Characteristic structural features of amorphous hydrated silicon films deposited by direct-currect decomposition of silane in a magnetic field View Full Text


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Article Info

DATE

1997-07

AUTHORS

O. A. Golikova, A. N. Kuznetsov, V. Kh. Kudoyarova, M. M. Kazanin

ABSTRACT

Data on the hydrogen content and different forms of hydrogen bonds with silicon in a-Si:H films deposited by direct-current decomposition of silane in a magnetic field (MASD) as a function of the deposition conditions are presented: temperature, pressure of the mixture 25%SiH4+75%Ar, pumping rate, and insertion of a grid into the discharge chamber. The correlations between the photoconductivity and the structural features of the films are established. More... »

PAGES

691-694

Identifiers

URI

http://scigraph.springernature.com/pub.10.1134/1.1187067

DOI

http://dx.doi.org/10.1134/1.1187067

DIMENSIONS

https://app.dimensions.ai/details/publication/pub.1028411645


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