Modeling of mass transfer under conditions of local gas-phase epitaxy through a mask View Full Text


Ontology type: schema:ScholarlyArticle     


Article Info

DATE

1997-04

AUTHORS

L. B. Proékt, M. A. Kaliteevskii, V. B. Kantor, D. A. Piotrovskii, M. A. Sinitsyn, B. S. Yavich

ABSTRACT

The diffusion mass transfer of reagents under the conditions of local gas-phase epitaxy through a mask has been studied by the method of numerical modeling. The possible effect of adsorption of reagents on the surface of the mask and their surface diffusion on the local growth rate is studied. The computational results are compared with published experimental data. More... »

PAGES

401-404

Identifiers

URI

http://scigraph.springernature.com/pub.10.1134/1.1187171

DOI

http://dx.doi.org/10.1134/1.1187171

DIMENSIONS

https://app.dimensions.ai/details/publication/pub.1029966357


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[
  {
    "@context": "https://springernature.github.io/scigraph/jsonld/sgcontext.json", 
    "about": [
      {
        "id": "http://purl.org/au-research/vocabulary/anzsrc-for/2008/02", 
        "inDefinedTermSet": "http://purl.org/au-research/vocabulary/anzsrc-for/2008/", 
        "name": "Physical Sciences", 
        "type": "DefinedTerm"
      }, 
      {
        "id": "http://purl.org/au-research/vocabulary/anzsrc-for/2008/0204", 
        "inDefinedTermSet": "http://purl.org/au-research/vocabulary/anzsrc-for/2008/", 
        "name": "Condensed Matter Physics", 
        "type": "DefinedTerm"
      }, 
      {
        "id": "http://purl.org/au-research/vocabulary/anzsrc-for/2008/0206", 
        "inDefinedTermSet": "http://purl.org/au-research/vocabulary/anzsrc-for/2008/", 
        "name": "Quantum Physics", 
        "type": "DefinedTerm"
      }
    ], 
    "author": [
      {
        "affiliation": {
          "alternateName": "A. F. Ioffe Physicotechnical Institute, Russian Academy of Sciences, 194021, St. Petersburg, Russia", 
          "id": "http://www.grid.ac/institutes/grid.4886.2", 
          "name": [
            "A. F. Ioffe Physicotechnical Institute, Russian Academy of Sciences, 194021, St. Petersburg, Russia"
          ], 
          "type": "Organization"
        }, 
        "familyName": "Pro\u00e9kt", 
        "givenName": "L. B.", 
        "id": "sg:person.012710653255.27", 
        "sameAs": [
          "https://app.dimensions.ai/discover/publication?and_facet_researcher=ur.012710653255.27"
        ], 
        "type": "Person"
      }, 
      {
        "affiliation": {
          "alternateName": "A. F. Ioffe Physicotechnical Institute, Russian Academy of Sciences, 194021, St. Petersburg, Russia", 
          "id": "http://www.grid.ac/institutes/grid.4886.2", 
          "name": [
            "A. F. Ioffe Physicotechnical Institute, Russian Academy of Sciences, 194021, St. Petersburg, Russia"
          ], 
          "type": "Organization"
        }, 
        "familyName": "Kaliteevskii", 
        "givenName": "M. A.", 
        "id": "sg:person.014454350336.50", 
        "sameAs": [
          "https://app.dimensions.ai/discover/publication?and_facet_researcher=ur.014454350336.50"
        ], 
        "type": "Person"
      }, 
      {
        "affiliation": {
          "alternateName": "A. F. Ioffe Physicotechnical Institute, Russian Academy of Sciences, 194021, St. Petersburg, Russia", 
          "id": "http://www.grid.ac/institutes/grid.4886.2", 
          "name": [
            "A. F. Ioffe Physicotechnical Institute, Russian Academy of Sciences, 194021, St. Petersburg, Russia"
          ], 
          "type": "Organization"
        }, 
        "familyName": "Kantor", 
        "givenName": "V. B.", 
        "type": "Person"
      }, 
      {
        "affiliation": {
          "alternateName": "A. F. Ioffe Physicotechnical Institute, Russian Academy of Sciences, 194021, St. Petersburg, Russia", 
          "id": "http://www.grid.ac/institutes/grid.4886.2", 
          "name": [
            "A. F. Ioffe Physicotechnical Institute, Russian Academy of Sciences, 194021, St. Petersburg, Russia"
          ], 
          "type": "Organization"
        }, 
        "familyName": "Piotrovskii", 
        "givenName": "D. A.", 
        "type": "Person"
      }, 
      {
        "affiliation": {
          "alternateName": "A. F. Ioffe Physicotechnical Institute, Russian Academy of Sciences, 194021, St. Petersburg, Russia", 
          "id": "http://www.grid.ac/institutes/grid.4886.2", 
          "name": [
            "A. F. Ioffe Physicotechnical Institute, Russian Academy of Sciences, 194021, St. Petersburg, Russia"
          ], 
          "type": "Organization"
        }, 
        "familyName": "Sinitsyn", 
        "givenName": "M. A.", 
        "id": "sg:person.014606113257.46", 
        "sameAs": [
          "https://app.dimensions.ai/discover/publication?and_facet_researcher=ur.014606113257.46"
        ], 
        "type": "Person"
      }, 
      {
        "affiliation": {
          "alternateName": "A. F. Ioffe Physicotechnical Institute, Russian Academy of Sciences, 194021, St. Petersburg, Russia", 
          "id": "http://www.grid.ac/institutes/grid.4886.2", 
          "name": [
            "A. F. Ioffe Physicotechnical Institute, Russian Academy of Sciences, 194021, St. Petersburg, Russia"
          ], 
          "type": "Organization"
        }, 
        "familyName": "Yavich", 
        "givenName": "B. S.", 
        "id": "sg:person.016523513075.53", 
        "sameAs": [
          "https://app.dimensions.ai/discover/publication?and_facet_researcher=ur.016523513075.53"
        ], 
        "type": "Person"
      }
    ], 
    "datePublished": "1997-04", 
    "datePublishedReg": "1997-04-01", 
    "description": "The diffusion mass transfer of reagents under the conditions of local gas-phase epitaxy through a mask has been studied by the method of numerical modeling. The possible effect of adsorption of reagents on the surface of the mask and their surface diffusion on the local growth rate is studied. The computational results are compared with published experimental data.", 
    "genre": "article", 
    "id": "sg:pub.10.1134/1.1187171", 
    "inLanguage": "en", 
    "isAccessibleForFree": false, 
    "isPartOf": [
      {
        "id": "sg:journal.1136692", 
        "issn": [
          "1063-7826", 
          "1090-6479"
        ], 
        "name": "Semiconductors", 
        "publisher": "Pleiades Publishing", 
        "type": "Periodical"
      }, 
      {
        "issueNumber": "4", 
        "type": "PublicationIssue"
      }, 
      {
        "type": "PublicationVolume", 
        "volumeNumber": "31"
      }
    ], 
    "keywords": [
      "mass transfer", 
      "diffusion mass transfer", 
      "gas-phase epitaxy", 
      "numerical modeling", 
      "surface diffusion", 
      "experimental data", 
      "local growth rate", 
      "epitaxy", 
      "computational results", 
      "modeling", 
      "mask", 
      "transfer", 
      "surface", 
      "adsorption", 
      "diffusion", 
      "conditions", 
      "growth rate", 
      "method", 
      "results", 
      "effect", 
      "rate", 
      "reagents", 
      "possible effects", 
      "data", 
      "local gas-phase epitaxy"
    ], 
    "name": "Modeling of mass transfer under conditions of local gas-phase epitaxy through a mask", 
    "pagination": "401-404", 
    "productId": [
      {
        "name": "dimensions_id", 
        "type": "PropertyValue", 
        "value": [
          "pub.1029966357"
        ]
      }, 
      {
        "name": "doi", 
        "type": "PropertyValue", 
        "value": [
          "10.1134/1.1187171"
        ]
      }
    ], 
    "sameAs": [
      "https://doi.org/10.1134/1.1187171", 
      "https://app.dimensions.ai/details/publication/pub.1029966357"
    ], 
    "sdDataset": "articles", 
    "sdDatePublished": "2021-11-01T18:03", 
    "sdLicense": "https://scigraph.springernature.com/explorer/license/", 
    "sdPublisher": {
      "name": "Springer Nature - SN SciGraph project", 
      "type": "Organization"
    }, 
    "sdSource": "s3://com-springernature-scigraph/baseset/20211101/entities/gbq_results/article/article_302.jsonl", 
    "type": "ScholarlyArticle", 
    "url": "https://doi.org/10.1134/1.1187171"
  }
]
 

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This table displays all metadata directly associated to this object as RDF triples.

120 TRIPLES      21 PREDICATES      52 URIs      43 LITERALS      6 BLANK NODES

Subject Predicate Object
1 sg:pub.10.1134/1.1187171 schema:about anzsrc-for:02
2 anzsrc-for:0204
3 anzsrc-for:0206
4 schema:author N3ce2bfb756834a1380133aa5585d4509
5 schema:datePublished 1997-04
6 schema:datePublishedReg 1997-04-01
7 schema:description The diffusion mass transfer of reagents under the conditions of local gas-phase epitaxy through a mask has been studied by the method of numerical modeling. The possible effect of adsorption of reagents on the surface of the mask and their surface diffusion on the local growth rate is studied. The computational results are compared with published experimental data.
8 schema:genre article
9 schema:inLanguage en
10 schema:isAccessibleForFree false
11 schema:isPartOf N05a3986a281849dba9443bc180c6937a
12 Nce82d43ef85b43faa06e6c5ce20ff965
13 sg:journal.1136692
14 schema:keywords adsorption
15 computational results
16 conditions
17 data
18 diffusion
19 diffusion mass transfer
20 effect
21 epitaxy
22 experimental data
23 gas-phase epitaxy
24 growth rate
25 local gas-phase epitaxy
26 local growth rate
27 mask
28 mass transfer
29 method
30 modeling
31 numerical modeling
32 possible effects
33 rate
34 reagents
35 results
36 surface
37 surface diffusion
38 transfer
39 schema:name Modeling of mass transfer under conditions of local gas-phase epitaxy through a mask
40 schema:pagination 401-404
41 schema:productId N436d17ac2d024af298caeeb09455f1d7
42 N931cb63a095a4c7a9f2b7cfe2abc6222
43 schema:sameAs https://app.dimensions.ai/details/publication/pub.1029966357
44 https://doi.org/10.1134/1.1187171
45 schema:sdDatePublished 2021-11-01T18:03
46 schema:sdLicense https://scigraph.springernature.com/explorer/license/
47 schema:sdPublisher N6d22d96064a445468e093846a8ce4c85
48 schema:url https://doi.org/10.1134/1.1187171
49 sgo:license sg:explorer/license/
50 sgo:sdDataset articles
51 rdf:type schema:ScholarlyArticle
52 N00d74764d0e94075bee276fdb1e8ffd5 schema:affiliation grid-institutes:grid.4886.2
53 schema:familyName Piotrovskii
54 schema:givenName D. A.
55 rdf:type schema:Person
56 N05a3986a281849dba9443bc180c6937a schema:issueNumber 4
57 rdf:type schema:PublicationIssue
58 N10c71093b57042baa0f077bd1f2719bf schema:affiliation grid-institutes:grid.4886.2
59 schema:familyName Kantor
60 schema:givenName V. B.
61 rdf:type schema:Person
62 N3ce2bfb756834a1380133aa5585d4509 rdf:first sg:person.012710653255.27
63 rdf:rest Nc52ed5ff7de643dc84869b73c47f97d0
64 N40620de61e2245ba9499d99c3d1ac2aa rdf:first N10c71093b57042baa0f077bd1f2719bf
65 rdf:rest Na769962f271e4ababf1580e6019c89a6
66 N436d17ac2d024af298caeeb09455f1d7 schema:name doi
67 schema:value 10.1134/1.1187171
68 rdf:type schema:PropertyValue
69 N6d22d96064a445468e093846a8ce4c85 schema:name Springer Nature - SN SciGraph project
70 rdf:type schema:Organization
71 N931cb63a095a4c7a9f2b7cfe2abc6222 schema:name dimensions_id
72 schema:value pub.1029966357
73 rdf:type schema:PropertyValue
74 Na769962f271e4ababf1580e6019c89a6 rdf:first N00d74764d0e94075bee276fdb1e8ffd5
75 rdf:rest Nf0fe31cb20a643fa94ec617777605260
76 Nc52ed5ff7de643dc84869b73c47f97d0 rdf:first sg:person.014454350336.50
77 rdf:rest N40620de61e2245ba9499d99c3d1ac2aa
78 Nce82d43ef85b43faa06e6c5ce20ff965 schema:volumeNumber 31
79 rdf:type schema:PublicationVolume
80 Ne73461271fcb4091ac8abe082fe49122 rdf:first sg:person.016523513075.53
81 rdf:rest rdf:nil
82 Nf0fe31cb20a643fa94ec617777605260 rdf:first sg:person.014606113257.46
83 rdf:rest Ne73461271fcb4091ac8abe082fe49122
84 anzsrc-for:02 schema:inDefinedTermSet anzsrc-for:
85 schema:name Physical Sciences
86 rdf:type schema:DefinedTerm
87 anzsrc-for:0204 schema:inDefinedTermSet anzsrc-for:
88 schema:name Condensed Matter Physics
89 rdf:type schema:DefinedTerm
90 anzsrc-for:0206 schema:inDefinedTermSet anzsrc-for:
91 schema:name Quantum Physics
92 rdf:type schema:DefinedTerm
93 sg:journal.1136692 schema:issn 1063-7826
94 1090-6479
95 schema:name Semiconductors
96 schema:publisher Pleiades Publishing
97 rdf:type schema:Periodical
98 sg:person.012710653255.27 schema:affiliation grid-institutes:grid.4886.2
99 schema:familyName Proékt
100 schema:givenName L. B.
101 schema:sameAs https://app.dimensions.ai/discover/publication?and_facet_researcher=ur.012710653255.27
102 rdf:type schema:Person
103 sg:person.014454350336.50 schema:affiliation grid-institutes:grid.4886.2
104 schema:familyName Kaliteevskii
105 schema:givenName M. A.
106 schema:sameAs https://app.dimensions.ai/discover/publication?and_facet_researcher=ur.014454350336.50
107 rdf:type schema:Person
108 sg:person.014606113257.46 schema:affiliation grid-institutes:grid.4886.2
109 schema:familyName Sinitsyn
110 schema:givenName M. A.
111 schema:sameAs https://app.dimensions.ai/discover/publication?and_facet_researcher=ur.014606113257.46
112 rdf:type schema:Person
113 sg:person.016523513075.53 schema:affiliation grid-institutes:grid.4886.2
114 schema:familyName Yavich
115 schema:givenName B. S.
116 schema:sameAs https://app.dimensions.ai/discover/publication?and_facet_researcher=ur.016523513075.53
117 rdf:type schema:Person
118 grid-institutes:grid.4886.2 schema:alternateName A. F. Ioffe Physicotechnical Institute, Russian Academy of Sciences, 194021, St. Petersburg, Russia
119 schema:name A. F. Ioffe Physicotechnical Institute, Russian Academy of Sciences, 194021, St. Petersburg, Russia
120 rdf:type schema:Organization
 




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