Silicon network in a-Si:H films containing ordered inclusions View Full Text


Ontology type: schema:ScholarlyArticle     


Article Info

DATE

2001-05

AUTHORS

O. A. Golikova, E. V. Bogdanova, M. M. Kazanin, A. N. Kuznetsov, V. A. Terekhov, V. M. Kashkarov, O. V. Ostapenko

ABSTRACT

a-Si:H films with inclusions of (SiH2)n clusters or Si nanocrystals have been grown by magnetron-assisted SiH4 decomposition (dc-MASD). The films were characterized by the microstructural parameter R=0.7–1.0. Ultrasoft X-ray emission spectroscopy was applied to establish the effect of these inclusions on the increasing ordering of Si network. It is shown that, irrespective of the nature of the inclusions, their effect is strongest for films of intrinsic material deposited at high temperatures (up to 400°C). More... »

PAGES

579-582

Identifiers

URI

http://scigraph.springernature.com/pub.10.1134/1.1371625

DOI

http://dx.doi.org/10.1134/1.1371625

DIMENSIONS

https://app.dimensions.ai/details/publication/pub.1007076194


Indexing Status Check whether this publication has been indexed by Scopus and Web Of Science using the SN Indexing Status Tool
Incoming Citations Browse incoming citations for this publication using opencitations.net

JSON-LD is the canonical representation for SciGraph data.

TIP: You can open this SciGraph record using an external JSON-LD service: JSON-LD Playground Google SDTT

[
  {
    "@context": "https://springernature.github.io/scigraph/jsonld/sgcontext.json", 
    "about": [
      {
        "id": "http://purl.org/au-research/vocabulary/anzsrc-for/2008/02", 
        "inDefinedTermSet": "http://purl.org/au-research/vocabulary/anzsrc-for/2008/", 
        "name": "Physical Sciences", 
        "type": "DefinedTerm"
      }, 
      {
        "id": "http://purl.org/au-research/vocabulary/anzsrc-for/2008/0204", 
        "inDefinedTermSet": "http://purl.org/au-research/vocabulary/anzsrc-for/2008/", 
        "name": "Condensed Matter Physics", 
        "type": "DefinedTerm"
      }, 
      {
        "id": "http://purl.org/au-research/vocabulary/anzsrc-for/2008/0206", 
        "inDefinedTermSet": "http://purl.org/au-research/vocabulary/anzsrc-for/2008/", 
        "name": "Quantum Physics", 
        "type": "DefinedTerm"
      }
    ], 
    "author": [
      {
        "affiliation": {
          "alternateName": "Ioffe Physicotechnical Institute, Russian Academy of Sciences, Politekhnicheskaya ul. 26, 194021, St. Petersburg, Russia", 
          "id": "http://www.grid.ac/institutes/grid.423485.c", 
          "name": [
            "Ioffe Physicotechnical Institute, Russian Academy of Sciences, Politekhnicheskaya ul. 26, 194021, St. Petersburg, Russia"
          ], 
          "type": "Organization"
        }, 
        "familyName": "Golikova", 
        "givenName": "O. A.", 
        "id": "sg:person.010266073777.04", 
        "sameAs": [
          "https://app.dimensions.ai/discover/publication?and_facet_researcher=ur.010266073777.04"
        ], 
        "type": "Person"
      }, 
      {
        "affiliation": {
          "alternateName": "Ioffe Physicotechnical Institute, Russian Academy of Sciences, Politekhnicheskaya ul. 26, 194021, St. Petersburg, Russia", 
          "id": "http://www.grid.ac/institutes/grid.423485.c", 
          "name": [
            "Ioffe Physicotechnical Institute, Russian Academy of Sciences, Politekhnicheskaya ul. 26, 194021, St. Petersburg, Russia"
          ], 
          "type": "Organization"
        }, 
        "familyName": "Bogdanova", 
        "givenName": "E. V.", 
        "id": "sg:person.012556446371.01", 
        "sameAs": [
          "https://app.dimensions.ai/discover/publication?and_facet_researcher=ur.012556446371.01"
        ], 
        "type": "Person"
      }, 
      {
        "affiliation": {
          "alternateName": "Ioffe Physicotechnical Institute, Russian Academy of Sciences, Politekhnicheskaya ul. 26, 194021, St. Petersburg, Russia", 
          "id": "http://www.grid.ac/institutes/grid.423485.c", 
          "name": [
            "Ioffe Physicotechnical Institute, Russian Academy of Sciences, Politekhnicheskaya ul. 26, 194021, St. Petersburg, Russia"
          ], 
          "type": "Organization"
        }, 
        "familyName": "Kazanin", 
        "givenName": "M. M.", 
        "id": "sg:person.012671615173.91", 
        "sameAs": [
          "https://app.dimensions.ai/discover/publication?and_facet_researcher=ur.012671615173.91"
        ], 
        "type": "Person"
      }, 
      {
        "affiliation": {
          "alternateName": "Ioffe Physicotechnical Institute, Russian Academy of Sciences, Politekhnicheskaya ul. 26, 194021, St. Petersburg, Russia", 
          "id": "http://www.grid.ac/institutes/grid.423485.c", 
          "name": [
            "Ioffe Physicotechnical Institute, Russian Academy of Sciences, Politekhnicheskaya ul. 26, 194021, St. Petersburg, Russia"
          ], 
          "type": "Organization"
        }, 
        "familyName": "Kuznetsov", 
        "givenName": "A. N.", 
        "id": "sg:person.012436124105.42", 
        "sameAs": [
          "https://app.dimensions.ai/discover/publication?and_facet_researcher=ur.012436124105.42"
        ], 
        "type": "Person"
      }, 
      {
        "affiliation": {
          "alternateName": "Voronezh State University, 394026, Voronezh, Russia", 
          "id": "http://www.grid.ac/institutes/grid.20567.36", 
          "name": [
            "Voronezh State University, 394026, Voronezh, Russia"
          ], 
          "type": "Organization"
        }, 
        "familyName": "Terekhov", 
        "givenName": "V. A.", 
        "id": "sg:person.011732071035.61", 
        "sameAs": [
          "https://app.dimensions.ai/discover/publication?and_facet_researcher=ur.011732071035.61"
        ], 
        "type": "Person"
      }, 
      {
        "affiliation": {
          "alternateName": "Voronezh State University, 394026, Voronezh, Russia", 
          "id": "http://www.grid.ac/institutes/grid.20567.36", 
          "name": [
            "Voronezh State University, 394026, Voronezh, Russia"
          ], 
          "type": "Organization"
        }, 
        "familyName": "Kashkarov", 
        "givenName": "V. M.", 
        "id": "sg:person.07754044531.22", 
        "sameAs": [
          "https://app.dimensions.ai/discover/publication?and_facet_researcher=ur.07754044531.22"
        ], 
        "type": "Person"
      }, 
      {
        "affiliation": {
          "alternateName": "Voronezh State University, 394026, Voronezh, Russia", 
          "id": "http://www.grid.ac/institutes/grid.20567.36", 
          "name": [
            "Voronezh State University, 394026, Voronezh, Russia"
          ], 
          "type": "Organization"
        }, 
        "familyName": "Ostapenko", 
        "givenName": "O. V.", 
        "id": "sg:person.013722407705.73", 
        "sameAs": [
          "https://app.dimensions.ai/discover/publication?and_facet_researcher=ur.013722407705.73"
        ], 
        "type": "Person"
      }
    ], 
    "datePublished": "2001-05", 
    "datePublishedReg": "2001-05-01", 
    "description": "Abstracta-Si:H films with inclusions of (SiH2)n clusters or Si nanocrystals have been grown by magnetron-assisted SiH4 decomposition (dc-MASD). The films were characterized by the microstructural parameter R=0.7\u20131.0. Ultrasoft X-ray emission spectroscopy was applied to establish the effect of these inclusions on the increasing ordering of Si network. It is shown that, irrespective of the nature of the inclusions, their effect is strongest for films of intrinsic material deposited at high temperatures (up to 400\u00b0C).", 
    "genre": "article", 
    "id": "sg:pub.10.1134/1.1371625", 
    "inLanguage": "en", 
    "isAccessibleForFree": false, 
    "isPartOf": [
      {
        "id": "sg:journal.1136692", 
        "issn": [
          "1063-7826", 
          "1090-6479"
        ], 
        "name": "Semiconductors", 
        "publisher": "Pleiades Publishing", 
        "type": "Periodical"
      }, 
      {
        "issueNumber": "5", 
        "type": "PublicationIssue"
      }, 
      {
        "type": "PublicationVolume", 
        "volumeNumber": "35"
      }
    ], 
    "keywords": [
      "silicon network", 
      "SiH4 decomposition", 
      "intrinsic material", 
      "Si nanocrystals", 
      "Si network", 
      "ray emission spectroscopy", 
      "films", 
      "ordering", 
      "emission spectroscopy", 
      "network", 
      "microstructural parameters", 
      "nanocrystals", 
      "parameters", 
      "high temperature", 
      "magnetron", 
      "decomposition", 
      "Si", 
      "spectroscopy", 
      "clusters", 
      "inclusion", 
      "materials", 
      "temperature", 
      "nature", 
      "effect"
    ], 
    "name": "Silicon network in a-Si:H films containing ordered inclusions", 
    "pagination": "579-582", 
    "productId": [
      {
        "name": "dimensions_id", 
        "type": "PropertyValue", 
        "value": [
          "pub.1007076194"
        ]
      }, 
      {
        "name": "doi", 
        "type": "PropertyValue", 
        "value": [
          "10.1134/1.1371625"
        ]
      }
    ], 
    "sameAs": [
      "https://doi.org/10.1134/1.1371625", 
      "https://app.dimensions.ai/details/publication/pub.1007076194"
    ], 
    "sdDataset": "articles", 
    "sdDatePublished": "2022-06-01T22:01", 
    "sdLicense": "https://scigraph.springernature.com/explorer/license/", 
    "sdPublisher": {
      "name": "Springer Nature - SN SciGraph project", 
      "type": "Organization"
    }, 
    "sdSource": "s3://com-springernature-scigraph/baseset/20220601/entities/gbq_results/article/article_321.jsonl", 
    "type": "ScholarlyArticle", 
    "url": "https://doi.org/10.1134/1.1371625"
  }
]
 

Download the RDF metadata as:  json-ld nt turtle xml License info

HOW TO GET THIS DATA PROGRAMMATICALLY:

JSON-LD is a popular format for linked data which is fully compatible with JSON.

curl -H 'Accept: application/ld+json' 'https://scigraph.springernature.com/pub.10.1134/1.1371625'

N-Triples is a line-based linked data format ideal for batch operations.

curl -H 'Accept: application/n-triples' 'https://scigraph.springernature.com/pub.10.1134/1.1371625'

Turtle is a human-readable linked data format.

curl -H 'Accept: text/turtle' 'https://scigraph.springernature.com/pub.10.1134/1.1371625'

RDF/XML is a standard XML format for linked data.

curl -H 'Accept: application/rdf+xml' 'https://scigraph.springernature.com/pub.10.1134/1.1371625'


 

This table displays all metadata directly associated to this object as RDF triples.

131 TRIPLES      21 PREDICATES      51 URIs      42 LITERALS      6 BLANK NODES

Subject Predicate Object
1 sg:pub.10.1134/1.1371625 schema:about anzsrc-for:02
2 anzsrc-for:0204
3 anzsrc-for:0206
4 schema:author N80ba113b9f254d329473d7a92f2781f4
5 schema:datePublished 2001-05
6 schema:datePublishedReg 2001-05-01
7 schema:description Abstracta-Si:H films with inclusions of (SiH2)n clusters or Si nanocrystals have been grown by magnetron-assisted SiH4 decomposition (dc-MASD). The films were characterized by the microstructural parameter R=0.7–1.0. Ultrasoft X-ray emission spectroscopy was applied to establish the effect of these inclusions on the increasing ordering of Si network. It is shown that, irrespective of the nature of the inclusions, their effect is strongest for films of intrinsic material deposited at high temperatures (up to 400°C).
8 schema:genre article
9 schema:inLanguage en
10 schema:isAccessibleForFree false
11 schema:isPartOf N309a703301264473a11ea4b2ae44c078
12 Nb3344d10bf3d475494cc93531df0762f
13 sg:journal.1136692
14 schema:keywords Si
15 Si nanocrystals
16 Si network
17 SiH4 decomposition
18 clusters
19 decomposition
20 effect
21 emission spectroscopy
22 films
23 high temperature
24 inclusion
25 intrinsic material
26 magnetron
27 materials
28 microstructural parameters
29 nanocrystals
30 nature
31 network
32 ordering
33 parameters
34 ray emission spectroscopy
35 silicon network
36 spectroscopy
37 temperature
38 schema:name Silicon network in a-Si:H films containing ordered inclusions
39 schema:pagination 579-582
40 schema:productId N7e72a4fe21674ee8a6e3e817ea7bd98b
41 Nfb6ff507f4f6413ea10422bd8400b7c8
42 schema:sameAs https://app.dimensions.ai/details/publication/pub.1007076194
43 https://doi.org/10.1134/1.1371625
44 schema:sdDatePublished 2022-06-01T22:01
45 schema:sdLicense https://scigraph.springernature.com/explorer/license/
46 schema:sdPublisher Nd99f2b719eda4478ab5afb9c881ab834
47 schema:url https://doi.org/10.1134/1.1371625
48 sgo:license sg:explorer/license/
49 sgo:sdDataset articles
50 rdf:type schema:ScholarlyArticle
51 N14f9ff47f8e641c1ae464b3d59fb645e rdf:first sg:person.012556446371.01
52 rdf:rest N73fccbbdefad4b9eb164a8a53db815eb
53 N309a703301264473a11ea4b2ae44c078 schema:volumeNumber 35
54 rdf:type schema:PublicationVolume
55 N73fccbbdefad4b9eb164a8a53db815eb rdf:first sg:person.012671615173.91
56 rdf:rest Ne3587b640b9043fab894bde09e1e29bc
57 N7e72a4fe21674ee8a6e3e817ea7bd98b schema:name dimensions_id
58 schema:value pub.1007076194
59 rdf:type schema:PropertyValue
60 N80ba113b9f254d329473d7a92f2781f4 rdf:first sg:person.010266073777.04
61 rdf:rest N14f9ff47f8e641c1ae464b3d59fb645e
62 Nb1182779b80c41d78750f4b9cc1a003c rdf:first sg:person.011732071035.61
63 rdf:rest Ndbeb37ac765e42ee862188b0bbaa868a
64 Nb131e4d270314c86914c17ca1c5aa395 rdf:first sg:person.013722407705.73
65 rdf:rest rdf:nil
66 Nb3344d10bf3d475494cc93531df0762f schema:issueNumber 5
67 rdf:type schema:PublicationIssue
68 Nd99f2b719eda4478ab5afb9c881ab834 schema:name Springer Nature - SN SciGraph project
69 rdf:type schema:Organization
70 Ndbeb37ac765e42ee862188b0bbaa868a rdf:first sg:person.07754044531.22
71 rdf:rest Nb131e4d270314c86914c17ca1c5aa395
72 Ne3587b640b9043fab894bde09e1e29bc rdf:first sg:person.012436124105.42
73 rdf:rest Nb1182779b80c41d78750f4b9cc1a003c
74 Nfb6ff507f4f6413ea10422bd8400b7c8 schema:name doi
75 schema:value 10.1134/1.1371625
76 rdf:type schema:PropertyValue
77 anzsrc-for:02 schema:inDefinedTermSet anzsrc-for:
78 schema:name Physical Sciences
79 rdf:type schema:DefinedTerm
80 anzsrc-for:0204 schema:inDefinedTermSet anzsrc-for:
81 schema:name Condensed Matter Physics
82 rdf:type schema:DefinedTerm
83 anzsrc-for:0206 schema:inDefinedTermSet anzsrc-for:
84 schema:name Quantum Physics
85 rdf:type schema:DefinedTerm
86 sg:journal.1136692 schema:issn 1063-7826
87 1090-6479
88 schema:name Semiconductors
89 schema:publisher Pleiades Publishing
90 rdf:type schema:Periodical
91 sg:person.010266073777.04 schema:affiliation grid-institutes:grid.423485.c
92 schema:familyName Golikova
93 schema:givenName O. A.
94 schema:sameAs https://app.dimensions.ai/discover/publication?and_facet_researcher=ur.010266073777.04
95 rdf:type schema:Person
96 sg:person.011732071035.61 schema:affiliation grid-institutes:grid.20567.36
97 schema:familyName Terekhov
98 schema:givenName V. A.
99 schema:sameAs https://app.dimensions.ai/discover/publication?and_facet_researcher=ur.011732071035.61
100 rdf:type schema:Person
101 sg:person.012436124105.42 schema:affiliation grid-institutes:grid.423485.c
102 schema:familyName Kuznetsov
103 schema:givenName A. N.
104 schema:sameAs https://app.dimensions.ai/discover/publication?and_facet_researcher=ur.012436124105.42
105 rdf:type schema:Person
106 sg:person.012556446371.01 schema:affiliation grid-institutes:grid.423485.c
107 schema:familyName Bogdanova
108 schema:givenName E. V.
109 schema:sameAs https://app.dimensions.ai/discover/publication?and_facet_researcher=ur.012556446371.01
110 rdf:type schema:Person
111 sg:person.012671615173.91 schema:affiliation grid-institutes:grid.423485.c
112 schema:familyName Kazanin
113 schema:givenName M. M.
114 schema:sameAs https://app.dimensions.ai/discover/publication?and_facet_researcher=ur.012671615173.91
115 rdf:type schema:Person
116 sg:person.013722407705.73 schema:affiliation grid-institutes:grid.20567.36
117 schema:familyName Ostapenko
118 schema:givenName O. V.
119 schema:sameAs https://app.dimensions.ai/discover/publication?and_facet_researcher=ur.013722407705.73
120 rdf:type schema:Person
121 sg:person.07754044531.22 schema:affiliation grid-institutes:grid.20567.36
122 schema:familyName Kashkarov
123 schema:givenName V. M.
124 schema:sameAs https://app.dimensions.ai/discover/publication?and_facet_researcher=ur.07754044531.22
125 rdf:type schema:Person
126 grid-institutes:grid.20567.36 schema:alternateName Voronezh State University, 394026, Voronezh, Russia
127 schema:name Voronezh State University, 394026, Voronezh, Russia
128 rdf:type schema:Organization
129 grid-institutes:grid.423485.c schema:alternateName Ioffe Physicotechnical Institute, Russian Academy of Sciences, Politekhnicheskaya ul. 26, 194021, St. Petersburg, Russia
130 schema:name Ioffe Physicotechnical Institute, Russian Academy of Sciences, Politekhnicheskaya ul. 26, 194021, St. Petersburg, Russia
131 rdf:type schema:Organization
 




Preview window. Press ESC to close (or click here)


...