    "inLanguage": [
      "en"
    ], 
    "isAccessibleForFree": false, 
    "isPartOf": [
      {
        "id": "sg:journal.1136237", 
        "issn": [
          "1063-780X", 
          "1562-6938"
        ], 
        "name": "Plasma Physics Reports", 
        "type": "Periodical"
      }, 
      {
        "issueNumber": "9", 
        "type": "PublicationIssue"
      }, 
      {
        "type": "PublicationVolume", 
        "volumeNumber": "44"
      }
    ], 
    "name": "Effect of an External Magnetic Field on the Absorption Efficiency of the RF Power in a Spatially Bounded Inductive Plasma Source", 
    "pagination": "878-881", 
    "productId": [
      {
        "name": "readcube_id", 
        "type": "PropertyValue", 
        "value": [
          "7b1db2c6e6a407b22464e737d593fd3f8e99db0bb874c8a0ef6c37cc36e0a1de"
        ]
      }, 
      {
        "name": "doi", 
        "type": "PropertyValue", 
        "value": [
          "10.1134/s1063780x18090088"
        ]
      }, 
      {
        "name": "dimensions_id", 
        "type": "PropertyValue", 
        "value": [
          "pub.1107110951"
        ]
      }
    ], 
    "sameAs": [
      "https://doi.org/10.1134/s1063780x18090088", 
      "https://app.dimensions.ai/details/publication/pub.1107110951"
    ], 
    "sdDataset": "articles", 
    "sdDatePublished": "2019-04-10T15:15", 
    "sdLicense": "https://scigraph.springernature.com/explorer/license/", 
    "sdPublisher": {
      "name": "Springer Nature - SN SciGraph project", 
      "type": "Organization"
    }, 
    "sdSource": "s3://com-uberresearch-data-dimensions-target-20181106-alternative/cleanup/v134/2549eaecd7973599484d7c17b260dba0a4ecb94b/merge/v9/a6c9fde33151104705d4d7ff012ea9563521a3ce/jats-lookup/v90/0000000001_0000000264/records_8663_00000605.jsonl", 
    "type": "ScholarlyArticle", 
    "url": "http://link.springer.com/10.1134%2FS1063780X18090088"
  }
]
 

Download the RDF metadata as:  json-ld nt turtle xml License info

HOW TO GET THIS DATA PROGRAMMATICALLY:

JSON-LD is a popular format for linked data which is fully compatible with JSON.

curl -H 'Accept: application/ld+json' 'https://scigraph.springernature.com/pub.10.1134/s1063780x18090088'

N-Triples is a line-based linked data format ideal for batch operations.

curl -H 'Accept: application/n-triples' 'https://scigraph.springernature.com/pub.10.1134/s1063780x18090088'

Turtle is a human-readable linked data format.

curl -H 'Accept: text/turtle' 'https://scigraph.springernature.com/pub.10.1134/s1063780x18090088'

RDF/XML is a standard XML format for linked data.

curl -H 'Accept: application/rdf+xml' 'https://scigraph.springernature.com/pub.10.1134/s1063780x18090088'


 

This table displays all metadata directly associated to this object as RDF triples.

130 TRIPLES      21 PREDICATES      40 URIs      19 LITERALS      7 BLANK NODES

Subject Predicate Object
1 sg:pub.10.1134/s1063780x18090088 schema:about anzsrc-for:02
2 anzsrc-for:0202
3 schema:author N8116d88d67f040c495693eb923a49821
4 schema:citation sg:pub.10.1134/1.1744949
5 sg:pub.10.1134/1.1788762
6 sg:pub.10.3103/s002713491401010x
7 https://doi.org/10.1002/0471724254
8 https://doi.org/10.1017/cbo9780511974342
9 https://doi.org/10.1063/1.369150
10 https://doi.org/10.1070/pu2008v051n05abeh006422
11 https://doi.org/10.1088/0963-0252/1/2/006
12 https://doi.org/10.1088/0963-0252/1/3/006
13 https://doi.org/10.1088/0963-0252/25/1/015016
14 https://doi.org/10.1088/0963-0252/3/2/007
15 https://doi.org/10.1088/0963-0252/9/4/301
16 https://doi.org/10.1116/1.4819316
17 schema:datePublished 2018-09
18 schema:datePublishedReg 2018-09-01
19 schema:description The measured dependences of the equivalent plasma resistance on the external magnetic field (0–50 G) in a 46-cm-diameter RF inductive plasma source operating at frequencies of 2, 4, and 13.56 MHz and a power of 100–500 W are presented. The experiments were carried out in argon at pressures of 0.1–30 mTorr. The presence of the external magnetic field leads to the appearance of resonance domains of efficient RF power absorption corresponding to the conditions of resonance excitation of helicons coupled with Trivelpiece–Gould modes. It is shown that RF power absorption at frequencies of 2 MHz can be optimized by applying an external magnetic field corresponding to the domains of resonance absorption. The effect is enhanced with increasing operating frequency.
20 schema:genre research_article
21 schema:inLanguage en
22 schema:isAccessibleForFree false
23 schema:isPartOf N0b1058e1117d43a8b8602a5db64bb7ae
24 N803a4d58b0ef43e99b2b044be55a4d77
25 sg:journal.1136237
26 schema:name Effect of an External Magnetic Field on the Absorption Efficiency of the RF Power in a Spatially Bounded Inductive Plasma Source
27 schema:pagination 878-881
28 schema:productId N10e1dfe3f3494b888c4efd1f5627135d
29 N194fab0b1ba1412092f72b41bb6a42e6
30 N9588b1b61c044e5dbc99cd4275f23bb1
31 schema:sameAs https://app.dimensions.ai/details/publication/pub.1107110951
32 https://doi.org/10.1134/s1063780x18090088
33 schema:sdDatePublished 2019-04-10T15:15
34 schema:sdLicense https://scigraph.springernature.com/explorer/license/
35 schema:sdPublisher Ne66afe2d8eb74ae28692d222473b83f6
36 schema:url http://link.springer.com/10.1134%2FS1063780X18090088
37 sgo:license sg:explorer/license/
38 sgo:sdDataset articles
39 rdf:type schema:ScholarlyArticle
40 N0b1058e1117d43a8b8602a5db64bb7ae schema:volumeNumber 44
41 rdf:type schema:PublicationVolume
42 N10e1dfe3f3494b888c4efd1f5627135d schema:name readcube_id
43 schema:value 7b1db2c6e6a407b22464e737d593fd3f8e99db0bb874c8a0ef6c37cc36e0a1de
44 rdf:type schema:PropertyValue
45 N194fab0b1ba1412092f72b41bb6a42e6 schema:name dimensions_id
46 schema:value pub.1107110951
47 rdf:type schema:PropertyValue
48 N29002ba0e83e498eb1e6417dc35b1519 rdf:first sg:person.010033754055.29
49 rdf:rest N713b1dc0c7144a0d9929decb179041e1
50 N47ef8d511af34cdfa74b746fe53d7cd4 rdf:first sg:person.07453514152.10
51 rdf:rest rdf:nil
52 N6518129bab3f474e8d176f1785ade2bb rdf:first sg:person.014140704615.67
53 rdf:rest N29002ba0e83e498eb1e6417dc35b1519
54 N713b1dc0c7144a0d9929decb179041e1 rdf:first Nff5cb34f07e74d078822a255feb05de9
55 rdf:rest N47ef8d511af34cdfa74b746fe53d7cd4
56 N803a4d58b0ef43e99b2b044be55a4d77 schema:issueNumber 9
57 rdf:type schema:PublicationIssue
58 N8116d88d67f040c495693eb923a49821 rdf:first sg:person.011273102047.95
59 rdf:rest N6518129bab3f474e8d176f1785ade2bb
60 N9588b1b61c044e5dbc99cd4275f23bb1 schema:name doi
61 schema:value 10.1134/s1063780x18090088
62 rdf:type schema:PropertyValue
63 Ne66afe2d8eb74ae28692d222473b83f6 schema:name Springer Nature - SN SciGraph project
64 rdf:type schema:Organization
65 Nff5cb34f07e74d078822a255feb05de9 schema:affiliation https://www.grid.ac/institutes/grid.14476.30
66 schema:familyName Zadiriyev
67 schema:givenName I. I.
68 rdf:type schema:Person
69 anzsrc-for:02 schema:inDefinedTermSet anzsrc-for:
70 schema:name Physical Sciences
71 rdf:type schema:DefinedTerm
72 anzsrc-for:0202 schema:inDefinedTermSet anzsrc-for:
73 schema:name Atomic, Molecular, Nuclear, Particle and Plasma Physics
74 rdf:type schema:DefinedTerm
75 sg:journal.1136237 schema:issn 1063-780X
76 1562-6938
77 schema:name Plasma Physics Reports
78 rdf:type schema:Periodical
79 sg:person.010033754055.29 schema:affiliation https://www.grid.ac/institutes/grid.14476.30
80 schema:familyName Vavilin
81 schema:givenName K. V.
82 schema:sameAs https://app.dimensions.ai/discover/publication?and_facet_researcher=ur.010033754055.29
83 rdf:type schema:Person
84 sg:person.011273102047.95 schema:affiliation https://www.grid.ac/institutes/grid.14476.30
85 schema:familyName Nekliudova
86 schema:givenName P. A.
87 schema:sameAs https://app.dimensions.ai/discover/publication?and_facet_researcher=ur.011273102047.95
88 rdf:type schema:Person
89 sg:person.014140704615.67 schema:affiliation https://www.grid.ac/institutes/grid.14476.30
90 schema:familyName Kralkina
91 schema:givenName E. A.
92 schema:sameAs https://app.dimensions.ai/discover/publication?and_facet_researcher=ur.014140704615.67
93 rdf:type schema:Person
94 sg:person.07453514152.10 schema:affiliation https://www.grid.ac/institutes/grid.14476.30
95 schema:familyName Nikonov
96 schema:givenName A. M.
97 schema:sameAs https://app.dimensions.ai/discover/publication?and_facet_researcher=ur.07453514152.10
98 rdf:type schema:Person
99 sg:pub.10.1134/1.1744949 schema:sameAs https://app.dimensions.ai/details/publication/pub.1000097377
100 https://doi.org/10.1134/1.1744949
101 rdf:type schema:CreativeWork
102 sg:pub.10.1134/1.1788762 schema:sameAs https://app.dimensions.ai/details/publication/pub.1016016533
103 https://doi.org/10.1134/1.1788762
104 rdf:type schema:CreativeWork
105 sg:pub.10.3103/s002713491401010x schema:sameAs https://app.dimensions.ai/details/publication/pub.1070973492
106 https://doi.org/10.3103/s002713491401010x
107 rdf:type schema:CreativeWork
108 https://doi.org/10.1002/0471724254 schema:sameAs https://app.dimensions.ai/details/publication/pub.1109700912
109 rdf:type schema:CreativeWork
110 https://doi.org/10.1017/cbo9780511974342 schema:sameAs https://app.dimensions.ai/details/publication/pub.1098676635
111 rdf:type schema:CreativeWork
112 https://doi.org/10.1063/1.369150 schema:sameAs https://app.dimensions.ai/details/publication/pub.1058001848
113 rdf:type schema:CreativeWork
114 https://doi.org/10.1070/pu2008v051n05abeh006422 schema:sameAs https://app.dimensions.ai/details/publication/pub.1058174119
115 rdf:type schema:CreativeWork
116 https://doi.org/10.1088/0963-0252/1/2/006 schema:sameAs https://app.dimensions.ai/details/publication/pub.1017028051
117 rdf:type schema:CreativeWork
118 https://doi.org/10.1088/0963-0252/1/3/006 schema:sameAs https://app.dimensions.ai/details/publication/pub.1052712722
119 rdf:type schema:CreativeWork
120 https://doi.org/10.1088/0963-0252/25/1/015016 schema:sameAs https://app.dimensions.ai/details/publication/pub.1059120013
121 rdf:type schema:CreativeWork
122 https://doi.org/10.1088/0963-0252/3/2/007 schema:sameAs https://app.dimensions.ai/details/publication/pub.1045420824
123 rdf:type schema:CreativeWork
124 https://doi.org/10.1088/0963-0252/9/4/301 schema:sameAs https://app.dimensions.ai/details/publication/pub.1003047783
125 rdf:type schema:CreativeWork
126 https://doi.org/10.1116/1.4819316 schema:sameAs https://app.dimensions.ai/details/publication/pub.1062176895
127 rdf:type schema:CreativeWork
128 https://www.grid.ac/institutes/grid.14476.30 schema:alternateName Moscow State University
129 schema:name Department of Physics, Moscow State University, 111991, Moscow, Russia
130 rdf:type schema:Organization
 




Preview window. Press ESC to close (or click here)


...