Conductivity and the Hall coefficient of nanostructured titanium nitride films View Full Text


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Article Info

DATE

2004-11

AUTHORS

R. A. Andrievski, Z. M. Dashevsky, G. V. Kalinnikov

ABSTRACT

The conductivity and the Hall coefficient of nanostructured TiN films synthesized by nonreactive RF magnetron sputtering have been experimentally studied. The mechanism of conductivity and the role of grain size are discussed.

PAGES

930-932

References to SciGraph publications

Identifiers

URI

http://scigraph.springernature.com/pub.10.1134/1.1829346

DOI

http://dx.doi.org/10.1134/1.1829346

DIMENSIONS

https://app.dimensions.ai/details/publication/pub.1014067633


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