Modeling of mass transfer under conditions of local gas-phase epitaxy through a mask View Full Text


Ontology type: schema:ScholarlyArticle     


Article Info

DATE

1997-04

AUTHORS

L. B. Proékt, M. A. Kaliteevskii, V. B. Kantor, D. A. Piotrovskii, M. A. Sinitsyn, B. S. Yavich

ABSTRACT

The diffusion mass transfer of reagents under the conditions of local gas-phase epitaxy through a mask has been studied by the method of numerical modeling. The possible effect of adsorption of reagents on the surface of the mask and their surface diffusion on the local growth rate is studied. The computational results are compared with published experimental data. More... »

PAGES

401-404

Identifiers

URI

http://scigraph.springernature.com/pub.10.1134/1.1187171

DOI

http://dx.doi.org/10.1134/1.1187171

DIMENSIONS

https://app.dimensions.ai/details/publication/pub.1029966357


Indexing Status Check whether this publication has been indexed by Scopus and Web Of Science using the SN Indexing Status Tool
Incoming Citations Browse incoming citations for this publication using opencitations.net

JSON-LD is the canonical representation for SciGraph data.

TIP: You can open this SciGraph record using an external JSON-LD service: JSON-LD Playground Google SDTT

[
  {
    "@context": "https://springernature.github.io/scigraph/jsonld/sgcontext.json", 
    "about": [
      {
        "id": "http://purl.org/au-research/vocabulary/anzsrc-for/2008/02", 
        "inDefinedTermSet": "http://purl.org/au-research/vocabulary/anzsrc-for/2008/", 
        "name": "Physical Sciences", 
        "type": "DefinedTerm"
      }, 
      {
        "id": "http://purl.org/au-research/vocabulary/anzsrc-for/2008/0204", 
        "inDefinedTermSet": "http://purl.org/au-research/vocabulary/anzsrc-for/2008/", 
        "name": "Condensed Matter Physics", 
        "type": "DefinedTerm"
      }, 
      {
        "id": "http://purl.org/au-research/vocabulary/anzsrc-for/2008/0206", 
        "inDefinedTermSet": "http://purl.org/au-research/vocabulary/anzsrc-for/2008/", 
        "name": "Quantum Physics", 
        "type": "DefinedTerm"
      }
    ], 
    "author": [
      {
        "affiliation": {
          "alternateName": "A. F. Ioffe Physicotechnical Institute, Russian Academy of Sciences, 194021, St. Petersburg, Russia", 
          "id": "http://www.grid.ac/institutes/grid.4886.2", 
          "name": [
            "A. F. Ioffe Physicotechnical Institute, Russian Academy of Sciences, 194021, St. Petersburg, Russia"
          ], 
          "type": "Organization"
        }, 
        "familyName": "Pro\u00e9kt", 
        "givenName": "L. B.", 
        "id": "sg:person.012710653255.27", 
        "sameAs": [
          "https://app.dimensions.ai/discover/publication?and_facet_researcher=ur.012710653255.27"
        ], 
        "type": "Person"
      }, 
      {
        "affiliation": {
          "alternateName": "A. F. Ioffe Physicotechnical Institute, Russian Academy of Sciences, 194021, St. Petersburg, Russia", 
          "id": "http://www.grid.ac/institutes/grid.4886.2", 
          "name": [
            "A. F. Ioffe Physicotechnical Institute, Russian Academy of Sciences, 194021, St. Petersburg, Russia"
          ], 
          "type": "Organization"
        }, 
        "familyName": "Kaliteevskii", 
        "givenName": "M. A.", 
        "id": "sg:person.014454350336.50", 
        "sameAs": [
          "https://app.dimensions.ai/discover/publication?and_facet_researcher=ur.014454350336.50"
        ], 
        "type": "Person"
      }, 
      {
        "affiliation": {
          "alternateName": "A. F. Ioffe Physicotechnical Institute, Russian Academy of Sciences, 194021, St. Petersburg, Russia", 
          "id": "http://www.grid.ac/institutes/grid.4886.2", 
          "name": [
            "A. F. Ioffe Physicotechnical Institute, Russian Academy of Sciences, 194021, St. Petersburg, Russia"
          ], 
          "type": "Organization"
        }, 
        "familyName": "Kantor", 
        "givenName": "V. B.", 
        "type": "Person"
      }, 
      {
        "affiliation": {
          "alternateName": "A. F. Ioffe Physicotechnical Institute, Russian Academy of Sciences, 194021, St. Petersburg, Russia", 
          "id": "http://www.grid.ac/institutes/grid.4886.2", 
          "name": [
            "A. F. Ioffe Physicotechnical Institute, Russian Academy of Sciences, 194021, St. Petersburg, Russia"
          ], 
          "type": "Organization"
        }, 
        "familyName": "Piotrovskii", 
        "givenName": "D. A.", 
        "type": "Person"
      }, 
      {
        "affiliation": {
          "alternateName": "A. F. Ioffe Physicotechnical Institute, Russian Academy of Sciences, 194021, St. Petersburg, Russia", 
          "id": "http://www.grid.ac/institutes/grid.4886.2", 
          "name": [
            "A. F. Ioffe Physicotechnical Institute, Russian Academy of Sciences, 194021, St. Petersburg, Russia"
          ], 
          "type": "Organization"
        }, 
        "familyName": "Sinitsyn", 
        "givenName": "M. A.", 
        "id": "sg:person.014606113257.46", 
        "sameAs": [
          "https://app.dimensions.ai/discover/publication?and_facet_researcher=ur.014606113257.46"
        ], 
        "type": "Person"
      }, 
      {
        "affiliation": {
          "alternateName": "A. F. Ioffe Physicotechnical Institute, Russian Academy of Sciences, 194021, St. Petersburg, Russia", 
          "id": "http://www.grid.ac/institutes/grid.4886.2", 
          "name": [
            "A. F. Ioffe Physicotechnical Institute, Russian Academy of Sciences, 194021, St. Petersburg, Russia"
          ], 
          "type": "Organization"
        }, 
        "familyName": "Yavich", 
        "givenName": "B. S.", 
        "id": "sg:person.016523513075.53", 
        "sameAs": [
          "https://app.dimensions.ai/discover/publication?and_facet_researcher=ur.016523513075.53"
        ], 
        "type": "Person"
      }
    ], 
    "datePublished": "1997-04", 
    "datePublishedReg": "1997-04-01", 
    "description": "The diffusion mass transfer of reagents under the conditions of local gas-phase epitaxy through a mask has been studied by the method of numerical modeling. The possible effect of adsorption of reagents on the surface of the mask and their surface diffusion on the local growth rate is studied. The computational results are compared with published experimental data.", 
    "genre": "article", 
    "id": "sg:pub.10.1134/1.1187171", 
    "inLanguage": "en", 
    "isAccessibleForFree": false, 
    "isPartOf": [
      {
        "id": "sg:journal.1136692", 
        "issn": [
          "1063-7826", 
          "1090-6479"
        ], 
        "name": "Semiconductors", 
        "publisher": "Pleiades Publishing", 
        "type": "Periodical"
      }, 
      {
        "issueNumber": "4", 
        "type": "PublicationIssue"
      }, 
      {
        "type": "PublicationVolume", 
        "volumeNumber": "31"
      }
    ], 
    "keywords": [
      "mass transfer", 
      "diffusion mass transfer", 
      "gas-phase epitaxy", 
      "numerical modeling", 
      "surface diffusion", 
      "experimental data", 
      "local growth rate", 
      "epitaxy", 
      "computational results", 
      "modeling", 
      "mask", 
      "transfer", 
      "surface", 
      "adsorption", 
      "diffusion", 
      "conditions", 
      "growth rate", 
      "method", 
      "results", 
      "effect", 
      "rate", 
      "reagents", 
      "possible effects", 
      "data", 
      "local gas-phase epitaxy"
    ], 
    "name": "Modeling of mass transfer under conditions of local gas-phase epitaxy through a mask", 
    "pagination": "401-404", 
    "productId": [
      {
        "name": "dimensions_id", 
        "type": "PropertyValue", 
        "value": [
          "pub.1029966357"
        ]
      }, 
      {
        "name": "doi", 
        "type": "PropertyValue", 
        "value": [
          "10.1134/1.1187171"
        ]
      }
    ], 
    "sameAs": [
      "https://doi.org/10.1134/1.1187171", 
      "https://app.dimensions.ai/details/publication/pub.1029966357"
    ], 
    "sdDataset": "articles", 
    "sdDatePublished": "2022-01-01T18:08", 
    "sdLicense": "https://scigraph.springernature.com/explorer/license/", 
    "sdPublisher": {
      "name": "Springer Nature - SN SciGraph project", 
      "type": "Organization"
    }, 
    "sdSource": "s3://com-springernature-scigraph/baseset/20220101/entities/gbq_results/article/article_285.jsonl", 
    "type": "ScholarlyArticle", 
    "url": "https://doi.org/10.1134/1.1187171"
  }
]
 

Download the RDF metadata as:  json-ld nt turtle xml License info

HOW TO GET THIS DATA PROGRAMMATICALLY:

JSON-LD is a popular format for linked data which is fully compatible with JSON.

curl -H 'Accept: application/ld+json' 'https://scigraph.springernature.com/pub.10.1134/1.1187171'

N-Triples is a line-based linked data format ideal for batch operations.

curl -H 'Accept: application/n-triples' 'https://scigraph.springernature.com/pub.10.1134/1.1187171'

Turtle is a human-readable linked data format.

curl -H 'Accept: text/turtle' 'https://scigraph.springernature.com/pub.10.1134/1.1187171'

RDF/XML is a standard XML format for linked data.

curl -H 'Accept: application/rdf+xml' 'https://scigraph.springernature.com/pub.10.1134/1.1187171'


 

This table displays all metadata directly associated to this object as RDF triples.

120 TRIPLES      21 PREDICATES      52 URIs      43 LITERALS      6 BLANK NODES

Subject Predicate Object
1 sg:pub.10.1134/1.1187171 schema:about anzsrc-for:02
2 anzsrc-for:0204
3 anzsrc-for:0206
4 schema:author Nee487fef14084d259d2756c7572d4dd1
5 schema:datePublished 1997-04
6 schema:datePublishedReg 1997-04-01
7 schema:description The diffusion mass transfer of reagents under the conditions of local gas-phase epitaxy through a mask has been studied by the method of numerical modeling. The possible effect of adsorption of reagents on the surface of the mask and their surface diffusion on the local growth rate is studied. The computational results are compared with published experimental data.
8 schema:genre article
9 schema:inLanguage en
10 schema:isAccessibleForFree false
11 schema:isPartOf N18ea04ff8b7b4572b72a9fa43fb506e5
12 Nef5587c0eafa4516965ffe114c989099
13 sg:journal.1136692
14 schema:keywords adsorption
15 computational results
16 conditions
17 data
18 diffusion
19 diffusion mass transfer
20 effect
21 epitaxy
22 experimental data
23 gas-phase epitaxy
24 growth rate
25 local gas-phase epitaxy
26 local growth rate
27 mask
28 mass transfer
29 method
30 modeling
31 numerical modeling
32 possible effects
33 rate
34 reagents
35 results
36 surface
37 surface diffusion
38 transfer
39 schema:name Modeling of mass transfer under conditions of local gas-phase epitaxy through a mask
40 schema:pagination 401-404
41 schema:productId N9155843537a94adb9e0e499a6800b002
42 Nac8188e91b304ec2a59a699c1eaf88b1
43 schema:sameAs https://app.dimensions.ai/details/publication/pub.1029966357
44 https://doi.org/10.1134/1.1187171
45 schema:sdDatePublished 2022-01-01T18:08
46 schema:sdLicense https://scigraph.springernature.com/explorer/license/
47 schema:sdPublisher N9fc6c9e236864cb88e6c54860e1dff56
48 schema:url https://doi.org/10.1134/1.1187171
49 sgo:license sg:explorer/license/
50 sgo:sdDataset articles
51 rdf:type schema:ScholarlyArticle
52 N18ea04ff8b7b4572b72a9fa43fb506e5 schema:issueNumber 4
53 rdf:type schema:PublicationIssue
54 N2e5caaf22598408d8c4af97bbe70d0ba rdf:first sg:person.014606113257.46
55 rdf:rest N61f8464d9e0e418fabf4d03fd184fab1
56 N3c325876151946c4870bf2d2a3fd9b1f rdf:first N84efe7aa7540447e8f6d57c04e3a9036
57 rdf:rest N2e5caaf22598408d8c4af97bbe70d0ba
58 N486fe7c2db1d4d018d4d6ddc806800df rdf:first N4a2f48bc561442f3b10bf87a57ca0335
59 rdf:rest N3c325876151946c4870bf2d2a3fd9b1f
60 N4a2f48bc561442f3b10bf87a57ca0335 schema:affiliation grid-institutes:grid.4886.2
61 schema:familyName Kantor
62 schema:givenName V. B.
63 rdf:type schema:Person
64 N61f8464d9e0e418fabf4d03fd184fab1 rdf:first sg:person.016523513075.53
65 rdf:rest rdf:nil
66 N84efe7aa7540447e8f6d57c04e3a9036 schema:affiliation grid-institutes:grid.4886.2
67 schema:familyName Piotrovskii
68 schema:givenName D. A.
69 rdf:type schema:Person
70 N9155843537a94adb9e0e499a6800b002 schema:name dimensions_id
71 schema:value pub.1029966357
72 rdf:type schema:PropertyValue
73 N9fc6c9e236864cb88e6c54860e1dff56 schema:name Springer Nature - SN SciGraph project
74 rdf:type schema:Organization
75 Nac8188e91b304ec2a59a699c1eaf88b1 schema:name doi
76 schema:value 10.1134/1.1187171
77 rdf:type schema:PropertyValue
78 Ne67ccd7b765d43f3a6b797d013e0cd61 rdf:first sg:person.014454350336.50
79 rdf:rest N486fe7c2db1d4d018d4d6ddc806800df
80 Nee487fef14084d259d2756c7572d4dd1 rdf:first sg:person.012710653255.27
81 rdf:rest Ne67ccd7b765d43f3a6b797d013e0cd61
82 Nef5587c0eafa4516965ffe114c989099 schema:volumeNumber 31
83 rdf:type schema:PublicationVolume
84 anzsrc-for:02 schema:inDefinedTermSet anzsrc-for:
85 schema:name Physical Sciences
86 rdf:type schema:DefinedTerm
87 anzsrc-for:0204 schema:inDefinedTermSet anzsrc-for:
88 schema:name Condensed Matter Physics
89 rdf:type schema:DefinedTerm
90 anzsrc-for:0206 schema:inDefinedTermSet anzsrc-for:
91 schema:name Quantum Physics
92 rdf:type schema:DefinedTerm
93 sg:journal.1136692 schema:issn 1063-7826
94 1090-6479
95 schema:name Semiconductors
96 schema:publisher Pleiades Publishing
97 rdf:type schema:Periodical
98 sg:person.012710653255.27 schema:affiliation grid-institutes:grid.4886.2
99 schema:familyName Proékt
100 schema:givenName L. B.
101 schema:sameAs https://app.dimensions.ai/discover/publication?and_facet_researcher=ur.012710653255.27
102 rdf:type schema:Person
103 sg:person.014454350336.50 schema:affiliation grid-institutes:grid.4886.2
104 schema:familyName Kaliteevskii
105 schema:givenName M. A.
106 schema:sameAs https://app.dimensions.ai/discover/publication?and_facet_researcher=ur.014454350336.50
107 rdf:type schema:Person
108 sg:person.014606113257.46 schema:affiliation grid-institutes:grid.4886.2
109 schema:familyName Sinitsyn
110 schema:givenName M. A.
111 schema:sameAs https://app.dimensions.ai/discover/publication?and_facet_researcher=ur.014606113257.46
112 rdf:type schema:Person
113 sg:person.016523513075.53 schema:affiliation grid-institutes:grid.4886.2
114 schema:familyName Yavich
115 schema:givenName B. S.
116 schema:sameAs https://app.dimensions.ai/discover/publication?and_facet_researcher=ur.016523513075.53
117 rdf:type schema:Person
118 grid-institutes:grid.4886.2 schema:alternateName A. F. Ioffe Physicotechnical Institute, Russian Academy of Sciences, 194021, St. Petersburg, Russia
119 schema:name A. F. Ioffe Physicotechnical Institute, Russian Academy of Sciences, 194021, St. Petersburg, Russia
120 rdf:type schema:Organization
 




Preview window. Press ESC to close (or click here)


...