Silicon Micromechanical Devices View Full Text


Ontology type: schema:ScholarlyArticle     


Article Info

DATE

1983-04

AUTHORS

James B. Angell, Stephen C. Terry, Phillip W. Barth

ABSTRACT

N/A

PAGES

44-55

Journal

TITLE

Scientific American

ISSUE

4

VOLUME

248

Related Patents

  • Mechanical Sensor For High Temperature Environments
  • Solid State Vibrating Gyro
  • Microfabricated Elastomeric Valve And Pump Systems
  • High Throughput Screening Of Crystallization Of Materials
  • Devices Utilizing Self-Assembled Gel And Method Of Manufacture
  • Microfabricated Elastomeric Valve And Pump Systems
  • Integrated Monolithic Microfabricated Electrospray And Liquid Chromatography System And Method
  • Integrated Monolithic Microfabricated Dispensing Nozzle And Liquid Chromatography-Electrospray System And Method
  • Integrated Monolithic Microfabricated Electrospray And Liquid Chromatography System And Method
  • Integrated Monolithic Microfabricated Dispensing Nozzle And Liquid Chromatography-Electrospray System And Method
  • Microfabricated Electrospray Device
  • Microfluidic Rotary Flow Reactor Matrix
  • Image Processing Method And System For Microfluidic Devices
  • Microfabricated Elastomeric Valve And Pump Systems
  • Low-Pressure Packaging For Fluid Devices
  • Discriminating Electromagnetic Radiation Based On Angle Of Incidence
  • Method For Producing Alkylene Oxide Addition Products
  • Fluorocarbon Emulsion Stabilizing Surfactants
  • Delivering And/Or Receiving Fluids
  • Microfluidic Chemostat
  • Polymer Surface Modification
  • Micromachined Accelerometer Gyroscope
  • Micromechanical Thermoelectric Sensor Element
  • Multi-Channel Magnetic Flux Detector Comprising A Magnetometer Modular Construction In A Vessel Containing A Cooling Medium
  • Microfabricated Reactor
  • Electrostatic/Electrostrictive Actuation Of Elastomer Structures Using Compliant Electrodes
  • Microfluidic Device And Methods Of Using Same
  • Integrated Chip Carriers With Thermocycler Interfaces And Methods Of Using The Same
  • Microfabricated Reactor, Process For Manufacturing The Reactor, And Method Of Amplification
  • Microfluidic Device And Methods Of Using Same
  • Integrated Chip Carriers With Thermocycler Interfaces And Methods Of Using The Same
  • Method And System For Microfluidic Device And Imaging Thereof
  • Microfabricated Elastomeric Valve And Pump Systems
  • Microfabricated Elastomeric Valve And Pump Systems
  • Microfabricated Crossflow Devices And Methods
  • Microfluidic Device And Methods Of Using Same
  • Microfluidic Free Interface Diffusion Techniques
  • Integrated Monolithic Microfabricated Electrospray And Liquid Chromatography System And Method
  • Parallel Gas Chromatograph With Microdetector Array
  • Micromachined Rate And Acceleration Sensor And Method
  • Microfabricated Reactor
  • Integrated Monolithic Microfabricated Dispensing Nozzle And Liquid Chromatography-Electrospray System And Method
  • Separation Media, Multiple Electrospray Nozzle System And Method
  • Integrated Monolithic Microfabricated Electrospray And Liquid Chromatography System And Method
  • Microfabricated Reactor
  • Method Of Making An Electrostatic Silicon Accelerometer
  • Micromechanical Electric Shunt And Encoding Devices Made Therefrom
  • Integrated Monolithic Microfabricated Electrospray And Liquid Chromatography System And Method
  • Microfluidic Protein Crystallography Techniques
  • Microfluidic Free Interface Diffusion Techniques
  • Microfluidic Free Interface Diffusion Techniques
  • Velocity Independent Analyte Characterization
  • Microfluidic Particle-Analysis Systems
  • Microfabricated Crossflow Devices And Methods
  • Microfabricated Elastomeric Valve And Pump Systems
  • Microfabricated Elastomeric Valve And Pump Systems
  • Microfabricated Crossflow Devices And Methods
  • Thermal Reaction Device And Method For Using The Same
  • Manipulation Of Fluids And Reactions In Microfluidic Systems
  • Combinatorial Synthesis System
  • Microfluidic Free Interface Diffusion Techniques
  • Microfluidic Large Scale Integration
  • Integrated Monolithic Microfabricated Electrospray And Liquid Chromatography System And Method
  • Microminiature Semiconductor Valve
  • Electrospray Nozzle And Monolithic Substrate
  • Integrated Monolithic Microfabricated Dispensing Nozzle And Liquid Chromatography-Electrospray System And Method
  • Compact, Low-Profile Chromatograph
  • Microminiature Valve Having Silicon Diaphragm
  • Micromachined Rate And Acceleration Sensor
  • Integrated Monolithic Microfabricated Electrospray And Liquid Chromatography System And Method
  • Micromachined Rate And Acceleration Sensor
  • Resonant Accelerometer
  • Cantilevered Microtip Manufacturing By Ion Implantation And Etching
  • Microfluidic Devices And Methods Of Use
  • Microfluidic Chromatography
  • Sample Multiplexing
  • Apparatus And Methods For Conducting Assays And High Throughput Screening
  • Manipulating Droplet Size
  • Method And System For Microfluidic Device And Imaging Thereof
  • Process For Preparing Sulfates And/Or Sulfonates In A Micro-Reaction System
  • Microfluidic Devices And Methods Of Using Same
  • Microfabricated Elastomeric Valve And Pump Systems
  • Microfluidic Reaction Apparatus For High Throughput Screening
  • Process For The Ozonolysis Of Unsaturated Compounds
  • Nucleic Acid Amplification Using Microfluidic Devices
  • Microfluidic Devices And Methods Of Using Same
  • Microfabricated Elastomeric Valve And Pump Systems
  • Ion Mobility Storage Trap And Method
  • Devices And Methods Utilizing Arrays Of Structures For Analyte Capture
  • Compartmentalised Combinatorial Chemistry By Microfluidic Control
  • High Throughput Screening Of Crystallization Of Materials
  • Delivering And/Or Receiving Fluids
  • Microfabricated Reactor
  • Integrated Monolithic Microfabricated Electrospray And Liquid Chromatography System And Method
  • Microfabricated Reactor, Process For Manufacturing The Reactor, And Method Of Amplification
  • Integrated Monolithic Microfabricated Electrospray And Liquid Chromatography System And Method
  • Integrated Monolithic Microfabricated Electrospray And Liquid Chromatography System And Method
  • Integrated Monolithic Microfabricated Electrospray And Liquid Chromatography System And Method
  • Spherical Particles Having Narrow Size Distribution Made By Ultrasonic Vibration
  • Optical Coupling Device Utilizing A Mirror And Cantilevered Arm
  • Separation Media, Multiple Electrospray Nozzle System And Method
  • Microfluidic Protein Crystallography Techniques
  • Microfabricated Elastomeric Valve And Pump Systems
  • Thermal Reaction Device And Method For Using The Same
  • Microfabricated Elastomeric Valve And Pump Systems
  • Crystal Forming Devices And Systems And Methods For Using The Same
  • Method And System For Microfluidic Device And Imaging Thereof
  • Microfluidic Protein Crystallography
  • Microfluidic Devices And Methods Of Use
  • Microfluidic Devices And Methods Of Use In The Formation And Control Of Nanoreactors
  • Vitro Evolution In Microfluidic Systems
  • In Vitro Evolution In Microfluidic Systems
  • Microfluidic Devices And Methods Of Use In The Formation And Control Of Nanoreactors
  • Thermally-Actuated Microminiature Valve
  • Micromachined Valve With Polyimide Film Diaphragm
  • Self Aligning Small Scale Integrated Circuit Semiconductor Chips To Form Large Area Arrays
  • Mass Airflow Sensor
  • Microfluidic Particle-Analysis Systems
  • High Throughput Screening Of Crystallization Materials
  • Manipulation Of Microfluidic Droplets
  • Method Of Synthesis And Testing Of Combinatorial Libraries Using Microcapsules
  • Integrated Monolithic Microfabricated Electrospray And Liquid Chromatography System And Method
  • Microfabricated Crossflow Devices And Methods
  • Identifiers

    URI

    http://scigraph.springernature.com/pub.10.1038/scientificamerican0483-44

    DOI

    http://dx.doi.org/10.1038/scientificamerican0483-44

    DIMENSIONS

    https://app.dimensions.ai/details/publication/pub.1056527150


    Indexing Status Check whether this publication has been indexed by Scopus and Web Of Science using the SN Indexing Status Tool
    Incoming Citations Browse incoming citations for this publication using opencitations.net

    JSON-LD is the canonical representation for SciGraph data.

    TIP: You can open this SciGraph record using an external JSON-LD service: JSON-LD Playground Google SDTT

    [
      {
        "@context": "https://springernature.github.io/scigraph/jsonld/sgcontext.json", 
        "author": [
          {
            "familyName": "Angell", 
            "givenName": "James B.", 
            "type": "Person"
          }, 
          {
            "familyName": "Terry", 
            "givenName": "Stephen C.", 
            "type": "Person"
          }, 
          {
            "familyName": "Barth", 
            "givenName": "Phillip W.", 
            "type": "Person"
          }
        ], 
        "datePublished": "1983-04", 
        "datePublishedReg": "1983-04-01", 
        "genre": "non_research_article", 
        "id": "sg:pub.10.1038/scientificamerican0483-44", 
        "inLanguage": [
          "en"
        ], 
        "isAccessibleForFree": false, 
        "isPartOf": [
          {
            "id": "sg:journal.1018656", 
            "issn": [
              "0036-8733", 
              "1946-7087"
            ], 
            "name": "Scientific American", 
            "type": "Periodical"
          }, 
          {
            "issueNumber": "4", 
            "type": "PublicationIssue"
          }, 
          {
            "type": "PublicationVolume", 
            "volumeNumber": "248"
          }
        ], 
        "name": "Silicon Micromechanical Devices", 
        "pagination": "44-55", 
        "productId": [
          {
            "name": "doi", 
            "type": "PropertyValue", 
            "value": [
              "10.1038/scientificamerican0483-44"
            ]
          }, 
          {
            "name": "dimensions_id", 
            "type": "PropertyValue", 
            "value": [
              "pub.1056527150"
            ]
          }
        ], 
        "sameAs": [
          "https://doi.org/10.1038/scientificamerican0483-44", 
          "https://app.dimensions.ai/details/publication/pub.1056527150"
        ], 
        "sdDataset": "articles", 
        "sdDatePublished": "2019-04-10T23:45", 
        "sdLicense": "https://scigraph.springernature.com/explorer/license/", 
        "sdPublisher": {
          "name": "Springer Nature - SN SciGraph project", 
          "type": "Organization"
        }, 
        "sdSource": "s3://com-uberresearch-data-dimensions-target-20181106-alternative/cleanup/v134/2549eaecd7973599484d7c17b260dba0a4ecb94b/merge/v9/a6c9fde33151104705d4d7ff012ea9563521a3ce/jats-lookup/v90/0000000001_0000000264/records_8695_00000101.jsonl", 
        "type": "ScholarlyArticle", 
        "url": "http://www.nature.com/doifinder/10.1038/scientificamerican0483-44"
      }
    ]
     

    Download the RDF metadata as:  json-ld nt turtle xml License info

    HOW TO GET THIS DATA PROGRAMMATICALLY:

    JSON-LD is a popular format for linked data which is fully compatible with JSON.

    curl -H 'Accept: application/ld+json' 'https://scigraph.springernature.com/pub.10.1038/scientificamerican0483-44'

    N-Triples is a line-based linked data format ideal for batch operations.

    curl -H 'Accept: application/n-triples' 'https://scigraph.springernature.com/pub.10.1038/scientificamerican0483-44'

    Turtle is a human-readable linked data format.

    curl -H 'Accept: text/turtle' 'https://scigraph.springernature.com/pub.10.1038/scientificamerican0483-44'

    RDF/XML is a standard XML format for linked data.

    curl -H 'Accept: application/rdf+xml' 'https://scigraph.springernature.com/pub.10.1038/scientificamerican0483-44'


     

    This table displays all metadata directly associated to this object as RDF triples.

    53 TRIPLES      18 PREDICATES      23 URIs      17 LITERALS      6 BLANK NODES

    Subject Predicate Object
    1 sg:pub.10.1038/scientificamerican0483-44 schema:author N335a622a84d646daae882d9b3b9b3ffa
    2 schema:datePublished 1983-04
    3 schema:datePublishedReg 1983-04-01
    4 schema:genre non_research_article
    5 schema:inLanguage en
    6 schema:isAccessibleForFree false
    7 schema:isPartOf N6698dbafdb8e47e58eb270278ff8bc9f
    8 Nc92e1432070d4a9582e1e5d4ddd1a418
    9 sg:journal.1018656
    10 schema:name Silicon Micromechanical Devices
    11 schema:pagination 44-55
    12 schema:productId Ncf407c77e15f47e18d09dc1a67b38a65
    13 Ne1d0ce965cb0425c85944f5fe5c74604
    14 schema:sameAs https://app.dimensions.ai/details/publication/pub.1056527150
    15 https://doi.org/10.1038/scientificamerican0483-44
    16 schema:sdDatePublished 2019-04-10T23:45
    17 schema:sdLicense https://scigraph.springernature.com/explorer/license/
    18 schema:sdPublisher Ned71e426eccf4b04b4cba87bbc7002fc
    19 schema:url http://www.nature.com/doifinder/10.1038/scientificamerican0483-44
    20 sgo:license sg:explorer/license/
    21 sgo:sdDataset articles
    22 rdf:type schema:ScholarlyArticle
    23 N335a622a84d646daae882d9b3b9b3ffa rdf:first Nd36a4eb7fd8b4defbdb809a3bd518b10
    24 rdf:rest N505e0fac4ef54b11a0b60d5fb4056d68
    25 N505e0fac4ef54b11a0b60d5fb4056d68 rdf:first N9708cc35e83542229e4adc9f02115e76
    26 rdf:rest Nc6760af135644b6f80efee2c1926c912
    27 N6698dbafdb8e47e58eb270278ff8bc9f schema:volumeNumber 248
    28 rdf:type schema:PublicationVolume
    29 N75ad6eb84e0147b28d2fca5def8ca570 schema:familyName Barth
    30 schema:givenName Phillip W.
    31 rdf:type schema:Person
    32 N9708cc35e83542229e4adc9f02115e76 schema:familyName Terry
    33 schema:givenName Stephen C.
    34 rdf:type schema:Person
    35 Nc6760af135644b6f80efee2c1926c912 rdf:first N75ad6eb84e0147b28d2fca5def8ca570
    36 rdf:rest rdf:nil
    37 Nc92e1432070d4a9582e1e5d4ddd1a418 schema:issueNumber 4
    38 rdf:type schema:PublicationIssue
    39 Ncf407c77e15f47e18d09dc1a67b38a65 schema:name dimensions_id
    40 schema:value pub.1056527150
    41 rdf:type schema:PropertyValue
    42 Nd36a4eb7fd8b4defbdb809a3bd518b10 schema:familyName Angell
    43 schema:givenName James B.
    44 rdf:type schema:Person
    45 Ne1d0ce965cb0425c85944f5fe5c74604 schema:name doi
    46 schema:value 10.1038/scientificamerican0483-44
    47 rdf:type schema:PropertyValue
    48 Ned71e426eccf4b04b4cba87bbc7002fc schema:name Springer Nature - SN SciGraph project
    49 rdf:type schema:Organization
    50 sg:journal.1018656 schema:issn 0036-8733
    51 1946-7087
    52 schema:name Scientific American
    53 rdf:type schema:Periodical
     




    Preview window. Press ESC to close (or click here)


    ...