Grazing incidence X-ray diffraction (GIRXD) study of the phase composition of SiCxFey and SiCxNyFez thin films View Full Text


Ontology type: schema:ScholarlyArticle      Open Access: True


Article Info

DATE

2015-11

AUTHORS

R. V. Pushkarev, N. I. Fainer, K. K. Maurya

ABSTRACT

Films of various composition are synthesized by chemical vapor deposition under low pressure using the thermal decomposition of the following initial gas mixtures: ferrocene Fe(C5H5)2 and helium; ferrocene, tris(diethylamino)silane [(C2H5)2N]3SiH (TDEAS) and helium; ferrocene, 1,1,1,3,3,3-hexamethyldisilazane [(CH3)3Si]2NH (HMDS), and helium. The chemical composition of the films obtained is analyzed by FTIR and Raman spectroscopies. The phase composition of the films is studied by grazing incidence X-ray diffraction (GIXRD). It is determined that the films grown from the gas mixtures of organiosilicon compounds (TDEAS or HMDS), ferrocene, and helium have the same chemical and phase composition (SiCxNyFez), while the films obtained from the mixture of ferrocene and helium have another composition (SiCxFey). More... »

PAGES

1176-1178

Identifiers

URI

http://scigraph.springernature.com/pub.10.1134/s0022476615060244

DOI

http://dx.doi.org/10.1134/s0022476615060244

DIMENSIONS

https://app.dimensions.ai/details/publication/pub.1032537751


Indexing Status Check whether this publication has been indexed by Scopus and Web Of Science using the SN Indexing Status Tool
Incoming Citations Browse incoming citations for this publication using opencitations.net

JSON-LD is the canonical representation for SciGraph data.

TIP: You can open this SciGraph record using an external JSON-LD service: JSON-LD Playground Google SDTT

[
  {
    "@context": "https://springernature.github.io/scigraph/jsonld/sgcontext.json", 
    "about": [
      {
        "id": "http://purl.org/au-research/vocabulary/anzsrc-for/2008/0306", 
        "inDefinedTermSet": "http://purl.org/au-research/vocabulary/anzsrc-for/2008/", 
        "name": "Physical Chemistry (incl. Structural)", 
        "type": "DefinedTerm"
      }, 
      {
        "id": "http://purl.org/au-research/vocabulary/anzsrc-for/2008/03", 
        "inDefinedTermSet": "http://purl.org/au-research/vocabulary/anzsrc-for/2008/", 
        "name": "Chemical Sciences", 
        "type": "DefinedTerm"
      }
    ], 
    "author": [
      {
        "affiliation": {
          "alternateName": "Nikolaev Institute of Inorganic Chemistry", 
          "id": "https://www.grid.ac/institutes/grid.425759.8", 
          "name": [
            "Nikolaev Institute of Inorganic Chemistry, Siberian Branch, Russian Academy of Sciences, Novosibirsk, Russia"
          ], 
          "type": "Organization"
        }, 
        "familyName": "Pushkarev", 
        "givenName": "R. V.", 
        "id": "sg:person.015046465021.57", 
        "sameAs": [
          "https://app.dimensions.ai/discover/publication?and_facet_researcher=ur.015046465021.57"
        ], 
        "type": "Person"
      }, 
      {
        "affiliation": {
          "alternateName": "Nikolaev Institute of Inorganic Chemistry", 
          "id": "https://www.grid.ac/institutes/grid.425759.8", 
          "name": [
            "Nikolaev Institute of Inorganic Chemistry, Siberian Branch, Russian Academy of Sciences, Novosibirsk, Russia"
          ], 
          "type": "Organization"
        }, 
        "familyName": "Fainer", 
        "givenName": "N. I.", 
        "type": "Person"
      }, 
      {
        "affiliation": {
          "alternateName": "National Physical Laboratory of India", 
          "id": "https://www.grid.ac/institutes/grid.419701.a", 
          "name": [
            "National Physical Laboratory, 110012, New Delhi, India"
          ], 
          "type": "Organization"
        }, 
        "familyName": "Maurya", 
        "givenName": "K. K.", 
        "id": "sg:person.010703060773.18", 
        "sameAs": [
          "https://app.dimensions.ai/discover/publication?and_facet_researcher=ur.010703060773.18"
        ], 
        "type": "Person"
      }
    ], 
    "citation": [
      {
        "id": "https://doi.org/10.1016/j.jpcs.2007.07.061", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1002451191"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "https://doi.org/10.1088/0268-1242/27/8/083001", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1012881196"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "https://doi.org/10.1103/physrevlett.88.066603", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1024786969"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "https://doi.org/10.1103/physrevlett.88.066603", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1024786969"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "https://doi.org/10.3390/ma3021049", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1048786223"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "https://doi.org/10.1021/am403464e", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1055144279"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "https://doi.org/10.1021/ic900934u", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1055584589"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "https://doi.org/10.1021/ic900934u", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1055584589"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "https://doi.org/10.1021/ja0107273", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1055765853"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "https://doi.org/10.1021/ja0107273", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1055765853"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "https://doi.org/10.1063/1.1435570", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1057706574"
        ], 
        "type": "CreativeWork"
      }
    ], 
    "datePublished": "2015-11", 
    "datePublishedReg": "2015-11-01", 
    "description": "Films of various composition are synthesized by chemical vapor deposition under low pressure using the thermal decomposition of the following initial gas mixtures: ferrocene Fe(C5H5)2 and helium; ferrocene, tris(diethylamino)silane [(C2H5)2N]3SiH (TDEAS) and helium; ferrocene, 1,1,1,3,3,3-hexamethyldisilazane [(CH3)3Si]2NH (HMDS), and helium. The chemical composition of the films obtained is analyzed by FTIR and Raman spectroscopies. The phase composition of the films is studied by grazing incidence X-ray diffraction (GIXRD). It is determined that the films grown from the gas mixtures of organiosilicon compounds (TDEAS or HMDS), ferrocene, and helium have the same chemical and phase composition (SiCxNyFez), while the films obtained from the mixture of ferrocene and helium have another composition (SiCxFey).", 
    "genre": "non_research_article", 
    "id": "sg:pub.10.1134/s0022476615060244", 
    "inLanguage": [
      "en"
    ], 
    "isAccessibleForFree": true, 
    "isPartOf": [
      {
        "id": "sg:journal.1135923", 
        "issn": [
          "0022-4766", 
          "2542-0976"
        ], 
        "name": "Journal of Structural Chemistry", 
        "type": "Periodical"
      }, 
      {
        "issueNumber": "6", 
        "type": "PublicationIssue"
      }, 
      {
        "type": "PublicationVolume", 
        "volumeNumber": "56"
      }
    ], 
    "name": "Grazing incidence X-ray diffraction (GIRXD) study of the phase composition of SiCxFey and SiCxNyFez thin films", 
    "pagination": "1176-1178", 
    "productId": [
      {
        "name": "readcube_id", 
        "type": "PropertyValue", 
        "value": [
          "9b01774bea383a8a689895de4f5b8557b1a5bfe0789e22ef3d16d492fa985e58"
        ]
      }, 
      {
        "name": "doi", 
        "type": "PropertyValue", 
        "value": [
          "10.1134/s0022476615060244"
        ]
      }, 
      {
        "name": "dimensions_id", 
        "type": "PropertyValue", 
        "value": [
          "pub.1032537751"
        ]
      }
    ], 
    "sameAs": [
      "https://doi.org/10.1134/s0022476615060244", 
      "https://app.dimensions.ai/details/publication/pub.1032537751"
    ], 
    "sdDataset": "articles", 
    "sdDatePublished": "2019-04-10T19:06", 
    "sdLicense": "https://scigraph.springernature.com/explorer/license/", 
    "sdPublisher": {
      "name": "Springer Nature - SN SciGraph project", 
      "type": "Organization"
    }, 
    "sdSource": "s3://com-uberresearch-data-dimensions-target-20181106-alternative/cleanup/v134/2549eaecd7973599484d7c17b260dba0a4ecb94b/merge/v9/a6c9fde33151104705d4d7ff012ea9563521a3ce/jats-lookup/v90/0000000001_0000000264/records_8678_00000500.jsonl", 
    "type": "ScholarlyArticle", 
    "url": "http://link.springer.com/10.1134/S0022476615060244"
  }
]
 

Download the RDF metadata as:  json-ld nt turtle xml License info

HOW TO GET THIS DATA PROGRAMMATICALLY:

JSON-LD is a popular format for linked data which is fully compatible with JSON.

curl -H 'Accept: application/ld+json' 'https://scigraph.springernature.com/pub.10.1134/s0022476615060244'

N-Triples is a line-based linked data format ideal for batch operations.

curl -H 'Accept: application/n-triples' 'https://scigraph.springernature.com/pub.10.1134/s0022476615060244'

Turtle is a human-readable linked data format.

curl -H 'Accept: text/turtle' 'https://scigraph.springernature.com/pub.10.1134/s0022476615060244'

RDF/XML is a standard XML format for linked data.

curl -H 'Accept: application/rdf+xml' 'https://scigraph.springernature.com/pub.10.1134/s0022476615060244'


 

This table displays all metadata directly associated to this object as RDF triples.

101 TRIPLES      21 PREDICATES      35 URIs      19 LITERALS      7 BLANK NODES

Subject Predicate Object
1 sg:pub.10.1134/s0022476615060244 schema:about anzsrc-for:03
2 anzsrc-for:0306
3 schema:author N4325a76a0091433ab8742705f25035e9
4 schema:citation https://doi.org/10.1016/j.jpcs.2007.07.061
5 https://doi.org/10.1021/am403464e
6 https://doi.org/10.1021/ic900934u
7 https://doi.org/10.1021/ja0107273
8 https://doi.org/10.1063/1.1435570
9 https://doi.org/10.1088/0268-1242/27/8/083001
10 https://doi.org/10.1103/physrevlett.88.066603
11 https://doi.org/10.3390/ma3021049
12 schema:datePublished 2015-11
13 schema:datePublishedReg 2015-11-01
14 schema:description Films of various composition are synthesized by chemical vapor deposition under low pressure using the thermal decomposition of the following initial gas mixtures: ferrocene Fe(C5H5)2 and helium; ferrocene, tris(diethylamino)silane [(C2H5)2N]3SiH (TDEAS) and helium; ferrocene, 1,1,1,3,3,3-hexamethyldisilazane [(CH3)3Si]2NH (HMDS), and helium. The chemical composition of the films obtained is analyzed by FTIR and Raman spectroscopies. The phase composition of the films is studied by grazing incidence X-ray diffraction (GIXRD). It is determined that the films grown from the gas mixtures of organiosilicon compounds (TDEAS or HMDS), ferrocene, and helium have the same chemical and phase composition (SiCxNyFez), while the films obtained from the mixture of ferrocene and helium have another composition (SiCxFey).
15 schema:genre non_research_article
16 schema:inLanguage en
17 schema:isAccessibleForFree true
18 schema:isPartOf N07266b7ba54b49ada3e53f93e62ae3ca
19 N214c561cbb3c47d8865e16b1ba532d68
20 sg:journal.1135923
21 schema:name Grazing incidence X-ray diffraction (GIRXD) study of the phase composition of SiCxFey and SiCxNyFez thin films
22 schema:pagination 1176-1178
23 schema:productId N366a87305ed947879604aefe005583f0
24 N5cf7b827658445ec81d0587ed769911b
25 Nfbe0c98e50f344288a0ccb15ffb93770
26 schema:sameAs https://app.dimensions.ai/details/publication/pub.1032537751
27 https://doi.org/10.1134/s0022476615060244
28 schema:sdDatePublished 2019-04-10T19:06
29 schema:sdLicense https://scigraph.springernature.com/explorer/license/
30 schema:sdPublisher N526b4279b3d646729900434824db82cd
31 schema:url http://link.springer.com/10.1134/S0022476615060244
32 sgo:license sg:explorer/license/
33 sgo:sdDataset articles
34 rdf:type schema:ScholarlyArticle
35 N07266b7ba54b49ada3e53f93e62ae3ca schema:issueNumber 6
36 rdf:type schema:PublicationIssue
37 N214c561cbb3c47d8865e16b1ba532d68 schema:volumeNumber 56
38 rdf:type schema:PublicationVolume
39 N366a87305ed947879604aefe005583f0 schema:name readcube_id
40 schema:value 9b01774bea383a8a689895de4f5b8557b1a5bfe0789e22ef3d16d492fa985e58
41 rdf:type schema:PropertyValue
42 N3ca8b05a4e104373a243d6af07779bb2 rdf:first sg:person.010703060773.18
43 rdf:rest rdf:nil
44 N4325a76a0091433ab8742705f25035e9 rdf:first sg:person.015046465021.57
45 rdf:rest N951abc4120e64070a18bfd8444efa421
46 N4c9422dd7b7544d98d6b15be35bd8a4f schema:affiliation https://www.grid.ac/institutes/grid.425759.8
47 schema:familyName Fainer
48 schema:givenName N. I.
49 rdf:type schema:Person
50 N526b4279b3d646729900434824db82cd schema:name Springer Nature - SN SciGraph project
51 rdf:type schema:Organization
52 N5cf7b827658445ec81d0587ed769911b schema:name doi
53 schema:value 10.1134/s0022476615060244
54 rdf:type schema:PropertyValue
55 N951abc4120e64070a18bfd8444efa421 rdf:first N4c9422dd7b7544d98d6b15be35bd8a4f
56 rdf:rest N3ca8b05a4e104373a243d6af07779bb2
57 Nfbe0c98e50f344288a0ccb15ffb93770 schema:name dimensions_id
58 schema:value pub.1032537751
59 rdf:type schema:PropertyValue
60 anzsrc-for:03 schema:inDefinedTermSet anzsrc-for:
61 schema:name Chemical Sciences
62 rdf:type schema:DefinedTerm
63 anzsrc-for:0306 schema:inDefinedTermSet anzsrc-for:
64 schema:name Physical Chemistry (incl. Structural)
65 rdf:type schema:DefinedTerm
66 sg:journal.1135923 schema:issn 0022-4766
67 2542-0976
68 schema:name Journal of Structural Chemistry
69 rdf:type schema:Periodical
70 sg:person.010703060773.18 schema:affiliation https://www.grid.ac/institutes/grid.419701.a
71 schema:familyName Maurya
72 schema:givenName K. K.
73 schema:sameAs https://app.dimensions.ai/discover/publication?and_facet_researcher=ur.010703060773.18
74 rdf:type schema:Person
75 sg:person.015046465021.57 schema:affiliation https://www.grid.ac/institutes/grid.425759.8
76 schema:familyName Pushkarev
77 schema:givenName R. V.
78 schema:sameAs https://app.dimensions.ai/discover/publication?and_facet_researcher=ur.015046465021.57
79 rdf:type schema:Person
80 https://doi.org/10.1016/j.jpcs.2007.07.061 schema:sameAs https://app.dimensions.ai/details/publication/pub.1002451191
81 rdf:type schema:CreativeWork
82 https://doi.org/10.1021/am403464e schema:sameAs https://app.dimensions.ai/details/publication/pub.1055144279
83 rdf:type schema:CreativeWork
84 https://doi.org/10.1021/ic900934u schema:sameAs https://app.dimensions.ai/details/publication/pub.1055584589
85 rdf:type schema:CreativeWork
86 https://doi.org/10.1021/ja0107273 schema:sameAs https://app.dimensions.ai/details/publication/pub.1055765853
87 rdf:type schema:CreativeWork
88 https://doi.org/10.1063/1.1435570 schema:sameAs https://app.dimensions.ai/details/publication/pub.1057706574
89 rdf:type schema:CreativeWork
90 https://doi.org/10.1088/0268-1242/27/8/083001 schema:sameAs https://app.dimensions.ai/details/publication/pub.1012881196
91 rdf:type schema:CreativeWork
92 https://doi.org/10.1103/physrevlett.88.066603 schema:sameAs https://app.dimensions.ai/details/publication/pub.1024786969
93 rdf:type schema:CreativeWork
94 https://doi.org/10.3390/ma3021049 schema:sameAs https://app.dimensions.ai/details/publication/pub.1048786223
95 rdf:type schema:CreativeWork
96 https://www.grid.ac/institutes/grid.419701.a schema:alternateName National Physical Laboratory of India
97 schema:name National Physical Laboratory, 110012, New Delhi, India
98 rdf:type schema:Organization
99 https://www.grid.ac/institutes/grid.425759.8 schema:alternateName Nikolaev Institute of Inorganic Chemistry
100 schema:name Nikolaev Institute of Inorganic Chemistry, Siberian Branch, Russian Academy of Sciences, Novosibirsk, Russia
101 rdf:type schema:Organization
 




Preview window. Press ESC to close (or click here)


...