Silicon Micromechanical Devices View Full Text


Ontology type: schema:ScholarlyArticle     


Article Info

DATE

1983-04

AUTHORS

James B. Angell, Stephen C. Terry, Phillip W. Barth

ABSTRACT

N/A

PAGES

44-55

Journal

TITLE

Scientific American

ISSUE

4

VOLUME

248

Related Patents

  • Mechanical Sensor For High Temperature Environments
  • Solid State Vibrating Gyro
  • Microfabricated Elastomeric Valve And Pump Systems
  • High Throughput Screening Of Crystallization Of Materials
  • Devices Utilizing Self-Assembled Gel And Method Of Manufacture
  • Microfabricated Elastomeric Valve And Pump Systems
  • Integrated Monolithic Microfabricated Electrospray And Liquid Chromatography System And Method
  • Integrated Monolithic Microfabricated Dispensing Nozzle And Liquid Chromatography-Electrospray System And Method
  • Integrated Monolithic Microfabricated Electrospray And Liquid Chromatography System And Method
  • Integrated Monolithic Microfabricated Dispensing Nozzle And Liquid Chromatography-Electrospray System And Method
  • Microfabricated Electrospray Device
  • Microfluidic Rotary Flow Reactor Matrix
  • Image Processing Method And System For Microfluidic Devices
  • Microfabricated Elastomeric Valve And Pump Systems
  • Low-Pressure Packaging For Fluid Devices
  • Discriminating Electromagnetic Radiation Based On Angle Of Incidence
  • Method For Producing Alkylene Oxide Addition Products
  • Fluorocarbon Emulsion Stabilizing Surfactants
  • Delivering And/Or Receiving Fluids
  • Microfluidic Chemostat
  • Polymer Surface Modification
  • Micromachined Accelerometer Gyroscope
  • Micromechanical Thermoelectric Sensor Element
  • Multi-Channel Magnetic Flux Detector Comprising A Magnetometer Modular Construction In A Vessel Containing A Cooling Medium
  • Microfabricated Reactor
  • Electrostatic/Electrostrictive Actuation Of Elastomer Structures Using Compliant Electrodes
  • Integrated Chip Carriers With Thermocycler Interfaces And Methods Of Using The Same
  • Microfluidic Device And Methods Of Using Same
  • Method And System For Microfluidic Device And Imaging Thereof
  • Integrated Chip Carriers With Thermocycler Interfaces And Methods Of Using The Same
  • Microfluidic Device And Methods Of Using Same
  • Microfabricated Reactor, Process For Manufacturing The Reactor, And Method Of Amplification
  • Microfluidic Device And Methods Of Using Same
  • Microfluidic Free Interface Diffusion Techniques
  • Microfabricated Elastomeric Valve And Pump Systems
  • Microfabricated Elastomeric Valve And Pump Systems
  • Microfabricated Crossflow Devices And Methods
  • Microfabricated Reactor
  • Integrated Monolithic Microfabricated Electrospray And Liquid Chromatography System And Method
  • Integrated Monolithic Microfabricated Dispensing Nozzle And Liquid Chromatography-Electrospray System And Method
  • Separation Media, Multiple Electrospray Nozzle System And Method
  • Integrated Monolithic Microfabricated Electrospray And Liquid Chromatography System And Method
  • Integrated Monolithic Microfabricated Electrospray And Liquid Chromatography System And Method
  • Micromachined Rate And Acceleration Sensor And Method
  • Microfabricated Reactor
  • Parallel Gas Chromatograph With Microdetector Array
  • Micromechanical Electric Shunt And Encoding Devices Made Therefrom
  • Method Of Making An Electrostatic Silicon Accelerometer
  • Microfluidic Protein Crystallography Techniques
  • Microfluidic Free Interface Diffusion Techniques
  • Microfluidic Free Interface Diffusion Techniques
  • Velocity Independent Analyte Characterization
  • Microfluidic Particle-Analysis Systems
  • Microfabricated Crossflow Devices And Methods
  • Microfabricated Elastomeric Valve And Pump Systems
  • Microfabricated Elastomeric Valve And Pump Systems
  • Microfabricated Crossflow Devices And Methods
  • Thermal Reaction Device And Method For Using The Same
  • Manipulation Of Fluids And Reactions In Microfluidic Systems
  • Combinatorial Synthesis System
  • Microfluidic Free Interface Diffusion Techniques
  • Microfluidic Large Scale Integration
  • Integrated Monolithic Microfabricated Electrospray And Liquid Chromatography System And Method
  • Microminiature Semiconductor Valve
  • Electrospray Nozzle And Monolithic Substrate
  • Integrated Monolithic Microfabricated Dispensing Nozzle And Liquid Chromatography-Electrospray System And Method
  • Compact, Low-Profile Chromatograph
  • Microminiature Valve Having Silicon Diaphragm
  • Micromachined Rate And Acceleration Sensor
  • Integrated Monolithic Microfabricated Electrospray And Liquid Chromatography System And Method
  • Micromachined Rate And Acceleration Sensor
  • Resonant Accelerometer
  • Cantilevered Microtip Manufacturing By Ion Implantation And Etching
  • Microfluidic Devices And Methods Of Use
  • Microfluidic Chromatography
  • Sample Multiplexing
  • Apparatus And Methods For Conducting Assays And High Throughput Screening
  • Manipulating Droplet Size
  • Method And System For Microfluidic Device And Imaging Thereof
  • Process For Preparing Sulfates And/Or Sulfonates In A Micro-Reaction System
  • Microfluidic Devices And Methods Of Using Same
  • Microfabricated Elastomeric Valve And Pump Systems
  • Microfluidic Reaction Apparatus For High Throughput Screening
  • Process For The Ozonolysis Of Unsaturated Compounds
  • Nucleic Acid Amplification Using Microfluidic Devices
  • Microfluidic Devices And Methods Of Using Same
  • Microfabricated Elastomeric Valve And Pump Systems
  • Ion Mobility Storage Trap And Method
  • Devices And Methods Utilizing Arrays Of Structures For Analyte Capture
  • Compartmentalised Combinatorial Chemistry By Microfluidic Control
  • High Throughput Screening Of Crystallization Of Materials
  • Delivering And/Or Receiving Fluids
  • Microfabricated Reactor
  • Integrated Monolithic Microfabricated Electrospray And Liquid Chromatography System And Method
  • Microfabricated Reactor, Process For Manufacturing The Reactor, And Method Of Amplification
  • Integrated Monolithic Microfabricated Electrospray And Liquid Chromatography System And Method
  • Integrated Monolithic Microfabricated Electrospray And Liquid Chromatography System And Method
  • Integrated Monolithic Microfabricated Electrospray And Liquid Chromatography System And Method
  • Spherical Particles Having Narrow Size Distribution Made By Ultrasonic Vibration
  • Optical Coupling Device Utilizing A Mirror And Cantilevered Arm
  • Integrated Monolithic Microfabricated Electrospray And Liquid Chromatography System And Method
  • Microfabricated Reactor, Process For Manufacturing The Reactor, And Method Of Amplification
  • Spherical Particles Having Narrow Size Distribution Made By Ultrasonic Vibration
  • High Throughput Screening Of Crystallization Materials
  • Crystal Forming Devices And Systems And Methods For Using The Same
  • Method And System For Microfluidic Device And Imaging Thereof
  • Vitro Evolution In Microfluidic Systems
  • Microfluidic Devices And Methods Of Use
  • Microfluidic Devices And Methods Of Use In The Formation And Control Of Nanoreactors
  • In Vitro Evolution In Microfluidic Systems
  • Manipulation Of Microfluidic Droplets
  • Microfluidic Particle-Analysis Systems
  • Microfabricated Crossflow Devices And Methods
  • Method Of Synthesis And Testing Of Combinatorial Libraries Using Microcapsules
  • Microfluidic Devices And Methods Of Use In The Formation And Control Of Nanoreactors
  • Thermally-Actuated Microminiature Valve
  • Micromachined Valve With Polyimide Film Diaphragm
  • Integrated Monolithic Microfabricated Electrospray And Liquid Chromatography System And Method
  • Self Aligning Small Scale Integrated Circuit Semiconductor Chips To Form Large Area Arrays
  • Mass Airflow Sensor
  • Microfluidic Protein Crystallography
  • Thermal Reaction Device And Method For Using The Same
  • Microfabricated Elastomeric Valve And Pump Systems
  • Identifiers

    URI

    http://scigraph.springernature.com/pub.10.1038/scientificamerican0483-44

    DOI

    http://dx.doi.org/10.1038/scientificamerican0483-44

    DIMENSIONS

    https://app.dimensions.ai/details/publication/pub.1056527150


    Indexing Status Check whether this publication has been indexed by Scopus and Web Of Science using the SN Indexing Status Tool
    Incoming Citations Browse incoming citations for this publication using opencitations.net

    JSON-LD is the canonical representation for SciGraph data.

    TIP: You can open this SciGraph record using an external JSON-LD service: JSON-LD Playground Google SDTT

    [
      {
        "@context": "https://springernature.github.io/scigraph/jsonld/sgcontext.json", 
        "author": [
          {
            "familyName": "Angell", 
            "givenName": "James B.", 
            "type": "Person"
          }, 
          {
            "familyName": "Terry", 
            "givenName": "Stephen C.", 
            "type": "Person"
          }, 
          {
            "familyName": "Barth", 
            "givenName": "Phillip W.", 
            "type": "Person"
          }
        ], 
        "datePublished": "1983-04", 
        "datePublishedReg": "1983-04-01", 
        "genre": "non_research_article", 
        "id": "sg:pub.10.1038/scientificamerican0483-44", 
        "inLanguage": [
          "en"
        ], 
        "isAccessibleForFree": false, 
        "isPartOf": [
          {
            "id": "sg:journal.1018656", 
            "issn": [
              "0036-8733", 
              "1946-7087"
            ], 
            "name": "Scientific American", 
            "type": "Periodical"
          }, 
          {
            "issueNumber": "4", 
            "type": "PublicationIssue"
          }, 
          {
            "type": "PublicationVolume", 
            "volumeNumber": "248"
          }
        ], 
        "name": "Silicon Micromechanical Devices", 
        "pagination": "44-55", 
        "productId": [
          {
            "name": "doi", 
            "type": "PropertyValue", 
            "value": [
              "10.1038/scientificamerican0483-44"
            ]
          }, 
          {
            "name": "dimensions_id", 
            "type": "PropertyValue", 
            "value": [
              "pub.1056527150"
            ]
          }
        ], 
        "sameAs": [
          "https://doi.org/10.1038/scientificamerican0483-44", 
          "https://app.dimensions.ai/details/publication/pub.1056527150"
        ], 
        "sdDataset": "articles", 
        "sdDatePublished": "2019-04-10T23:45", 
        "sdLicense": "https://scigraph.springernature.com/explorer/license/", 
        "sdPublisher": {
          "name": "Springer Nature - SN SciGraph project", 
          "type": "Organization"
        }, 
        "sdSource": "s3://com-uberresearch-data-dimensions-target-20181106-alternative/cleanup/v134/2549eaecd7973599484d7c17b260dba0a4ecb94b/merge/v9/a6c9fde33151104705d4d7ff012ea9563521a3ce/jats-lookup/v90/0000000001_0000000264/records_8695_00000101.jsonl", 
        "type": "ScholarlyArticle", 
        "url": "http://www.nature.com/doifinder/10.1038/scientificamerican0483-44"
      }
    ]
     

    Download the RDF metadata as:  json-ld nt turtle xml License info

    HOW TO GET THIS DATA PROGRAMMATICALLY:

    JSON-LD is a popular format for linked data which is fully compatible with JSON.

    curl -H 'Accept: application/ld+json' 'https://scigraph.springernature.com/pub.10.1038/scientificamerican0483-44'

    N-Triples is a line-based linked data format ideal for batch operations.

    curl -H 'Accept: application/n-triples' 'https://scigraph.springernature.com/pub.10.1038/scientificamerican0483-44'

    Turtle is a human-readable linked data format.

    curl -H 'Accept: text/turtle' 'https://scigraph.springernature.com/pub.10.1038/scientificamerican0483-44'

    RDF/XML is a standard XML format for linked data.

    curl -H 'Accept: application/rdf+xml' 'https://scigraph.springernature.com/pub.10.1038/scientificamerican0483-44'


     

    This table displays all metadata directly associated to this object as RDF triples.

    53 TRIPLES      18 PREDICATES      23 URIs      17 LITERALS      6 BLANK NODES

    Subject Predicate Object
    1 sg:pub.10.1038/scientificamerican0483-44 schema:author N6d58f131e38f4d43938aeaf413e34289
    2 schema:datePublished 1983-04
    3 schema:datePublishedReg 1983-04-01
    4 schema:genre non_research_article
    5 schema:inLanguage en
    6 schema:isAccessibleForFree false
    7 schema:isPartOf N2fb861edaa3642ed9acb31392456ce4f
    8 Nfb30b4134d8144e990c7bad874d46ad4
    9 sg:journal.1018656
    10 schema:name Silicon Micromechanical Devices
    11 schema:pagination 44-55
    12 schema:productId N6516a5a49aed4c0bbc120eaf02321b14
    13 Nb3357fece61848fe96e4f95f145bee80
    14 schema:sameAs https://app.dimensions.ai/details/publication/pub.1056527150
    15 https://doi.org/10.1038/scientificamerican0483-44
    16 schema:sdDatePublished 2019-04-10T23:45
    17 schema:sdLicense https://scigraph.springernature.com/explorer/license/
    18 schema:sdPublisher N56e8c649583b444b9fdafd3e8171f408
    19 schema:url http://www.nature.com/doifinder/10.1038/scientificamerican0483-44
    20 sgo:license sg:explorer/license/
    21 sgo:sdDataset articles
    22 rdf:type schema:ScholarlyArticle
    23 N0a9eb21fcec445f88281b226490677fa rdf:first Ndf55cac6094c441bb37070178334781a
    24 rdf:rest N840784d776874d658b363217e2f04111
    25 N0f2a39043e164b578a45af1304aa9bb6 schema:familyName Angell
    26 schema:givenName James B.
    27 rdf:type schema:Person
    28 N2fb861edaa3642ed9acb31392456ce4f schema:volumeNumber 248
    29 rdf:type schema:PublicationVolume
    30 N56e8c649583b444b9fdafd3e8171f408 schema:name Springer Nature - SN SciGraph project
    31 rdf:type schema:Organization
    32 N6516a5a49aed4c0bbc120eaf02321b14 schema:name doi
    33 schema:value 10.1038/scientificamerican0483-44
    34 rdf:type schema:PropertyValue
    35 N6d58f131e38f4d43938aeaf413e34289 rdf:first N0f2a39043e164b578a45af1304aa9bb6
    36 rdf:rest N0a9eb21fcec445f88281b226490677fa
    37 N840784d776874d658b363217e2f04111 rdf:first Nad9b0a0973de46b9b3605b840b6c7d45
    38 rdf:rest rdf:nil
    39 Nad9b0a0973de46b9b3605b840b6c7d45 schema:familyName Barth
    40 schema:givenName Phillip W.
    41 rdf:type schema:Person
    42 Nb3357fece61848fe96e4f95f145bee80 schema:name dimensions_id
    43 schema:value pub.1056527150
    44 rdf:type schema:PropertyValue
    45 Ndf55cac6094c441bb37070178334781a schema:familyName Terry
    46 schema:givenName Stephen C.
    47 rdf:type schema:Person
    48 Nfb30b4134d8144e990c7bad874d46ad4 schema:issueNumber 4
    49 rdf:type schema:PublicationIssue
    50 sg:journal.1018656 schema:issn 0036-8733
    51 1946-7087
    52 schema:name Scientific American
    53 rdf:type schema:Periodical
     




    Preview window. Press ESC to close (or click here)


    ...