Heteropolytype structures with SiC quantum dots View Full Text


Ontology type: schema:ScholarlyArticle     


Article Info

DATE

2005-12

AUTHORS

A. A. Lebedev, V. N. Petrov, A. N. Titkov, L. M. Sorokin, A. S. Tregubova, G. N. Mosina, A. E. Cherenkov, M. P. Shcheglov

ABSTRACT

Epitaxial silicon carbide layers of 3C-SiC polytype with an array of nanodimensional SiC quantum dots (QDs) have been obtained for the first time using an improved method of sublimation epitaxy in vacuum. The X-ray topography and X-ray diffraction data unambiguously confirm the formation of a 3C-SiC epilayer with twinned regions on the surface of a 6H-SiC substrate. The surface topography of epilayers was studied by atomic force microscopy (AFM), and the microstructure of a near-surface layer of the deposit was investigated by transmission electron microscopy (TEM). Using the AFM and TEM data, the presence of QDs (representing SiC nanoislands) is established, and their average dimensions and concentration are evaluated. More... »

PAGES

997-1000

Identifiers

URI

http://scigraph.springernature.com/pub.10.1134/1.2150879

DOI

http://dx.doi.org/10.1134/1.2150879

DIMENSIONS

https://app.dimensions.ai/details/publication/pub.1030680414


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[
  {
    "@context": "https://springernature.github.io/scigraph/jsonld/sgcontext.json", 
    "about": [
      {
        "id": "http://purl.org/au-research/vocabulary/anzsrc-for/2008/02", 
        "inDefinedTermSet": "http://purl.org/au-research/vocabulary/anzsrc-for/2008/", 
        "name": "Physical Sciences", 
        "type": "DefinedTerm"
      }, 
      {
        "id": "http://purl.org/au-research/vocabulary/anzsrc-for/2008/0299", 
        "inDefinedTermSet": "http://purl.org/au-research/vocabulary/anzsrc-for/2008/", 
        "name": "Other Physical Sciences", 
        "type": "DefinedTerm"
      }
    ], 
    "author": [
      {
        "affiliation": {
          "alternateName": "Ioffe Physicotechnical Institute, Russian Academy of Sciences, 194021, St. Petersburg, Russia", 
          "id": "http://www.grid.ac/institutes/grid.423485.c", 
          "name": [
            "Ioffe Physicotechnical Institute, Russian Academy of Sciences, 194021, St. Petersburg, Russia"
          ], 
          "type": "Organization"
        }, 
        "familyName": "Lebedev", 
        "givenName": "A. A.", 
        "id": "sg:person.011264364575.18", 
        "sameAs": [
          "https://app.dimensions.ai/discover/publication?and_facet_researcher=ur.011264364575.18"
        ], 
        "type": "Person"
      }, 
      {
        "affiliation": {
          "alternateName": "Ioffe Physicotechnical Institute, Russian Academy of Sciences, 194021, St. Petersburg, Russia", 
          "id": "http://www.grid.ac/institutes/grid.423485.c", 
          "name": [
            "Ioffe Physicotechnical Institute, Russian Academy of Sciences, 194021, St. Petersburg, Russia"
          ], 
          "type": "Organization"
        }, 
        "familyName": "Petrov", 
        "givenName": "V. N.", 
        "id": "sg:person.010547461051.73", 
        "sameAs": [
          "https://app.dimensions.ai/discover/publication?and_facet_researcher=ur.010547461051.73"
        ], 
        "type": "Person"
      }, 
      {
        "affiliation": {
          "alternateName": "Ioffe Physicotechnical Institute, Russian Academy of Sciences, 194021, St. Petersburg, Russia", 
          "id": "http://www.grid.ac/institutes/grid.423485.c", 
          "name": [
            "Ioffe Physicotechnical Institute, Russian Academy of Sciences, 194021, St. Petersburg, Russia"
          ], 
          "type": "Organization"
        }, 
        "familyName": "Titkov", 
        "givenName": "A. N.", 
        "id": "sg:person.07370501716.85", 
        "sameAs": [
          "https://app.dimensions.ai/discover/publication?and_facet_researcher=ur.07370501716.85"
        ], 
        "type": "Person"
      }, 
      {
        "affiliation": {
          "alternateName": "Ioffe Physicotechnical Institute, Russian Academy of Sciences, 194021, St. Petersburg, Russia", 
          "id": "http://www.grid.ac/institutes/grid.423485.c", 
          "name": [
            "Ioffe Physicotechnical Institute, Russian Academy of Sciences, 194021, St. Petersburg, Russia"
          ], 
          "type": "Organization"
        }, 
        "familyName": "Sorokin", 
        "givenName": "L. M.", 
        "id": "sg:person.010730376716.55", 
        "sameAs": [
          "https://app.dimensions.ai/discover/publication?and_facet_researcher=ur.010730376716.55"
        ], 
        "type": "Person"
      }, 
      {
        "affiliation": {
          "alternateName": "Ioffe Physicotechnical Institute, Russian Academy of Sciences, 194021, St. Petersburg, Russia", 
          "id": "http://www.grid.ac/institutes/grid.423485.c", 
          "name": [
            "Ioffe Physicotechnical Institute, Russian Academy of Sciences, 194021, St. Petersburg, Russia"
          ], 
          "type": "Organization"
        }, 
        "familyName": "Tregubova", 
        "givenName": "A. S.", 
        "id": "sg:person.014577536705.39", 
        "sameAs": [
          "https://app.dimensions.ai/discover/publication?and_facet_researcher=ur.014577536705.39"
        ], 
        "type": "Person"
      }, 
      {
        "affiliation": {
          "alternateName": "Ioffe Physicotechnical Institute, Russian Academy of Sciences, 194021, St. Petersburg, Russia", 
          "id": "http://www.grid.ac/institutes/grid.423485.c", 
          "name": [
            "Ioffe Physicotechnical Institute, Russian Academy of Sciences, 194021, St. Petersburg, Russia"
          ], 
          "type": "Organization"
        }, 
        "familyName": "Mosina", 
        "givenName": "G. N.", 
        "id": "sg:person.010557736205.75", 
        "sameAs": [
          "https://app.dimensions.ai/discover/publication?and_facet_researcher=ur.010557736205.75"
        ], 
        "type": "Person"
      }, 
      {
        "affiliation": {
          "alternateName": "Ioffe Physicotechnical Institute, Russian Academy of Sciences, 194021, St. Petersburg, Russia", 
          "id": "http://www.grid.ac/institutes/grid.423485.c", 
          "name": [
            "Ioffe Physicotechnical Institute, Russian Academy of Sciences, 194021, St. Petersburg, Russia"
          ], 
          "type": "Organization"
        }, 
        "familyName": "Cherenkov", 
        "givenName": "A. E.", 
        "id": "sg:person.011716107167.09", 
        "sameAs": [
          "https://app.dimensions.ai/discover/publication?and_facet_researcher=ur.011716107167.09"
        ], 
        "type": "Person"
      }, 
      {
        "affiliation": {
          "alternateName": "Ioffe Physicotechnical Institute, Russian Academy of Sciences, 194021, St. Petersburg, Russia", 
          "id": "http://www.grid.ac/institutes/grid.423485.c", 
          "name": [
            "Ioffe Physicotechnical Institute, Russian Academy of Sciences, 194021, St. Petersburg, Russia"
          ], 
          "type": "Organization"
        }, 
        "familyName": "Shcheglov", 
        "givenName": "M. P.", 
        "id": "sg:person.010346162345.53", 
        "sameAs": [
          "https://app.dimensions.ai/discover/publication?and_facet_researcher=ur.010346162345.53"
        ], 
        "type": "Person"
      }
    ], 
    "datePublished": "2005-12", 
    "datePublishedReg": "2005-12-01", 
    "description": "Epitaxial silicon carbide layers of 3C-SiC polytype with an array of nanodimensional SiC quantum dots (QDs) have been obtained for the first time using an improved method of sublimation epitaxy in vacuum. The X-ray topography and X-ray diffraction data unambiguously confirm the formation of a 3C-SiC epilayer with twinned regions on the surface of a 6H-SiC substrate. The surface topography of epilayers was studied by atomic force microscopy (AFM), and the microstructure of a near-surface layer of the deposit was investigated by transmission electron microscopy (TEM). Using the AFM and TEM data, the presence of QDs (representing SiC nanoislands) is established, and their average dimensions and concentration are evaluated.", 
    "genre": "article", 
    "id": "sg:pub.10.1134/1.2150879", 
    "inLanguage": "en", 
    "isAccessibleForFree": false, 
    "isPartOf": [
      {
        "id": "sg:journal.1136630", 
        "issn": [
          "0320-0116", 
          "0360-120X"
        ], 
        "name": "Technical Physics Letters", 
        "publisher": "Pleiades Publishing", 
        "type": "Periodical"
      }, 
      {
        "issueNumber": "12", 
        "type": "PublicationIssue"
      }, 
      {
        "type": "PublicationVolume", 
        "volumeNumber": "31"
      }
    ], 
    "keywords": [
      "atomic force microscopy", 
      "transmission electron microscopy", 
      "SiC quantum dots", 
      "quantum dots", 
      "epitaxial silicon carbide layers", 
      "presence of QDs", 
      "near-surface layer", 
      "force microscopy", 
      "ray diffraction data", 
      "electron microscopy", 
      "silicon carbide layers", 
      "TEM data", 
      "ray topography", 
      "diffraction data", 
      "sublimation epitaxy", 
      "surface topography", 
      "dots", 
      "average dimensions", 
      "epilayers", 
      "microscopy", 
      "twinned regions", 
      "carbide layer", 
      "layer", 
      "epitaxy", 
      "vacuum", 
      "first time", 
      "array", 
      "substrate", 
      "improved method", 
      "polytypes", 
      "topography", 
      "surface", 
      "microstructure", 
      "structure", 
      "region", 
      "formation", 
      "method", 
      "concentration", 
      "dimensions", 
      "data", 
      "time", 
      "presence", 
      "deposits"
    ], 
    "name": "Heteropolytype structures with SiC quantum dots", 
    "pagination": "997-1000", 
    "productId": [
      {
        "name": "dimensions_id", 
        "type": "PropertyValue", 
        "value": [
          "pub.1030680414"
        ]
      }, 
      {
        "name": "doi", 
        "type": "PropertyValue", 
        "value": [
          "10.1134/1.2150879"
        ]
      }
    ], 
    "sameAs": [
      "https://doi.org/10.1134/1.2150879", 
      "https://app.dimensions.ai/details/publication/pub.1030680414"
    ], 
    "sdDataset": "articles", 
    "sdDatePublished": "2022-05-20T07:23", 
    "sdLicense": "https://scigraph.springernature.com/explorer/license/", 
    "sdPublisher": {
      "name": "Springer Nature - SN SciGraph project", 
      "type": "Organization"
    }, 
    "sdSource": "s3://com-springernature-scigraph/baseset/20220519/entities/gbq_results/article/article_403.jsonl", 
    "type": "ScholarlyArticle", 
    "url": "https://doi.org/10.1134/1.2150879"
  }
]
 

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This table displays all metadata directly associated to this object as RDF triples.

150 TRIPLES      21 PREDICATES      69 URIs      61 LITERALS      6 BLANK NODES

Subject Predicate Object
1 sg:pub.10.1134/1.2150879 schema:about anzsrc-for:02
2 anzsrc-for:0299
3 schema:author N6c68160949674230b135ee9ed4d5f95a
4 schema:datePublished 2005-12
5 schema:datePublishedReg 2005-12-01
6 schema:description Epitaxial silicon carbide layers of 3C-SiC polytype with an array of nanodimensional SiC quantum dots (QDs) have been obtained for the first time using an improved method of sublimation epitaxy in vacuum. The X-ray topography and X-ray diffraction data unambiguously confirm the formation of a 3C-SiC epilayer with twinned regions on the surface of a 6H-SiC substrate. The surface topography of epilayers was studied by atomic force microscopy (AFM), and the microstructure of a near-surface layer of the deposit was investigated by transmission electron microscopy (TEM). Using the AFM and TEM data, the presence of QDs (representing SiC nanoislands) is established, and their average dimensions and concentration are evaluated.
7 schema:genre article
8 schema:inLanguage en
9 schema:isAccessibleForFree false
10 schema:isPartOf N50f629db3f894296983f73994f6045de
11 N82812ea401bc48bd8cf39b03cbd25723
12 sg:journal.1136630
13 schema:keywords SiC quantum dots
14 TEM data
15 array
16 atomic force microscopy
17 average dimensions
18 carbide layer
19 concentration
20 data
21 deposits
22 diffraction data
23 dimensions
24 dots
25 electron microscopy
26 epilayers
27 epitaxial silicon carbide layers
28 epitaxy
29 first time
30 force microscopy
31 formation
32 improved method
33 layer
34 method
35 microscopy
36 microstructure
37 near-surface layer
38 polytypes
39 presence
40 presence of QDs
41 quantum dots
42 ray diffraction data
43 ray topography
44 region
45 silicon carbide layers
46 structure
47 sublimation epitaxy
48 substrate
49 surface
50 surface topography
51 time
52 topography
53 transmission electron microscopy
54 twinned regions
55 vacuum
56 schema:name Heteropolytype structures with SiC quantum dots
57 schema:pagination 997-1000
58 schema:productId N8c6bdc3ea1e243e18166a84f34251ffd
59 Nb851b8eaa30b41f4a29ba5d14caa635d
60 schema:sameAs https://app.dimensions.ai/details/publication/pub.1030680414
61 https://doi.org/10.1134/1.2150879
62 schema:sdDatePublished 2022-05-20T07:23
63 schema:sdLicense https://scigraph.springernature.com/explorer/license/
64 schema:sdPublisher N04254aefa428473999c87a7597efe752
65 schema:url https://doi.org/10.1134/1.2150879
66 sgo:license sg:explorer/license/
67 sgo:sdDataset articles
68 rdf:type schema:ScholarlyArticle
69 N04254aefa428473999c87a7597efe752 schema:name Springer Nature - SN SciGraph project
70 rdf:type schema:Organization
71 N2d4bbab2df8a440cb8d46e0b6a468eb1 rdf:first sg:person.010730376716.55
72 rdf:rest N7a58957e0a3e435ab83e6a267995bd6a
73 N2f9cdb130aba43caa766c25b6562d05d rdf:first sg:person.07370501716.85
74 rdf:rest N2d4bbab2df8a440cb8d46e0b6a468eb1
75 N4dcbb2a8a0a84b3e866b0ba04d9a49a8 rdf:first sg:person.010547461051.73
76 rdf:rest N2f9cdb130aba43caa766c25b6562d05d
77 N50f629db3f894296983f73994f6045de schema:volumeNumber 31
78 rdf:type schema:PublicationVolume
79 N6c68160949674230b135ee9ed4d5f95a rdf:first sg:person.011264364575.18
80 rdf:rest N4dcbb2a8a0a84b3e866b0ba04d9a49a8
81 N7a58957e0a3e435ab83e6a267995bd6a rdf:first sg:person.014577536705.39
82 rdf:rest Nea121ed49bbd4161817a4e81abc9b0bc
83 N82812ea401bc48bd8cf39b03cbd25723 schema:issueNumber 12
84 rdf:type schema:PublicationIssue
85 N8c6bdc3ea1e243e18166a84f34251ffd schema:name dimensions_id
86 schema:value pub.1030680414
87 rdf:type schema:PropertyValue
88 Nad966faa5cd74fe6863a1ddb8e08ec9d rdf:first sg:person.011716107167.09
89 rdf:rest Ne7b960d799134947a37962a0ef0104fb
90 Nb851b8eaa30b41f4a29ba5d14caa635d schema:name doi
91 schema:value 10.1134/1.2150879
92 rdf:type schema:PropertyValue
93 Ne7b960d799134947a37962a0ef0104fb rdf:first sg:person.010346162345.53
94 rdf:rest rdf:nil
95 Nea121ed49bbd4161817a4e81abc9b0bc rdf:first sg:person.010557736205.75
96 rdf:rest Nad966faa5cd74fe6863a1ddb8e08ec9d
97 anzsrc-for:02 schema:inDefinedTermSet anzsrc-for:
98 schema:name Physical Sciences
99 rdf:type schema:DefinedTerm
100 anzsrc-for:0299 schema:inDefinedTermSet anzsrc-for:
101 schema:name Other Physical Sciences
102 rdf:type schema:DefinedTerm
103 sg:journal.1136630 schema:issn 0320-0116
104 0360-120X
105 schema:name Technical Physics Letters
106 schema:publisher Pleiades Publishing
107 rdf:type schema:Periodical
108 sg:person.010346162345.53 schema:affiliation grid-institutes:grid.423485.c
109 schema:familyName Shcheglov
110 schema:givenName M. P.
111 schema:sameAs https://app.dimensions.ai/discover/publication?and_facet_researcher=ur.010346162345.53
112 rdf:type schema:Person
113 sg:person.010547461051.73 schema:affiliation grid-institutes:grid.423485.c
114 schema:familyName Petrov
115 schema:givenName V. N.
116 schema:sameAs https://app.dimensions.ai/discover/publication?and_facet_researcher=ur.010547461051.73
117 rdf:type schema:Person
118 sg:person.010557736205.75 schema:affiliation grid-institutes:grid.423485.c
119 schema:familyName Mosina
120 schema:givenName G. N.
121 schema:sameAs https://app.dimensions.ai/discover/publication?and_facet_researcher=ur.010557736205.75
122 rdf:type schema:Person
123 sg:person.010730376716.55 schema:affiliation grid-institutes:grid.423485.c
124 schema:familyName Sorokin
125 schema:givenName L. M.
126 schema:sameAs https://app.dimensions.ai/discover/publication?and_facet_researcher=ur.010730376716.55
127 rdf:type schema:Person
128 sg:person.011264364575.18 schema:affiliation grid-institutes:grid.423485.c
129 schema:familyName Lebedev
130 schema:givenName A. A.
131 schema:sameAs https://app.dimensions.ai/discover/publication?and_facet_researcher=ur.011264364575.18
132 rdf:type schema:Person
133 sg:person.011716107167.09 schema:affiliation grid-institutes:grid.423485.c
134 schema:familyName Cherenkov
135 schema:givenName A. E.
136 schema:sameAs https://app.dimensions.ai/discover/publication?and_facet_researcher=ur.011716107167.09
137 rdf:type schema:Person
138 sg:person.014577536705.39 schema:affiliation grid-institutes:grid.423485.c
139 schema:familyName Tregubova
140 schema:givenName A. S.
141 schema:sameAs https://app.dimensions.ai/discover/publication?and_facet_researcher=ur.014577536705.39
142 rdf:type schema:Person
143 sg:person.07370501716.85 schema:affiliation grid-institutes:grid.423485.c
144 schema:familyName Titkov
145 schema:givenName A. N.
146 schema:sameAs https://app.dimensions.ai/discover/publication?and_facet_researcher=ur.07370501716.85
147 rdf:type schema:Person
148 grid-institutes:grid.423485.c schema:alternateName Ioffe Physicotechnical Institute, Russian Academy of Sciences, 194021, St. Petersburg, Russia
149 schema:name Ioffe Physicotechnical Institute, Russian Academy of Sciences, 194021, St. Petersburg, Russia
150 rdf:type schema:Organization
 




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