Maskless milling of diamond by a focused oxygen ion beam View Full Text


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Article Info

DATE

2015-08

AUTHORS

Aiden A. Martin, Steven Randolph, Aurelien Botman, Milos Toth, Igor Aharonovich

ABSTRACT

Recent advances in focused ion beam technology have enabled high-resolution, maskless nanofabrication using light ions. Studies with light ions to date have, however, focused on milling of materials where sub-surface ion beam damage does not inhibit device performance. Here we report on maskless milling of single crystal diamond using a focused beam of oxygen ions. Material quality is assessed by Raman and luminescence analysis, and reveals that the damage layer generated by oxygen ions can be removed by non-intrusive post-processing methods such as localised electron beam induced chemical etching. More... »

PAGES

8958

References to SciGraph publications

Identifiers

URI

http://scigraph.springernature.com/pub.10.1038/srep08958

DOI

http://dx.doi.org/10.1038/srep08958

DIMENSIONS

https://app.dimensions.ai/details/publication/pub.1046939169

PUBMED

https://www.ncbi.nlm.nih.gov/pubmed/25753406


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