CVD diamond coating of AlN ceramic substrates to enhance heat removal View Full Text


Ontology type: schema:ScholarlyArticle     


Article Info

DATE

2006-07

AUTHORS

V. G. Ralchenko, A. V. Saveliev, A. F. Popovich, I. I. Vlasov, S. V. Voronina, E. E. Ashkinazi

ABSTRACT

Polycrystalline diamond coatings over 100 μm thick are produced on AlN ceramic substrates by microwave-plasma CVD from a CH4-H2-O2 mixture. Their Raman spectra indicate good phase purity and a compressive stress as high as about 4 GPa due to the thermal-expansion mismatch between the diamond and the ceramic. Measurements by the laser flash technique at room temperature show the coatings to have a thermal conductivity of 970 W m−1 K−1 as against 290 and 170 W m−1 K−1 for mono-and polycrystalline aluminum nitride, respectively. It is concluded that a diamond coating of appropriate thickness significantly enhances the thermal conductivity of the surface region of AlN substrates and therefore could be useful for creating more efficient AlN heat sinks. More... »

PAGES

205-209

Journal

TITLE

Russian Microelectronics

ISSUE

4

VOLUME

35

Author Affiliations

Identifiers

URI

http://scigraph.springernature.com/pub.10.1134/s1063739706040019

DOI

http://dx.doi.org/10.1134/s1063739706040019

DIMENSIONS

https://app.dimensions.ai/details/publication/pub.1014886009


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