Ontology type: schema:ScholarlyArticle
2004-10
AUTHORSE. V. Bogdanova, V. V. Kozlovski, D. S. Rumyantsev, A. A. Volkova, A. A. Lebedev
ABSTRACTProtons with energy E=100 keV were implanted with doses ranging from 2×1017 to 4×1017 cm−2 into 6H-and 4H-SiC n-type samples at room temperature. The samples were subjected to various types of postimplantation heat treatment in the temperature range 550–1500°C. The parameters of the samples were studied by measuring the capacitance-voltage and current-voltage characteristics and by analyzing the photoluminescence spectra. Blistering on the surface of the sample is observed after annealing the samples at a temperature of 800°C only after implantation of protons with a dose of ≤3×1017 cm−2. A decrease in the resistivity of the compensated layer sets in after annealing at a temperature of ∼1200°C and is completed after annealing at a temperature of ∼1500°C. A drastic decrease in the photoluminescence intensity is observed after implantation for all types of samples. Recovery of the photoluminescence intensity sets in after annealing at temperatures ≥800°C and is complete after annealing at a temperature of 1500°C. More... »
PAGES1176-1178
http://scigraph.springernature.com/pub.10.1134/1.1808824
DOIhttp://dx.doi.org/10.1134/1.1808824
DIMENSIONShttps://app.dimensions.ai/details/publication/pub.1046758295
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[
{
"@context": "https://springernature.github.io/scigraph/jsonld/sgcontext.json",
"about": [
{
"id": "http://purl.org/au-research/vocabulary/anzsrc-for/2008/02",
"inDefinedTermSet": "http://purl.org/au-research/vocabulary/anzsrc-for/2008/",
"name": "Physical Sciences",
"type": "DefinedTerm"
},
{
"id": "http://purl.org/au-research/vocabulary/anzsrc-for/2008/0204",
"inDefinedTermSet": "http://purl.org/au-research/vocabulary/anzsrc-for/2008/",
"name": "Condensed Matter Physics",
"type": "DefinedTerm"
},
{
"id": "http://purl.org/au-research/vocabulary/anzsrc-for/2008/0206",
"inDefinedTermSet": "http://purl.org/au-research/vocabulary/anzsrc-for/2008/",
"name": "Quantum Physics",
"type": "DefinedTerm"
}
],
"author": [
{
"affiliation": {
"alternateName": "Ioffe Physicotechnical Institute, Russian Academy of Sciences, Politekhnicheskaya ul. 26, 194021, St. Petersburg, Russia",
"id": "http://www.grid.ac/institutes/grid.423485.c",
"name": [
"Ioffe Physicotechnical Institute, Russian Academy of Sciences, Politekhnicheskaya ul. 26, 194021, St. Petersburg, Russia"
],
"type": "Organization"
},
"familyName": "Bogdanova",
"givenName": "E. V.",
"id": "sg:person.012556446371.01",
"sameAs": [
"https://app.dimensions.ai/discover/publication?and_facet_researcher=ur.012556446371.01"
],
"type": "Person"
},
{
"affiliation": {
"alternateName": "St. Petersburg Polytechnical University, ul. Politekhnicheskaya 29, 195251, St. Petersburg, Russia",
"id": "http://www.grid.ac/institutes/grid.32495.39",
"name": [
"St. Petersburg Polytechnical University, ul. Politekhnicheskaya 29, 195251, St. Petersburg, Russia"
],
"type": "Organization"
},
"familyName": "Kozlovski",
"givenName": "V. V.",
"id": "sg:person.011730241573.99",
"sameAs": [
"https://app.dimensions.ai/discover/publication?and_facet_researcher=ur.011730241573.99"
],
"type": "Person"
},
{
"affiliation": {
"alternateName": "St. Petersburg Polytechnical University, ul. Politekhnicheskaya 29, 195251, St. Petersburg, Russia",
"id": "http://www.grid.ac/institutes/grid.32495.39",
"name": [
"St. Petersburg Polytechnical University, ul. Politekhnicheskaya 29, 195251, St. Petersburg, Russia"
],
"type": "Organization"
},
"familyName": "Rumyantsev",
"givenName": "D. S.",
"id": "sg:person.011052617673.72",
"sameAs": [
"https://app.dimensions.ai/discover/publication?and_facet_researcher=ur.011052617673.72"
],
"type": "Person"
},
{
"affiliation": {
"alternateName": "Ioffe Physicotechnical Institute, Russian Academy of Sciences, Politekhnicheskaya ul. 26, 194021, St. Petersburg, Russia",
"id": "http://www.grid.ac/institutes/grid.423485.c",
"name": [
"Ioffe Physicotechnical Institute, Russian Academy of Sciences, Politekhnicheskaya ul. 26, 194021, St. Petersburg, Russia"
],
"type": "Organization"
},
"familyName": "Volkova",
"givenName": "A. A.",
"id": "sg:person.013357163367.38",
"sameAs": [
"https://app.dimensions.ai/discover/publication?and_facet_researcher=ur.013357163367.38"
],
"type": "Person"
},
{
"affiliation": {
"alternateName": "Ioffe Physicotechnical Institute, Russian Academy of Sciences, Politekhnicheskaya ul. 26, 194021, St. Petersburg, Russia",
"id": "http://www.grid.ac/institutes/grid.423485.c",
"name": [
"Ioffe Physicotechnical Institute, Russian Academy of Sciences, Politekhnicheskaya ul. 26, 194021, St. Petersburg, Russia"
],
"type": "Organization"
},
"familyName": "Lebedev",
"givenName": "A. A.",
"id": "sg:person.011264364575.18",
"sameAs": [
"https://app.dimensions.ai/discover/publication?and_facet_researcher=ur.011264364575.18"
],
"type": "Person"
}
],
"datePublished": "2004-10",
"datePublishedReg": "2004-10-01",
"description": "Protons with energy E=100 keV were implanted with doses ranging from 2\u00d71017 to 4\u00d71017 cm\u22122 into 6H-and 4H-SiC n-type samples at room temperature. The samples were subjected to various types of postimplantation heat treatment in the temperature range 550\u20131500\u00b0C. The parameters of the samples were studied by measuring the capacitance-voltage and current-voltage characteristics and by analyzing the photoluminescence spectra. Blistering on the surface of the sample is observed after annealing the samples at a temperature of 800\u00b0C only after implantation of protons with a dose of \u22643\u00d71017 cm\u22122. A decrease in the resistivity of the compensated layer sets in after annealing at a temperature of \u223c1200\u00b0C and is completed after annealing at a temperature of \u223c1500\u00b0C. A drastic decrease in the photoluminescence intensity is observed after implantation for all types of samples. Recovery of the photoluminescence intensity sets in after annealing at temperatures \u2265800\u00b0C and is complete after annealing at a temperature of 1500\u00b0C.",
"genre": "article",
"id": "sg:pub.10.1134/1.1808824",
"inLanguage": "en",
"isAccessibleForFree": false,
"isPartOf": [
{
"id": "sg:journal.1136692",
"issn": [
"1063-7826",
"1090-6479"
],
"name": "Semiconductors",
"publisher": "Pleiades Publishing",
"type": "Periodical"
},
{
"issueNumber": "10",
"type": "PublicationIssue"
},
{
"type": "PublicationVolume",
"volumeNumber": "38"
}
],
"keywords": [
"current-voltage characteristics",
"implantation of protons",
"temperature range 550",
"SiC layer",
"heat treatment",
"layer sets",
"room temperature",
"range 550",
"photoluminescence intensity",
"radiation defects",
"temperature",
"photoluminescence spectra",
"type samples",
"types of samples",
"resistivity",
"layer",
"high content",
"surface",
"drastic decrease",
"energy",
"parameters",
"implantation",
"samples",
"characteristics",
"defects",
"keV",
"decrease",
"types",
"content",
"recovery",
"formation",
"set",
"intensity",
"spectra",
"protons",
"study",
"intensity sets",
"treatment",
"dose",
"doses"
],
"name": "Formation and study of buried SiC layers with a high content of radiation defects",
"pagination": "1176-1178",
"productId": [
{
"name": "dimensions_id",
"type": "PropertyValue",
"value": [
"pub.1046758295"
]
},
{
"name": "doi",
"type": "PropertyValue",
"value": [
"10.1134/1.1808824"
]
}
],
"sameAs": [
"https://doi.org/10.1134/1.1808824",
"https://app.dimensions.ai/details/publication/pub.1046758295"
],
"sdDataset": "articles",
"sdDatePublished": "2022-05-20T07:22",
"sdLicense": "https://scigraph.springernature.com/explorer/license/",
"sdPublisher": {
"name": "Springer Nature - SN SciGraph project",
"type": "Organization"
},
"sdSource": "s3://com-springernature-scigraph/baseset/20220519/entities/gbq_results/article/article_379.jsonl",
"type": "ScholarlyArticle",
"url": "https://doi.org/10.1134/1.1808824"
}
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133 TRIPLES
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