Polycrystal diamond growth in a microwave plasma torch View Full Text


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Article Info

DATE

2010-12

AUTHORS

K. F. Sergeichev, N. A. Lukina, A. P. Bolshakov, V. G. Ralchenko, N. R. Arutyunyan, I. I. Vlasov

ABSTRACT

Diamond films of different structures were deposited on quartz, WC-Co, and molybdenum substrates in a microwave plasma torch discharge in an argon-hydrogen-methane gas mixture in a sealed chamber at pressures close to atmospheric by using the chemical vapor deposition technique. Images of diamond polycrystal films and separate crystals, as well as results of Raman spectroscopy, are presented. The spectra of optical plasma radiation recorded during film deposition demonstrate the presence of intense Hα hydrogen and C2 radical bands known as Swan bands. More... »

PAGES

1272-1277

References to SciGraph publications

Identifiers

URI

http://scigraph.springernature.com/pub.10.1134/s1063780x10130301

DOI

http://dx.doi.org/10.1134/s1063780x10130301

DIMENSIONS

https://app.dimensions.ai/details/publication/pub.1004057786


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