Optimization Of PVDF-TrFE Processing Conditions For The Fabrication Of Organic MEMS Resonators View Full Text


Ontology type: schema:ScholarlyArticle      Open Access: True


Article Info

DATE

2016-05

AUTHORS

Pierre-Henri Ducrot, Isabelle Dufour, Cédric Ayela

ABSTRACT

This paper reports a systematic optimization of processing conditions of PVDF-TrFE piezoelectric thin films, used as integrated transducers in organic MEMS resonators. Indeed, despite data on electromechanical properties of PVDF found in the literature, optimized processing conditions that lead to these properties remain only partially described. In this work, a rigorous optimization of parameters enabling state-of-the-art piezoelectric properties of PVDF-TrFE thin films has been performed via the evaluation of the actuation performance of MEMS resonators. Conditions such as annealing duration, poling field and poling duration have been optimized and repeatability of the process has been demonstrated. More... »

PAGES

19426

References to SciGraph publications

Identifiers

URI

http://scigraph.springernature.com/pub.10.1038/srep19426

DOI

http://dx.doi.org/10.1038/srep19426

DIMENSIONS

https://app.dimensions.ai/details/publication/pub.1012790244

PUBMED

https://www.ncbi.nlm.nih.gov/pubmed/26792224


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147 schema:name Bordeaux INP, IMS, UMR 5218, F-33405 Talence, France
148 CNRS, IMS, UMR 5218, F-33405 Talence, France
149 Univ. Bordeaux, IMS, UMR 5218, F-33405 Talence, France
150 rdf:type schema:Organization
 




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