Manifestation of the Sapphire Crystal Structure in the Surface Nanopattern and Its Application in the Nitride Film Growth View Full Text


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Article Info

DATE

2018-03

AUTHORS

A. E. Muslimov, A. V. Butashin, V. M. Kanevsky, A. N. Deryabin, E. A. Vovk, V. A. Babaev

ABSTRACT

The “quenching” technique was used to investigate the initial stage of the formation of a terracestep nanostructure on the R-cut surface of sapphire crystal upon high-temperature annealing in air. The morphological features of the formation of A- and R-sapphire planes are experimentally shown in dependence on the misorientation direction and qualitatively interpreted with allowance for the surface energy density for the main sapphire faces. The possibilities of forming AlN layers on the R-sapphire surface with a terrace-step nanostructure under thermochemical effect and high-temperature substrate annealing in a mixture of nitrogen and reducing gases are considered. More... »

PAGES

234-240

References to SciGraph publications

  • 2009-12. Obtainment of textured films of aluminum nitride by thermochemical nitridation of sapphire in SEMICONDUCTORS
  • 1999-12. Melting of clusters approaching 0D in THE EUROPEAN PHYSICAL JOURNAL D
  • 2014-05. Specific features of the growth of AIIBVI films on (0001)Al2O3 substrates in CRYSTALLOGRAPHY REPORTS
  • 2016-01. Sapphire evolution of the vicinal (0001) sapphire surface upon annealing in air in CRYSTALLOGRAPHY REPORTS
  • 2007-01. Kinetics of the melting-dispersion process in copper thin films in PHYSICS OF THE SOLID STATE
  • 2015-07. Growth of crystalline ZnO films on the nitridated (0001) sapphire surface in CRYSTALLOGRAPHY REPORTS
  • 2015-01. Specific features of the surface morphology of modified AlN/sapphire substrates fabricated by thermochemical nitridation in CRYSTALLOGRAPHY REPORTS
  • 2015-06. Simulation of surface energies of sapphire crystals in PHYSICS OF THE SOLID STATE
  • 2009-10. Manifestation of the heterogeneous mechanism upon melting of low-dimensional systems in PHYSICS OF THE SOLID STATE
  • 2012-05. Ordered gold nanostructures on sapphire surfaces: Fabrication and optical investigations in CRYSTALLOGRAPHY REPORTS
  • 2009-02. Faceting of sapphire crystals grown from a melt by the Stepanov method in TECHNICAL PHYSICS
  • 2004-05. Dependence of the surface energy on the size and shape of a nanocrystal in PHYSICS OF THE SOLID STATE
  • 2011-05. Characterization of single-crystal sapphire substrates by X-ray methods and atomic force microscopy in CRYSTALLOGRAPHY REPORTS
  • 2017-03. Photonics of 2D gold nanolayers on sapphire surface in CRYSTALLOGRAPHY REPORTS
  • Identifiers

    URI

    http://scigraph.springernature.com/pub.10.1134/s1063774518020141

    DOI

    http://dx.doi.org/10.1134/s1063774518020141

    DIMENSIONS

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