Extreme-ultraviolet source based on the electron-cyclotron-resonance discharge View Full Text


Ontology type: schema:ScholarlyArticle     


Article Info

DATE

2008-09

AUTHORS

A. V. Vodopyanov, S. V. Golubev, D. A. Mansfeld, A. G. Nikolaev, K. P. Savkin, N. N. Salashchenko, N. I. Chkhalo, G. Yu. Yushkov

ABSTRACT

An extreme-ultraviolet (EUV) source based on a low-pressure discharge sustained in a magnetic trap by the high-power millimeter-wave radiation under electron-cyclotron-resonance (ECR) conditions is discussed. Multiply charged ions are efficiently generated and excited in such a discharge (tin ions injected into the trap from a vacuum-arc discharge were used) and emit line radiation in the desired wavelength range. A radiation power of 50 W in a wavelength range of 13.5 nm ± 1% and an efficiency of about 1% for the conversion of the micro-wave radiation absorbed in the plasma to the extreme ultraviolet radiation were achieved in the preliminary experiments. More... »

PAGES

95-98

Identifiers

URI

http://scigraph.springernature.com/pub.10.1134/s0021364008140051

DOI

http://dx.doi.org/10.1134/s0021364008140051

DIMENSIONS

https://app.dimensions.ai/details/publication/pub.1003826282


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[
  {
    "@context": "https://springernature.github.io/scigraph/jsonld/sgcontext.json", 
    "about": [
      {
        "id": "http://purl.org/au-research/vocabulary/anzsrc-for/2008/0202", 
        "inDefinedTermSet": "http://purl.org/au-research/vocabulary/anzsrc-for/2008/", 
        "name": "Atomic, Molecular, Nuclear, Particle and Plasma Physics", 
        "type": "DefinedTerm"
      }, 
      {
        "id": "http://purl.org/au-research/vocabulary/anzsrc-for/2008/02", 
        "inDefinedTermSet": "http://purl.org/au-research/vocabulary/anzsrc-for/2008/", 
        "name": "Physical Sciences", 
        "type": "DefinedTerm"
      }
    ], 
    "author": [
      {
        "affiliation": {
          "alternateName": "Institute of Applied Physics", 
          "id": "https://www.grid.ac/institutes/grid.410472.4", 
          "name": [
            "Institute of Applied Physics, Russian Academy of Sciences, 603950, Nizhny Novgorod, Russia"
          ], 
          "type": "Organization"
        }, 
        "familyName": "Vodopyanov", 
        "givenName": "A. V.", 
        "id": "sg:person.010036204015.07", 
        "sameAs": [
          "https://app.dimensions.ai/discover/publication?and_facet_researcher=ur.010036204015.07"
        ], 
        "type": "Person"
      }, 
      {
        "affiliation": {
          "alternateName": "Institute of Applied Physics", 
          "id": "https://www.grid.ac/institutes/grid.410472.4", 
          "name": [
            "Institute of Applied Physics, Russian Academy of Sciences, 603950, Nizhny Novgorod, Russia"
          ], 
          "type": "Organization"
        }, 
        "familyName": "Golubev", 
        "givenName": "S. V.", 
        "id": "sg:person.013757175541.56", 
        "sameAs": [
          "https://app.dimensions.ai/discover/publication?and_facet_researcher=ur.013757175541.56"
        ], 
        "type": "Person"
      }, 
      {
        "affiliation": {
          "alternateName": "Institute of Applied Physics", 
          "id": "https://www.grid.ac/institutes/grid.410472.4", 
          "name": [
            "Institute of Applied Physics, Russian Academy of Sciences, 603950, Nizhny Novgorod, Russia"
          ], 
          "type": "Organization"
        }, 
        "familyName": "Mansfeld", 
        "givenName": "D. A.", 
        "id": "sg:person.013536247155.76", 
        "sameAs": [
          "https://app.dimensions.ai/discover/publication?and_facet_researcher=ur.013536247155.76"
        ], 
        "type": "Person"
      }, 
      {
        "affiliation": {
          "alternateName": "Institute of High Current Electronics", 
          "id": "https://www.grid.ac/institutes/grid.465280.d", 
          "name": [
            "Institute of High-Current Electronics, Siberian Branch, Russian Academy of Sciences, 634055, Tomsk, Russia"
          ], 
          "type": "Organization"
        }, 
        "familyName": "Nikolaev", 
        "givenName": "A. G.", 
        "id": "sg:person.011710311302.16", 
        "sameAs": [
          "https://app.dimensions.ai/discover/publication?and_facet_researcher=ur.011710311302.16"
        ], 
        "type": "Person"
      }, 
      {
        "affiliation": {
          "alternateName": "Institute of High Current Electronics", 
          "id": "https://www.grid.ac/institutes/grid.465280.d", 
          "name": [
            "Institute of High-Current Electronics, Siberian Branch, Russian Academy of Sciences, 634055, Tomsk, Russia"
          ], 
          "type": "Organization"
        }, 
        "familyName": "Savkin", 
        "givenName": "K. P.", 
        "id": "sg:person.0726243247.19", 
        "sameAs": [
          "https://app.dimensions.ai/discover/publication?and_facet_researcher=ur.0726243247.19"
        ], 
        "type": "Person"
      }, 
      {
        "affiliation": {
          "alternateName": "Institute for Physics of Microstructures", 
          "id": "https://www.grid.ac/institutes/grid.425081.a", 
          "name": [
            "Institute for Physics of Microstructures, Russian Academy of Sciences, 603950, Nizhny Novgorod, Russia"
          ], 
          "type": "Organization"
        }, 
        "familyName": "Salashchenko", 
        "givenName": "N. N.", 
        "id": "sg:person.015026774364.86", 
        "sameAs": [
          "https://app.dimensions.ai/discover/publication?and_facet_researcher=ur.015026774364.86"
        ], 
        "type": "Person"
      }, 
      {
        "affiliation": {
          "alternateName": "Institute for Physics of Microstructures", 
          "id": "https://www.grid.ac/institutes/grid.425081.a", 
          "name": [
            "Institute for Physics of Microstructures, Russian Academy of Sciences, 603950, Nizhny Novgorod, Russia"
          ], 
          "type": "Organization"
        }, 
        "familyName": "Chkhalo", 
        "givenName": "N. I.", 
        "id": "sg:person.012637115451.39", 
        "sameAs": [
          "https://app.dimensions.ai/discover/publication?and_facet_researcher=ur.012637115451.39"
        ], 
        "type": "Person"
      }, 
      {
        "affiliation": {
          "alternateName": "Institute of High Current Electronics", 
          "id": "https://www.grid.ac/institutes/grid.465280.d", 
          "name": [
            "Institute of High-Current Electronics, Siberian Branch, Russian Academy of Sciences, 634055, Tomsk, Russia"
          ], 
          "type": "Organization"
        }, 
        "familyName": "Yushkov", 
        "givenName": "G. Yu.", 
        "id": "sg:person.01042471647.94", 
        "sameAs": [
          "https://app.dimensions.ai/discover/publication?and_facet_researcher=ur.01042471647.94"
        ], 
        "type": "Person"
      }
    ], 
    "citation": [
      {
        "id": "https://doi.org/10.1117/12.482676", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1018923097"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "https://doi.org/10.1117/12.436716", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1040585280"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "https://doi.org/10.1006/jxra.1996.0014", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1050014721"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "https://doi.org/10.1063/1.1459619", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1057708860"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "https://doi.org/10.1063/1.1702139", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1057772365"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "https://doi.org/10.1063/1.2206778", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1057846906"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "https://doi.org/10.3367/ufnr.0172.200210a.1113", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1071219910"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "https://doi.org/10.3367/ufnr.0177.200707h.0777", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1071220583"
        ], 
        "type": "CreativeWork"
      }
    ], 
    "datePublished": "2008-09", 
    "datePublishedReg": "2008-09-01", 
    "description": "An extreme-ultraviolet (EUV) source based on a low-pressure discharge sustained in a magnetic trap by the high-power millimeter-wave radiation under electron-cyclotron-resonance (ECR) conditions is discussed. Multiply charged ions are efficiently generated and excited in such a discharge (tin ions injected into the trap from a vacuum-arc discharge were used) and emit line radiation in the desired wavelength range. A radiation power of 50 W in a wavelength range of 13.5 nm \u00b1 1% and an efficiency of about 1% for the conversion of the micro-wave radiation absorbed in the plasma to the extreme ultraviolet radiation were achieved in the preliminary experiments.", 
    "genre": "research_article", 
    "id": "sg:pub.10.1134/s0021364008140051", 
    "inLanguage": [
      "en"
    ], 
    "isAccessibleForFree": false, 
    "isPartOf": [
      {
        "id": "sg:journal.1052174", 
        "issn": [
          "0021-3640", 
          "1090-6487"
        ], 
        "name": "JETP Letters", 
        "type": "Periodical"
      }, 
      {
        "issueNumber": "2", 
        "type": "PublicationIssue"
      }, 
      {
        "type": "PublicationVolume", 
        "volumeNumber": "88"
      }
    ], 
    "name": "Extreme-ultraviolet source based on the electron-cyclotron-resonance discharge", 
    "pagination": "95-98", 
    "productId": [
      {
        "name": "readcube_id", 
        "type": "PropertyValue", 
        "value": [
          "123ad06b590b132aac01f9e1b8834f0104aa1fb4d037dd243376b29c2b27fa34"
        ]
      }, 
      {
        "name": "doi", 
        "type": "PropertyValue", 
        "value": [
          "10.1134/s0021364008140051"
        ]
      }, 
      {
        "name": "dimensions_id", 
        "type": "PropertyValue", 
        "value": [
          "pub.1003826282"
        ]
      }
    ], 
    "sameAs": [
      "https://doi.org/10.1134/s0021364008140051", 
      "https://app.dimensions.ai/details/publication/pub.1003826282"
    ], 
    "sdDataset": "articles", 
    "sdDatePublished": "2019-04-10T20:44", 
    "sdLicense": "https://scigraph.springernature.com/explorer/license/", 
    "sdPublisher": {
      "name": "Springer Nature - SN SciGraph project", 
      "type": "Organization"
    }, 
    "sdSource": "s3://com-uberresearch-data-dimensions-target-20181106-alternative/cleanup/v134/2549eaecd7973599484d7c17b260dba0a4ecb94b/merge/v9/a6c9fde33151104705d4d7ff012ea9563521a3ce/jats-lookup/v90/0000000001_0000000264/records_8684_00000498.jsonl", 
    "type": "ScholarlyArticle", 
    "url": "http://link.springer.com/10.1134/S0021364008140051"
  }
]
 

Download the RDF metadata as:  json-ld nt turtle xml License info

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This table displays all metadata directly associated to this object as RDF triples.

140 TRIPLES      21 PREDICATES      35 URIs      19 LITERALS      7 BLANK NODES

Subject Predicate Object
1 sg:pub.10.1134/s0021364008140051 schema:about anzsrc-for:02
2 anzsrc-for:0202
3 schema:author N7bbc314f059c4e01958d5fcbe6778d96
4 schema:citation https://doi.org/10.1006/jxra.1996.0014
5 https://doi.org/10.1063/1.1459619
6 https://doi.org/10.1063/1.1702139
7 https://doi.org/10.1063/1.2206778
8 https://doi.org/10.1117/12.436716
9 https://doi.org/10.1117/12.482676
10 https://doi.org/10.3367/ufnr.0172.200210a.1113
11 https://doi.org/10.3367/ufnr.0177.200707h.0777
12 schema:datePublished 2008-09
13 schema:datePublishedReg 2008-09-01
14 schema:description An extreme-ultraviolet (EUV) source based on a low-pressure discharge sustained in a magnetic trap by the high-power millimeter-wave radiation under electron-cyclotron-resonance (ECR) conditions is discussed. Multiply charged ions are efficiently generated and excited in such a discharge (tin ions injected into the trap from a vacuum-arc discharge were used) and emit line radiation in the desired wavelength range. A radiation power of 50 W in a wavelength range of 13.5 nm ± 1% and an efficiency of about 1% for the conversion of the micro-wave radiation absorbed in the plasma to the extreme ultraviolet radiation were achieved in the preliminary experiments.
15 schema:genre research_article
16 schema:inLanguage en
17 schema:isAccessibleForFree false
18 schema:isPartOf N3655e18e49bc47a9a52f70ee091d40d3
19 N646c222545124940b045e5eb5170b7be
20 sg:journal.1052174
21 schema:name Extreme-ultraviolet source based on the electron-cyclotron-resonance discharge
22 schema:pagination 95-98
23 schema:productId N19324f9a12064759b6b8504c57c0690b
24 N63a050605f054aac965d0056914caabc
25 Nd361a5acad8840e68220696334610bdf
26 schema:sameAs https://app.dimensions.ai/details/publication/pub.1003826282
27 https://doi.org/10.1134/s0021364008140051
28 schema:sdDatePublished 2019-04-10T20:44
29 schema:sdLicense https://scigraph.springernature.com/explorer/license/
30 schema:sdPublisher N4e1388cbf04344939ce25c82a5a10eb8
31 schema:url http://link.springer.com/10.1134/S0021364008140051
32 sgo:license sg:explorer/license/
33 sgo:sdDataset articles
34 rdf:type schema:ScholarlyArticle
35 N19324f9a12064759b6b8504c57c0690b schema:name readcube_id
36 schema:value 123ad06b590b132aac01f9e1b8834f0104aa1fb4d037dd243376b29c2b27fa34
37 rdf:type schema:PropertyValue
38 N255e25c0d8a64549b0ab178a798a5b81 rdf:first sg:person.015026774364.86
39 rdf:rest N9d662ab7dc5842f58399ae1831edd40f
40 N3655e18e49bc47a9a52f70ee091d40d3 schema:volumeNumber 88
41 rdf:type schema:PublicationVolume
42 N4cb9302342d34bbda1fefe323fdcd53a rdf:first sg:person.013757175541.56
43 rdf:rest N9cb2355681b24ad09b6671ab09c74880
44 N4e1388cbf04344939ce25c82a5a10eb8 schema:name Springer Nature - SN SciGraph project
45 rdf:type schema:Organization
46 N63a050605f054aac965d0056914caabc schema:name doi
47 schema:value 10.1134/s0021364008140051
48 rdf:type schema:PropertyValue
49 N646c222545124940b045e5eb5170b7be schema:issueNumber 2
50 rdf:type schema:PublicationIssue
51 N7bbc314f059c4e01958d5fcbe6778d96 rdf:first sg:person.010036204015.07
52 rdf:rest N4cb9302342d34bbda1fefe323fdcd53a
53 N8c4e3d5501fd4552ac84c72ca6e4dfcb rdf:first sg:person.011710311302.16
54 rdf:rest Nbb78778628d146f5b57f907ece3c5211
55 N9cb2355681b24ad09b6671ab09c74880 rdf:first sg:person.013536247155.76
56 rdf:rest N8c4e3d5501fd4552ac84c72ca6e4dfcb
57 N9d662ab7dc5842f58399ae1831edd40f rdf:first sg:person.012637115451.39
58 rdf:rest Nbd41a51b51fe4835a7c9a3ad35b4df95
59 Nbb78778628d146f5b57f907ece3c5211 rdf:first sg:person.0726243247.19
60 rdf:rest N255e25c0d8a64549b0ab178a798a5b81
61 Nbd41a51b51fe4835a7c9a3ad35b4df95 rdf:first sg:person.01042471647.94
62 rdf:rest rdf:nil
63 Nd361a5acad8840e68220696334610bdf schema:name dimensions_id
64 schema:value pub.1003826282
65 rdf:type schema:PropertyValue
66 anzsrc-for:02 schema:inDefinedTermSet anzsrc-for:
67 schema:name Physical Sciences
68 rdf:type schema:DefinedTerm
69 anzsrc-for:0202 schema:inDefinedTermSet anzsrc-for:
70 schema:name Atomic, Molecular, Nuclear, Particle and Plasma Physics
71 rdf:type schema:DefinedTerm
72 sg:journal.1052174 schema:issn 0021-3640
73 1090-6487
74 schema:name JETP Letters
75 rdf:type schema:Periodical
76 sg:person.010036204015.07 schema:affiliation https://www.grid.ac/institutes/grid.410472.4
77 schema:familyName Vodopyanov
78 schema:givenName A. V.
79 schema:sameAs https://app.dimensions.ai/discover/publication?and_facet_researcher=ur.010036204015.07
80 rdf:type schema:Person
81 sg:person.01042471647.94 schema:affiliation https://www.grid.ac/institutes/grid.465280.d
82 schema:familyName Yushkov
83 schema:givenName G. Yu.
84 schema:sameAs https://app.dimensions.ai/discover/publication?and_facet_researcher=ur.01042471647.94
85 rdf:type schema:Person
86 sg:person.011710311302.16 schema:affiliation https://www.grid.ac/institutes/grid.465280.d
87 schema:familyName Nikolaev
88 schema:givenName A. G.
89 schema:sameAs https://app.dimensions.ai/discover/publication?and_facet_researcher=ur.011710311302.16
90 rdf:type schema:Person
91 sg:person.012637115451.39 schema:affiliation https://www.grid.ac/institutes/grid.425081.a
92 schema:familyName Chkhalo
93 schema:givenName N. I.
94 schema:sameAs https://app.dimensions.ai/discover/publication?and_facet_researcher=ur.012637115451.39
95 rdf:type schema:Person
96 sg:person.013536247155.76 schema:affiliation https://www.grid.ac/institutes/grid.410472.4
97 schema:familyName Mansfeld
98 schema:givenName D. A.
99 schema:sameAs https://app.dimensions.ai/discover/publication?and_facet_researcher=ur.013536247155.76
100 rdf:type schema:Person
101 sg:person.013757175541.56 schema:affiliation https://www.grid.ac/institutes/grid.410472.4
102 schema:familyName Golubev
103 schema:givenName S. V.
104 schema:sameAs https://app.dimensions.ai/discover/publication?and_facet_researcher=ur.013757175541.56
105 rdf:type schema:Person
106 sg:person.015026774364.86 schema:affiliation https://www.grid.ac/institutes/grid.425081.a
107 schema:familyName Salashchenko
108 schema:givenName N. N.
109 schema:sameAs https://app.dimensions.ai/discover/publication?and_facet_researcher=ur.015026774364.86
110 rdf:type schema:Person
111 sg:person.0726243247.19 schema:affiliation https://www.grid.ac/institutes/grid.465280.d
112 schema:familyName Savkin
113 schema:givenName K. P.
114 schema:sameAs https://app.dimensions.ai/discover/publication?and_facet_researcher=ur.0726243247.19
115 rdf:type schema:Person
116 https://doi.org/10.1006/jxra.1996.0014 schema:sameAs https://app.dimensions.ai/details/publication/pub.1050014721
117 rdf:type schema:CreativeWork
118 https://doi.org/10.1063/1.1459619 schema:sameAs https://app.dimensions.ai/details/publication/pub.1057708860
119 rdf:type schema:CreativeWork
120 https://doi.org/10.1063/1.1702139 schema:sameAs https://app.dimensions.ai/details/publication/pub.1057772365
121 rdf:type schema:CreativeWork
122 https://doi.org/10.1063/1.2206778 schema:sameAs https://app.dimensions.ai/details/publication/pub.1057846906
123 rdf:type schema:CreativeWork
124 https://doi.org/10.1117/12.436716 schema:sameAs https://app.dimensions.ai/details/publication/pub.1040585280
125 rdf:type schema:CreativeWork
126 https://doi.org/10.1117/12.482676 schema:sameAs https://app.dimensions.ai/details/publication/pub.1018923097
127 rdf:type schema:CreativeWork
128 https://doi.org/10.3367/ufnr.0172.200210a.1113 schema:sameAs https://app.dimensions.ai/details/publication/pub.1071219910
129 rdf:type schema:CreativeWork
130 https://doi.org/10.3367/ufnr.0177.200707h.0777 schema:sameAs https://app.dimensions.ai/details/publication/pub.1071220583
131 rdf:type schema:CreativeWork
132 https://www.grid.ac/institutes/grid.410472.4 schema:alternateName Institute of Applied Physics
133 schema:name Institute of Applied Physics, Russian Academy of Sciences, 603950, Nizhny Novgorod, Russia
134 rdf:type schema:Organization
135 https://www.grid.ac/institutes/grid.425081.a schema:alternateName Institute for Physics of Microstructures
136 schema:name Institute for Physics of Microstructures, Russian Academy of Sciences, 603950, Nizhny Novgorod, Russia
137 rdf:type schema:Organization
138 https://www.grid.ac/institutes/grid.465280.d schema:alternateName Institute of High Current Electronics
139 schema:name Institute of High-Current Electronics, Siberian Branch, Russian Academy of Sciences, 634055, Tomsk, Russia
140 rdf:type schema:Organization
 




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