Optical method for measuring structural parameters of island films View Full Text


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Article Info

DATE

2000-09

AUTHORS

A. M. Bonch-Bruevich, T. A. Vartanyan, N. B. Leonov, S. G. Przhibel’skii, V. V. Khromov

ABSTRACT

An optical method for determining characteristics of the submicron structure in island films is proposed. The method is based on the measurements of fluctuations of optical properties of a film detected when a focused laser beam is scanned over it. It is shown that the island size distribution can be determined in principle by the method proposed. Structural inhomogeneity of a Cs film on sapphire is revealed experimentally. Parameters of these inhomogeneities are measured as functions of the film thickness. The correspondence of the results of the optical method and the data of electron microscopy is tested for a In film on glass. More... »

PAGES

402-407

Identifiers

URI

http://scigraph.springernature.com/pub.10.1134/1.1310708

DOI

http://dx.doi.org/10.1134/1.1310708

DIMENSIONS

https://app.dimensions.ai/details/publication/pub.1018641097


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