Investigation of the structure, elemental and phase composition of coatings on the basis of oxynitride titanium deposited by reactive magnetron ... View Full Text


Ontology type: schema:ScholarlyArticle     


Article Info

DATE

2014-11

AUTHORS

N. N. Nikitenkov, E. S. Kiselyova, M. E. Konischev, V. S. Sypchenko, A. N. Nikitenkov, V. F. Pichugin, I. A. Shylepov, M. Epple

ABSTRACT

The structure, morphology and properties of titanium-oxynitride coatings deposited by pulsed reactive magnetron sputtering were investigated. The methods of X-ray diffractometry, Raman spectroscopy, secondary ion mass-spectrometry and scanning electron microscopy are used. It is established that the structure, and the elemental and phase composition of coatings depend on the size of the ratio of oxygen/nitrogen in the composition of the reactive gas, and also on the magnitude of the negative bias applied to the substrate. The increase in the fraction of nitrogen leads to a reduction in the speed of sputtering, to a reduction in the contact angle of wetting, an increase in hardness and a reduction in Young’s modulus when a negative offset was used. More... »

PAGES

1230-1234

References to SciGraph publications

Identifiers

URI

http://scigraph.springernature.com/pub.10.1134/s1027451014060391

DOI

http://dx.doi.org/10.1134/s1027451014060391

DIMENSIONS

https://app.dimensions.ai/details/publication/pub.1007656205


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