Ontology type: schema:ScholarlyArticle
2013-10
AUTHORS ABSTRACTThe degradation of thin films on thermal annealing was studied by atomic force and scanning electron microscopy. Main factors that govern high-temperature mass transfer in the multilayer structures were disclosed. It is shown that local curvature of internal and external interfaces is a driving force in the mass transfer responsible for thin film degradation, redistribution of alloying elements, and formation of silicides. More... »
PAGES348-354
http://scigraph.springernature.com/pub.10.1134/s1029959913040085
DOIhttp://dx.doi.org/10.1134/s1029959913040085
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