Optimization Of PVDF-TrFE Processing Conditions For The Fabrication Of Organic MEMS Resonators View Full Text


Ontology type: schema:ScholarlyArticle      Open Access: True


Article Info

DATE

2016-05

AUTHORS

Pierre-Henri Ducrot, Isabelle Dufour, Cédric Ayela

ABSTRACT

This paper reports a systematic optimization of processing conditions of PVDF-TrFE piezoelectric thin films, used as integrated transducers in organic MEMS resonators. Indeed, despite data on electromechanical properties of PVDF found in the literature, optimized processing conditions that lead to these properties remain only partially described. In this work, a rigorous optimization of parameters enabling state-of-the-art piezoelectric properties of PVDF-TrFE thin films has been performed via the evaluation of the actuation performance of MEMS resonators. Conditions such as annealing duration, poling field and poling duration have been optimized and repeatability of the process has been demonstrated. More... »

PAGES

19426

References to SciGraph publications

Identifiers

URI

http://scigraph.springernature.com/pub.10.1038/srep19426

DOI

http://dx.doi.org/10.1038/srep19426

DIMENSIONS

https://app.dimensions.ai/details/publication/pub.1012790244

PUBMED

https://www.ncbi.nlm.nih.gov/pubmed/26792224


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[
  {
    "@context": "https://springernature.github.io/scigraph/jsonld/sgcontext.json", 
    "about": [
      {
        "id": "http://purl.org/au-research/vocabulary/anzsrc-for/2008/0912", 
        "inDefinedTermSet": "http://purl.org/au-research/vocabulary/anzsrc-for/2008/", 
        "name": "Materials Engineering", 
        "type": "DefinedTerm"
      }, 
      {
        "id": "http://purl.org/au-research/vocabulary/anzsrc-for/2008/09", 
        "inDefinedTermSet": "http://purl.org/au-research/vocabulary/anzsrc-for/2008/", 
        "name": "Engineering", 
        "type": "DefinedTerm"
      }
    ], 
    "author": [
      {
        "affiliation": {
          "alternateName": "Laboratoire de l'Integration du Materiau au Systeme", 
          "id": "https://www.grid.ac/institutes/grid.462974.a", 
          "name": [
            "Univ. Bordeaux, IMS, UMR 5218, F-33405 Talence, France", 
            "CNRS, IMS, UMR 5218, F-33405 Talence, France", 
            "Bordeaux INP, IMS, UMR 5218, F-33405 Talence, France"
          ], 
          "type": "Organization"
        }, 
        "familyName": "Ducrot", 
        "givenName": "Pierre-Henri", 
        "id": "sg:person.016003235661.86", 
        "sameAs": [
          "https://app.dimensions.ai/discover/publication?and_facet_researcher=ur.016003235661.86"
        ], 
        "type": "Person"
      }, 
      {
        "affiliation": {
          "alternateName": "Laboratoire de l'Integration du Materiau au Systeme", 
          "id": "https://www.grid.ac/institutes/grid.462974.a", 
          "name": [
            "Univ. Bordeaux, IMS, UMR 5218, F-33405 Talence, France", 
            "CNRS, IMS, UMR 5218, F-33405 Talence, France", 
            "Bordeaux INP, IMS, UMR 5218, F-33405 Talence, France"
          ], 
          "type": "Organization"
        }, 
        "familyName": "Dufour", 
        "givenName": "Isabelle", 
        "id": "sg:person.015735307037.18", 
        "sameAs": [
          "https://app.dimensions.ai/discover/publication?and_facet_researcher=ur.015735307037.18"
        ], 
        "type": "Person"
      }, 
      {
        "affiliation": {
          "alternateName": "Laboratoire de l'Integration du Materiau au Systeme", 
          "id": "https://www.grid.ac/institutes/grid.462974.a", 
          "name": [
            "Univ. Bordeaux, IMS, UMR 5218, F-33405 Talence, France", 
            "CNRS, IMS, UMR 5218, F-33405 Talence, France", 
            "Bordeaux INP, IMS, UMR 5218, F-33405 Talence, France"
          ], 
          "type": "Organization"
        }, 
        "familyName": "Ayela", 
        "givenName": "C\u00e9dric", 
        "id": "sg:person.01306627205.21", 
        "sameAs": [
          "https://app.dimensions.ai/discover/publication?and_facet_researcher=ur.01306627205.21"
        ], 
        "type": "Person"
      }
    ], 
    "citation": [
      {
        "id": "https://doi.org/10.1021/ma801495k", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1017220143"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "https://doi.org/10.1021/ma801495k", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1017220143"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "https://doi.org/10.1016/j.sna.2007.04.002", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1019944721"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "https://doi.org/10.1088/0964-1726/16/5/036", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1025407592"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "sg:pub.10.1007/s10832-007-9047-0", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1032400665", 
          "https://doi.org/10.1007/s10832-007-9047-0"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "https://doi.org/10.1016/j.jclepro.2015.05.111", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1036940951"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "https://doi.org/10.1088/0964-1726/23/3/033001", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1037065634"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "https://doi.org/10.1155/2013/435938", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1040682101"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "https://doi.org/10.1002/aic.690431334", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1042354720"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "https://doi.org/10.1002/0471440264.pst427", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1046028045"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "sg:pub.10.1007/s10832-007-9095-5", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1046201021", 
          "https://doi.org/10.1007/s10832-007-9095-5"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "https://doi.org/10.1109/58.764850", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1061191553"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "https://doi.org/10.1109/58.852073", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1061191832"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "https://doi.org/10.1109/jlt.2005.849904", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1061283055"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "https://doi.org/10.1109/jmems.2007.911375", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1061290487"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "https://doi.org/10.1109/jsen.2011.2159835", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1061321830"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "https://doi.org/10.1109/tuffc.2009.1046", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1061809543"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "sg:pub.10.1142/s025676790900414x", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1063011537", 
          "https://doi.org/10.1142/s025676790900414x"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "https://doi.org/10.1109/ise.1988.38546", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1086250293"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "https://doi.org/10.1109/ugim.2003.1225750", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1093794407"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "https://doi.org/10.1109/isaf.2012.6297771", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1094373358"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "https://doi.org/10.1109/memsys.2012.6170364", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1094378318"
        ], 
        "type": "CreativeWork"
      }
    ], 
    "datePublished": "2016-05", 
    "datePublishedReg": "2016-05-01", 
    "description": "This paper reports a systematic optimization of processing conditions of PVDF-TrFE piezoelectric thin films, used as integrated transducers in organic MEMS resonators. Indeed, despite data on electromechanical properties of PVDF found in the literature, optimized processing conditions that lead to these properties remain only partially described. In this work, a rigorous optimization of parameters enabling state-of-the-art piezoelectric properties of PVDF-TrFE thin films has been performed via the evaluation of the actuation performance of MEMS resonators. Conditions such as annealing duration, poling field and poling duration have been optimized and repeatability of the process has been demonstrated. ", 
    "genre": "research_article", 
    "id": "sg:pub.10.1038/srep19426", 
    "inLanguage": [
      "en"
    ], 
    "isAccessibleForFree": true, 
    "isPartOf": [
      {
        "id": "sg:journal.1045337", 
        "issn": [
          "2045-2322"
        ], 
        "name": "Scientific Reports", 
        "type": "Periodical"
      }, 
      {
        "issueNumber": "1", 
        "type": "PublicationIssue"
      }, 
      {
        "type": "PublicationVolume", 
        "volumeNumber": "6"
      }
    ], 
    "name": "Optimization Of PVDF-TrFE Processing Conditions For The Fabrication Of Organic MEMS Resonators", 
    "pagination": "19426", 
    "productId": [
      {
        "name": "readcube_id", 
        "type": "PropertyValue", 
        "value": [
          "3cee6e6bbf4843a4ca46db888d8458ed66e561f4514517cd2ff4013090b7f5c4"
        ]
      }, 
      {
        "name": "pubmed_id", 
        "type": "PropertyValue", 
        "value": [
          "26792224"
        ]
      }, 
      {
        "name": "nlm_unique_id", 
        "type": "PropertyValue", 
        "value": [
          "101563288"
        ]
      }, 
      {
        "name": "doi", 
        "type": "PropertyValue", 
        "value": [
          "10.1038/srep19426"
        ]
      }, 
      {
        "name": "dimensions_id", 
        "type": "PropertyValue", 
        "value": [
          "pub.1012790244"
        ]
      }
    ], 
    "sameAs": [
      "https://doi.org/10.1038/srep19426", 
      "https://app.dimensions.ai/details/publication/pub.1012790244"
    ], 
    "sdDataset": "articles", 
    "sdDatePublished": "2019-04-11T00:22", 
    "sdLicense": "https://scigraph.springernature.com/explorer/license/", 
    "sdPublisher": {
      "name": "Springer Nature - SN SciGraph project", 
      "type": "Organization"
    }, 
    "sdSource": "s3://com-uberresearch-data-dimensions-target-20181106-alternative/cleanup/v134/2549eaecd7973599484d7c17b260dba0a4ecb94b/merge/v9/a6c9fde33151104705d4d7ff012ea9563521a3ce/jats-lookup/v90/0000000001_0000000264/records_8695_00000549.jsonl", 
    "type": "ScholarlyArticle", 
    "url": "http://www.nature.com/articles/srep19426"
  }
]
 

Download the RDF metadata as:  json-ld nt turtle xml License info

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This table displays all metadata directly associated to this object as RDF triples.

150 TRIPLES      21 PREDICATES      50 URIs      21 LITERALS      9 BLANK NODES

Subject Predicate Object
1 sg:pub.10.1038/srep19426 schema:about anzsrc-for:09
2 anzsrc-for:0912
3 schema:author N89f7d85ec16047df919921df0b8e39f5
4 schema:citation sg:pub.10.1007/s10832-007-9047-0
5 sg:pub.10.1007/s10832-007-9095-5
6 sg:pub.10.1142/s025676790900414x
7 https://doi.org/10.1002/0471440264.pst427
8 https://doi.org/10.1002/aic.690431334
9 https://doi.org/10.1016/j.jclepro.2015.05.111
10 https://doi.org/10.1016/j.sna.2007.04.002
11 https://doi.org/10.1021/ma801495k
12 https://doi.org/10.1088/0964-1726/16/5/036
13 https://doi.org/10.1088/0964-1726/23/3/033001
14 https://doi.org/10.1109/58.764850
15 https://doi.org/10.1109/58.852073
16 https://doi.org/10.1109/isaf.2012.6297771
17 https://doi.org/10.1109/ise.1988.38546
18 https://doi.org/10.1109/jlt.2005.849904
19 https://doi.org/10.1109/jmems.2007.911375
20 https://doi.org/10.1109/jsen.2011.2159835
21 https://doi.org/10.1109/memsys.2012.6170364
22 https://doi.org/10.1109/tuffc.2009.1046
23 https://doi.org/10.1109/ugim.2003.1225750
24 https://doi.org/10.1155/2013/435938
25 schema:datePublished 2016-05
26 schema:datePublishedReg 2016-05-01
27 schema:description This paper reports a systematic optimization of processing conditions of PVDF-TrFE piezoelectric thin films, used as integrated transducers in organic MEMS resonators. Indeed, despite data on electromechanical properties of PVDF found in the literature, optimized processing conditions that lead to these properties remain only partially described. In this work, a rigorous optimization of parameters enabling state-of-the-art piezoelectric properties of PVDF-TrFE thin films has been performed via the evaluation of the actuation performance of MEMS resonators. Conditions such as annealing duration, poling field and poling duration have been optimized and repeatability of the process has been demonstrated.
28 schema:genre research_article
29 schema:inLanguage en
30 schema:isAccessibleForFree true
31 schema:isPartOf N51dbe153fb504bef886b97efcb35bae7
32 Ne41632f6b5f646a3b225fd26cb12d54e
33 sg:journal.1045337
34 schema:name Optimization Of PVDF-TrFE Processing Conditions For The Fabrication Of Organic MEMS Resonators
35 schema:pagination 19426
36 schema:productId N0c788b6db999493b864a22b758b0bab0
37 N397c32fdc26f43dead83766342c99e4e
38 N8eb242f3e62b40f0bf02649db7aff5a3
39 Nd56eec7fd4ea48b6929f2f2065816a54
40 Ndf92757a8eda4bf1ac00657c79f6bafc
41 schema:sameAs https://app.dimensions.ai/details/publication/pub.1012790244
42 https://doi.org/10.1038/srep19426
43 schema:sdDatePublished 2019-04-11T00:22
44 schema:sdLicense https://scigraph.springernature.com/explorer/license/
45 schema:sdPublisher N1647ff6f23d8445386d79ab88981e36b
46 schema:url http://www.nature.com/articles/srep19426
47 sgo:license sg:explorer/license/
48 sgo:sdDataset articles
49 rdf:type schema:ScholarlyArticle
50 N0c788b6db999493b864a22b758b0bab0 schema:name doi
51 schema:value 10.1038/srep19426
52 rdf:type schema:PropertyValue
53 N1647ff6f23d8445386d79ab88981e36b schema:name Springer Nature - SN SciGraph project
54 rdf:type schema:Organization
55 N397c32fdc26f43dead83766342c99e4e schema:name readcube_id
56 schema:value 3cee6e6bbf4843a4ca46db888d8458ed66e561f4514517cd2ff4013090b7f5c4
57 rdf:type schema:PropertyValue
58 N4ff9dde42d7149ff9d60c706e46d3ddd rdf:first sg:person.01306627205.21
59 rdf:rest rdf:nil
60 N51dbe153fb504bef886b97efcb35bae7 schema:issueNumber 1
61 rdf:type schema:PublicationIssue
62 N89f7d85ec16047df919921df0b8e39f5 rdf:first sg:person.016003235661.86
63 rdf:rest Ncea66ae6607844518aab73ad0950be00
64 N8eb242f3e62b40f0bf02649db7aff5a3 schema:name dimensions_id
65 schema:value pub.1012790244
66 rdf:type schema:PropertyValue
67 Ncea66ae6607844518aab73ad0950be00 rdf:first sg:person.015735307037.18
68 rdf:rest N4ff9dde42d7149ff9d60c706e46d3ddd
69 Nd56eec7fd4ea48b6929f2f2065816a54 schema:name pubmed_id
70 schema:value 26792224
71 rdf:type schema:PropertyValue
72 Ndf92757a8eda4bf1ac00657c79f6bafc schema:name nlm_unique_id
73 schema:value 101563288
74 rdf:type schema:PropertyValue
75 Ne41632f6b5f646a3b225fd26cb12d54e schema:volumeNumber 6
76 rdf:type schema:PublicationVolume
77 anzsrc-for:09 schema:inDefinedTermSet anzsrc-for:
78 schema:name Engineering
79 rdf:type schema:DefinedTerm
80 anzsrc-for:0912 schema:inDefinedTermSet anzsrc-for:
81 schema:name Materials Engineering
82 rdf:type schema:DefinedTerm
83 sg:journal.1045337 schema:issn 2045-2322
84 schema:name Scientific Reports
85 rdf:type schema:Periodical
86 sg:person.01306627205.21 schema:affiliation https://www.grid.ac/institutes/grid.462974.a
87 schema:familyName Ayela
88 schema:givenName Cédric
89 schema:sameAs https://app.dimensions.ai/discover/publication?and_facet_researcher=ur.01306627205.21
90 rdf:type schema:Person
91 sg:person.015735307037.18 schema:affiliation https://www.grid.ac/institutes/grid.462974.a
92 schema:familyName Dufour
93 schema:givenName Isabelle
94 schema:sameAs https://app.dimensions.ai/discover/publication?and_facet_researcher=ur.015735307037.18
95 rdf:type schema:Person
96 sg:person.016003235661.86 schema:affiliation https://www.grid.ac/institutes/grid.462974.a
97 schema:familyName Ducrot
98 schema:givenName Pierre-Henri
99 schema:sameAs https://app.dimensions.ai/discover/publication?and_facet_researcher=ur.016003235661.86
100 rdf:type schema:Person
101 sg:pub.10.1007/s10832-007-9047-0 schema:sameAs https://app.dimensions.ai/details/publication/pub.1032400665
102 https://doi.org/10.1007/s10832-007-9047-0
103 rdf:type schema:CreativeWork
104 sg:pub.10.1007/s10832-007-9095-5 schema:sameAs https://app.dimensions.ai/details/publication/pub.1046201021
105 https://doi.org/10.1007/s10832-007-9095-5
106 rdf:type schema:CreativeWork
107 sg:pub.10.1142/s025676790900414x schema:sameAs https://app.dimensions.ai/details/publication/pub.1063011537
108 https://doi.org/10.1142/s025676790900414x
109 rdf:type schema:CreativeWork
110 https://doi.org/10.1002/0471440264.pst427 schema:sameAs https://app.dimensions.ai/details/publication/pub.1046028045
111 rdf:type schema:CreativeWork
112 https://doi.org/10.1002/aic.690431334 schema:sameAs https://app.dimensions.ai/details/publication/pub.1042354720
113 rdf:type schema:CreativeWork
114 https://doi.org/10.1016/j.jclepro.2015.05.111 schema:sameAs https://app.dimensions.ai/details/publication/pub.1036940951
115 rdf:type schema:CreativeWork
116 https://doi.org/10.1016/j.sna.2007.04.002 schema:sameAs https://app.dimensions.ai/details/publication/pub.1019944721
117 rdf:type schema:CreativeWork
118 https://doi.org/10.1021/ma801495k schema:sameAs https://app.dimensions.ai/details/publication/pub.1017220143
119 rdf:type schema:CreativeWork
120 https://doi.org/10.1088/0964-1726/16/5/036 schema:sameAs https://app.dimensions.ai/details/publication/pub.1025407592
121 rdf:type schema:CreativeWork
122 https://doi.org/10.1088/0964-1726/23/3/033001 schema:sameAs https://app.dimensions.ai/details/publication/pub.1037065634
123 rdf:type schema:CreativeWork
124 https://doi.org/10.1109/58.764850 schema:sameAs https://app.dimensions.ai/details/publication/pub.1061191553
125 rdf:type schema:CreativeWork
126 https://doi.org/10.1109/58.852073 schema:sameAs https://app.dimensions.ai/details/publication/pub.1061191832
127 rdf:type schema:CreativeWork
128 https://doi.org/10.1109/isaf.2012.6297771 schema:sameAs https://app.dimensions.ai/details/publication/pub.1094373358
129 rdf:type schema:CreativeWork
130 https://doi.org/10.1109/ise.1988.38546 schema:sameAs https://app.dimensions.ai/details/publication/pub.1086250293
131 rdf:type schema:CreativeWork
132 https://doi.org/10.1109/jlt.2005.849904 schema:sameAs https://app.dimensions.ai/details/publication/pub.1061283055
133 rdf:type schema:CreativeWork
134 https://doi.org/10.1109/jmems.2007.911375 schema:sameAs https://app.dimensions.ai/details/publication/pub.1061290487
135 rdf:type schema:CreativeWork
136 https://doi.org/10.1109/jsen.2011.2159835 schema:sameAs https://app.dimensions.ai/details/publication/pub.1061321830
137 rdf:type schema:CreativeWork
138 https://doi.org/10.1109/memsys.2012.6170364 schema:sameAs https://app.dimensions.ai/details/publication/pub.1094378318
139 rdf:type schema:CreativeWork
140 https://doi.org/10.1109/tuffc.2009.1046 schema:sameAs https://app.dimensions.ai/details/publication/pub.1061809543
141 rdf:type schema:CreativeWork
142 https://doi.org/10.1109/ugim.2003.1225750 schema:sameAs https://app.dimensions.ai/details/publication/pub.1093794407
143 rdf:type schema:CreativeWork
144 https://doi.org/10.1155/2013/435938 schema:sameAs https://app.dimensions.ai/details/publication/pub.1040682101
145 rdf:type schema:CreativeWork
146 https://www.grid.ac/institutes/grid.462974.a schema:alternateName Laboratoire de l'Integration du Materiau au Systeme
147 schema:name Bordeaux INP, IMS, UMR 5218, F-33405 Talence, France
148 CNRS, IMS, UMR 5218, F-33405 Talence, France
149 Univ. Bordeaux, IMS, UMR 5218, F-33405 Talence, France
150 rdf:type schema:Organization
 




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